Annealing furnace with heat insulation structure

Abstract

The utility model provides an annealing furnace with a heat insulation structure. According to the annealing furnace with the heat insulation and preservation structure, a furnace body is fixedly connected to the top of a bottom plate through a mounting frame, the furnace body comprises a shell, a heat preservation shell is mounted in the shell, an inner shell is mounted in the heat preservation shell through a plurality of fixing bolts, mounting openings are formed in the front face and the back face of the inner shell correspondingly, and the mounting openings are communicated with the heat preservation shell; the interiors of the mounting openings are fixedly connected with heat conducting plates, the adjacent faces of the two heat conducting plates are fixedly connected with motor heat equipment, a liquid conveying assembly is mounted on one side of the furnace body, and a first tee joint is mounted at an outlet of the liquid conveying assembly through a conveying pipe; and two outlets of the first three-way head are respectively provided with a shunt pipe through a connecting pipe. According to the annealing furnace with the heat insulation and heat preservation structure, the heat insulation and heat preservation effect of the furnace body is improved through the design, and meanwhile the heating efficiency of the cold furnace is improved through mutual cooperation of the heat supply equipment and the electric heating equipment.

Description

Technical Field

[0001] The utility model relates to the field of annealing furnaces, in particular to an annealing furnace with a heat insulation structure. Background Art

[0002] Annealing is a process used in semiconductor device manufacturing that involves heating multiple semiconductor wafers to affect their electrical properties. Thermal treatments are designed for different effects. Wafers can be heated to activate dopants, convert thin films into thin films or to the wafer-substrate interface, densely deposited thin films, change the state of growing thin films, repair implanted damage, move dopants, or transfer dopants from one film to another or from a thin film into the wafer substrate.

[0003] Annealing furnace is a kind of equipment used for metal processing. By controlling the temperature and atmosphere, the metal can achieve the desired heat treatment effect in the furnace. The steps are divided into heating, maintaining temperature, controlling atmosphere and cooling.

[0004] The existing annealing furnace body structure is relatively simple, resulting in poor insulation and heat preservation effects, reducing the thermal energy utilization rate. At the same time, the internal heating method is single, and it takes a long time to heat to the required temperature when the cold furnace is just started, which reduces the working efficiency of the annealing furnace.

[0005] Therefore, it is necessary to provide an annealing furnace with a heat insulation structure to solve the above technical problems. Utility Model Content

[0006] The utility model provides an annealing furnace with a heat insulation structure, which solves the problems that annealing furnaces with simple furnace structures and single heating methods have poor heat insulation effects and require a long time to heat up when starting a cold furnace, which reduces the working efficiency of the annealing furnace.

[0007] In order to solve the above technical problems, the utility model provides an annealing furnace with a heat insulation structure, comprising: a bottom plate;

[0008] The furnace body is fixedly connected to the top of the base plate through a mounting bracket, the furnace body comprises a shell, an insulation shell is installed inside the shell, an inner shell is installed inside the insulation shell through a plurality of fixing bolts, the front and back sides of the inner shell are provided with mounting openings, the insides of the mounting openings are fixedly connected with heat conducting plates, two adjacent sides of the heat conducting plates are fixedly connected with motor thermal equipment, a liquid delivery assembly is installed on one side of the furnace body, the outlet of the liquid delivery assembly is installed with a first three-way head through a delivery pipe, the two outlets of the first three-way head are respectively installed with diversion pipes through connecting pipes, the adjacent sides of the two diversion pipes are fixedly connected with a plurality of water inlet pipes, a suction pipe is installed on the inlet of the liquid delivery assembly, a reflux pipe with a third valve is installed on one side of the furnace body near the bottom, a filter assembly is installed on the top of the base plate near one side, and a sealing door is provided on the other side of the furnace body;

[0009] A gas delivery assembly is installed on the top of the furnace body, the inlet of the gas delivery assembly is installed with a second tee through a fixed pipe, one of the outlets of the second tee is installed with a first valve through a mounting pipe, a heating device is installed on the top of the furnace body, the inlet of the heating device is installed with an air inlet pipe, and the outlet of the heating device is installed with a second valve through the air supply pipe;

