Magnetic suspension type molecular pump

Abstract

The utility model discloses a magnetic suspension type molecular pump which comprises a molecular pump body and a buffer assembly, and the buffer assembly is arranged on the outer side of the middle of the lower end of the molecular pump body. The hollow rod is vertically arranged on the outer side of the middle of the lower end of a molecular pump body, the connecting rod is arranged in the hollow rod, an open groove is formed in the connecting rod, the elastic piece is arranged in the open groove of the connecting rod, the buffer rod is arranged at the lower end of the elastic piece, the top of the elastic piece is fixed to the top of the open groove, and the outer wall of the buffer rod is attached to the inner wall of the open groove; the outer wall of the buffer rod is attached to the inner wall of the open groove. According to the magnetic suspension type molecular pump, the molecular pump body is buffered through the connecting rods, the elastic pieces and the buffer rods which are arranged on the outer side of the lower end of the molecular pump body, the buffering performance of the molecular pump body is enhanced, the device is buffered and protected, and therefore the service life of the device is effectively prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of molecular pumps, in particular to a magnetic suspension molecular pump. Background Art

[0002] A molecular pump is a commonly used vacuum-generating device. It uses a high-speed rotating rotor to transfer momentum to gas molecules, giving them a directional velocity. This compresses the gas and drives it toward the exhaust port, where it is then pumped away by the preceding stage. A magnetic levitation molecular pump utilizes magnetic bearings to suspend the molecular pump rotor in mid-air, enabling contactless, frictionless, and lubrication-free operation at high speeds. Due to these advantages, magnetic levitation molecular pumps are widely used in the field of creating high-vacuum and high-cleanliness vacuum environments.

[0003] Most existing magnetic levitation molecular pumps do not have a buffering function, and the buffering performance of the device is poor. In actual use, they do not have a buffering protection function, which can easily shorten the service life of the device. Therefore, we propose a magnetic levitation molecular pump. Utility Model Content

[0004] The purpose of this section is to summarize some aspects of the embodiments of the present invention and briefly introduce some preferred embodiments. Some simplifications or omissions may be made in this section and in the abstract and title of the utility model to avoid obscuring the purpose of this section, the abstract and the title of the utility model, and such simplifications or omissions shall not be used to limit the scope of the present invention.

[0005] In view of the above problems and / or the problems existing in the existing magnetic levitation molecular pumps, the present utility model is proposed.

[0006] Therefore, the purpose of the present invention is to provide a magnetic levitation molecular pump, which cushions the molecular pump body by multiple connecting rods, elastic parts and buffer rods arranged on the outer side of the lower end of the molecular pump body, enhances the buffering performance of the molecular pump body, and provides buffering protection for the device, thereby effectively extending the service life of the device.

[0007] In order to solve the above technical problems, according to one aspect of the present invention, the present invention provides the following technical solutions:

[0008] A magnetic levitation molecular pump, comprising:

[0009] Molecular pump body;

[0010] A buffer assembly is arranged on the outer side of the middle portion of the lower end of the molecular pump body, and the buffer assembly includes a hollow rod vertically arranged on the outer side of the middle portion of the lower end of the molecular pump body, a connecting rod arranged inside the hollow rod and having a slot therein, an elastic member arranged in the slot of the connecting rod, and a buffer rod arranged at the lower end of the elastic member, the top of the elastic member is fixed to the top of the slot, the outer wall of the buffer rod is in contact with the inner wall of the slot, and the outer wall of the buffer rod is in contact with the inner wall of the slot;

[0011] As a preferred solution of the magnetic levitation molecular pump described in the utility model, a threaded hole is opened on the outer side of the middle part of the lower end of the molecular pump body, and an external thread is provided on the upper side of the outer wall of the hollow rod, and the hollow rod is threadedly connected to the molecular pump body.

[0012] As a preferred solution of the magnetic levitation molecular pump described in the present invention, a first bolt is provided on the outer wall of the hollow rod, and the first bolt passes through the hollow rod to the connecting rod.

[0013] As a preferred solution of the magnetic levitation molecular pump described in the present invention, the elastic member is a spring or an elastic sleeve.

[0014] As a preferred solution of the magnetic levitation molecular pump described in the present invention, the outer wall of the buffer rod is provided with multiple limit rods, the slotted outer wall of the connecting rod is provided with a limit groove, and the outer wall of the limit rod is in contact with the inner wall of the limit groove.

