Cleaning device for inner wall of auxiliary chamber of single crystal furnace

Abstract

The utility model provides a single crystal furnace auxiliary chamber inner wall cleaning device which comprises a base, an automatic telescopic rod is arranged on the base, a cleaning assembly is arranged at the top of the automatic telescopic rod and comprises an arc-shaped plate horizontally extending towards the auxiliary chamber inner wall, and a cleaning brush is arranged on the outer side of the arc-shaped plate. The arc-shaped plate is driven by the motor to horizontally rotate, so that the cleaning brush rotatably cleans the inner wall of the auxiliary chamber; the base is further provided with a brush cleaning assembly, the brush cleaning assembly comprises a stand column fixed to the base, the top of the stand column is provided with a middle supporting piece arranged outside the automatic telescopic rod in a sleeving mode, the middle supporting piece is provided with a scraper, and the scraper is located on the outer side of the arc-shaped plate and used for cleaning the cleaning brush on the outer side of the arc-shaped plate.

Description

Technical Field

[0001] The utility model relates to the technical field of single crystal silicon, in particular to a device for cleaning the wall of a sub-chamber of a single crystal furnace. Background Art

[0002] The primary method for preparing single crystal silicon is the Czochralski method, which is implemented using a single crystal furnace. The process includes vacuuming, leak detection, pressurization, melting, stabilization, welding, seeding, shoulder release, shoulder rotation, equalizing diameters, finishing, and furnace shutdown. The cleanliness of the single crystal furnace's auxiliary chamber significantly impacts the quality of the single crystal silicon. Due to the high height of the auxiliary chamber, manual operation is difficult. Currently, a motor-driven cleaning brush is commonly used to rotate within the auxiliary chamber for automatic cleaning. However, the cleaning brush collects dust during use, which is absorbed by the brush. Failure to clean the brush effectively compromises the cleaning efficiency of the auxiliary chamber's inner walls. Utility Model Content

[0003] The purpose of the utility model is to provide a cleaning device for the inner wall of the auxiliary chamber of a single crystal furnace, which adopts a motor to drive a cleaning brush to clean the inner wall of the auxiliary chamber, and a scraper is provided for the cleaning brush. When the cleaning brush completes cleaning the inner wall of the auxiliary chamber, the scraper is used to clean the cleaning brush to ensure that the inner wall of the auxiliary chamber is clean.

[0004] In order to solve the above technical problems, the present invention adopts the following solutions:

[0005] A cleaning device for the inner wall of a single crystal furnace auxiliary chamber comprises a base, an automatic telescopic rod is provided on the base, a cleaning assembly is provided on the top of the automatic telescopic rod, the cleaning assembly comprises an arc-shaped plate extending horizontally toward the inner wall of the auxiliary chamber, and a cleaning brush is provided on the outer side of the arc-shaped plate. The arc-shaped plate rotates horizontally under the drive of a motor, so that the cleaning brush rotates and cleans the inner wall of the auxiliary chamber;

[0006] The base is also provided with a brush cleaning assembly, which includes a column fixed on the base, a middle support member provided on the top of the column and sleeved on the outside of the automatic telescopic rod, and a scraper provided on the middle support member. The scraper is located on the outside of the curved plate and is used to clean the cleaning brush on the outside of the curved plate.

[0007] Furthermore, a plurality of scrapers are vertically arranged on the inner side of the scraper, so that the scraper has a sawtooth or comb-tooth shape.

[0008] Furthermore, a dust collection box is provided on the base, and the dust collection box is located below the scraper.

[0009] Furthermore, the intermediate support member includes a dust collecting barrel, which is sleeved on the outside of the automatic telescopic rod. A support plate is provided along the outside of the upper opening of the dust collecting barrel, which is fixedly connected to the column, and the scraper is provided on the side of the support plate close to the dust collecting barrel, so that the upper opening of the dust collecting barrel faces the scraper, and the lower opening of the dust collecting barrel faces the dust collection box.

[0010] Furthermore, the diameter of the upper opening of the dust collecting cylinder is larger than the diameter of the lower opening of the dust collecting cylinder, so that the shape of the dust collecting cylinder is a constricted shape.

[0011] Furthermore, a motor placement box is provided on the top of the automatic telescopic rod, and a motor is provided in the motor placement box.

[0012] Furthermore, a rotating disk is provided on the motor placement box, the output end of the motor passes through the center of the rotating disk, and a plurality of cleaning components are evenly provided on the periphery of the rotating disk.

