Multifunctional ion implanter

Abstract

The utility model discloses a multifunctional ion implanter, which relates to the technical field of ion implanters and comprises an ion implanter body, a display screen and an emergency button are arranged on one side of the ion implanter body, a transparent plate is arranged on one side of the display screen and the emergency button, and metal side plates are fixedly connected to two sides of the transparent plate. According to the utility model, through the arrangement of the transparent plate and the cooperation of the two metal side plates, the control assemblies such as the display screen, the emergency button, the drawing keyboard and the like are protected, the condition that the ion implanter body is touched by mistake after data adjustment is avoided, the use stability is ensured, and through the arrangement of the clamping groove, the closing of the transparent plate is limited by adopting a clamping mode, so that the use safety is improved. And the two sides of one end of the clamping strip are both designed to be inclined, so that the clamping strip can be guided, the clamping strip is inserted into the clamping groove, and the use stability is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of ion implanters, in particular to a multifunctional ion implanter. Background Art

[0002] An ion implanter consists of an ion source, ion introduction and mass analyzer, accelerator tube, scanning system, and process chamber. Minor components can be omitted based on actual needs. The ion source is the primary component of the ion implanter, its function being to ionize the gaseous particles of the element to be implanted into ions, thereby determining the type of ions to be implanted and the beam intensity. Electrons generated by direct current or high-frequency discharge in the ion source serve as bombarding particles. When the energy of the foreign electrons exceeds the ionization potential of the atoms, they ionize the elements through collision. In addition to the original electrons, positrons and secondary electrons are produced after the collision. The positive ions enter the mass analyzer to select the desired ions, then pass through an accelerator to obtain higher energy. After being focused by a quadruple lens, they enter the target chamber for ion implantation.

[0003] In the prior art, when an ion implanter is in use, the keyboard, buttons and display screen used for its operation are mostly exposed. After use, it is easy to touch the buttons and keys, which will affect the data of the ion implanter and the start and stop of the machine, thereby affecting the use of the ion implanter. Utility Model Content

[0004] The purpose of the present utility model is to solve the problem that in the prior art, when an ion implanter is in use, the keyboard, buttons and display screen used for operation are mostly exposed to the outside, and after use, it is easy to touch the buttons and keys, which will affect the data of the ion implanter and the start and stop of the machine, thereby affecting the use of the ion implanter. A multifunctional ion implanter is proposed.

[0005] In order to achieve the above-mentioned purpose, the present invention adopts the following technical scheme: a multifunctional ion implanter, comprising an ion implanter body, a display screen and an emergency button are provided on one side of the ion implanter body, a transparent plate is provided on one side of the display screen and the emergency button, and metal side plates are fixedly connected on both sides of the transparent plate, one side of one metal side plate is rotatably connected to the ion implanter body by a hinge, a card slot is provided on one side of the ion implanter body, the card slot is located on one side of the display screen, a pull-out keyboard is provided below the display screen, a card strip is fixedly connected on one side of the other metal side plate, the card strip is plugged into the card slot, and there is an interference fit between the card strip and the card slot, the ion implanter body is the existing technology, and is internally provided with components such as an ion source, plasma, extraction component, and magnetic analysis to perform ion implantation operations, and the specific components are adjusted according to usage requirements, and the pull-out keyboard adopts a pull-out type setting to avoid bumps.

[0006] Preferably, a mounting groove is provided on one side of the ion implanter body, and a magnetic block is fixedly connected inside the mounting groove.

[0007] Preferably, a drawer cavity is provided on one side of the lower end of the ion implanter body, and a water outlet pipe is provided at the upper end of the drawer cavity.

[0008] Preferably, a slide groove is provided in the middle of both sides of the pull-out cavity, a water tank is provided inside the pull-out cavity, and a rubber sheet is fixedly connected to one side of the other metal side plate.

[0009] Preferably, both sides of the water tank are fixedly connected with side limit rails, and the side limit rails are slidably connected to the slide groove. One side of the water tank is fixedly connected with an I-shaped handle, and the holding part of the I-shaped handle is of inclined design.

[0010] Preferably, a transparent baffle is fixedly installed on the upper end of one side of the processing chamber of the ion implanter body, an acceleration unit and a scanning disk are arranged inside the processing chamber, and a movable door panel is arranged at the lower middle part of the ion implanter body.

[0011] Preferably, a transparent strip is fixedly connected to the middle of one side of the water tank, a side groove is opened on one side of the upper end of the water tank, and the length of the water outlet pipe is smaller than the depth of the side groove.

[0012] Compared with the prior art, the advantages and positive effects of the present invention are:

[0013] 1. In the present invention, by setting a transparent plate and cooperating with two metal side plates, the display screen, emergency button, pull-out keyboard and other control components are protected to avoid accidental touching of the ion implanter body after data adjustment, thereby ensuring stability in use. By setting a card slot, the closing of the transparent plate is restricted by a card connection method, which is convenient to use and does not require the use of buckles or the like for fixing. Both sides of one end of the card strip are inclined, which can guide the card strip so that the card strip can be inserted into the card slot, thereby ensuring stability in use.

