Cracking furnace for coating equipment and coating equipment

Abstract

The utility model discloses a cracking furnace for coating equipment and the coating equipment. The cracking furnace comprises a furnace body provided with a cracking cavity extending in the vertical direction; the heating device is arranged on the outer wall of the furnace body; wherein gas raw materials are conveyed from bottom to top in the cracking cavity of the furnace body in the vertical direction, and a cracking reaction is carried out. The film coating equipment comprises a film coating cavity and a film coating device, wherein the film coating cavity is provided with a film coating chamber for placing a workpiece to be coated; and the cracking furnace is communicated with the coating chamber and is used for carrying out cracking reaction on the gas raw materials. According to the cracking furnace disclosed by the utility model, a vertical cracking mode is adopted, so that uncracked gas molecules are settled due to high density or specific gravity, the gas cracking time is prolonged, the gas cracking efficiency is improved, and the gas cracking is more sufficient.

Description

Technical Field

[0001] The utility model relates to the technical field of film coating, in particular to a cracking furnace for film coating equipment and the film coating equipment. Background Art

[0002] Parylene coating uses powdered Parylene raw material. Under vacuum and high-temperature conditions, the solid material is sublimated into a gaseous state. The gaseous material is then cracked at 550-750°C to form reactive gaseous monomers. These gaseous monomers are then transported into the coating chamber, where they are deposited and polymerized on the workpiece surface to form a film. Currently, Parylene coating primarily utilizes horizontal cracking furnaces, which can lead to insufficient powder cracking before coating. Furthermore, within a horizontal cracking chamber, there is no height difference between the gas molecules before and after cracking, allowing them to mix and enter the coating chamber. This can result in an impure film and weak adhesion. Utility Model Content

[0003] In order to solve the above technical problems, an embodiment of the present invention provides a cracking furnace for coating equipment and coating equipment, which adopts a vertical cracking method to completely crack the powder before coating, thereby improving the quality of the film layer.

[0004] According to one aspect of the present invention, a cracking furnace for use in a coating device is provided. The cracking furnace comprises: a furnace body having a cracking chamber extending in a vertical direction; and a heating device disposed on an outer wall of the furnace body. A gaseous feedstock is transported from bottom to top along the vertical direction within the cracking chamber of the furnace body to undergo a cracking reaction.

[0005] According to some embodiments, the cracking furnace includes a plurality of the heating devices, and the plurality of the heating devices are arranged at intervals along the vertical direction.

[0006] According to some embodiments, the heating device comprises a plurality of heating components, and the plurality of heating components are distributed along the outer wall of the furnace body.

[0007] According to some embodiments, the heating device further includes a plurality of temperature measuring components for measuring the temperatures of corresponding heating components.

[0008] According to some embodiments, the cracking chamber is provided with profiles or fins for increasing the heat exchange area.

[0009] According to some embodiments, the furnace body is wrapped with a heat-insulating material.

[0010] According to some embodiments, the thermal insulation material is ceramic fiber.

[0011] According to some embodiments, the cracking furnace further includes a shell for placing the furnace body, and the shell is provided with a plurality of heat dissipation holes.

[0012] According to some embodiments, the housing is split into two halves.

[0013] According to some embodiments, an air outlet duct is provided above the furnace body, and the air outlet duct is provided with at least two air outlets spaced apart along the vertical direction.

[0014] According to another aspect of the present invention, a coating device is provided. The coating device includes: a coating chamber having a coating chamber for placing a workpiece to be coated; and a cracking furnace according to any of the above embodiments, connected to the coating chamber and configured to perform a cracking reaction on a gaseous feedstock.

[0015] According to some embodiments, the coating equipment further includes: a sublimation chamber for heating and sublimating the solid raw material, and transporting the gaseous raw material obtained by sublimation of the solid raw material to the cracking furnace.

[0016] In a cracking furnace according to an embodiment of the present invention, the furnace body includes a cracking chamber extending vertically. Gas feed is transported from bottom to top within the cracking chamber along the vertical direction to undergo a cracking reaction. By employing a vertical cracking method, uncracked gas molecules settle due to their high density or specific gravity, thereby increasing the gas cracking time, improving the gas cracking efficiency, and achieving more complete gas cracking.