[0013] Furthermore, the cleaning assembly includes a support rod, one end of which is embedded in the rotating disk, and the other end of which is connected to the arc plate.

[0014] Furthermore, the cross-section of the scraper in the horizontal direction is annular, and the inner side surface of the annular shape is in close contact with the cleaning brush on the outer side of the arc plate.

[0015] Beneficial effects of the utility model:

[0016] The utility model provides a cleaning device for the inner wall of the auxiliary chamber of a single crystal furnace, which mainly adopts a motor to drive a cleaning brush to clean the inner wall of the auxiliary chamber, and drives the cleaning brush to rise and fall by an automatic telescopic rod so that the cleaning brush can move up and down in the auxiliary chamber, and then the cleaning brush can be rotated horizontally in the auxiliary chamber by a rotating disk. The cleaning brush cleans the inner wall of the auxiliary chamber through horizontal rotation and up and down movement, and the degree of automation is high.

[0017] In addition, a scraper and a dust collecting tube are provided for the cleaning brush. After the cleaning brush finishes cleaning the inner wall of the auxiliary chamber, the scraper can be used to clean the cleaning brush to remove the dust adsorbed on the cleaning brush, thereby effectively improving the cleaning efficiency of the inner wall of the auxiliary chamber, and the removed dust can also be effectively collected into the dust collection box through the dust collecting tube, which can effectively reduce dust pollution. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic structural diagram of a cleaning device for the inner wall of a single crystal furnace auxiliary chamber in Example 1 of the present utility model;

[0019] Figure 2 This is a schematic top view of the cleaning assembly in Example 1 of the present utility model;

[0020] Figure 3This is a schematic cross-sectional view of the cleaning assembly in Example 1 of the present utility model;

[0021] Figure 4 This is a schematic top view of the cleaning assembly in Example 1 of the present utility model;

[0022] Explanation of the reference numerals: 1-base, 2-dust collecting box, 3-automatic telescopic rod, 4-motor placement box, 5-support rod, 6-arc plate, 60-cleaning brush, 7-middle support, 70-dust collecting barrel, 71-support plate, 8-bottom column, 9-scraper, 10-rotating disk. DETAILED DESCRIPTION

[0023] In order to enable those skilled in the art to better understand the technical solution of the present invention, the present invention is further described in detail below with reference to the accompanying drawings and specific implementation methods, but the implementation methods of the present invention are not limited thereto.

[0024] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "longitudinal", "lateral", "horizontal", "inside", "outside", "front", "back", "top", "bottom", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, or are the orientation or position relationship in which the utility model product is usually placed when in use. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0025] In the description of the present invention, it should also be noted that, unless otherwise expressly specified or limited, the terms "disposed," "opened," "installed," "connected," and "connected" should be understood in a broad sense. For example, they may refer to fixed connections, detachable connections, or integral connections; they may refer to mechanical connections or electrical connections; they may refer to direct connections or indirect connections through an intermediate medium; and they may refer to internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in the present invention based on the specific circumstances.

[0026] The present invention will be described in detail below with reference to the accompanying drawings and in conjunction with the embodiments:

[0027] Example 1

[0028] In this embodiment, a cleaning device for the inner wall of a single crystal furnace auxiliary chamber is provided, comprising a base 1, an automatically retractable rod 3 being provided on the base 1, a cleaning assembly being provided on the top of the automatically retractable rod 3, the cleaning assembly comprising an arc-shaped plate 6 extending horizontally toward the inner wall of the auxiliary chamber, and a cleaning brush 60 being provided on the outer side of the arc-shaped plate 6. The arc-shaped plate 6 is driven by a motor to rotate horizontally, causing the cleaning brush 60 to rotate and clean the inner wall of the auxiliary chamber;

[0029] The base 1 is also provided with a brush cleaning assembly, which includes a column fixed on the base 1, and the top of the column is provided with an intermediate support member 7 which is sleeved on the outside of the automatic telescopic rod 3. A scraper 9 is provided on the intermediate support member 7, and the scraper 9 is located on the outside of the curved plate 6 for cleaning the cleaning brush 60 on the outside of the curved plate 6.

