Preparation device for corrosion-resistant and wear-resistant coating on surface of CMP (chemical mechanical

Abstract

The utility model discloses a preparation device for an anti-corrosion and wear-resistant coating on the surface of a CMP trimmer, and relates to the technical field of CMP trimmers. The cooling device comprises the direct-current arc plasma torch, the objective table and the cooling mechanism, the heat preservation base is arranged at the bottom of the objective table, the cooling mechanism is arranged, comprehensive and efficient cooling of the objective table and the CMP trimmer on the objective table is achieved, it is ensured that heat generated in the deposition process can be taken away in time, and therefore the deposition efficiency is improved. The coating quality reduction caused by overheating is avoided, cooling water is driven to circulate through an external liquid pump, the temperature in the deposition process can be accurately controlled in combination with the heat preservation effect of the heat preservation base, the accurate temperature management is beneficial to optimizing the plasma deposition effect, and the plasma deposition quality is improved. The diamond powder can be molten under the optimal temperature condition and firmly attached to the surface of the trimmer, the deposition efficiency is improved, and the situation of deposition failure or unstable quality caused by temperature fluctuation is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of CMP dressers, in particular to a device for preparing a corrosion-resistant and wear-resistant coating on the surface of a CMP dresser. Background Art

[0002] As a core equipment in the semiconductor manufacturing process, the CMP dresser plays a key role in restoring the performance of the CMP polishing pad, extending its service life and maintaining a good polishing effect. It uses dressing media such as diamond to grind the surface of the polishing pad through precisely controlled mechanical or electrical methods to remove the wear debris caused by the glazing phenomenon, improve the roughness and flatness of the polishing pad, and thus ensure the global flatness of the wafer surface.

[0003] The existing device for preparing corrosion-resistant and wear-resistant coating on the surface of CMP dressers is equipped with a cooling water pipe at the bottom of the stage to cool the CMP dresser after high-temperature processing. However, the straight-up and straight-down cooling water pipe is difficult to cool the entire stage, which easily causes temperature differences on the surface of the stage, resulting in poor cooling effect and easily affecting the quality of the finished product. Utility Model Content

[0004] Based on this, the purpose of the present invention is to provide a device for preparing a corrosion-resistant and wear-resistant coating on the surface of a CMP dresser, so as to solve the technical problem in the prior art that the cooling water pipe is difficult to evenly cool the entire worktable, resulting in poor cooling effect and easily affecting the quality of the finished product.

[0005] To achieve the above-mentioned objectives, the present invention provides the following technical solutions: a device for preparing a corrosion-resistant and wear-resistant coating on the surface of a CMP dresser, comprising a DC arc plasma torch, a stage and a cooling mechanism, wherein a heat-insulating seat is provided at the bottom of the stage, and a mounting groove is provided at the bottom of the heat-insulating seat, and the cooling mechanism comprises a first water inlet pipe, a first guide groove and a second guide groove are provided inside the stage, the first water inlet pipe is connected to a first water outlet pipe through the first guide groove, the first water inlet pipe is connected to a second water inlet pipe through a first connecting pipe, the second water inlet pipe is connected to a second water outlet pipe through a second guide groove, a second connecting pipe is connected between the second water outlet pipe and the first water outlet pipe, a cooling water pipe is provided on one side of the first connecting pipe, and a return pipe is provided on one side of the second connecting pipe.

[0006] By adopting the above technical solution, the DC arc plasma torch, as a key component for coating preparation, can generate high-temperature plasma for depositing the corrosion-resistant and wear-resistant coating on the surface of the CMP dresser.

[0007] Furthermore, the first water inlet pipe and the second water inlet pipe are symmetrically arranged along the central axis of the loading platform, and the first water outlet pipe and the second water outlet pipe are symmetrically arranged along the central axis of the loading platform.

[0008] By adopting the above technical solution, the symmetrically arranged first water inlet pipe and the second water inlet pipe can ensure that cooling water enters the cooling system simultaneously and evenly from both sides of the loading platform.

[0009] Furthermore, the first guide groove and the second guide groove are both spirally arranged, and the first guide groove and the second guide groove are staggered.

[0010] By adopting the above technical solution, the spiral first guide groove and the second guide groove can increase the contact area and contact time between the cooling water and the worktable, so that the cooling water can more fully absorb and remove the heat generated by the worktable and the CMP dresser thereon.

[0011] Furthermore, the cooling water pipe is connected to an external liquid pump, and the cooling water pipe and the return pipe are mirror-imaged along the central axis of the stage.

[0012] By adopting the above technical solution, the cooling water can circulate in the cooling water pipe by providing power through an external liquid pump.

[0013] Furthermore, a mounting plate is provided on the top of the DC arc plasma torch, and a base is provided on one side of the mounting plate.

[0014] By adopting the above technical solution, the mounting plate provides a stable support platform for the DC arc plasma torch, ensuring the stability and accuracy of the plasma torch during operation.

[0015] Furthermore, a rubber layer is provided at the bottom of the heat preservation seat, and friction lines are provided at the bottom of the rubber layer.

