Single wafer inverted double-sided structure developing flower basket
By designing a single-wafer inverted double-sided development basket, the problems of wafer contamination and friction damage caused by traditional baskets are solved, achieving more efficient development effects and better line width control.
Patent Information
- Application Number
- CN202422180666.1
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-05
- Publication Date
- 2025-09-23
- Estimated Expiration
- 2034-09-05
AI Technical Summary
During the development process of traditional single-wafer development baskets, the wafer surface is easily contaminated, line width control after development is difficult, and friction damage to the back side of the wafer and wafer breakage are unavoidable problems.
A single-wafer inverted double-sided developing basket is designed. It adopts an inverted double-hole developing basket structure. The tray is designed with an upper and lower tray in a coaxial relationship. The edge of the wafer contacts the upper and lower trays of the basket during the developing process. The edge of the wafer contacts the basket in the developer solution on the upper and lower trays of the basket, ensuring that the wafer is not damaged by friction on either the front or back side.
It ensures that the photolithography pattern on the wafer surface is not contaminated, the development effect is better, the developer is in full contact with the photoresist, and the line width is accurately controlled after development, thereby improving the development quality and efficiency.
Smart Images
Figure CN223377600U_ABST
Abstract
Description
Technical Field
[0001] The utility model belongs to the technical field of semiconductors, and in particular relates to a single-wafer inverted double-sided structure developing basket. Background Art
[0002] Electronic information technology is developing rapidly, becoming an indispensable component of people's lives and a ubiquitous part of our lives. Semiconductors are a core component of electronic information, and wafers play a crucial role in the semiconductor industry. Wafers primarily refer to the silicon wafers used in the manufacture of silicon semiconductor integrated circuits. Depending on the material used, they can also be categorized as InP wafers, sapphire wafers, GaN wafers, and others. Because they are mostly circular, they are called wafers. Various circuit component structures or optoelectronic device structures can be fabricated on wafers. Double-sided wafers simplify previously difficult processes and avoid problems such as short circuits.
[0003] Wafers are typically placed in a conventional development basket for cleaning and development. However, with traditional single-wafer development baskets, the wafer is immersed in the solution with the developed side facing up. As the photoresist in the exposed areas dissolves during development, some dirt often falls back onto the wafer surface and becomes difficult to remove, impacting the pattern processing on the wafer and reducing yield. The residual developer cannot be quickly dissolved into the fixer during post-development fixing, making it difficult to control the line width after development. The improved single-sided inverted development basket only ensures that the front-side structures of the wafer are fully and cleanly developed, but damage to the back-side structures caused by friction with the basket is inevitable. Utility Model Content
[0004] In order to solve the technical problems existing in the known technology, the utility model provides a single-wafer inverted double-sided structure developing basket. The inverted double-hole developing basket structure and the double-tray hollow structure are utilized. During the developing process, only the edge of the wafer contacts the basket, thereby ensuring that the pattern on both the front and back sides of the wafer will not be damaged due to friction with the basket.
[0005] The purpose of the utility model is to provide a single-wafer inverted double-sided structure developing flower basket, comprising a handle and a tray; the tray is composed of an upper tray with a circular ring structure and a lower tray with a circular ring structure; the outer wall of the tray is provided with a protrusion connected to the handle; the inner diameter of the lower tray is equal to the inner diameter of the upper tray; an annular support portion extending inward is provided at the lower port of the lower tray; the lower end surface of the upper tray is provided with an annular protrusion that is gap-matched with the lower tray; the upper tray and the lower tray are in a coaxial relationship; and an air-avoiding groove is provided on the upper opening side wall of the lower tray.
[0006] Preferably, the handle comprises two parts, a straight rod and a threaded rod, and the handle and the tray are perpendicular to each other.
[0007] Preferably, the lower end of the handle is connected to the raised portion via a thread.
[0008] Preferably, a compression nut is installed on the threaded rod.
[0009] The advantages and positive effects of the utility model are:
[0010] The proposed single-wafer inverted double-sided development basket in this application features a simple and rational structure, making it ideal for single-wafer development operations. By performing inverted development with the developing surface facing downward, it effectively ensures that the photolithographic pattern on the wafer surface is free of any contamination or contamination. Furthermore, the basket tray can be completely submerged in the developer during the development process, ensuring full contact between the developer and the exposed photoresist, thereby achieving better development results.
