Spraying disc leveling mechanism

Abstract

The utility model relates to the technical field of vacuum coating equipment, and discloses a spraying disc leveling mechanism which comprises a connecting disc, a mounting disc; the adjusting screw rods are evenly distributed around the axis of the mounting disc, the bottoms of the adjusting screw rods abut against the connecting disc, the tops of the adjusting screw rods penetrate through the mounting disc and are in threaded connection with the mounting disc, and the adjusting screw rods are sleeved with locking nuts; the guide columns are evenly distributed around the axis of the mounting disc, the bottoms of the guide columns are connected with the connecting disc, the tops of the guide columns penetrate through the mounting disc and are in sliding connection with the mounting disc, and scales are arranged on the outer walls of the guide columns in the axial direction; the bottom of the connecting shaft penetrates through the connecting disc and extends to the position below the connecting disc; and the spraying disc is fixedly connected with the bottom of the connecting shaft. The leveling device has the beneficial effects that the structure is simplified, the production cost is reduced, the levelness and the height of the spraying disc can be synchronously adjusted, the leveling position of the spraying disc can be easily judged, and the leveling precision is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of vacuum coating equipment, in particular to a spray plate leveling mechanism. Background Art

[0002] In the semiconductor coating process, a spray pan is typically used to spray high-temperature metal gas onto the wafer. This spray pan is also equipped with a heater to heat the metal gas. To ensure a uniform film thickness on the semiconductor substrate, the spray pan must be leveled so that it is parallel to the semiconductor substrate.

[0003] The existing spray pan leveling mechanism has a complex overall structure and high production cost. It can only adjust the horizontality of the spray pan but cannot adjust the installation height of the spray pan. Moreover, when fine-tuning the horizontality of the spray pan, it is difficult to judge the leveling position of the spray pan, and the leveling accuracy is low. Utility Model Content

[0004] The purpose of the utility model is to provide a spray plate leveling mechanism, which simplifies the structure, reduces production costs, and can synchronously adjust the horizontality and height of the spray plate, making it easy to judge the leveling position of the spray plate and improving the leveling accuracy.

[0005] In order to achieve the above purpose, the utility model provides a spray plate leveling mechanism, comprising

[0006] Connecting plate, used for connecting with vacuum coating equipment;

[0007] A mounting plate, arranged above the connecting plate;

[0008] A plurality of adjusting screws are evenly distributed around the axis of the mounting plate, the bottom of the adjusting screw is against the connecting plate, and the top passes through the mounting plate and is threadedly connected to the mounting plate, and a locking nut is sleeved on the adjusting screw, and the upper end surface of the locking nut is against the lower end surface of the mounting plate;

[0009] A plurality of guide pillars are evenly distributed around the axis of the mounting plate, wherein the bottom of the guide pillars is connected to the connecting plate, the top of the guide pillars passes through the mounting plate and is slidably connected to the mounting plate, and the outer wall of the guide pillars is provided with scales along the axial direction;

[0010] A connecting shaft, the top of which is fixed to the mounting plate, and the bottom of which passes through the connecting plate and extends to below the connecting plate;

[0011] The spray plate is located below the connecting plate and is fixedly connected to the bottom of the connecting shaft.

[0012] Furthermore, it also includes a bellows, which is sleeved outside the connecting shaft, one end of the bellows is connected to the mounting disk, and the other end is connected to the connecting disk.

[0013] Furthermore, annular bosses are provided at both ends of the bellows, a limiting hole corresponding to the outer diameter of one annular boss is opened on the connecting plate, and a limiting step corresponding to the inner diameter of the other annular boss is provided at the bottom of the mounting plate.

[0014] Furthermore, it also includes a flange fixing seat and a bearing. The number of the flange fixing seat and the bearing is the same as that of the guide column and their positions correspond. The flange fixing seat is fixed to the bottom of the guide column. The flange fixing seat is provided with a mounting hole and an adjustment screw hole. An adjustment screw is provided in the adjustment screw hole. The connecting plate is provided with a threaded hole corresponding to the mounting hole.