[0010] The shell and the insulation shell are fitted together. Both the insulation shell and the inner shell are waterproof and resistant to high temperatures. The insulation shell improves the insulation effect. There is a certain space between the insulation shell and the inner shell for storing liquid. The liquid between the insulation shell and the inner shell is heated by the heat conduction plate. Before the liquid is injected between the insulation shell and the inner shell, the liquid can be heated to the required temperature and then poured into the filter assembly. The liquid delivery assembly includes a shell and a delivery pump. The diversion pipe is fixed to the front and back of the furnace body near the top. The other end of the water inlet pipe is located between the insulation shell and the inner shell. The other end of the third valve is connected to the top of the filter assembly through a butt pipe. The other end of the return pipe is located between the insulation shell and the inner shell.

[0011] Preferably, a handle is installed on the other side of the sealed door, and a temperature sensor is installed on the top of the furnace body;

[0012] The monitoring end of the temperature sensor is located inside the furnace body.

[0013] Preferably, a placement plate is installed on the bottom of the inner wall of the inner shell through a plurality of support bolts, and an operation screen is installed on the front of the furnace body through a mounting base;

[0014] The operation screen can set the equipment operating parameters.

[0015] Preferably, a control box is installed on the front of the furnace body, and a box door is installed on the front of the control box;

[0016] The control box is equipped with a power switch and a controller for controlling the operation of the equipment.

[0017] Preferably, the filter assembly comprises a filter box, a filter plate is installed inside the filter box, and a sealing plate with a butt-jointed pipe is installed on the top of the filter box;

[0018] The other end of the butt-joint pipe is connected to the other end of the third valve.

[0019] Preferably, the gas delivery assembly comprises a protective shell with an air vent, a dual-purpose air pump is installed inside the protective shell, and an air hood is installed at the outlet of the dual-purpose air pump through a pump pipe;

[0020] The gas cover is installed at a position close to one side of the top of the inner wall of the inner shell.

[0021] Compared with the related art, the annealing furnace with heat insulation structure provided by the utility model has the following beneficial effects:

[0022] The utility model provides an annealing furnace with a heat insulation structure. In order to increase the heating efficiency and heat insulation effect of the annealing furnace, the furnace body is divided into an outermost shell, which can play a protective role. Then, the heat insulation shell is installed on the inner surface of the furnace body to increase the overall heat insulation effect of the annealing furnace. An inner shell is installed inside the heat insulation shell through multiple fixing bolts, and a certain distance is allowed between the heat insulation shell and the inner shell, so that liquid is placed inside and the liquid is heated by the heat conduction plate on the inner shell, thereby improving the overall heat insulation effect of the annealing furnace. Then, it is only necessary to install the gas delivery component on the top of the furnace body, and connect the gas delivery component with the air outlet and the installation pipe of the heating equipment through the second three-way head on the fixed pipe of the gas delivery component. The gas delivery component is opened and closed by the first valve and the second valve in coordination with the gas delivery component to realize heat supply to the inside of the furnace body or discharge the high-temperature air inside the furnace body to realize gradual cooling. The heat insulation effect of the furnace body is increased through the design, and the heating efficiency of the cold furnace is improved by the cooperation between the heating equipment and the electric heating equipment. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] Figure 1 A schematic structural diagram of a preferred embodiment of an annealing furnace with a heat insulation structure provided by the utility model;

[0024] Figure 2 Provides a schematic structural diagram of a temperature sensor for the utility model;

[0025] Figure 3 Provides a structural diagram of the support bolt for the utility model;

[0026] Figure 4 Provides a structural diagram of the water inlet pipe for the utility model;

[0027] Figure 5 Provides a structural diagram of a drain pipe for the utility model;

[0028] Figure 6 The utility model provides a structural schematic diagram of a dual-purpose air suction pump.

