Ultrasonic scanning device

Abstract

The utility model relates to an ultrasonic scanning device, comprising: a substrate having a scanning cavity for accommodating a tested object; the at least one weak current electric appliance is mounted on the base body and comprises an ultrasonic generator, and the ultrasonic generator is configured to generate an ultrasonic signal; the ultrasonic probe is configured in the scanning cavity and connected with the ultrasonic generator, and the ultrasonic probe is configured to emit ultrasonic waves to the tested object arranged in the scanning cavity based on the ultrasonic signals so as to carry out ultrasonic scanning on the tested object; the strong current electric appliance is installed on the base body and can generate an electromagnetic field, and the power of the strong current electric appliance is larger than that of the weak current electric appliance; wherein the strong-current electric appliance and the weak-current electric appliance are arranged in a mutually separated mode in the mode that the scanning cavity is arranged between the strong-current electric appliance and the weak-current electric appliance.

Description

Technical Field

[0001] The present application relates to the technical field of scanning equipment, and in particular to an ultrasonic scanning equipment. Background Art

[0002] Ultrasonic scanning equipment is widely used. It can be used to detect internal defects such as cracks, delamination, holes, foreign matter, etc. in products of various industries such as semiconductor devices, circuit boards, ceramics, resins, automotive parts, metal products, wafers, etc. without causing damage to the tested products. It has high detection accuracy and is easy to operate.

[0003] In the ultrasonic scanning equipment disclosed in the relevant technology, core components such as ultrasonic generators are basically concentrated in the electrical cabinet below the equipment workbench panel. There are many high-power electrical appliances in the electrical cabinet, such as power modules, motor drivers, etc. These high-power electrical appliances are prone to generate strong electromagnetic fields, which will cause non-negligible interference to the ultrasonic signal generated by the ultrasonic generator, resulting in noise in the scanning data of the object under test, affecting the scanning quality. Summary of the Invention

[0004] In view of this, the present application proposes an ultrasonic scanning device.

[0005] The ultrasonic scanning device proposed in this application includes:

[0006] A base body having a scanning cavity for accommodating an object to be measured;

[0007] at least one weak current electrical appliance, mounted on the base and comprising an ultrasonic generator, wherein the ultrasonic generator is configured to generate an ultrasonic signal;

[0008] an ultrasonic probe disposed in the scanning cavity and connected to the ultrasonic generator, the ultrasonic probe being configured to transmit ultrasonic waves to the object under test disposed in the scanning cavity based on the ultrasonic signal, so as to perform ultrasonic scanning on the object under test;

[0009] At least one strong electrical appliance, mounted on the substrate and capable of generating an electromagnetic field, wherein the power of the strong electrical appliance is greater than the power of the weak electrical appliance;

[0010] The strong current electrical appliance and the weak current electrical appliance are arranged to be separated from each other with the scanning cavity interposed therebetween.

[0011] In some possible implementations, the substrate has a high-current cavity and a low-current cavity located on opposite sides of the scanning cavity, respectively. The at least one low-current electrical appliance is configured in the low-current cavity, and the at least one high-current electrical appliance is configured in the high-current cavity.

[0012] In some possible implementations, the weak current cavity is located on the upper side of the scanning cavity, and the strong current cavity is located on the lower side of the scanning cavity.

[0013] In some possible implementations, the substrate includes:

[0014] A first inspection door, used for closing and opening the weak current chamber;

[0015] The second inspection door is used to close and open the high-voltage chamber.

[0016] In some possible implementations, the first inspection door and the second inspection door each have a heat dissipation mesh, and the low-voltage cavity is located at an elevation of 1 to 1.5 meters from the ground.

[0017] In some possible implementations, the substrate includes:

[0018] a first metal partition, separating the scanning cavity from the weak current cavity and defining an upper boundary of the scanning cavity and a lower boundary of the weak current cavity;

[0019] The second metal partition separates the scanning cavity from the high-voltage cavity and defines the lower boundary of the scanning cavity and the upper boundary of the high-voltage cavity.

[0020] In some possible implementations, the distance between the high-voltage electrical appliance and the low-voltage electrical appliance is not less than 0.5 meters.

[0021] In some possible implementations, the following further comprises:

[0022] A motor is connected to the ultrasonic probe through a motion transmission mechanism to drive the ultrasonic probe to move relative to the object under test in the scanning cavity.