[0014] 2. In the present invention, by setting the magnetic block, when the transparent plate is opened, the metal side plate can be adsorbed to avoid the shaking of the transparent plate, thereby ensuring that the body is prevented from being hit and causing accidental touch when adjusting the data, thereby facilitating use. By setting the water tank, it is used to collect the water generated by the cooling system inside the ion implanter body, which is convenient for water recycling. One side of the I-shaped handle is set to be inclined, which can be convenient for holding and using. By setting the transparent strip, the water level in the water tank can be easily observed, and the water inside can be poured out conveniently. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] Figure 1The present invention provides a three-dimensional structural diagram of a multifunctional ion implanter;

[0016] Figure 2 The utility model provides a three-dimensional structural diagram of an ion implanter body in a multifunctional ion implanter;

[0017] Figure 3 The utility model provides a three-dimensional structural diagram of a transparent plate and a metal side plate in a multifunctional ion implanter;

[0018] Figure 4 The utility model provides a three-dimensional structural schematic diagram of a water storage tank in a multifunctional ion implanter.

[0019] Legend: 1. Ion implanter body; 2. Transparent baffle; 3. Accelerator unit; 4. Scanning disk; 5. Movable door panel; 6. Transparent panel; 7. Metal side panel; 8. Magnetic block; 9. Pull-out chamber; 10. Slide; 11. Water tank; 12. I-shaped handle; 13. Installation slot; 14. Emergency button; 15. Display screen; 16. Pull-out keyboard; 17. Card slot; 18. Water outlet pipe; 19. Rubber sheet; 20. Card strip; 21. Side limit track; 22. Transparent strip; 23. Side slot. DETAILED DESCRIPTION

[0020] In order to more clearly understand the above-mentioned purpose, features and advantages of the present invention, the present invention is further described below with reference to the accompanying drawings and embodiments. It should be noted that the embodiments of the present application and the features therein can be combined with each other without conflict.

[0021] In the following description, many specific details are set forth to facilitate a full understanding of the present invention. However, the present invention may also be implemented in other ways than those described herein. Therefore, the present invention is not limited to the specific embodiments disclosed in the following specification.

[0022] Example 1: Figure 1 - Figure 3As shown, the utility model provides a multifunctional ion implanter, including an ion implanter body 1, a display screen 15 and an emergency button 14 are provided on one side of the ion implanter body 1, a transparent plate 6 is provided on one side of the display screen 15 and the emergency button 14, and metal side plates 7 are fixedly connected on both sides of the transparent plate 6, one side of one metal side plate 7 is rotatably connected to the ion implanter body 1 by a hinge, a card slot 17 is provided on one side of the ion implanter body 1, the card slot 17 is located on one side of the display screen 15, and a pull-out keyboard 16 is provided below the display screen 15, and a card strip 20 is fixedly connected on one side of the other metal side plate 7, the card strip 20 is plugged into the card slot 17, and there is an interference fit between the card strip 20 and the card slot 17. The ion implanter body 1 is the existing technology, and is internally provided with components such as an ion source, plasma, extraction component, and magnetic analysis for performing ion implantation operations. The specific components are adjusted according to usage requirements, and the pull-out keyboard 16 adopts a pull-out setting to avoid bumps.

[0023] The following is a detailed description of the specific settings and functions of this embodiment. Through the setting of the transparent plate 6, in conjunction with the two metal side panels 7, the display screen 15, the emergency button 14, the pull-out keyboard 16 and other control components are protected to avoid accidental touching of the ion implanter body 1 after data adjustment, thereby ensuring stability in use. Through the setting of the card slot 17, the closing of the transparent plate 6 is restricted by a card connection method, which is more convenient to use and does not require the use of buckles or the like for fixing. Both sides of one end of the card strip 20 are inclined designs, which can guide the card strip 20 so that the card strip 20 can be inserted into the card slot 17 to ensure stability in use.

[0024] Example 2: Figure 1 - Figure 4 As shown, a mounting groove 13 is provided on one side of the ion implanter body 1, and a magnetic block 8 is fixedly connected to the interior of the mounting groove 13. A pull-out cavity 9 is provided on one side of the lower end of the ion implanter body 1, and a water outlet pipe 18 is provided at the upper end of the pull-out cavity 9. A chute 10 is provided in the middle of both sides of the pull-out cavity 9, and a water tank 11 is provided inside the pull-out cavity 9. A rubber sheet 19 is fixedly connected to one side of the other metal side plate 7, and side limit rails 21 are fixedly connected to both sides of the water tank 11. The side limit rails 21 slide with the chute 10. Dynamic connection, one side of the water tank 11 is fixedly connected to the I-shaped handle 12, the holding part of the I-shaped handle 12 is an inclined design, the upper end of the ion implanter body 1 on one side of the processing chamber is fixedly installed with a transparent baffle 2, the interior of the processing chamber is provided with an acceleration unit 3 and a scanning disk 4, a movable door panel 5 is provided at the lower middle part of the ion implanter body 1, the middle part of one side of the water tank 11 is fixedly connected with a transparent strip 22, and a side groove 23 is opened on one side of the upper end of the water tank 11, and the length of the outlet pipe 18 is less than the depth of the side groove 23.