[0029] Numbers in the figure: 1, bottom plate, 2, mounting frame, 3, filter assembly, 301, filter box, 302, filter plate, 303, sealing plate, 304, butt joint, 4, suction pipe, 5, liquid delivery assembly, 6, delivery pipe, 7, connecting pipe, 8, first three-way head, 9, gas delivery assembly, 901, protective shell, 902, air vent, 903, dual-purpose suction pump, 904, pump pipe, 905, gas cover, 10, diverter pipe, 11, mounting base, 12, control box, 13, operation screen, 14, box door, 15 , furnace body, 151, shell, 152, insulation shell, 153, inner shell, 154, fixing bolt, 16, sealing door, 17, handle, 18, temperature sensor, 19, air inlet pipe, 20, heating equipment, 21, fixing pipe, 22, first valve, 23, installation pipe, 24, second three-way head, 25, second valve, 26, air supply pipe, 27, support bolt, 28, placement plate, 29, installation port, 30, heat conduction plate, 31, electric heating equipment, 32, water inlet pipe, 33, return pipe, 34, third valve. DETAILED DESCRIPTION

[0030] The present invention will be further described below with reference to the accompanying drawings and implementation examples.

[0031] Please refer to Figure 1 、 Figure 2 、 Figure 3 、 Figure 4 、 Figure 5 and Figure 6 ,in, Figure 1 A schematic structural diagram of a preferred embodiment of an annealing furnace with a heat insulation structure provided by the utility model; Figure 2 Provides a schematic structural diagram of a temperature sensor for the utility model; Figure 3 Provides a structural diagram of the support bolt for the utility model; Figure 4 Provides a structural diagram of the water inlet pipe for the utility model; Figure 5 Provides a structural diagram of a drain pipe for the utility model; Figure 6 The utility model provides a schematic diagram of the structure of a dual-purpose suction pump. The annealing furnace with a heat insulation structure comprises: a bottom plate 1;

[0032] The furnace body 15 is fixedly connected to the top of the bottom plate 1 through the mounting frame 2. The furnace body 15 includes a shell 151. The shell 151 is internally installed with an insulation shell 152. The insulation shell 152 is internally installed with an inner shell 153 through multiple fixing bolts 154. The front and back of the inner shell 153 are both provided with mounting openings 29. The interior of the mounting openings 29 is fixedly connected with a heat conducting plate 30. The adjacent sides of the two heat conducting plates 30 are fixedly connected with a motor heat device 31. A liquid delivery component 5 is installed on one side of the furnace body 15. The outlet of the liquid delivery component 5 is installed with a first tee connector 8 through a delivery pipe 6, and the two outlets of the first tee connector 8 are respectively installed with a diversion pipe 10 through a connecting pipe 7. The adjacent sides of the two diversion pipes 10 are fixedly connected to multiple water inlet pipes 32. The inlet of the liquid delivery component 5 is installed with a suction pipe 4. A return pipe 33 with a third valve 34 is installed on one side of the furnace body 15 near the bottom. A filter component 3 is installed on the top of the bottom plate 1 near one side, and a sealing door 16 is provided on the other side of the furnace body 15;

[0033] A gas delivery assembly 9 is installed on the top of the furnace body 15. The inlet of the gas delivery assembly 9 is installed with a second tee 24 through a fixed pipe 21. One of the outlets of the second tee 24 is installed with a first valve 22 through a mounting pipe 23. A heating device 20 is installed on the top of the furnace body 15. The inlet of the heating device 20 is installed with an air inlet pipe 19. The outlet of the heating device 20 is installed with a second valve 25 through a gas supply pipe 26.

[0034] The shell 151 and the insulation shell 152 are fitted together. The insulation shell 152 and the inner shell 153 are both waterproof and high-temperature resistant. The insulation shell 152 improves the insulation effect. There is a certain space between the insulation shell 152 and the inner shell 153 for filling the liquid, and the liquid between the insulation shell 152 and the inner shell 153 is heated by the heat conducting plate 30. Before the liquid is injected between the insulation shell 152 and the inner shell 153, the liquid can be heated to the required temperature before being poured into the filter assembly 3. The liquid delivery assembly 5 includes a shell and a delivery pump. The diverter pipe 10 is fixed to the front and back of the furnace body 15 near the top. The other end of the water inlet pipe 32 is located between the insulation shell 152 and the inner shell 153. The other end of the third valve 34 It is connected to the top of the filter assembly 3 through a docking pipe 304, and the other end of the return pipe 33 is located between the insulation shell 152 and the inner shell 153, and can discharge the liquid into the filter box 301. The other end of the suction pipe 4 is connected to one side of the filter assembly 3 at the bottom position, and the other end of the second valve 25 is connected through the mounting pipe 23 and the other outlet of the second three-way head 24. The gas delivery assembly 9 can realize air suction and air supply, so the inlet and outlet of the gas delivery assembly 9 can be exchanged, but the connection position with the heating equipment 20 and the first valve 22 will not change. The first valve 22 and the second valve 25 are opened and closed alternately, which can realize air supply and exhaust for the furnace body 15. The heating equipment 20 includes a shell and a device for providing hot air.