[0015] As a preferred solution of the magnetic levitation molecular pump described in the present invention, a mounting plate is fixed to the bottom of the buffer rod, a second bolt is provided on the outer side of the middle portion of the upper end of the mounting plate, and the second bolt passes through the mounting plate.

[0016] Compared with the prior art, the present invention has the following beneficial effects: this magnetic levitation molecular pump cushions the molecular pump body by means of a plurality of connecting rods, elastic parts and buffer rods arranged on the outer side of the lower end of the molecular pump body, thereby enhancing the cushioning properties of the molecular pump body and providing buffering protection for the device, thereby effectively extending the service life of the device. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] In order to more clearly illustrate the technical solutions of the embodiments of the present invention, the present invention will be described in detail below in conjunction with the accompanying drawings and detailed embodiments. Obviously, the drawings described below are only some embodiments of the present invention. For those skilled in the art, other drawings can be obtained based on these drawings without inventive labor. Among them:

[0018] Figure 1 This is a schematic diagram of the three-dimensional structure of a magnetic levitation molecular pump;

[0019] Figure 2 This is a schematic cross-sectional view of a magnetic levitation molecular pump buffer assembly;

[0020] Figure 3 This is a schematic diagram of the partial three-dimensional structure of a magnetic levitation molecular pump in this application;

[0021] In the figure: 100, molecular pump body; 200, buffer assembly; 210, hollow rod; 211, first bolt; 220, connecting rod; 230, elastic member; 240, buffer rod; 241, limit rod; 242, mounting plate; 243, second bolt. DETAILED DESCRIPTION

[0022] In order to make the above-mentioned objects, features and advantages of the present invention more obvious and easy to understand, the specific embodiments of the present invention are described in detail below with reference to the accompanying drawings.

[0023] Next, the present invention is described in detail with reference to schematic diagrams. For ease of illustration, cross-sectional views of device structures may be partially enlarged and not to scale when describing the embodiments of the present invention. Furthermore, the schematic diagrams are merely illustrative and should not limit the scope of protection of the present invention. Furthermore, in actual production, three-dimensional dimensions, including length, width, and depth, should be included.

[0024] In order to make the purpose, technical solutions and advantages of the present invention more clear, the embodiments of the present invention will be described in further detail below with reference to the accompanying drawings.

[0025] The utility model provides a magnetic levitation molecular pump, which cushions the molecular pump body by means of a plurality of connecting rods, elastic parts and buffer rods arranged on the outer side of the lower end of the molecular pump body, thereby enhancing the buffering performance of the molecular pump body and providing buffering protection for the device, thereby effectively extending the service life of the device.

[0026] Figure 1-Figure 3 The structure diagram of a magnetic levitation molecular pump of the present invention is shown. Figure 1-Figure 3 In this embodiment, a magnetic levitation molecular pump includes a molecular pump body 100 and a buffer assembly 200 .

[0027] Molecular pump body 100.

[0028] The buffer assembly 200 is arranged on the outer side of the middle part of the lower end of the molecular pump body 100. The buffer assembly 200 includes a hollow rod 210 vertically arranged on the outer side of the middle part of the lower end of the molecular pump body 100, a connecting rod 220 arranged inside the hollow rod 210 and having a slot therein, an elastic member 230 arranged in the slot of the connecting rod 220, and a buffer rod 240 arranged at the lower end of the elastic member 230. The top of the elastic member 230 is fixed to the top of the slot, the outer wall of the buffer rod 240 is in contact with the inner wall of the slot, and the outer wall of the buffer rod 240 is in contact with the inner wall of the slot. Preferably, in the present embodiment, a threaded hole is provided on the outer side of the middle part of the lower end of the molecular pump body 100, and an external thread is provided on the upper side of the outer wall of the hollow rod 210. The hollow rod 210 is threadedly connected to the molecular pump body 100. The hollow rod 210 is threadedly installed on the lower end of the molecular pump body 100 under the action of the external thread and the threaded hole. The operator can remove it by rotating the hollow rod 210 in order to disassemble and replace it. The outer wall of the hollow rod 210 is provided with a first bolt 211. The first bolt 211 passes through the hollow rod 210 to the connecting rod 220. The connecting rod 220 is installed inside the hollow rod 210 under the action of the first bolt 211. The operator can adjust the position of the connecting rod 220 in the hollow rod 210 according to the actual usage, and then adjust the length of the entire buffer assembly 200, so as to adjust the height of the molecular pump body 100. To enhance the practicality of the device, the outer wall of the buffer rod 240 is provided with multiple limit rods 241, and the slotted outer wall of the connecting rod 220 is provided with a limit groove. The outer wall of the limit rod 241 fits with the inner wall of the limit groove. The set limit rod 241 and the limit groove play a role in limiting the buffer rod 240, preventing the buffer rod 240 from rotating and causing the elastic part 230 to twist. At the same time, it also increases the friction between the buffer rod 240 and the slot, consumes energy in the buffering process, reduces the vibration amplitude, and improves its stability. A mounting plate 242 is fixed to the bottom of the buffer rod 240, and a second bolt 243 is provided on the outer side of the middle part of the upper end of the mounting plate 242. The second bolt 243 passes through the mounting plate 242. The second bolt 243 set on the mounting plate 242 and passing through the mounting plate 242 can fix the mounting plate 242 in a specified position, thereby ensuring the stable placement of the mounting plate 242 and the entire device.