[0011] The developer basket's handles are designed to facilitate easy movement and manipulation of wafers. After development is complete, operators can quickly and accurately transfer wafers from the developer solution to the fixer solution. This timeliness significantly improves development accuracy and efficiency. Overall, this developer basket not only simplifies the development process but also significantly improves development quality, ensuring high precision and reliability throughout the wafer manufacturing process. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 An exploded view of a preferred embodiment of the present utility model;
[0013] Figure 2 This is a structural diagram of the upper tray in a preferred embodiment of the present utility model;
[0014] Figure 3 This is a structural diagram of the lower tray in a preferred embodiment of the present utility model;
[0015] Figure 4 This is a structural diagram of a handle in a preferred embodiment of the present utility model;
[0016] Figure 5 This is a usage status diagram of a preferred embodiment of the utility model. DETAILED DESCRIPTION
[0017] In order to make the above-mentioned purpose, design control system and advantages of the utility model more clearly understood, the utility model is further described in detail with reference to the following embodiments. It should be understood that the specific embodiments described herein are only used to explain the utility model and are not intended to limit the utility model.
[0018] like Figures 1 to 5 As shown, the technical solution of the utility model is:
[0019] A single wafer inverted double-sided structure developing basket includes a handle 3 and a tray; wherein:
[0020] The tray is composed of an upper tray 1 with a circular ring structure and a lower tray 2 with a circular ring structure; both the upper tray 1 and the lower tray 2 are circular ring structures;
[0021] The outer wall of the tray is provided with a raised portion connected to the handle 3; the inner diameter of the lower tray 2 is equal to the inner diameter of the upper tray 1; an annular support portion extending inward is provided at the lower end port of the lower tray 2, and during use, the wafer 5 is overlapped on the annular support portion; the lower end face of the upper tray 1 is provided with an annular protrusion that is clearance-matched with the lower tray 2; the upper tray 1 and the lower tray 2 are coaxial; an air-avoidance groove 21 is provided on the upper opening side wall of the lower tray 2; the number of the air-avoidance grooves 21 can be two or other numbers, and the structure of the air-avoidance groove 21 can be a rectangular notch. The air-avoidance groove 21 has the following technical advantages: first, it is convenient to move the upper tray, and second, it is convenient to use tweezers to pick up and place wafers;
[0022] In this embodiment, the lower end of handle 3 is detachably connected to the raised portion. Specifically, handle 3 comprises a straight rod and a threaded rod, and the handle and the tray are perpendicular to each other. Specifically, the lower end of handle 3 is threadedly connected to the raised portion. A compression nut 4 is mounted on the threaded rod.
[0023] The upper tray 1 and the lower tray 2 are in a coaxial relationship.
[0024] The wall thickness of the tray is less than 5 mm.
[0025] The diameter of the inner hole of the lower tray 2 is not less than 90 mm.
[0026] The handle 3 is a cylindrical straight rod, and the handle 3 and the tray are perpendicular to each other.
[0027] The upper surface diameter of the truncated cone structure is less than 103 mm.
[0028] The length of the handle 3 is 20 cm, and the diameter of the handle 3 is 1 cm.
[0029] Working principle:
[0030] First, according to the size of the wafer 5, select the upper tray 1, lower tray 2 and handle 3 of appropriate size, and then Figure 5 finally, use tweezers to pick up the wafer 5 and place it in the lower tray 2 for development; after the development is completed, use tweezers to remove the wafer 5 from the tray.
[0031] The above description is only a preferred embodiment of the present invention and does not limit the present invention in any form. Any simple modification, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention are within the scope of the technical solution of the present invention.
Claims
1. A single-wafer inverted double-sided structure developing basket, comprising a handle (3) and a tray; characterized in that: The tray is composed of an upper tray (1) with a circular ring structure and a lower tray (2) with a circular ring structure; the outer wall of the tray is provided with a protrusion connected to the handle (3); the inner diameter of the lower tray (2) is equal to the inner diameter of the upper tray (1); an annular support portion extending inward is provided at the lower end of the lower tray (2); the lower end surface of the upper tray (1) is provided with an annular protrusion that is clearance-matched with the lower tray (2); the upper tray (1) and the lower tray (2) are in a coaxial relationship; and a clearance groove (21) is provided on the upper opening side wall of the lower tray (2).
2. The single wafer inverted double-sided structure developing basket according to claim 1, characterized in that: The handle (3) comprises two parts: a straight rod and a threaded rod, and the handle (3) and the tray are perpendicular to each other.
3. The single wafer inverted double-sided structure developing basket according to claim 1, characterized in that: The lower end of the handle (3) is connected to the raised portion via a thread.
4. The single wafer inverted double-sided structure developing basket according to claim 2, characterized in that: A compression nut (4) is mounted on the threaded rod.