[0030] refer to Figures 1 to 4 , it can be seen that the present application mainly drives the motor placement box 4 and the cleaning component to rise and fall by the automatic telescopic rod 3, thereby making the motor placement box 4 and the cleaning component enter and exit the sub-chamber; and, a motor is placed in the motor placement box 4, and the motor drives the rotating disk 10 to rotate horizontally, thereby making the cleaning component connected to the outer periphery of the rotating disk 10 rotate horizontally, at this time, the cleaning component realizes the cleaning effect of the sub-chamber wall by rubbing the cleaning brush 60 on the outer side of the arc plate 6 against the inner wall of the sub-chamber, then the cleaning brush 60 is in close contact with the inner wall of the sub-chamber, and

[0031] During the cleaning process of the cleaning component rotating, the automatic telescopic rod 3 will automatically move up or down, causing the height of the cleaning component on the inner wall of the sub-chamber to change, thereby cleaning the inner walls of the sub-chamber at different heights. The automation of the cleaning device for the inner wall of the sub-chamber of the single crystal furnace is improved by the automatic telescopic rod 3 and the motor drive, which can effectively improve the cleaning efficiency of the inner wall of the sub-chamber.

[0032] Specifically, the rotating disk 10 is located on the motor placement box 4, so that the output end of the motor passes through the center of the rotating disk 10, and the rotating disk 10 is driven by the motor to rotate horizontally, and a plurality of cleaning components are evenly arranged on the outer periphery of the rotating disk 10, such as Figure 2 In the figure, four support rods 5 are evenly arranged on the rotating disk 10, one end of the support rod 5 is embedded in the rotating disk 10, and the other end of the support rod 5 is connected to the arc plate 6. Through the support of the support rod 5, the cleaning brush 60 can contact the inner wall of the auxiliary chamber. Under the driving action of the motor and the automatic telescopic rod 3, the inner wall of the auxiliary chamber is scratched, so that the oxide on the inner wall of the entire auxiliary chamber can be quickly cleaned up, which is more convenient.

[0033] In some preferred embodiments, a plurality of scrapers are vertically arranged on the inner side of the scraper 9, so that the shape of the scraper 9 is serrated or comb-shaped. In specific operation, the lifting height and rotation time of the cleaning component can be controlled by the motor and the automatic telescopic rod 3 to achieve cleaning of the inner wall of the sub-chamber. When the cleaning component completes the cleaning work, the cleaning component can be lowered to the height of the scraper 9 by the automatic telescopic rod 3. At this time, the cleaning brush 60 is in close contact with the scraper 9; then the cleaning component is controlled by the motor to rotate horizontally. At this time, there is a scratch between the cleaning brush 60 and the scraper 9. The scrapers arranged vertically in the scraper 9 can remove the dust adsorbed by the cleaning brush 60 during the horizontal rotation, thereby cleaning the cleaning brush 60 and ensuring that the cleaning brush 60 cleans the inner wall of the sub-chamber after entering the sub-chamber again, effectively improving the cleaning efficiency of the sub-chamber inner wall.

[0034] In some preferred embodiments, the scraper 9 has a circular cross-section in the horizontal direction, and the inner side of the ring is in close contact with the cleaning brush 60 on the outer side of the arc plate 6. When the cleaning assembly descends to the height of the scraper 9, the cleaning brush 60 will be embedded in the ring. By rotating horizontally, the cleaning brush 60 can effectively rub against the scraper 9, thereby cleaning the cleaning brush 60.

[0035] In some preferred embodiments, a dust collection box 2 is further provided on the base 1. The dust collection box 2 is located below the scraper 9 and is used to collect dust scraped off by the scraper 9 to prevent dust from spreading in the air, thereby effectively reducing dust pollution.

[0036] In some preferred embodiments, the intermediate support member 7 includes a dust collecting barrel 70, which is sleeved on the outside of the automatic telescopic rod 3. A support plate 71 is provided along the outside of the upper opening of the dust collecting barrel 70. The support plate 71 is fixedly connected to the column, and the scraper 9 is provided on the side of the support plate 71 close to the dust collecting barrel 70, so that the upper end opening of the dust collecting barrel 70 faces the scraper 9, and the lower end opening of the dust collecting barrel 70 faces the dust collecting box 2, so that the dust removed by the scraper 9 can be effectively collected into the dust collecting box 2 through the dust collecting barrel 70, thereby effectively reducing dust pollution.