[0016] By adopting the above technical solution, the rubber layer has good elasticity and shock absorption performance, which can effectively absorb the vibration and impact generated by the device during operation, thereby ensuring that the stage and the CMP dresser thereon remain stable.

[0017] In summary, the present invention has the following beneficial effects:

[0018] 1. The present invention achieves comprehensive and efficient cooling of the stage and the CMP dresser thereon by providing a cooling mechanism, a first water inlet pipe, a second water inlet pipe, a first guide groove, a second guide groove, a first water outlet pipe, a second water outlet pipe, and a return pipe, thereby ensuring that the heat generated during the deposition process can be removed in a timely manner, avoiding the degradation of coating quality due to overheating. The cooling water circulation is driven by an external liquid pump, and combined with the heat preservation effect of the heat preservation seat, it is possible to achieve precise control of the temperature during the deposition process. This precise temperature management helps to optimize the deposition effect of the plasma, allowing the diamond powder to melt under optimal temperature conditions and firmly adhere to the dresser surface, thereby improving deposition efficiency and reducing deposition failures or unstable quality caused by temperature fluctuations. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model;

[0020] Figure 2 This is a schematic diagram of the structure of the installation slot of the utility model;

[0021] Figure 3 This is a schematic structural diagram of the first guide trough of the utility model;

[0022] Figure 4 It is a partial cross-sectional structural schematic diagram of the utility model.

[0023] In the figure: 1. Base; 2. Mounting plate; 3. DC arc plasma torch; 4. Stage; 5. Insulation seat; 6. Mounting slot; 7. Cooling mechanism; 701. First water inlet pipe; 702. Second water inlet pipe; 703. First connecting pipe; 704. Cooling water pipe; 705. First guide trough; 706. Second guide trough; 707. First water outlet pipe; 708. Second water outlet pipe; 709. Second connecting pipe; 710. Return pipe. DETAILED DESCRIPTION

[0024] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. The embodiments described below with reference to the drawings are exemplary and are only used to explain the present invention, and cannot be understood as limiting the present invention.

[0025] In the description of the present invention, it should be noted that the terms "center", "up", "down", "left", "right", "vertical", "horizontal", "inside", "outside", etc., indicating directions or positional relationships, are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limitations on the present invention. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0026] In the description of the present invention, it should be noted that, unless otherwise clearly specified and limited, the terms "install", "connect", "connect", and "set" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection, or an indirect connection through an intermediate medium, or it can be a connection between the internal parts of two components. For ordinary technicians in this field, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0027] The following describes an embodiment of the present invention based on its overall structure.

[0028] Preparation device for anti-corrosion and wear-resistant coating on the surface of CMP dresser, such as Figure 1-Figure 4 As shown, it includes a DC arc plasma torch 3, a stage 4 and a cooling mechanism 7. A heat preservation seat 5 is provided at the bottom of the stage 4. A mounting groove 6 is provided at the bottom of the heat preservation seat 5. The cooling mechanism 7 includes a first water inlet pipe 701. A first guide groove 705 and a second guide groove 706 are provided inside the stage 4. The first water inlet pipe 701 is connected to a first water outlet pipe 707 through the first guide groove 705. The first water inlet pipe 701 is connected to the second water inlet pipe 702 through the first connecting pipe 703. The second water inlet pipe 702 is connected to the second water outlet pipe 707 through the second guide groove 706. A second water outlet pipe 708 is connected, and a second connecting pipe 709 is connected between the second water outlet pipe 708 and the first water outlet pipe 707. A cooling water pipe 704 is provided on one side of the first connecting pipe 703, and a return pipe 710 is provided on one side of the second connecting pipe 709. The DC arc plasma torch 3 is a key component for coating preparation and can generate high-temperature plasma for depositing an anti-corrosion and wear-resistant coating on the surface of the CMP dresser. The mounting groove 6 facilitates the installation and fixation of the insulation seat 5 and other parts of the preparation device to ensure the stability and reliability of the entire device.

[0029] See Figure 2 、 Figure 3 、 Figure 4The first water inlet pipe 701 and the second water inlet pipe 702 are symmetrically arranged along the central axis of the worktable 4, and the first water outlet pipe 707 and the second water outlet pipe 708 are symmetrically arranged along the central axis of the worktable 4. The symmetrically arranged first water inlet pipe 701 and the second water inlet pipe 702 can ensure that the cooling water enters the cooling system from both sides of the worktable 4 at the same time and evenly, and the symmetrically arranged first water outlet pipe 707 and the second water outlet pipe 708 can ensure that the cooling water is discharged from the cooling system from both sides of the worktable 4 at the same time and evenly.

[0030] See Figure 3 、 Figure 4 The first guide groove 705 and the second guide groove 706 are both spirally arranged, and the first guide groove 705 and the second guide groove 706 are staggered. The spiral first guide groove 705 and the second guide groove 706 can increase the contact area and contact time between the cooling water and the worktable 4, so that the cooling water can more fully absorb and take away the heat generated by the worktable and the CMP dresser thereon. The staggered first guide groove 705 and the second guide groove 706 can form a more complex cooling water flow channel, increase the turbulence of the cooling water, and thus improve the heat exchange efficiency of the cooling water.