[0023] In some possible implementations, the at least one high-voltage electrical appliance includes a motor driver electrically connected to the motor.

[0024] In some possible implementations, the at least one low-current electrical appliance further includes an industrial computer, and the at least one high-current electrical appliance further includes a power module.

[0025] According to the ultrasonic scanning device provided by the present application, the high-voltage electrical appliances and the low-voltage electrical appliances, particularly the ultrasonic generator, are separated from each other by a scanning cavity. This effectively prevents the electromagnetic field generated by the high-voltage electrical appliances from interfering with the ultrasonic signals generated by the ultrasonic generator, thereby helping to ensure the quality of the device's scanning of the object under test. Furthermore, arranging other low-voltage electrical appliances together with the ultrasonic generator substantially prevents them from interfering with the ultrasonic signals of the ultrasonic generator, and helps to rationally arrange the installation locations of the various electrical components, thereby avoiding the need for the device to be oversized. BRIEF DESCRIPTION OF THE DRAWINGS

[0026] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings of the embodiments will be briefly introduced below. Obviously, the drawings described below only relate to some embodiments of the present application, and are not limitations to the present application.

[0027] Figure 1 This is a front view of an ultrasonic scanning device provided in one embodiment of the present application.

[0028] Figure 2 yes Figure 1 Right view of .

[0029] Description of reference numerals:

[0030] 1-substrate, 1A-scanning cavity, 1B-weak current cavity, 1C-strong current cavity;

[0031] 2-Weak current electrical appliances;

[0032] 3-Ultrasonic generator;

[0033] 4-Ultrasonic probe;

[0034] 5- strong electrical appliances;

[0035] 6-Industrial Computer;

[0036] 7-First inspection door;

[0037] 8- Second inspection door;

[0038] 9-Motion transmission component;

[0039] 10- Third inspection door;

[0040] 11- first metal separator;

[0041] 12- Second metal separator. DETAILED DESCRIPTION

[0042] In order to make the purpose, technical solutions and advantages of the present application clearer, the technical solutions of the embodiments of the present application will be clearly and completely described below in conjunction with the drawings of the embodiments of the present application. Obviously, the described embodiments are part of the embodiments of the present application, rather than all the embodiments. Based on the described embodiments of the present application, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of this application. It is understood that, in the absence of conflict, some technical means of the various embodiments described herein can be replaced or combined with each other.

[0043] In the description of this application, the terms "first," "second," etc., if used, are used solely to distinguish the objects being described and do not convey any order or technical meaning. Thus, an object defined as "first," "second," etc. may explicitly or implicitly include one or more of such objects. Furthermore, for example, the term "first element" alone does not imply the presence of a "second element," nor does the term "second element" alone imply the presence of a "first element." Furthermore, the terms "a" or "an," and the like, do not denote a limitation on quantity, but rather indicate the presence of at least one, and "plurality" means at least two.

[0044] Figures 1 to 2 An ultrasonic scanning device (hereinafter sometimes referred to as the device) provided in an embodiment of the present application is shown. The device includes a base 1, at least one weak-current electrical appliance 2, an ultrasonic probe 4 and at least one strong-current electrical appliance 5.

[0045] The base 1 has a central scanning chamber 1A, a weak current chamber 1B above the scanning chamber 1A, and a strong current chamber 1C below the scanning chamber 1A. The scanning chamber 1A is used to accommodate an object to be scanned, such as a semiconductor device, ceramic product, metal product, or resin.

[0046] The at least one weak-current electrical appliance 2 is installed in the weak-current cavity 1B of the base 1 , and the at least one weak-current electrical appliance 2 includes an ultrasonic generator 3 , which is configured to generate ultrasonic signals.

[0047] The ultrasonic probe 4 is disposed in the scanning cavity 1A and connected to the ultrasonic generator 3. The ultrasonic probe 4 is configured to transmit ultrasonic waves to the object disposed in the scanning cavity 1A based on the ultrasonic signal generated by the ultrasonic generator 3, so as to perform ultrasonic scanning on the object.