[0015] Furthermore, the connecting shaft and the mounting plate are provided with an electrode introduction channel, a cooling water inlet channel, a cooling water outlet channel and a process gas introduction channel along the axial direction.

[0016] Furthermore, a limiting plane is provided on the top side wall of the adjusting screw along the axial direction.

[0017] Furthermore, the number of the guide pillars and the adjusting screws are both two, and both are symmetrically arranged along the radial direction of the connecting disk.

[0018] Furthermore, the number of the mounting holes is the same as the number of the adjusting screw holes, and they are arranged at intervals around the axis in the circumferential direction of the flange connection seat.

[0019] Compared with the prior art, the spray pan leveling mechanism of the present invention has the following advantages: It is equipped with an adjustment screw and a guide post. Since the top of the connecting shaft is fixed to the mounting plate and the bottom is fixed to the spray pan, by rotating the adjustment screw arranged around the mounting plate, the mounting plate's levelness can be adjusted simultaneously with the mounting plate's height, thereby achieving adjustment of both the levelness and height of the spray pan. The guide post not only serves as a guide during spray pan adjustment, but also, due to the scale provided, facilitates auxiliary judgment of the spray pan's height and levelness, thereby improving leveling accuracy. In addition, a locking nut is provided to prevent the spray pan from moving after adjustment, ensuring leveling accuracy. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 This is a structural diagram of the spray plate leveling mechanism of an embodiment of the utility model;

[0021] Figure 2 This is a cross-sectional view of the spray plate leveling mechanism according to an embodiment of the present utility model;

[0022] Figure 3This is a top view of the flange fixing seat of the spray plate leveling mechanism according to an embodiment of the present utility model;

[0023] Figure 4 It is a top view of the connecting shaft of the spray plate leveling mechanism according to an embodiment of the present utility model.

[0024] In the figure, 1. connecting plate; 11. limiting hole; 2. mounting plate; 21. limiting step; 3. guide column; 31. scale; 4. adjusting screw; 41. locking nut; 42. limiting plane; 5. connecting shaft; 6. spray plate; 7. bellows; 71. annular boss; 8. flange fixing seat; 81. mounting hole; 82. adjusting screw hole; 9. bearing; 100. electrode introduction channel; 101. cooling water inlet channel; 102. cooling water outlet channel; 103. process gas introduction channel; a. electrode. DETAILED DESCRIPTION

[0025] The following embodiments are used to illustrate the present invention, but are not intended to limit the scope of the present invention.

[0026] In the description of the present invention, it should be understood that the terms "upper", "lower", "front", "back", "inside", "outside", etc. used in the present invention to indicate the orientation or position relationship are based on the position relationship shown in the accompanying drawings, and are only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the devices and elements referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on the present invention.

[0027] like Figures 1 to 4 As shown, a spray plate 6 leveling mechanism according to a preferred embodiment of the present invention includes a connecting plate 1, a mounting plate 2, multiple adjustment screws 4, multiple guide posts 3, a connecting shaft 5, and a spray plate 6. The connecting plate 1 is used to connect to the vacuum coating equipment, the mounting plate 2 is located above the connecting plate 1, the top of the connecting shaft 5 is fixed to the mounting plate 2, and the bottom passes through the connecting plate 1 and extends below the connecting plate 1 and is connected to the spray plate 6. The spray plate 6 is located below the connecting plate 1 and is located within the vacuum coating equipment when in use. Since the mounting plate 2 and the spray plate 6 are fixedly connected via the connecting shaft 5, the levelness and height of the spray plate 6 can be adjusted synchronously by adjusting the levelness and height of the mounting plate 2.

