Safety indicating device for wafer transmission port of machine table

Abstract

The utility model provides a safety indicating device for a machine wafer transmission port, and belongs to the technical field of semiconductor wafer processing. The machine table wafer conveying port safety indicating device comprises a port assembly and a connecting assembly, the port assembly comprises an etching machine table, a port platform, an inductor and an indicating lamp, the connecting assembly comprises a mounting plate, a pressing sleeve and an elastic clamping piece, the mounting plate is arranged at the corner of the port platform, and the pressing sleeve is arranged on the mounting plate. By arranging the etching machine table, the port platform, the inductor and the indicator lamp, the indicator lamp can be changed according to the fact that the inductor is pressed when a wafer is placed in place, so that a worker can conveniently and quickly judge whether the wafer is placed in place or not, the requirement for the professional degree of personnel training is reduced, and the working efficiency is improved. Through the arrangement of the mounting plate, the pressing sleeve and the elastic clamping piece, the indicator lamp is mounted on the mounting plate in a clamping connection mode of the pressing sleeve and the elastic clamping piece, and disassembly, assembly, maintenance and replacement are convenient.

Description

Technical Field

[0001] The present application relates to the field of semiconductor wafer processing, and more specifically, to a safety indicator device for a wafer transfer port of a machine. Background Art

[0002] Wafers are silicon wafers used to make silicon semiconductor circuits. The starting material is silicon. High-purity polycrystalline silicon is dissolved, doped with silicon seed crystals, and then slowly pulled out to form cylindrical single crystals. Silicon ingots are then ground, polished, and sliced ​​to form silicon wafers, also known as wafers.

[0003] During the wafer processing process, a wafer box is needed to temporarily store the wafers. The etching machine that processes the wafers needs to use a robotic arm to remove the wafers in the wafer box placed at the port of the machine. However, some people manually place the wafer box at the port of the etching machine, which makes it inconvenient for personnel to quickly determine whether the position is correct. In addition, safety and accuracy training for new employees is more time-consuming, which is not conducive to overall work efficiency. Utility Model Content

[0004] In order to make up for the above shortcomings, the present application provides a machine wafer transfer port safety indication device, which aims to improve the problems raised in the above background technology.

[0005] An embodiment of the present application provides a wafer transfer port safety indicator device for a machine, including a port component and a connection component.

[0006] The port assembly includes an etching machine, a port platform, a sensor and an indicator light. The port platform is located outside the etching machine. The sensor is arranged on the top of the port platform. The indicator light is located on one side of the port platform. The sensor and the indicator light are electrically connected.

[0007] The connecting assembly includes a mounting plate, a pressing sleeve and an elastic clip. The mounting plate is arranged at the corner of the port platform, the indicator light is located between the mounting plate and the pressing sleeve, the pressing sleeve passes through the mounting plate, and the elastic clip is arranged at the end of the pressing sleeve and abuts against the mounting plate.

[0008] In a specific embodiment, a positioning bolt is provided through the mounting plate, and the positioning bolt is threadedly connected to the port platform.

[0009] In the above implementation process, positioning bolts are provided to fix the mounting plate on the port platform.

[0010] In a specific embodiment, the mounting plate is provided with a long hole, and the positioning bolt passes through the long hole.

[0011] In the above implementation process, by providing a long hole, it is not only used for passing the positioning bolt for installation and fixation, but also can be used for position adjustment, thereby improving practicality.

[0012] In a specific embodiment, the mounting plate is L-shaped, and an opening is formed on the mounting plate, through which the end of the pressing sleeve passes.

[0013] In the above implementation process, the L-shaped mounting plate can be conveniently fixed to the port platform, and the opening on the side can pass through the pressing sleeve to fix the indicator light.

[0014] In a specific embodiment, the pressing sleeve is adapted to the indicator light, and the pressing sleeve is provided with a light opening.

[0015] In the above implementation process, the light port is used to expose the light.

[0016] In a specific embodiment, the elastic clamping part includes a spring and a clamping block, the pressing sleeve is provided with a groove, the spring is arranged in the groove, one end of the clamping block is slidably arranged in the groove and connected to the spring, and the other end of the clamping block abuts against the mounting plate.

[0017] In the above implementation process, by setting a spring and a card block, a compressible spring is used, and the card block can be pressed to squeeze the spring into the groove during disassembly, so that the pressure sleeve can be removed and the maintenance indicator light can be replaced. During installation, the elastic recovery effect of the spring is relied upon to push the card block, so that the card block remains extended out of the groove and abuts against the mounting plate, thereby clamping and fixing the pressure sleeve.

[0018] In a specific embodiment, the clamping block is provided with an inclined surface at one end away from the spring.

[0019] In the above implementation process, by providing the inclined surface, it is convenient to insert the pressing sleeve through the opening during installation, and the inclined surface contacts the inner wall of the opening to squeeze the card block, which makes the installation quick.