[0031] See Figure 2 、 Figure 3 The cooling water pipe 704 is connected to the external liquid pump. The cooling water pipe 704 and the return pipe 710 are mirror-set along the central axis of the worktable 4. The power is provided by the external liquid pump. The cooling water can circulate in the cooling water pipe 704. The mirror-set arrangement makes the cooling water pipe 704 and the return pipe 710 symmetrically distributed on both sides of the worktable 4, and the cooling water can flow evenly through various parts of the worktable.

[0032] See Figure 1 A mounting plate 2 is provided on the top of the DC arc plasma torch 3, and a base 1 is provided on one side of the mounting plate 2. The mounting plate 2 provides a stable support platform for the DC arc plasma torch 3, ensuring the stability and accuracy of the plasma torch during operation. The base 1 serves as the foundation of the entire device and provides solid support for upper components such as the mounting plate 2 and the DC arc plasma torch 3.

[0033] See Figure 1 A rubber layer is provided at the bottom of the insulation seat 5, and friction patterns are provided at the bottom of the rubber layer. The rubber layer has good elasticity and shock absorption performance. It can effectively absorb the vibration and impact generated by the device during operation, thereby ensuring that the stage 4 and the CMP dresser thereon remain stable. The friction patterns increase the contact area and friction coefficient between the rubber layer and the installation platform or the ground, making the entire device more stable when placed and not easy to slide or tilt.

[0034] The implementation principle of the present invention is as follows: first, a DC arc plasma torch 3 deposits diamond powder on the surface of the CMP dresser to form a diamond film. When cooling is required, an external liquid pump allows cooling water to enter the first connecting pipe 703 through the cooling water pipe 704, and then be diverted to the first water inlet pipe 701 and the second water inlet pipe 702. The cooling water then flows along the first guide groove 705 and the second guide groove 706 to cool the worktable, and then flows through the first water outlet pipe 707 and the second water outlet pipe 708 to the second connecting pipe 709 and flows out from the return pipe 710.

[0035] Parts not involved in the present invention are the same as those in the prior art or can be implemented by using the prior art, and will not be described in detail here.

[0036] Although embodiments of the present invention have been shown and described, these specific embodiments are merely explanations of the present invention and are not limitations on the present invention. The specific features, structures, materials, or characteristics described may be combined in a suitable manner in any one or more embodiments or examples. After reading this specification, those skilled in the art may make modifications, substitutions, and variations to the embodiments as needed without departing from the principles and purpose of the present invention, but as long as they are within the scope of the claims of the present invention, they are protected by patent law.

Claims

1. A device for preparing a corrosion-resistant and wear-resistant coating on the surface of a CMP dresser, characterized by: The invention comprises a direct current arc plasma torch (3), a stage (4) and a cooling mechanism (7), wherein a heat preservation seat (5) is provided at the bottom of the stage (4), a mounting groove (6) is provided at the bottom of the heat preservation seat (5), the cooling mechanism (7) comprises a first water inlet pipe (701), a first guide groove (705) and a second guide groove (706) are provided inside the stage (4), the first water inlet pipe (701) is connected to a first water outlet pipe (707) through the first guide groove (705), and the heat preservation seat (5) is provided at the bottom of the stage (4). The first water inlet pipe (701) is connected to the second water inlet pipe (702) via a first connecting pipe (703); the second water inlet pipe (702) is connected to the second water outlet pipe (708) via a second guide groove (706); a second connecting pipe (709) is connected between the second water outlet pipe (708) and the first water outlet pipe (707); a cooling water pipe (704) is provided on one side of the first connecting pipe (703); and a return pipe (710) is provided on one side of the second connecting pipe (709).

2. The device for preparing a corrosion-resistant and wear-resistant coating on the surface of a CMP dresser according to claim 1, characterized in that: The first water inlet pipe (701) and the second water inlet pipe (702) are symmetrically arranged along the central axis of the loading platform (4), and the first water outlet pipe (707) and the second water outlet pipe (708) are symmetrically arranged along the central axis of the loading platform (4).

3. The device for preparing a corrosion-resistant and wear-resistant coating on the surface of a CMP dresser according to claim 1, characterized in that: The first guide groove (705) and the second guide groove (706) are both arranged in a spiral shape, and the first guide groove (705) and the second guide groove (706) are arranged in a staggered manner.

4. The device for preparing a corrosion-resistant and wear-resistant coating on the surface of a CMP dresser according to claim 1, characterized in that: The cooling water pipe (704) is connected to an external liquid pump, and the cooling water pipe (704) and the return pipe (710) are arranged in a mirror image along the central axis of the stage (4).

5. The device for preparing a corrosion-resistant and wear-resistant coating on the surface of a CMP dresser according to claim 1, characterized in that: A mounting plate (2) is provided on the top of the DC arc plasma torch (3), and a base (1) is provided on one side of the mounting plate (2).

6. The device for preparing a corrosion-resistant and wear-resistant coating on the surface of a CMP dresser according to claim 1, characterized in that: The bottom of the heat-insulating seat (5) is provided with a rubber layer, and the bottom of the rubber layer is provided with friction lines.

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