[0037] In some preferred embodiments, the diameter of the upper opening of the dust collecting barrel 70 is larger than the diameter of the lower opening of the dust collecting barrel 70, so that the shape of the dust collecting barrel 70 is constricted, which can effectively guide the dust scraped by the scraper 9 into the dust collection box 2, effectively reducing dust pollution.

[0038] Example 2

[0039] Based on Example 1, the support rod 5 can be a sleeve rod, which includes a first rod and a second rod. One end of the first rod is embedded in the rotating disk 10, one end of the second rod is embedded in the first rod, and the other end of the second rod is connected to the arc plate 6. A plurality of circular holes are provided on the first rod, and a spring button buckle is provided on the second rod. The spring button buckle can be embedded in the circular hole. The length of the sleeve rod can be adjusted by pressing down the spring button buckle, so that the cleaning component can meet the cleaning needs of sub-chambers with different diameters.

[0040] It is understood that the above embodiments are merely exemplary embodiments for illustrating the principles of the present invention, and the present invention is not limited thereto. Those skilled in the art may make various modifications and improvements without departing from the spirit and substance of the present invention, and such modifications and improvements are also considered to be within the scope of protection of the present invention.

Claims

1. A cleaning device for the inner wall of a single crystal furnace auxiliary chamber, characterized in that: The invention comprises a base (1), wherein the base (1) is provided with an automatic telescopic rod (3), and a cleaning assembly is provided on the top of the automatic telescopic rod (3), wherein the cleaning assembly comprises an arc-shaped plate (6) extending horizontally toward the inner wall of the auxiliary chamber, and a cleaning brush (60) is provided on the outer side of the arc-shaped plate (6), and the arc-shaped plate (6) rotates horizontally under the drive of a motor, so that the cleaning brush (60) rotates and cleans the inner wall of the auxiliary chamber; The base (1) is also provided with a brush cleaning assembly, which comprises a column fixed on the base (1), the top of which is provided with an intermediate support member (7) sleeved on the outside of the automatic telescopic rod (3), and a scraper (9) is provided on the intermediate support member (7), which is located on the outside of the curved plate (6) and is used to clean the cleaning brush (60) on the outside of the curved plate (6).

2. The cleaning device for the inner wall of the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that: A plurality of scrapers are vertically arranged on the inner side of the scraper (9), so that the scraper (9) has a sawtooth or comb-tooth shape.

3. The cleaning device for the inner wall of the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that: A dust collection box (2) is also provided on the base (1), and the dust collection box (2) is located below the scraper (9).

4. The cleaning device for the inner wall of the auxiliary chamber of a single crystal furnace according to claim 3, characterized in that: The intermediate support member (7) comprises a dust collecting barrel (70), the dust collecting barrel (70) being sleeved outside the automatic telescopic rod (3), a support plate (71) being provided outside the upper opening of the dust collecting barrel (70), the support plate (71) being fixedly connected to the column, and the scraper (9) being provided on a side of the support plate (71) close to the dust collecting barrel (70), so that the upper opening of the dust collecting barrel (70) faces the scraper (9), and the lower opening of the dust collecting barrel (70) faces the dust collecting box (2).

5. The cleaning device for the inner wall of the auxiliary chamber of a single crystal furnace according to claim 4, characterized in that: The diameter of the upper opening of the dust collecting cylinder (70) is larger than the diameter of the lower opening of the dust collecting cylinder (70), so that the shape of the dust collecting cylinder (70) is a constricted shape.

6. The cleaning device for the inner wall of the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that: A motor placement box (4) is provided on the top of the automatic telescopic rod (3), and a motor is provided in the motor placement box (4).

7. The cleaning device for the inner wall of the auxiliary chamber of a single crystal furnace according to claim 6, characterized in that: A rotating disk (10) is provided on the motor placement box (4), the output end of the motor passes through the center of the rotating disk (10), and a plurality of cleaning components are evenly arranged on the outer periphery of the rotating disk (10).

8. The device for cleaning the inner wall of the auxiliary chamber of a single crystal furnace according to claim 1, characterized in that: The cleaning assembly comprises a support rod (5), one end of the support rod (5) is embedded in the rotating disk (10), and the other end of the support rod (5) is connected to the arc plate (6).

9. The single crystal furnace auxiliary chamber inner wall cleaning device according to claim 1, characterized in that: The scraper (9) has a ring-shaped cross section in the horizontal direction, and the inner side surface of the ring is in close contact with the cleaning brush (60) on the outer side of the arc plate (6).

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