Photoresist sampling device
By designing a photoresist sampling device including a rotor pump, a circulation pipe and a locking assembly, the problems of low sampling efficiency and inconvenient residue handling in the prior art are solved, and efficient and safe photoresist sampling is achieved.
Patent Information
- Application Number
- CN202422568589.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-23
- Publication Date
- 2025-09-26
- Estimated Expiration
- 2034-10-23
AI Technical Summary
Existing photoresist sampling devices have the problems of low sampling efficiency, inconvenient residue handling and waste.
A photoresist sampling device was designed, which included a rotor pump, a circulation pipe, a hand valve, a male head, a female head and a locking assembly. By controlling the operation of the hand valve and the locking assembly, efficient sampling of photoresist and removal of residues were achieved.
It improves sampling efficiency, saves production costs and on-site space, reduces leakage risks, and achieves the purpose of sampling on demand.
Smart Images
Figure CN223389507U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of photoresist sampling, in particular to a photoresist sampling device. Background Art
[0002] Photoresist, also known as photoresist, is a thin film material whose solubility changes when exposed to ultraviolet light, electron beams, ion beams, X-rays, or other radiation. It is a light-sensitive liquid mixture composed of three main components: a photosensitive resin, a sensitizer, and a solvent. It is used as an anti-corrosion coating during the photolithography process. Photoresist is primarily used in the processing of fine-grained graphics, such as display panels, integrated circuits, and discrete semiconductor devices.
[0003] Photoresist is an indispensable core material in the photolithography process and plays an important role in the semiconductor manufacturing process. There are currently many types of photoresist sampling devices. According to the product characteristics, production process and sampling volume, the current samplers all add sampling valves to the sampling pipeline. Due to the characteristics of the product, some products will remain in the sampling valve. Before each sampling, the residual sample must be rinsed clean, and the rinse material needs to be collected for secondary use. This operation causes a waste of time and raw materials, resulting in low sampling efficiency.
[0004] Therefore, there is an urgent need to provide a photoresist sampling device that improves sampling efficiency compared to the prior art. Utility Model Content
[0005] The utility model solves the technical problems existing in the prior art and provides a photoresist sampling device.
[0006] In order to achieve the above purpose, the technical solution adopted by the present utility model is as follows:
[0007] A photoresist sampling device includes a rotor pump, a first circulation pipe, a second circulation pipe, a first hand valve, a second hand valve, a hose, a male head, a female head and a locking assembly. The rotor pump is connected in series to a main pipe, the first circulation pipe and the second circulation pipe are both connected to the main pipe, the first circulation pipe and the second circulation pipe are respectively arranged at two ends of the rotor pump, the first circulation pipe is connected to the hose at one end away from the main pipe, the first hand valve is installed at the connection between the hose and the first circulation pipe, the hose is connected to the male head at one end away from the first circulation pipe, the second circulation pipe is connected to the female head at one end away from the main pipe, the second hand valve is installed at the connection between the second circulation pipe and the female head, the male head at one end away from the hose and the female head at one end away from the second circulation pipe are detachably connected via the locking assembly.
[0008] Furthermore, the locking assembly includes a first sleeve, a second sleeve, a groove and a block, the first sleeve is sleeved on the outside of the male head, the second sleeve is sleeved on the outside of the first sleeve and the female head, the groove is set on the outside of the first sleeve, the outside of the second sleeve is rotatably connected to the block, and the first sleeve and the second sleeve are detachably connected through the groove and the block.
[0009] Furthermore, the card block is integrally connected with a handle.
[0010] Furthermore, the grooves are provided in plurality, the clamping blocks are also provided in plurality, and the grooves and the clamping blocks are provided in a one-to-one correspondence.
[0011] Furthermore, the first sleeve is threadedly connected to the male head, and the second sleeve is threadedly connected to the female head.
[0012] Furthermore, a sealing gasket is provided between the male head and the first sleeve, and the sealing gasket is sleeved on the outside of the male head.
[0013] Furthermore, a sealing gasket is provided between the female connector and the second sleeve, and the sealing gasket is sleeved on the outside of the female connector.
[0014] Furthermore, the first sleeve extends into the interior of the female head away from one end of the male head.
[0015] Furthermore, the hose is a transparent hose, and the hose is made of Teflon material.
[0016] Furthermore, the first circulation pipe and the second circulation pipe are both L-shaped.