[0048] The at least one strong electric appliance 5 is installed in the strong electric cavity 1C of the base 1. The power of the strong electric appliance 5 is greater than that of the weak electric appliance 2, and the strong electric appliance 5 can generate a relatively strong electromagnetic field when in operation. Therefore, if the strong electric appliance 5 and the weak electric appliance 2, especially the ultrasonic generator 3, are arranged close to each other, the electromagnetic field generated by the strong electric appliance 5 when in operation will dry out the ultrasonic signal generated by the ultrasonic generator 3, resulting in deterioration of the scanning quality of the object under test. Advantageously, in this embodiment, the strong electric appliance 5 and the weak electric appliance 2, including the ultrasonic generator 3, are respectively arranged in the strong electric cavity 1C and the weak electric cavity 1B, which are separated from each other. Therefore, the strong electric appliance 5 and the weak electric appliance 2, especially the ultrasonic generator 3, are arranged in a manner separated from each other by the scanning cavity 1A. This can effectively prevent the electromagnetic field generated by the strong electric appliance 5 when in operation from interfering with the ultrasonic signal generated by the ultrasonic generator 3, thereby facilitating the scanning quality of the object under test by the device.

[0049] In this embodiment, the aforementioned at least one weak-current electrical appliance 2 also includes an industrial computer 6. The power of the industrial computer 6 is relatively small. Even if an electromagnetic field is generated during operation, the magnetic field strength of the electromagnetic field is very small. Therefore, even if it is arranged together with the ultrasonic generator 3 in the weak-current cavity 1B, it will basically not interfere with the ultrasonic signal of the ultrasonic generator 3, and it will help to reasonably arrange the installation positions of various electrical components and make full use of the storage space of the weak-current cavity 1B, thereby avoiding the large size of the equipment.

[0050] In the present embodiment, the outer profile of matrix 1 is formed into a rough rectangular parallelepiped shape, and the height dimension of this rectangular parallelepiped in the direction of gravity is significantly greater than the length dimension and width dimension in the horizontal direction, and this length dimension and this width dimension are substantially equal. In this way, while helping to configure the weak current cavity 1B and the weak current electrical appliance 2 therein, particularly the ultrasonic generator 3, at a suitable elevation, increase the distance between weak current cavity 1B and strong current cavity 1C as much as possible, thereby increase the distance between weak current electrical appliance 2 and strong current electrical appliance 5. Exemplarily, by such design, the elevation of weak current cavity 1B from ground can be easily set to 1 to 1.5 meters, and the distance between strong current electrical appliance 5 and weak current electrical appliance 2 is not less than 0.5 meter, thereby while ensuring that strong current electrical appliance 5 and ultrasonic generator 3 have enough distance, it is convenient for the operator to check the running state of weak current electrical appliance 2, particularly the ultrasonic generator 3, and to the inspection and maintenance of weak current electrical appliance 2, and. In certain embodiments, the elevation of weak current cavity 1B from ground is designed to 1.35 meters.

[0051] The base 1 also includes a first access door 7 and a second access door 8. The first access door 7 is hinged to the weak current chamber 1B and is used to close and open the weak current chamber 1B to facilitate maintenance and repair of the weak current devices 2 therein. The second access door 8 is hinged to the strong current chamber 1C and is used to close and open the strong current chamber 1C to facilitate maintenance and repair of the strong current devices 5 therein.

[0052] Please also see Figure 1 and Figure 2 , the number of first inspection doors 7 is configured to be multiple, wherein at least one first inspection door 7 is installed on the front of the weak current chamber 1B, and at least another first inspection door 7 is installed on the side of the weak current chamber 1B. Similarly, the number of second inspection doors 8 is also configured to be multiple, wherein at least one second inspection door 8 is installed on the front of the strong current chamber 1C, and at least another second inspection door 8 is installed on the side of the strong current chamber 1C. Figure 1 In order to clearly show the weak-current electrical appliance 2 and the strong-current electrical appliance 5, the first inspection door 7 and the second inspection door 8 on the front side are removed.

[0053] In addition, the first inspection door 7 and the second inspection door 8 each have a heat dissipation mesh to prevent the electrical components from overheating and causing performance degradation.

[0054] Furthermore, base 1 includes a third inspection door 10, which is hinged to scanning chamber 1A and is used to close and open scanning chamber 1A to facilitate maintenance and inspection of components within scanning chamber 1A. Furthermore, third inspection door 10 is designed with a transparent window to allow operators to observe the status of the object under test and ultrasonic probe 4.