[0020] In a specific embodiment, the port platform is provided with a placement groove, and the sensor is embedded in the placement groove.

[0021] In the above implementation process, the placement slot is used to further assist in positioning the placement of the wafer box.

[0022] Beneficial effects: The present application provides a safety indicator device for the wafer transfer port of a machine. By setting an etching machine, a port platform, a sensor and an indicator light, the indicator light can change according to the pressure on the sensor when the wafer is placed in place, so that the staff can quickly judge whether it is placed in place, and the requirements for the professional level of personnel training are reduced. By setting a mounting plate, a pressure sleeve and an elastic clip, the indicator light is installed on the mounting plate by adopting a clip-connection method of the pressure sleeve and the elastic clip, which is convenient for disassembly, assembly, maintenance and replacement. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] In order to more clearly illustrate the technical solutions of the implementation methods of the present application, the following is a brief introduction to the drawings required for use in the implementation methods. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without paying any creative work.

[0024] Figure 1 This is a schematic diagram of the structure of a safety indicator device for a wafer transfer port of a machine provided in an embodiment of the present application;

[0025] Figure 2 A schematic diagram of the structure of the port assembly provided in an embodiment of the present application;

[0026] Figure 3 A schematic diagram of the indicator light structure provided in an embodiment of the present application;

[0027] Figure 4 A schematic diagram of the mounting plate structure provided for an embodiment of the present application;

[0028] Figure 5 A schematic diagram of the compression sleeve structure provided in an embodiment of the present application;

[0029] Figure 6 A schematic diagram of the elastic clip structure provided in an embodiment of the present application.

[0030] In the figure: 100-port assembly; 110-etching machine; 120-port platform; 121-placement slot; 130-sensor; 150-indicator light; 200-connection assembly; 210-mounting plate; 211-long hole; 212-opening; 220-positioning bolt; 230-pressing sleeve; 231-groove; 240-elastic clip; 241-spring; 242-block; 243-inclined surface. DETAILED DESCRIPTION

[0031] The technical solutions in the embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments.

[0032] See also Figures 1-6 The present application provides a wafer transfer port safety indicator device for a machine platform, including a port component 100 and a connection component 200 .

[0033] See also Figure 1 、 2 and 3. The port assembly 100 includes an etching machine 110, a port platform 120, a sensor 130 and an indicator light 150. The port platform 120 is located outside the etching machine 110, the sensor 130 is arranged on the top of the port platform 120, and the indicator light 150 is located on one side of the port platform 120. The sensor 130 and the indicator light 150 are electrically connected, and the connecting line between the sensor 130 and the indicator light 150 can pass through the bottom of the port platform 120 for connection.

[0034] In a specific embodiment, the port platform 120 is provided with a placement groove 121 , and the sensor 130 is embedded in the placement groove 121 . The placement groove 121 is used to further assist in positioning the wafer box.

[0035] See also Figure 1 、 2 , 3, 4, 5 and 6, the connecting assembly 200 includes a mounting plate 210, a pressing sleeve 230 and an elastic clip 240, the mounting plate 210 is arranged at the corner of the port platform 120, the indicator light 150 is located between the mounting plate 210 and the pressing sleeve 230, the pressing sleeve 230 passes through the mounting plate 210, and the elastic clip 240 is arranged at the end of the pressing sleeve 230 and abuts against the mounting plate 210.

[0036] The mounting plate 210 is penetrated by a positioning bolt 220 , which is threadedly connected to the port platform 120 . The positioning bolt 220 is provided to fix the mounting plate 210 on the port platform 120 .

[0037] Specifically, the mounting plate 210 is provided with a long hole 211 , through which the positioning bolt 220 passes. The long hole 211 is provided, which is not only used for passing the positioning bolt 220 for installation and fixation, but also can be used for adjusting the position, thereby improving practicality.

[0038] In a specific embodiment, the mounting plate 210 is L-shaped, and an opening 212 is provided on the mounting plate 210. The end of the pressing sleeve 230 passes through the opening 212. The L-shaped mounting plate 210 can be conveniently fixed to the port platform 120. At the same time, the opening 212 on the side can pass through the pressing sleeve 230 to fix the indicator light 150.

[0039] It should be noted that the pressing sleeve 230 is adapted to the indicator light 150 , and the pressing sleeve 230 is provided with a light opening for exposing the light.