[0035] A handle 17 is installed on the other side of the sealed door 16, and a temperature sensor 18 is installed on the top of the furnace body 15;

[0036] The monitoring end of the temperature sensor 18 is located inside the furnace body 15 and can monitor the temperature inside the furnace body 15 in real time. The handle 17 is used to facilitate opening the sealed door.

[0037] A placement plate 28 is mounted on the bottom of the inner wall of the inner shell 153 via a plurality of support bolts 27 , and an operation screen 13 is mounted on the front of the furnace body 15 via a mounting base 11 ;

[0038] The operation screen 13 can be used to set the equipment operating parameters and display monitoring data. The placement plate 28 can be used to place products that need to be heated.

[0039] A control box 12 is installed on the front of the furnace body 15, and a box door 14 is installed on the front of the control box 12;

[0040] The box door 14 is provided with a lock, and the interior of the control box 12 is equipped with a power switch and a controller for controlling the operation of the equipment.

[0041] The filter assembly 3 includes a filter box 301, a filter plate 302 is installed inside the filter box 301, and a sealing plate 303 with a butt-joint pipe 304 is installed on the top of the filter box 301;

[0042] The other end of the butt joint 304 is connected to the other end of the third valve 34 , and the filter plate 302 performs a filtering effect.

[0043] The gas delivery assembly 9 includes a protective shell 901 with an air vent 902. A dual-purpose air pump 903 is installed inside the protective shell 901. An air hood 905 is installed at the outlet of the dual-purpose air pump 903 through a pump pipe 904.

[0044] The air hood 905 is installed at a position near the top of the inner wall of the inner shell 153 near one side. The air vent 902 is used to assist in heat dissipation. The dual-purpose air pump 903 is a multifunctional device that can both supply air and absorb air.

[0045] The working principle of the annealing furnace with heat insulation structure provided by the utility model is as follows:

[0046] The furnace body 15 is divided into an outermost shell 151, which can play a protective role. Then the insulation shell 152 is installed on the inner surface of the furnace body 15 to increase the overall insulation effect of the annealing furnace. An inner shell 153 is installed inside the insulation shell 152 through multiple fixing bolts 154, and a certain distance is allowed between the insulation shell 152 and the inner shell 153, so that liquid is placed inside and the liquid is heated by the heat conducting plate 30 on the inner shell 153, thereby improving the overall insulation effect of the annealing furnace. After that, it is only necessary to install the gas delivery component 9 on the top of the furnace body 15, and connect the second three-way head 24 to the air outlet and the installation pipe 23 of the heating equipment 20 on the fixed pipe 21 of the gas delivery component 9. The opening and closing of the first valve 22 and the second valve 25 cooperate with the gas delivery component 9 to realize the internal heating of the furnace body 15 or the discharge of the high-temperature air inside the furnace body 15 to achieve gradual cooling. In actual use, the liquid is first passed through The body conveying component 5 conveys the liquid in the filter component 3 to between the insulation shell 152 and the inner shell 153 through the water inlet pipe 32, and then the items to be heated are placed in the furnace body 15, and the furnace body 15 is sealed by the sealing door 16. Then the electric heating device 31 can be started to heat the inside of the furnace body 15. In this process, heat will synchronously heat the liquid between the insulation shell 152 and the inner shell 153 through the heat conduction plate 30. At the same time, the first valve 22 is closed and the second valve 25 is opened, and the heating device 20 is started to cooperate with the gas conveying component 9 to convey hot gas to the inside of the furnace body 15, assisting the electric heating device 31 to heat the furnace body 15. After heating to the corresponding temperature, the heating device 20 is turned off, and the second valve 25 is closed at the same time. It is only necessary to maintain the corresponding temperature through the electric heating device 31. In this process, the insulation shell 152 and the heated liquid will assist the electric heating device 31 in maintaining the internal temperature of the furnace body 15.

