Measuring equipment

Abstract

The utility model provides a measuring device. The measuring device comprises a cavity; the box cover is located at the top of the cavity, and the box cover and the cavity form a closed structure; and the driving device is used for driving the box cover to move relative to the cavity so as to open or close the cavity. The driving device drives the box cover to move relative to the cavity to open or close the cavity, the box cover does not need to be manually opened through a rope, automatic opening and closing of the cavity are achieved, the opening and closing speed of the cavity is improved, operation is convenient, time and labor are saved, and meanwhile the equipment maintenance or repair efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the field of semiconductor equipment, in particular to a measuring device. Background Art

[0002] When existing electron beam measurement equipment requires PM (equipment maintenance) or repair, the lid of the vacuum chamber must be opened using two ropes. This operation is time-consuming and labor-intensive, requiring several people to complete. This not only wastes manpower but also reduces the efficiency of equipment maintenance or repair. Utility Model Content

[0003] The purpose of the utility model is to provide a measuring device, which adopts a driving device to drive the box cover to move relative to the chamber to open the cavity, can quickly open the cavity, is easy to operate, saves time and effort, and improves the efficiency of equipment maintenance or repair.

[0004] In order to solve the above technical problems, the present invention provides a measuring device, comprising:

[0005] cavity;

[0006] A box cover is located on the top of the cavity and forms a closed structure with the cavity;

[0007] The driving device is used to drive the box cover to move relative to the cavity to open or close the cavity.

[0008] Optionally, the measuring device includes two driving devices.

[0009] Optionally, the two driving devices are located on opposite sides of the cavity.

[0010] Optionally, when the cavity is closed, the driving device is in contact with the box cover.

[0011] Optionally, grooves are provided on both sides of the bottom of the box cover; the top end of the driving device is embedded in the grooves.

[0012] Optionally, the driving device includes a cylinder.

[0013] Optionally, the measuring device further comprises a gas device for providing compressed gas to the cylinder.

[0014] Optionally, the measuring device further comprises a fixing device, and when the cavity is closed, the fixing device is used to fix the box cover and the cavity.

[0015] Optionally, the measuring device further includes a frame for supporting the cavity.

[0016] Optionally, the measurement equipment includes a measurement electron beam equipment.

[0017] Compared to existing technologies, the measuring device provided by the present invention comprises: a cavity; a lid located on top of the cavity and forming a closed structure with the cavity; and a drive device for driving the lid to move relative to the cavity to open or close the cavity. The present invention uses the drive device to drive the lid to move relative to the cavity to open or close the cavity, eliminating the need for a rope to manually open the lid. This achieves automatic opening and closing of the cavity and increases the speed of cavity opening and closing, making operation convenient, time-saving, and labor-saving, while also improving the efficiency of equipment maintenance or repair. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Those skilled in the art will appreciate that the accompanying drawings are provided for a better understanding of the present invention and do not constitute any limitation on the scope of the present invention.

[0019] Figure 1 It is a structural diagram of a measuring device provided by an embodiment of the present utility model.

[0020] Figure 2 It is a structural diagram of a measuring device provided by an embodiment of the present utility model.

[0021] Description of reference numerals:

[0022] 1- chamber; 2- box cover; 3- driving device; 4- frame; 5- fixed foot; 6- fixed block; 7- pulley; 8- fixed plate; 9- first gasket; 10- fixed spring; 11- fixed column; 12- second gasket; 13- screw; 14- gas channel; 15- gas valve; 16- vacuum pump. DETAILED DESCRIPTION

[0023] To further clarify the objectives, advantages, and features of the present invention, the present invention is further described below in conjunction with the accompanying drawings and specific embodiments. It should be noted that the drawings are highly simplified and not drawn to scale, and are intended solely to facilitate and clearly illustrate the objectives of the embodiments of the present invention. Furthermore, the structures shown in the drawings are often portions of the actual structures. In particular, different drawings may require different emphases and may use different scales.