[0055] Please review Figure 1 , the scanning cavity 1A is separated from the weak-current cavity 1B by a first metal partition 11 disposed therebetween, and the scanning cavity 1A is separated from the strong-current cavity 1C by a second metal partition 12 disposed therebetween, wherein the first metal partition 11 defines the upper boundary of the scanning cavity 1A and the lower boundary of the weak-current cavity 1B, and the second metal partition 12 defines the lower boundary of the scanning cavity 1A and the upper boundary of the strong-current cavity 1C. The first metal partition 11 and the second metal partition 12 can shield the electromagnetic field generated by the strong-current electrical appliance 5 during operation, further reducing the influence of the electromagnetic field on the ultrasonic signal. The first metal partition 11 and the second metal partition 12 can be regarded as components of the substrate 1. Figure 1 In the figure, since the first metal separator 11 and the second metal separator 12 are blocked by the outer surface of the base 1, the dotted lines are used to represent the reference numerals of the two.

[0056] The device also includes a motor (not shown) connected to the aforementioned ultrasonic probe 4 via a motion transmission assembly 9 to drive the ultrasonic probe 4 to move relative to the object under test within the scanning cavity 1A. The motion transmission assembly 9 may include a screw mechanism. Furthermore, the at least one high-voltage electrical device 5 may include a motor driver electrically connected to the motor and a power module that provides operating power to the device.

Claims

1. An ultrasonic scanning device, characterized in that: include: A base body having a scanning cavity for accommodating an object to be measured; at least one weak current electrical appliance, mounted on the base and comprising an ultrasonic generator, wherein the ultrasonic generator is configured to generate an ultrasonic signal; an ultrasonic probe disposed in the scanning cavity and connected to the ultrasonic generator, the ultrasonic probe being configured to transmit ultrasonic waves to the object under test disposed in the scanning cavity based on the ultrasonic signal, so as to perform ultrasonic scanning on the object under test; At least one strong electrical appliance, mounted on the substrate and capable of generating an electromagnetic field, wherein the power of the strong electrical appliance is greater than the power of the weak electrical appliance; The strong current electrical appliance and the weak current electrical appliance are arranged to be separated from each other with the scanning cavity interposed therebetween.

2. The ultrasonic scanning device according to claim 1, characterized in that The base body has a strong current cavity and a weak current cavity respectively located on opposite sides of the scanning cavity. The at least one weak current appliance is arranged in the weak current cavity, and the at least one strong current appliance is arranged in the strong current cavity.

3. The ultrasonic scanning device according to claim 2, characterized in that The weak current cavity is located on the upper side of the scanning cavity, and the strong current cavity is located on the lower side of the scanning cavity.

4. The ultrasonic scanning device according to claim 3, characterized in that The substrate comprises: A first inspection door, used for closing and opening the weak current chamber; The second inspection door is used to close and open the high-voltage chamber.

5. The ultrasonic scanning device according to claim 4, characterized in that The first inspection door and the second inspection door each have a heat dissipation mesh, and the low-voltage cavity is 1 to 1.5 meters above the ground.

6. The ultrasonic scanning device according to claim 3, characterized in that The substrate comprises: a first metal partition, separating the scanning cavity from the weak current cavity and defining an upper boundary of the scanning cavity and a lower boundary of the weak current cavity; The second metal partition separates the scanning cavity from the high-voltage cavity and defines the lower boundary of the scanning cavity and the upper boundary of the high-voltage cavity.

7. The ultrasonic scanning device according to any one of claims 1 to 6, characterized in that: The distance between the strong current appliance and the weak current appliance is not less than 0.5 meters.

8. The ultrasonic scanning device according to any one of claims 1 to 6, characterized in that: Also includes: A motor is connected to the ultrasonic probe through a motion transmission mechanism to drive the ultrasonic probe to move relative to the object under test in the scanning cavity.

9. The ultrasonic scanning device according to claim 8, characterized in that The at least one strong electrical appliance includes a motor driver electrically connected to the motor.

10. The ultrasonic scanning device according to claim 9, characterized in that The at least one low-current electrical appliance further includes an industrial computer, and the at least one high-current electrical appliance further includes a power module.

Images