[0028] Multiple adjustment screws 4 are evenly distributed around the axis of the mounting plate 2. The bottom of the adjustment screw 4 abuts against the connecting plate 1, and the top passes through the mounting plate 2 and is threadedly connected to the mounting plate 2. By rotating the adjustment screw 4 counterclockwise or clockwise, the level and height of the mounting plate 2 can be adjusted. To prevent the mounting plate 2 from moving after the position is adjusted, a locking nut 41 is provided on the adjustment screw 4. The upper end surface of the locking nut 41 abuts against the lower end surface of the mounting plate 2. The position of the mounting plate 2 is fixed by tightening the locking nut. Multiple guide posts 3 are used to guide the spray plate 6 when adjusting its level and height. Multiple guide posts 3 are evenly distributed around the axis of the mounting plate 2. The bottom of the guide posts 3 is connected to the connecting plate 1, and the top passes through the mounting plate 2 and is slidably connected to the mounting plate 2. To facilitate auxiliary judgment of the height and level of the spray plate 6 and improve leveling accuracy, the outer wall of the guide post 3 is provided with a scale 31 along the axial direction.

[0029] After the leveling mechanism of the spray plate 6 of the present invention is connected to the vacuum coating equipment, in order to ensure that the internal environment of the vacuum coating equipment is isolated from the external annular environment and avoid affecting the coating process, in some embodiments, refer to Figure 1 、 Figure 2 , further comprising a bellows 7, which is sleeved over the connecting shaft 5, with one end of the bellows 7 connected to the mounting plate 2 and the other end connected to the connecting plate 1. Specifically, in this embodiment, to facilitate positioning of the bellows 7 during installation, annular bosses 71 are provided at both ends of the bellows 7. Furthermore, a limiting hole 11 corresponding to the outer diameter of one annular boss 71 is provided on the connecting plate 1, and a limiting step 21 corresponding to the inner diameter of the other annular boss 71 is provided at the bottom of the mounting plate 2. The limiting bosses are fixed to the connecting plate 1 and the mounting plate 2 using screws.

[0030] In some embodiments, in order to facilitate the installation of the guide column 3 and to perform a secondary fine-tuning of the levelness of the spray plate 6, refer to Figure 1 、 Figure 3 、 Figure 4, also includes a flange fixing seat 8 and a bearing 9, wherein the flange fixing seat 8, the bearing 9 and the guide column 3 are the same in number and in corresponding positions, the flange fixing seat 8 is fixedly connected to the bottom of the guide column 3 by a pin, and a mounting hole 81 and an adjusting screw hole 82 are provided on the connecting plate 1, and an adjusting screw (not shown in the figure) is provided in the adjusting screw hole 82. A threaded hole corresponding to the mounting hole 81 is opened on the connecting plate 1, and a screw connecting the flange fixing seat 8 and the connecting plate 1 is provided in the mounting hole 81. Due to the installation gap between the mounting hole 81 and the screw, the threaded section of the adjusting screw is passed through the adjusting screw hole 82, and the end portion is abutted against the connecting plate 1. The screw in the mounting hole 81 can be loosened. By turning the adjusting screw, the levelness of the flange fixing seat 8 can be fine-tuned, and then the levelness of the spray plate 6 can be fine-tuned. Furthermore, in order to facilitate the arrangement of the positions of the mounting holes 81 and the adjusting screw holes 82 and improve the accuracy of secondary fine-tuning, the number of mounting holes 81 and the adjusting screw holes 82 is the same, and they are arranged at intervals around the axis of the flange connection seat. In this embodiment, the number of mounting holes 81 and the adjusting screw holes 82 are both 3, which can be set according to actual adjustment requirements.

[0031] In some embodiments, in order to facilitate the introduction of process gases, electrodes, etc. into the vacuum coating equipment, reduce the structure, and reduce the cost of the vacuum coating equipment, therefore, Figure 4 As shown, an electrode introduction channel 100, a cooling water inlet channel 101, a cooling water outlet channel 102 and a process gas introduction channel 103 are axially opened on the connecting shaft 5 and the mounting plate 2. The process gas, cooling water channel and electrode a can be integrated on the connecting shaft 5, and the pipelines for ventilation, water and electricity are integrated, which further simplifies the structure and reduces production costs.

[0032] In some embodiments, in order to facilitate the rotation of the adjusting screw 4, a limiting plane 42 is provided on the top side wall of the adjusting screw 4 along the axial direction, so as to facilitate the rotation of the adjusting screw 4 using an adjustable wrench.