[0017] Furthermore, multiple heating devices are arranged at intervals along the vertical direction on the outer wall of the furnace body, and multiple heating devices can be controlled individually. By adopting a segmented heating method, the temperature of the gas raw material at different positions can be adjusted, thereby avoiding insufficient or excessive gas decomposition. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Other features and advantages of the present invention will be better understood through the following detailed description of the optional embodiments in conjunction with the accompanying drawings, in which the same reference numerals represent the same or similar components, wherein:

[0019] Figure 1 A schematic structural diagram of a cracking furnace according to an embodiment of the present invention is shown;

[0020] Figure 2 Shown Figure 1 A schematic structural diagram of a heating device for a cracking furnace;

[0021] Figure 3 A schematic structural diagram of a cracking furnace according to another embodiment of the present invention is shown;

[0022] Figure 4 A schematic structural diagram of a cracking furnace according to another embodiment of the present invention is shown;

[0023] Figure 5 A schematic structural diagram of a coating device according to an embodiment of the present invention is shown. DETAILED DESCRIPTION

[0024] The following describes the implementation and use of the embodiments in detail. However, it should be understood that the specific embodiments discussed are merely illustrative of specific ways to implement and use the present invention and are not intended to limit the scope of the present invention. When describing the structural positions of components, such as up, down, top, and bottom, directional references are not absolute but relative. These directional references are appropriate when the components are arranged as shown in the figures, but they will change accordingly if the positions of the components in the figures are changed.

[0025] The present invention provides a cracking furnace for coating equipment. The cracking furnace comprises a furnace body with a cracking chamber extending vertically, and a heating device mounted on the outer wall of the furnace body. Gas feedstock is transported vertically upward within the cracking chamber of the furnace body to undergo a cracking reaction. By employing a vertical cracking method, powder is completely cracked before coating, improving film quality.

[0026] The specific structure and function of the cracking furnace according to the embodiment of the present utility model will be described in detail below with reference to the accompanying drawings.

[0027] Figure 1 FIG. 1 shows a schematic structural diagram of a cracking furnace 10 according to an embodiment of the present invention. Figure 2 Shown Figure 1 Schematic diagram of the structure of the heating device of the cracking furnace 10.

[0028] like Figure 1 and Figure 2 As shown in FIG, the cracking furnace 10 includes a furnace body 11 and a heating device 12. The furnace body 11 has a cracking chamber 111 extending in a vertical direction. The heating device 12 is disposed on the outer wall of the furnace body 11. The gaseous feedstock is transported vertically from bottom to top within the cracking chamber 111 of the furnace body 11 to undergo a cracking reaction.

[0029] By adopting a vertical cracking method, the uncracked gas molecules are allowed to settle due to their density or specific gravity, thereby increasing the gas cracking time, improving the gas cracking efficiency, and making the gas cracking more complete.

[0030] In some embodiments, the cracking furnace 10 includes a plurality of heating devices 12 , which are spaced apart in a vertical direction.

[0031] In some embodiments, the intervals between adjacent heating devices 12 in the vertical direction are the same. In other embodiments, the intervals between adjacent heating devices 12 in the vertical direction may also be different.

[0032] In some embodiments, the plurality of heating devices 12 can be controlled individually. By adopting a segmented heating method, the temperature of the gas feedstock at different locations can be adjusted, thereby avoiding insufficient or excessive gas cracking.

[0033] In some embodiments, each heating device 12 includes a plurality of heating elements 121, which are distributed circumferentially along the outer wall of the furnace body 11, and may be evenly or unevenly distributed. In some embodiments, the spacing between adjacent heating elements 121 is the same; in other embodiments, the spacing between adjacent heating elements 121 may be different. The heating elements 121 may be heating plates or heating wires, or heating wires may be arranged on the heating plates to heat the temperature within the cracking chamber 111 to the desired temperature for the cracking reaction.

[0034] In the illustrated embodiment, the cracking furnace 10 includes three heating devices 12, which are arranged at equal intervals in the vertical direction. Each heating device 12 includes two heating elements 121, which are symmetrically arranged along the outer wall of the furnace body 11. In other embodiments, the cracking furnace 10 may include one, two, or four heating devices 12, each of which may include one, three, or four heating elements.

[0035] In some embodiments, profiles or fins for increasing the heat exchange area are provided in the cracking chamber 111. For example, crisscross or spiral fins are provided in the cracking chamber 111. The crisscross or spiral fins can increase the contact area of ​​the gas and improve the gas cracking efficiency.