[0024] As used in the present invention, the singular forms "a", "an" and "the" include plural objects, unless the content clearly indicates otherwise. As used in the present invention, the term "or" is generally used in a sense including "and / or", unless the content clearly indicates otherwise. As used in the present invention, the term "several" is generally used in a sense including "at least one", unless the content clearly indicates otherwise. As used in the present invention, the term "at least two" is generally used in a sense including "two or more", unless the content clearly indicates otherwise. In addition, the terms "first", "second" and "third" are used for descriptive purposes only and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined as "first", "second" and "third" may explicitly or implicitly include one or at least two of the features.

[0025] Figure 1 This is a schematic diagram of the structure of a measuring device provided by an embodiment of the present invention. Figure 2 This is a schematic diagram of the structure of the measuring device provided by an embodiment of the present invention. Figure 1 and Figure 2 As shown, the measuring device provided by the embodiment of the present invention includes: a cavity 1; a cover 2 located on the top of the cavity 1 and forming a closed structure with the cavity 1; a driving device 3 for driving the cover 2 to move relative to the cavity 1 to open or close the cavity 1. Figure 1 This is a schematic diagram of the structure when the cavity is opened. Figure 2 It is a structural schematic diagram showing that the box cover 2 covers the cavity 1, and the box cover 2 and the cavity 1 form a closed structure.

[0026] Please refer to Figure 2 As shown, when the cavity 1 is closed, the driving device 3 is in a closed state. Figure 2 to Figure 1 As shown, when the cavity 1 needs to be opened, the driving device 3 drives the box cover 2 to move upward relative to the cavity 1 to open the cavity 1, that is, the driving device 3 lifts the box cover 2 so that there is a certain distance between the box cover 2 and the cavity 1. Please refer to Figures 1 to 2 As shown, when the cavity 1 needs to be closed, the driving device 3 drives the box cover 2 to move downward relative to the cavity 1 to close the cavity 1, that is, the driving device 3 moves downward, and the box cover 2 moves downward with the driving device 3 until the box cover 2 covers the cavity 1.

[0027] The utility model drives the box cover 2 to move relative to the cavity 1 through the driving device 3 to open or close the cavity 1, and there is no need to use a rope to manually open the box cover 2, thereby realizing automatic opening and closing of the cavity 1. Compared with manually opening the box cover 2 with a rope, the speed of opening and closing the cavity 1 is improved, the operation is convenient, time and labor are saved, and the efficiency of equipment maintenance or repair is improved.

[0028] In one embodiment of the present invention, the measuring device includes two drive devices 3 located on opposite sides of the chamber 1, thereby raising or lowering the box lid 2 from opposite sides. Of course, the number of drive devices 3 may be greater than two, for example, three (if the chamber 1 is a rectangular parallelepiped, they may be located near three sides of the parallelepiped) or four (if the chamber 1 is a rectangular parallelepiped, they may be located near four sides of the parallelepiped). These drive devices 3 may be distributed at various locations around the chamber 1 to safely raise the box lid 2. The number and location of the drive devices 3 may be determined based on factors such as the size and weight of the box lid 2, as well as actual needs.

[0029] In one embodiment of the present invention, please refer to Figure 2 As shown, when the cavity 1 is closed, the driving device 3 is in contact with the box cover 2. When the cavity 1 needs to be opened, the driving device 3 directly drives the box cover 2 to move upward. In another embodiment of the present invention, when the cavity 1 is closed, the driving device 3 may not be in contact with the box cover 2. In this way, when the driving device 3 is closed, there is no contact with the box cover 2. When the cavity 1 needs to be opened, the driving device 3 itself will extend until it contacts the box cover 2 and continue to extend to lift the box cover 2.

[0030] In one embodiment of the present invention, grooves are provided on both sides of the bottom of the box cover 2, and the top of the driving device 3 is embedded in the grooves to prevent the box cover 2 from shaking or the risk of falling when the driving device 3 lifts the box cover 2. Of course, the box cover 2 can also be provided with grooves on both sides of the bottom, and the top of the driving device 3 is provided with a protrusion, and the grooves and the protrusions are embedded to fix the box cover 2 and the driving device 3 relative to each other when the box cover 2 moves upward or downward, thereby preventing the box cover 2 from shaking or the risk of falling. Of course, the box cover 2 and the driving device 3 can also be fixed in any other manner known to those skilled in the art, and this utility model is not limited to this.