[0047] Compared with the related art, the annealing furnace with heat insulation structure provided by the utility model has the following beneficial effects:

[0048] In order to increase the heating efficiency and heat insulation effect of the annealing furnace, the furnace body 15 is divided into an outermost shell 151, which can play a protective role. Then, a heat-insulating shell 152 is installed on the inner surface of the furnace body 15 to increase the overall heat insulation effect of the annealing furnace. An inner shell 153 is installed inside the heat-insulating shell 152 through multiple fixing bolts 154, and a certain distance is set between the heat-insulating shell 152 and the inner shell 153, so that liquid can be placed inside and heated by the heat-conducting plate 30 on the inner shell 153, thereby improving the overall heat insulation effect of the annealing furnace. It is only necessary to install the gas delivery component 9 on the top of the furnace body 15, and connect the fixed pipe 21 of the gas delivery component 9 with the air outlet and the installation pipe 23 of the heating equipment 20 through the second three-way head 24. The opening and closing of the first valve 22 and the second valve 25 cooperate with the gas delivery component 9 to realize internal heating of the furnace body 15 or discharge the high-temperature air inside the furnace body 15 to realize gradual cooling. This design increases the thermal insulation effect of the furnace body, and at the same time, the heating efficiency of the cold furnace is improved through the cooperation between the heating equipment 20 and the electric heating equipment 31.

[0049] The above description is merely an embodiment of the present invention and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of the present invention, or directly or indirectly applied in other related technical fields, are also included in the patent protection scope of the present invention.

Claims

1. An annealing furnace with a heat insulation structure, characterized in that: include: base plate; The furnace body is fixedly connected to the top of the base plate through a mounting bracket, the furnace body comprises a shell, an insulation shell is installed inside the shell, an inner shell is installed inside the insulation shell through a plurality of fixing bolts, the front and back sides of the inner shell are provided with mounting openings, the insides of the mounting openings are fixedly connected with heat conducting plates, two adjacent sides of the heat conducting plates are fixedly connected with motor thermal equipment, a liquid delivery assembly is installed on one side of the furnace body, the outlet of the liquid delivery assembly is installed with a first three-way head through a delivery pipe, the two outlets of the first three-way head are respectively installed with diversion pipes through connecting pipes, the adjacent sides of the two diversion pipes are fixedly connected with a plurality of water inlet pipes, a suction pipe is installed on the inlet of the liquid delivery assembly, a reflux pipe with a third valve is installed on one side of the furnace body near the bottom, a filter assembly is installed on the top of the base plate near one side, and a sealing door is provided on the other side of the furnace body; A gas delivery assembly is installed on the top of the furnace body, the inlet of the gas delivery assembly is installed with a second tee joint through a fixed pipe, one of the outlets of the second tee joint is installed with a first valve through a mounting pipe, a heating device is installed on the top of the furnace body, the inlet of the heating device is installed with an air inlet pipe, and the outlet of the heating device is installed with a second valve through the air supply pipe.

2. The annealing furnace with a heat insulation structure according to claim 1, characterized in that: A handle is installed on the other side of the sealed door, and a temperature sensor is installed on the top of the furnace body.

3. The annealing furnace with a heat insulation structure according to claim 1, characterized in that: A placement plate is installed on the bottom of the inner wall of the inner shell through a plurality of support bolts, and an operation screen is installed on the front of the furnace body through a mounting base.

4. The annealing furnace with a heat insulation structure according to claim 1, characterized in that: A control box is installed on the front of the furnace body, and a box door is installed on the front of the control box.

5. The annealing furnace with a heat insulation structure according to claim 1, characterized in that: The filter assembly comprises a filter box, a filter plate is installed inside the filter box, and a sealing plate with a butt-joint pipe is installed on the top of the filter box.

6. The annealing furnace with a heat insulation structure according to claim 1, characterized in that: The gas delivery component comprises a protective shell with an air vent, a dual-purpose air pump is installed inside the protective shell, and an air cover is installed at the outlet of the dual-purpose air pump through a pump pipe.

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