[0029] Combine Figure 1-Figure 3, a magnetic levitation molecular pump of this embodiment is specifically used as follows: place the device to the specified position, fix the mounting plate 242 by the second bolt 243, and then fix the device. When the device is actually in use, the molecular pump body 100 is buffered by multiple connecting rods 220, elastic members 230 and buffer rods 240 arranged on the outer side of the lower end of the molecular pump body 100, thereby enhancing the buffering performance of the molecular pump body 100 and providing buffering protection for the device, thereby effectively extending the service life of the device. The entire hollow rod 210 is threadedly installed on the lower end of the molecular pump body 100 under the action of the external thread and the threaded hole. The operator can remove the hollow rod 210 by rotating it later for disassembly and replacement. The connecting rod 220 is installed inside the hollow rod 210 under the action of the first bolt 211. The operator can adjust the position of the connecting rod 220 in the hollow rod 210 according to the actual usage, and then adjust the length of the entire buffer assembly 200, so as to adjust the height of the molecular pump body 100 and enhance the practicality of the device.

[0030] While the present invention has been described above with reference to specific embodiments, various modifications may be made and equivalent components may be substituted without departing from the scope of the present invention. In particular, as long as no structural conflicts exist, the various features of the embodiments disclosed herein may be combined with one another in any manner, and the omission of an exhaustive description of these combinations in this specification is solely for the sake of space and resource conservation. Therefore, the present invention is not limited to the specific embodiments disclosed herein, but encompasses all technical solutions within the scope of the claims.

Claims

1. A magnetic levitation molecular pump, characterized in that: include: Molecular pump body (100); The buffer assembly (200) is arranged on the outer side of the middle portion of the lower end of the molecular pump body (100), and the buffer assembly (200) comprises a hollow rod (210) vertically arranged on the outer side of the middle portion of the lower end of the molecular pump body (100), a connecting rod (220) arranged inside the hollow rod (210) and having a slot therein, an elastic member (230) arranged in the slot of the connecting rod (220), and a buffer rod (240) arranged at the lower end of the elastic member (230), wherein the top of the elastic member (230) is fixed to the top of the slot, the outer wall of the buffer rod (240) is in contact with the inner wall of the slot, and the outer wall of the buffer rod (240) is in contact with the inner wall of the slot.

2. A magnetic levitation molecular pump according to claim 1, characterized in that: A threaded hole is provided on the outer side of the middle portion of the lower end of the molecular pump body (100), an external thread is provided on the upper side of the outer wall of the hollow rod (210), and the hollow rod (210) is threadedly connected to the molecular pump body (100).

3. The magnetic levitation molecular pump according to claim 1, characterized in that: A first bolt (211) is provided on the outer wall of the hollow rod (210), and the first bolt (211) passes through the hollow rod (210) to the connecting rod (220).

4. The magnetic levitation molecular pump according to claim 1, characterized in that: The elastic member (230) is a spring or an elastic sleeve.

5. The magnetic levitation molecular pump according to claim 1, characterized in that: The outer wall of the buffer rod (240) is provided with a plurality of limiting rods (241), and the slotted outer wall of the connecting rod (220) is provided with limiting grooves, and the outer walls of the limiting rods (241) are fitted with the inner walls of the limiting grooves.

6. The magnetic levitation molecular pump according to claim 1, characterized in that: A mounting plate (242) is fixed to the bottom of the buffer rod (240), and a second bolt (243) is provided on the outer side of the middle portion of the upper end of the mounting plate (242), and the second bolt (243) passes through the mounting plate (242).

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