[0031] In one embodiment of the present invention, the driving device 3 includes a cylinder, but is not limited thereto. The cylinder drives the box cover 2 to move relative to the cavity 1.

[0032] In one embodiment of the present invention, the measuring device further includes a gas device (not shown), which is connected to the cylinder to provide compressed gas to the cylinder, thereby achieving the up and down movement of the box cover 2. Of course, the gas device can be the original gas device of the measuring device, that is, the additional cylinder for driving the movement of the box cover 2 in the present invention can share the gas device of the original measuring device.

[0033] In one embodiment of the present invention, the measuring device further comprises a fixing device, and when the chamber 1 is closed, the fixing device is used to fix the box cover 2 and the cavity 1, so that the cavity 1 and the box cover 2 form a closed or sealed structure. Exemplarily, when the chamber 1 is closed, the box cover 2 is fixed to the cavity 1 by the fixing device. When the cavity needs to be opened for maintenance or repair, the fixing device is opened so that the fixed connection between the box cover 2 and the cavity 1 is cancelled. At this time, the driving device 3 can drive the box cover 2 to move upward relative to the cavity 1, thereby opening the cavity 1. When the maintenance or repair is completed, the driving device 3 drives the box cover 2 to move downward relative to the cavity 1. When the box cover 2 covers the cavity 1, or when the box cover 2 fits the cavity 1, the driving device 3 stops moving, and then the box cover 2 can be re-fixed to the cavity 1 using a fixing device.

[0034] In an embodiment of the present invention, the measuring device further includes a frame for supporting the cavity 1 . The measuring device can be fixed or moved via the frame, thereby facilitating the use of the measuring device.

[0035] In one embodiment of the present invention, the measuring equipment includes a measuring electron beam equipment, but is of course not limited to this. Any measuring equipment that needs to lift the box cover by a lifting rope can adopt the structure shown in the present invention, or any equipment that needs to move the box cover upward to open the cavity can adopt the structure shown in the present invention, that is, a driving device 3 is provided to drive the box cover 2 to move relative to the cavity 1 to open or close the cavity 1.

[0036] The following describes the remaining components by taking the measurement device as an electron beam measurement device as an example.

[0037] Please refer to Figure 1 and Figure 2As shown, the measuring device includes a frame 4, the cavity 1 is arranged on the frame 4, and fixed feet 5 and fixed blocks 6 are also provided at the bottom of the frame 4 (for example, four fixed feet 5 and four fixed blocks 6 are provided in this embodiment), and the fixed feet 5 and the fixed blocks 6 are in contact with the ground for fixing the measuring device. At the same time, a pulley 7 is also provided at the bottom of the frame 4 to move the measuring device. Exemplarily, when the measuring device is used to measure the wafer, or when the measuring device is idle, the pulley 7 is retracted, and the fixed feet 5 and the fixed blocks 6 are fixed to the ground so that the measuring device is fixed. When the measuring device needs to be moved to a certain position, the fixed feet 5 and the fixed blocks 6 are retracted, and the measuring device is moved by rolling the roller 7.

[0038] Please refer to Figure 1 and Figure 2 As shown, the measuring device further includes a fixed disk 8, a first gasket 9, a fixed spring 10, a fixed column 11, a second gasket 12, and a screw 13. Exemplarily, the screw 13 passes through the second gasket 12 to fix the fixed column 11 to the frame 4, and the fixed column 11 is fixedly connected to the cavity 1, thereby fixing the cavity 1 to the frame 4. The fixed spring 10 fixes the box cover 2 to the fixed disk 8 and the first gasket 9 to the fixed column 11, thereby achieving the fixation of the box cover 2 to the cavity 1. When the cavity 1 needs to be opened, it is only necessary to unscrew the fixed spring 10 to cancel the fixed connection between the box cover 2 and the cavity 1 (of course, the box cover 2 is still located on the cavity 1 at this time, but the fixed connection is canceled, and the box cover 2 can be moved).