[0017] Compared with the prior art, the beneficial effects of the present invention are:
[0018] (1) The utility model solves the problems of residual or uneven photoresist and volatilization in the photoresist sampling chamber, saves production costs and on-site space, reduces the risk of leakage, and improves sampling efficiency.
[0019] (2) The utility model can achieve the purpose of sampling according to demand by controlling the opening and closing status of the second hand valve. BRIEF DESCRIPTION OF THE DRAWINGS
[0020] Figure 1 It is a schematic diagram of the overall structure of the utility model.
[0021] Figure 2 It is a cross-sectional view showing the locking assembly of the present invention.
[0022] Description of reference numerals:
[0023] 1. Main pipeline; 2. Rotor pump; 3. First hand valve; 4. Second hand valve; 5. Hose; 6. First circulation pipeline; 7. Second circulation pipeline; 8. Male connector; 9. Female connector; 10. Locking assembly; 101. First sleeve; 102. Second sleeve; 103. Groove; 104. Block; 105. Handle. DETAILED DESCRIPTION
[0024] The technical solution of the present invention will be clearly described below in conjunction with the accompanying drawings. Obviously, the embodiments described are not all embodiments of the present invention. All other embodiments obtained by ordinary technicians in this field without making creative work are within the scope of protection of the present invention. It should be noted that the directions or positional relationships indicated by terms such as "center", "up", "down", "left", "right", "vertical", and "horizontal" are based on the directions or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description. They do not indicate or imply that the device or element referred to must have a specific direction, be constructed and operated in a specific direction. Therefore, they cannot be understood as limiting the present invention.
[0025] like Figure 1 As shown, the utility model provides a photoresist sampling device, including a rotor pump 2, a first circulation pipe 6, a second circulation pipe 7, a hose 5, a first hand valve 3, a second hand valve 4, a male head 8, a female head 9 and a locking assembly 10. The rotor pump 2 is connected in series to the main pipe 1, and the main pipe 1 is a pipe for transporting photoresist. The first circulation pipe 6 and the second circulation pipe 7 are both connected to the main pipe 1. The first circulation pipe 6 and the second circulation pipe 7 are located at both ends of the rotor pump 2. The end of the first circulation pipe 6 away from the main pipe 1 is connected to the hose 5. The first hand valve 3 is installed at the connection between the first circulation pipe 6 and the hose 5. The end of the hose 5 away from the first circulation pipe 6 is detachably connected to the male head 8. The end of the second circulation pipe 7 away from the main pipe 1 is detachably connected to the female head 9. The second hand valve 4 is installed at the connection between the female head 9 and the second circulation pipe 7. The end of the male head 8 away from the hose 5 and the end of the female head 9 away from the second circulation pipe 7 are detachably connected through the locking assembly 10.
[0026] like Figure 2As shown, the locking assembly 10 includes a first sleeve 101, a second sleeve 102, a groove 103, a block 104 and a handle 105. The first sleeve 101 is sleeved on the end of the male head 8 away from the hose 5. The first sleeve 101 is threadedly connected and fixed with the male head 8. The end of the first sleeve 101 away from the male head 8 extends into the interior of the female head 9. The second sleeve 102 is sleeved on the outside of the first sleeve 101. The second sleeve 102 is also sleeved on the outside of the female head 9. The second sleeve 102 and the female head 9 are threadedly connected and fixed. The outer wall of the second sleeve 102 is provided with a groove 103. The outside of the second sleeve 102 is rotatably connected to the block 104. The block 104 is integrally connected and provided with a handle Hand 105, when the handle 105 is in a state perpendicular to the axis of the second sleeve 102, the block 104 leaves the groove 103. At this time, the first sleeve 101 and the second sleeve 102 can move relatively, so that the male head 8 and the female head 9 can move relatively, and the male head 8 drives the first sleeve 101 to slide out from the female head 9 and the second sleeve 102. When the end of the handle 105 away from the block 104 is in contact with the outer wall of the second sleeve 102, the block 104 is located inside the groove 103. At this time, the first sleeve 101 and the second sleeve 102 are engaged, so that the male head 8 and the female head 9 are in a fixed connection state.
[0027] There can be multiple grooves 103 on the outside of the first sleeve 101, and there can also be multiple rotatably connected blocks 104 on the outside of the second sleeve 102. The grooves 103 and the blocks 104 are arranged in a one-to-one correspondence, and each block 104 is integrally connected to a handle 105.