[0025] The effect achieved by the entire embodiment is that, through the setting of the magnetic block 8, when the transparent plate 6 is opened, the metal side plate 7 can be adsorbed to avoid the shaking of the transparent plate 6, thereby ensuring that the body is prevented from being hit and causing accidental touch when adjusting data, thereby facilitating use. Through the setting of the water tank 11, it is used to collect the water generated by the internal cooling system of the ion implanter body 1, which is convenient for water recycling. One side of the I-shaped handle 12 is set to be inclined, which can be convenient for holding and using. Through the setting of the transparent strip 22, the water level in the water tank 11 can be easily observed, and the internal water can be poured out conveniently.

[0026] The method of use and working principle of this device are as follows: when in use, insert the water tank 11 into the pull-out cavity 9, then open the transparent plate 6, adsorb the metal side plate 7 through the magnetic block 8, then pull out the pull-out keyboard 16, observe the display screen 15, perform data operations, start the ion implantation machine body 1, start the internal components, and perform ion implantation. After the data adjustment is completed, close the transparent plate 6. When the transparent plate 6 is rotating, after the card strip 20 is inserted into the card slot 17, push the transparent plate 6 and completely insert the card strip 20 into the card slot 17. After using it for a period of time, observe the water level inside the water tank 11 through the transparent strip 22. At the appropriate time, hold the industrial handle 12 to pull out the water tank 11 and pour out the internal water. It can be used for cleaning equipment and other aspects.

[0027] The above are only preferred embodiments of the present invention and are not intended to limit the present invention in any other form. Any technician familiar with the profession may use the technical content disclosed above to change or modify it into an equivalent embodiment with equivalent changes and apply it to other fields. However, any simple modification, equivalent change and modification of the above embodiment made according to the technical essence of the present invention without departing from the content of the technical solution of the present invention shall still fall within the scope of protection of the technical solution of the present invention.

Claims

1. A multifunctional ion implanter, comprising an ion implanter body (1), characterized in that: A display screen (15) and an emergency button (14) are provided on one side of the ion implanter body (1); a transparent plate (6) is provided on one side of the display screen (15) and the emergency button (14); metal side plates (7) are fixedly connected to both sides of the transparent plate (6); one side of one metal side plate (7) is rotatably connected to the ion implanter body (1) via a hinge; a card slot (17) is provided on one side of the ion implanter body (1); the card slot (17) is located on one side of the display screen (15); a drawer keyboard (16) is provided below the display screen (15); a card strip (20) is fixedly connected to one side of the other metal side plate (7); the card strip (20) is plugged into the card slot (17).

2. A multifunctional ion implanter according to claim 1, characterized in that: A mounting groove (13) is provided on one side of the ion implanter body (1), and a magnetic block (8) is fixedly connected inside the mounting groove (13).

3. The multifunctional ion implanter according to claim 1, characterized in that: A draw-out cavity (9) is provided on one side of the lower end of the ion implanter body (1), and a water outlet pipe (18) is provided at the upper end of the draw-out cavity (9).

4. The multifunctional ion implanter according to claim 3, characterized in that: A slide groove (10) is provided in the middle of both sides of the drawer cavity (9), a water storage tank (11) is provided inside the drawer cavity (9), and a rubber sheet (19) is fixedly connected to one side of the other metal side plate (7).

5. The multifunctional ion implanter according to claim 4, characterized in that: Both sides of the water tank (11) are fixedly connected with side limit rails (21), and the side limit rails (21) are slidably connected to the chute (10). One side of the water tank (11) is fixedly connected with an I-shaped handle (12), and the gripping portion of the I-shaped handle (12) is of inclined design.

6. The multifunctional ion implanter according to claim 1, characterized in that: A transparent baffle (2) is fixedly mounted on the upper end of one side of the processing chamber of the ion implanter body (1); an acceleration unit (3) and a scanning disk (4) are arranged inside the processing chamber; and a movable door panel (5) is arranged below the middle of the ion implanter body (1).

7. The multifunctional ion implanter according to claim 5, characterized in that: A transparent strip (22) is fixedly connected to the middle of one side of the water storage tank (11), a side groove (23) is opened on one side of the upper end of the water storage tank (11), and the length of the water outlet pipe (18) is less than the depth of the side groove (23).

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