[0039] Please refer to Figure 1 As shown, in this embodiment, fixed plates 8 are respectively provided on opposite sides of the cavity 1, and the box cover 2 is fixed to the cavity 1 through the fixed plates 8 on both sides of the cavity 1. The two driving devices are provided on the other opposite sides of the cavity 1. Please refer to Figure 2 As shown, the measuring device is provided with four fixing posts 11, and the four fixing posts 11 are provided near the four corners of the cavity 1 (taking the cavity 1 as a rectangular parallelepiped as an example). Of course, the present invention does not limit the position and number of the fixing plate 8 and the fixing posts 11.

[0040] Please refer to Figure 1As shown, the measuring device further includes a vacuum pump 16, which is disposed at the bottom of the cavity 1. The vacuum pump 16 communicates with the cavity 1 from the bottom of the cavity 1 to evacuate the cavity 1. The vacuum pump 16 is also connected to the driving device 3 (e.g., a cylinder) via a gas valve 15 and a gas pipeline 14 to supply gas to the driving device 3. The other end of the vacuum pump 16 is connected to a gas device. That is, the driving device 3 added in this embodiment can share a gas device with the original measuring device, that is, it can be operated using existing factory gas.

[0041] In one embodiment of the present invention, two drive devices 3 are located on the frame 4 on either side of the chamber 1. One end of the drive device 3 is fixed to the frame 4, and the other end is in contact with the lid 2. When the chamber 1 needs to be opened, the other end of the drive device 3 extends to lift the lid 2, causing it to move upward. Only a relatively short gas pipe 14 is required to connect the drive device to the vacuum pump 16 below the chamber 1.

[0042] The measuring device provided by the present invention only needs to add a driving device 3 on the basis of the original measuring device, that is, only the original measuring device needs to be improved. This improvement is convenient and fast, and will not affect the measuring ability of the measuring device. At the same time, existing factory gas can be used, which is safe and reliable.

[0043] In addition, the measuring equipment provided by the present invention adopts a driving device 3 to drive the box cover 2 to move to open the chamber. Compared with the operation in the prior art that requires at least 4 people to lift the box cover, only one person is needed to independently complete the cavity opening operation, which reduces the number of staff required to operate, saves cavity opening time, and improves the work efficiency of equipment maintenance or repair.

[0044] In summary, the measuring device provided by the present invention comprises: a cavity; a lid located on top of the cavity and forming a closed structure with the cavity; and a drive device for driving the lid to move relative to the cavity to open or close the cavity. The present invention uses the drive device to drive the lid to move relative to the cavity to open or close the cavity, eliminating the need for manually opening the lid with a rope. This achieves automatic opening and closing of the cavity and improves the speed of cavity opening and closing, making operation convenient, time-saving, and labor-saving, while also improving the efficiency of equipment maintenance or repair.

[0045] The above description is only a description of the preferred embodiment of the present invention, and does not limit the scope of rights of the present invention. Any person skilled in the art can make possible changes and modifications to the technical solution of the present invention by using the methods and technical contents disclosed above without departing from the spirit and scope of the present invention. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments based on the technical essence of the present invention without departing from the content of the technical solution of the present invention shall fall within the scope of protection of the technical solution of the present invention.

Claims

1. A measuring device, characterized in that: include: cavity; A box cover is located on the top of the cavity and forms a closed structure with the cavity; A driving device, used for driving the box cover to move relative to the cavity to open or close the cavity; The measuring device includes two driving devices, which are located on opposite sides of the cavity; grooves are provided on both sides of the bottom of the box cover, and the top ends of the driving devices are embedded in the grooves; the driving devices include cylinders; The measuring device further comprises a gas device for supplying compressed gas to the cylinder.

2. The measuring device according to claim 1, wherein: When the cavity is closed, the driving device is in contact with the box cover.

3. The measuring device according to claim 1, wherein: The measuring device further comprises a fixing device, and when the cavity is closed, the fixing device is used to fix the box cover and the cavity.

4. The measuring device according to claim 1, wherein: The measuring device further includes a frame for supporting the cavity.

5. The measuring device according to any one of claims 1 to 4, characterized in that: The measurement equipment includes a measurement electron beam equipment.

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