[0028] A sealing gasket is provided between the male head 8 and the first sleeve 101, and the sealing gasket is sleeved on the outside of the male head 8; a sealing gasket is also provided between the female head 9 and the second sleeve 102, and the sealing gasket is sleeved on the outside of the female head 9; the provision of the sealing gasket plays a better sealing role.
[0029] The hose 5 and the male connector 8 are preferably connected by a threaded connection, and the female connector 9 and the second circulation pipe 7 are preferably connected by a threaded connection.
[0030] The first circulation pipe 6 and the second circulation pipe 7 are both designed to be L-shaped.
[0031] The hose 5 is a transparent hose 5 , and the material of the hose 5 is Teflon.
[0032] The working principle of a photoresist sampling device provided by the present invention is as follows: when the first hand valve 3 and the second hand valve 4 are in the open state, and the male head 8 and the female head 9 are connected by the locking assembly 10, the photoresist in the main pipe can circulate among the first circulation pipe 6, the hose 5, the male head 8, the female head 9, and the second circulation pipe 7 through the rotor pump 2. Since the hose 5 is made of transparent material, the condition of the internal photoresist can be observed through the hose 5; when it is necessary to sample the photoresist, first close the first hand valve 3 and the second hand valve 4, open the locking assembly 10, slide the male head 8 and the first sleeve 101 out from the second sleeve 102 and the female head 9, then remove the first sleeve 101 from the female head 9, put the female head 9 into the prepared sampling container, open the second hand valve 4, and use the pressure difference between the front and rear ends of the rotor pump 2 to sample the photoresist. After the sampling is completed, close the second hand valve 4.
[0033] The utility model can achieve the purpose of sampling on demand by controlling the switching status of the second hand valve 4; the utility model solves the problems of residual or uneven photoresist and volatilization in the photoresist sampling chamber, saves production costs and on-site space, reduces the risk of leakage, and improves sampling efficiency.
[0034] Finally, it should be noted that the above content is only used to illustrate the technical solution of the utility model, rather than to limit the scope of protection of the utility model. Simple modifications or equivalent replacements of the technical solution of the utility model by ordinary technicians in this field do not deviate from the essence and scope of the technical solution of the utility model.
Claims
1. A photoresist sampling device, characterized in that: It includes a rotor pump, a first circulation pipe, a second circulation pipe, a first hand valve, a second hand valve, a hose, a male head, a female head and a locking assembly. The rotor pump is connected in series to the main pipe. The first circulation pipe and the second circulation pipe are both connected to the main pipe. The first circulation pipe and the second circulation pipe are respectively arranged at both ends of the rotor pump. The end of the first circulation pipe away from the main pipe is connected to the hose. The first hand valve is installed at the connection between the hose and the first circulation pipe. The end of the hose away from the first circulation pipe is connected to the male head. The end of the second circulation pipe away from the main pipe is connected to the female head. The second hand valve is installed at the connection between the second circulation pipe and the female head. The end of the male head away from the hose and the end of the female head away from the second circulation pipe are detachably connected through the locking assembly.
2. A photoresist sampling device according to claim 1, characterized in that: The locking assembly includes a first sleeve, a second sleeve, a groove and a block. The first sleeve is sleeved on the outside of the male head, and the second sleeve is sleeved on the outside of the first sleeve and the female head. The groove is set on the outside of the first sleeve, and the outside of the second sleeve is rotatably connected to the block. The first sleeve and the second sleeve are detachably connected through the groove and the block.
3. A photoresist sampling device according to claim 2, characterized in that: The card block is integrally connected with a handle.
4. A photoresist sampling device according to claim 3, characterized in that: There are multiple grooves and multiple clamping blocks, and the grooves and the clamping blocks are arranged in a one-to-one correspondence.
5. The photoresist sampling device according to claim 2, characterized in that: The first sleeve is threadedly connected to the male head, and the second sleeve is threadedly connected to the female head.
6. A photoresist sampling device according to claim 5, characterized in that: A sealing gasket is provided between the male head and the first sleeve, and the sealing gasket is sleeved on the outside of the male head.
7. The photoresist sampling device according to claim 5, characterized in that: A sealing gasket is provided between the female connector and the second sleeve, and the sealing gasket is sleeved on the outside of the female connector.
8. The photoresist sampling device according to claim 2, characterized in that: The first sleeve extends into the interior of the female head at one end away from the male head.
9. The photoresist sampling device according to claim 1, characterized in that: The hose is a transparent hose and is made of Teflon material.
10. The photoresist sampling device according to claim 1, characterized in that: The first circulation pipe and the second circulation pipe are both L-shaped.