[0036] In some embodiments, each heating device 12 further includes a plurality of temperature measuring components (not shown), such as temperature sensors, for measuring the temperature around the corresponding heating component 121 .

[0037] In some embodiments, the cracking furnace 10 further includes a controller (not shown), which is connected to the heating device 12. A first set temperature and a second set temperature are input into the controller, and the second set temperature is lower than the first set temperature.

[0038] When the temperature measuring component of the heating device 12 detects that the actual temperature around the heating component 121 reaches the first set temperature, the controller controls the heating component 121 of the corresponding heating device 12 to stop heating, thereby avoiding excessive decomposition of the gas; when the temperature measuring component of the heating device 12 detects that the actual temperature around the heating component 121 is lower than the second set temperature, the controller controls the heating component 121 of the corresponding heating device 12 to start heating, thereby avoiding insufficient decomposition of the gas.

[0039] like Figure 3 As shown in FIG, the furnace body 11 of the cracking furnace 10 is wrapped with a heat-insulating material 13, which is made of ceramic fiber. The heat-insulating material 13 is used to reduce heat loss, ensure the cracking temperature of the cracking chamber 111, and improve the cracking efficiency.

[0040] like Figure 4 As shown in , the cracking furnace 10 further includes a shell 14 , which is located outside the heat-insulating material 13 and surrounds the furnace body 11 and the heat-insulating material 13 . The shell 14 is provided with a plurality of heat-dissipating holes 141 .

[0041] In some embodiments, the shell 14 is a two-half opening and closing type. In some embodiments, the cracking furnace 10 further includes a bracket 15 for fixing the cracking furnace 10 .

[0042] In some embodiments, a gas outlet duct 16 is provided above the furnace body 11. The gas outlet duct 16 has two gas outlets 161 spaced apart vertically, which are used to transport the cracked gas within the cracking chamber 111 of the cracking furnace 10 to the coating chamber of the coating equipment. The two gas outlets 161 facilitate improved feed uniformity. In other embodiments, the gas outlet duct 16 has three or more gas outlets 161 spaced apart vertically.

[0043] In some embodiments, an air inlet pipe 17 is provided below the furnace body 11 . The air inlet pipe 17 is provided with an air inlet 171 for conveying the gaseous raw material into the cracking chamber 111 of the cracking furnace 10 .

[0044] Figure 5 The schematic diagram of a coating apparatus 100 according to one embodiment of the present invention is shown. The coating apparatus 100 includes a coating chamber 40 and a cracking furnace 10 according to any of the preceding embodiments. The coating chamber 40 includes a coating chamber 41 for placing a workpiece to be coated, and the cracking furnace 10 is used to perform a cracking reaction on a gaseous feedstock.

[0045] In some embodiments, the coating apparatus 100 further includes a continuous feeding device 20 for conveying solid raw materials, such as solid parylene particles, pelletized parylene, sheet-shaped parylene, etc.

[0046] In some embodiments, the coating equipment 100 further includes a sublimation chamber 30 for heating and sublimating the solid raw material and transporting the sublimated gas into the cracking chamber 111 of the cracking furnace 10 .

[0047] like Figure 5 As shown, the inlet pipe 17 of the cracking furnace 10 is connected to the sublimation chamber 30, and the outlet pipe 16 of the cracking furnace 10 is connected to the coating chamber 41. The sublimated gas in the sublimation chamber 30 enters the cracking chamber 111 of the cracking furnace 10 through the air inlet 171 of the inlet pipe 17. The gas undergoes a cracking reaction in the cracking chamber 111, cracking into reactive gaseous monomers. The gaseous monomers then enter the coating chamber 41 through the two outlets 161 of the outlet pipe 16. The gaseous monomers are deposited and polymerized on the workpiece to form a film layer.

[0048] In some embodiments, the coating apparatus 100 further includes a vacuum system 50 for evacuating the coating chamber 41. The vacuum system 50 includes a pump assembly 51 for extracting air from the coating chamber 41. A cold trap 52 is provided between the pump assembly 51 and the coating chamber 41 to capture condensable gases in the extracted air.

[0049] In some embodiments, the vacuum system 50 further includes a valve 53 whose opening can be controlled, so as to adjust the pumping speed of the pump group 51 to control the vacuum pressure in the coating chamber 41 to be stable.

[0050] In some embodiments, the vacuum system 50 further includes a pressure sensor 54 for detecting the pressure in the pump group 51 .