[0033] In this embodiment, in order to reduce the number of guide pillars and adjusting screws 4 and reduce the difficulty of adjustment, the number of guide pillars and adjusting screws 4 is 2, and both are symmetrically arranged along the radial direction of the connecting disk 1, and the angle between the guide pillar and the adjacent adjusting screw 4 is 90°.

[0034] In summary, the present embodiment provides a spray pan 6 leveling mechanism, comprising an adjusting screw 4 and a guide post 3. Since the top of the connecting shaft 5 is fixed to the mounting pan 2 and the bottom to the spray pan 6, the adjusting screw 4, which is arranged around the mounting pan 2, can be rotated to adjust the levelness of the mounting pan 2 while also adjusting the height of the mounting pan 2, thereby achieving adjustment of both the levelness and height of the spray pan 6. The guide post 3 not only serves as a guide during adjustment of the spray pan 6, but also, due to the presence of a scale 31, facilitates auxiliary judgment of the height and levelness of the spray pan 6, thereby improving leveling accuracy. Furthermore, a locking nut 41 is provided to prevent the spray pan 6 from shifting after position adjustment, thereby ensuring leveling accuracy.

[0035] The above is only a preferred embodiment of the present invention. It should be pointed out that for ordinary technicians in this technical field, several improvements and replacements can be made without departing from the technical principles of the present invention. These improvements and replacements should also be regarded as the scope of protection of the present invention.

Claims

1. A spray plate leveling mechanism, characterized by: include Connecting plate, used for connecting with vacuum coating equipment; A mounting plate, arranged above the connecting plate; A plurality of adjusting screws are evenly distributed around the axis of the mounting plate, the bottom of the adjusting screw is against the connecting plate, and the top passes through the mounting plate and is threadedly connected to the mounting plate, and a locking nut is sleeved on the adjusting screw, and the upper end surface of the locking nut is against the lower end surface of the mounting plate; A plurality of guide pillars are evenly distributed around the axis of the mounting plate, wherein the bottom of the guide pillars is connected to the connecting plate, the top of the guide pillars passes through the mounting plate and is slidably connected to the mounting plate, and the outer wall of the guide pillars is provided with scales along the axial direction; A connecting shaft, the top of which is fixed to the mounting plate, and the bottom of which passes through the connecting plate and extends to below the connecting plate; The spray plate is located below the connecting plate and is fixedly connected to the bottom of the connecting shaft.

2. The spray plate leveling mechanism according to claim 1, characterized in that: It also includes a bellows, which is sleeved outside the connecting shaft. One end of the bellows is connected to the mounting disk, and the other end is connected to the connecting disk.

3. The spray plate leveling mechanism according to claim 2, characterized in that: Both ends of the bellows are provided with annular bosses, the connecting plate is provided with a limiting hole corresponding to the outer diameter of one annular boss, and the bottom of the mounting plate is provided with a limiting step corresponding to the inner diameter of the other annular boss.

4. The spray plate leveling mechanism according to claim 1, wherein: It also includes a flange fixing seat and a bearing. The number of the flange fixing seat and the bearing is the same as that of the guide column and their positions correspond. The flange fixing seat is fixed to the bottom of the guide column. The flange fixing seat is provided with a mounting hole and an adjustment screw hole. An adjustment screw is provided in the adjustment screw hole. The connecting plate is provided with a threaded hole corresponding to the mounting hole.

5. The spray plate leveling mechanism according to claim 1, characterized in that: The connecting shaft and the mounting plate are provided with an electrode introduction channel, a cooling water inlet channel, a cooling water outlet channel and a process gas introduction channel along the axial direction.

6. The spray plate leveling mechanism according to claim 1, wherein: A limiting plane is provided on the top side wall of the adjusting screw along the axial direction.

7. The spray plate leveling mechanism according to claim 1, wherein: The number of the guide pillars and the number of the adjusting screws are both 2, and both are symmetrically arranged along the radial direction of the connecting disk.

8. The spray plate leveling mechanism according to claim 4, characterized in that: The number of the mounting holes is the same as the number of the adjusting screw holes, and the mounting holes are arranged at intervals around the axis in the circumferential direction of the flange connection seat.

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