[0051] In some embodiments, the coating apparatus 100 further includes an exhaust gas treatment device 60, which is connected to the pump group 51 of the vacuum system 50 and is configured to treat and discharge the gas extracted by the pump group 51 of the vacuum system 50. The exhaust gas treatment device 60 includes, but is not limited to, recovering or decontaminating nitrogen, inert gas, hydrogen, hydrocarbon gas, and other reaction raw materials, process gas, or auxiliary gas for doping elements, and then discharging the gas to the outside to prevent environmental pollution and enable recycling.

[0052] In some embodiments, the coating equipment 100 further includes a liquid feeding device 70 , which is in communication with the coating chamber 41 and is used to transport the gaseous raw material obtained by vaporizing the liquid raw material into the coating chamber 41 .

[0053] In some embodiments, the coating equipment 100 further includes a gas feeding device 80 , which is in communication with the coating chamber 41 and is used to transport gas raw materials into the coating chamber 41 .

[0054] In some embodiments, the coating equipment 100 further includes a real-time film thickness monitoring system, which monitors the thickness of the film layer on the workpiece. When the thickness of the film layer reaches a predetermined thickness, the feeding device is closed.

[0055] According to an embodiment of the present invention, the feed system of the coating equipment can simultaneously realize gas feed, liquid feed, and solid feed. The multifunctional feed method provides conditions for the coating equipment to deposit different film layers. By combining different methods and types of raw materials, the coating equipment can deposit multifunctional composite film layers sequentially or simultaneously, integrating conventional CVD, PECVD, and ICVD technologies. This solves the problem that existing coating equipment can only realize a single CVD deposition technology, that is, it can only pass a single type of raw material and can only deposit one film layer at a time. It requires multiple starts and stops of the equipment and additions of materials to complete the composite film layer, resulting in poor film quality and long coating cycles.

[0056] The technical content and technical features of the present invention have been disclosed above. However, it is understood that, based on the creative ideas of the present invention, those skilled in the art may make various changes and improvements to the above-disclosed concepts, all of which fall within the scope of protection of the present invention. The description of the above embodiments is illustrative and not restrictive. The scope of protection of the present invention is determined by the claims.

Claims

1. A cracking furnace for coating equipment, characterized in that: include: The furnace body has a cracking chamber extending in a vertical direction; as well as A heating device is provided on the outer wall of the furnace body; The gaseous raw material is transported from bottom to top along the vertical direction in the cracking chamber of the furnace body to undergo cracking reaction.

2. The cracking furnace for coating equipment according to claim 1, characterized in that: The cracking furnace includes a plurality of heating devices, and the plurality of heating devices are arranged at intervals along the vertical direction.

3. The cracking furnace for coating equipment according to claim 2, characterized in that: The heating device includes a plurality of heating components, and the plurality of heating components are distributed along the outer wall of the furnace body.

4. The cracking furnace for coating equipment according to claim 3, characterized in that: The heating device further comprises a plurality of temperature measuring components for measuring the temperature of corresponding heating components.

5. The cracking furnace for coating equipment according to any one of claims 1 to 4, characterized in that: The cracking chamber is provided with profiles or fins for increasing the heat exchange area.

6. The cracking furnace for coating equipment according to any one of claims 1 to 4, characterized in that: The furnace body is wrapped with heat-insulating material.

7. The cracking furnace for coating equipment according to claim 6, characterized in that: The thermal insulation material is ceramic fiber.

8. The cracking furnace for coating equipment according to any one of claims 1 to 4, characterized in that: The cracking furnace further comprises a shell for placing the furnace body, and the shell is provided with a plurality of heat dissipation holes.

9. The cracking furnace for coating equipment according to claim 8, characterized in that: The shell is a two-half opening and closing type.

10. The cracking furnace for coating equipment according to any one of claims 1 to 4, characterized in that: An air outlet pipe is provided above the furnace body, and the air outlet pipe is provided with at least two air outlets spaced apart along the vertical direction.

11. A coating device, characterized in that: include: a coating chamber having a coating chamber for placing a workpiece to be coated; and The cracking furnace for the coating equipment according to any one of claims 1 to 10 is connected to the coating chamber and is used for performing cracking reactions on the gas raw materials.

12. The coating equipment according to claim 11, characterized in that: The coating equipment also includes: The sublimation chamber is used to heat and sublime the solid raw material and transport the gaseous raw material obtained by sublimation of the solid raw material to the cracking furnace.

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