[0040] In this embodiment, the elastic clamping member 240 includes a spring 241 and a clamping block 242. The pressing sleeve 230 is provided with a groove 231. The spring 241 is arranged in the groove 231. One end of the clamping block 242 is slidably arranged in the groove 231 and is connected to the spring 241. The other end of the clamping block 242 abuts against the mounting plate 210. By arranging the spring 241 and the clamping block 242, the compressible spring 241 can be used to press the clamping block 242 to squeeze the spring 241 into the groove 231 during disassembly, so that the pressing sleeve 230 can be removed and the maintenance indicator light 150 can be replaced. During installation, the elastic recovery effect of the spring 241 is relied upon to push the clamping block 242, so that the clamping block 242 remains extended out of the groove 231 and abuts against the mounting plate 210, thereby clamping and fixing the pressing sleeve 230.

[0041] The end of the clamping block 242 away from the spring 241 is provided with an inclined surface 243 . The end of the clamping block 242 away from the spring 241 is provided with an inclined surface 243 .

[0042] It should be noted that there are many kinds of machines in semiconductor processing factories in the art, and this embodiment is not limited to a specific machine.

[0043] The working principle of the wafer transfer port safety indicator device of the machine is as follows: during use, the staff transfers the wafer box to the port platform 120. When it is placed in place, the front end of the wafer box is aligned with the tail end of the machine port and pressed on the sensor 130. The indicator light 150 receives the signal from the sensor 130, and the indicator light 150 lights up green. The staff can quickly judge that the wafer box is placed in place, which not only ensures the accuracy of the material picking of the robot arm in the machine, but also reduces the difficulty of operation for the staff and reduces the professional training requirements for personnel. At the same time, when the indicator light 150 is damaged or specially replaced, the card block 242 can be pressed to squeeze the spring 24 1 enters the groove 231, so that the pressing sleeve 230 can be removed and the maintenance indicator light 150 can be replaced. During installation, the new indicator light 150 passes through the pressing sleeve 230. When the pressing sleeve 230 is inserted through the opening 212, the inclined surface 243 contacts the inner wall of the opening 212, thereby squeezing the clamping block 242, and the clamping block 242 enters the groove 231. After the clamping block 242 passes the opening 212, the elastic recovery effect of the spring 241 pushes the clamping block 242, so that the clamping block 242 keeps the part extending out of the groove 231 abutting against the mounting plate 210, thereby clamping and fixing the pressing sleeve 230, and facilitating disassembly, assembly, maintenance and replacement.

[0044] It should be noted that the specific models and specifications of the etching machine 110, sensor 130 and indicator light 150 need to be selected and determined based on the actual specifications of the device. The specific selection calculation method adopts the existing technology in this field, so it will not be described in detail.

[0045] The power supply and principles of the etching machine 110 , the sensor 130 and the indicator light 150 are clear to those skilled in the art and will not be described in detail here.

[0046] It will be apparent to those skilled in the art that the present application is not limited to the details of the exemplary embodiments described above, and that the present application can be implemented in other specific forms without departing from the spirit or essential characteristics of the present application. Therefore, the embodiments should be considered in all respects as illustrative and non-restrictive, and the scope of the present application is defined by the appended claims, not the foregoing description, and all variations within the meaning and range of equivalents of the claims are intended to be included therein. Any reference sign in a claim should not be construed as limiting the claim to which it relates.

Claims

1. A wafer transfer port safety indicator device for a machine, characterized in that: include A port assembly (100), the port assembly (100) comprising an etching machine (110), a port platform (120), a sensor (130) and an indicator light (150), the port platform (120) being located outside the etching machine (110), the sensor (130) being arranged on the top of the port platform (120), the indicator light (150) being located on one side of the port platform (120), and the sensor (130) and the indicator light (150) being electrically connected; A connecting assembly (200) includes a mounting plate (210), a pressing sleeve (230) and an elastic clamping member (240); the mounting plate (210) is arranged at a corner of the port platform (120); the indicator light (150) is located between the mounting plate (210) and the pressing sleeve (230); the pressing sleeve (230) passes through the mounting plate (210); and the elastic clamping member (240) is arranged at an end of the pressing sleeve (230) and abuts against the mounting plate (210).

2. The wafer transfer port safety indicator device according to claim 1, characterized in that: The mounting plate (210) is provided with a positioning bolt (220) running through it, and the positioning bolt (220) is threadedly connected to the port platform (120).

3. The wafer transfer port safety indicator device according to claim 2, characterized in that: The mounting plate (210) is provided with a long hole (211), and the positioning bolt (220) passes through the long hole (211).

4. The wafer transfer port safety indicator device according to claim 1, wherein: The mounting plate (210) is L-shaped, and an opening (212) is provided on the mounting plate (210), and an end portion of the pressing sleeve (230) passes through the opening (212).

5. The wafer transfer port safety indicator device according to claim 1, wherein: The pressing sleeve (230) is adapted to the indicator light (150), and the pressing sleeve (230) is provided with a light opening.

6. The wafer transfer port safety indicator device according to claim 1, characterized in that: The elastic clamping member (240) includes a spring (241) and a clamping block (242); the pressing sleeve (230) is provided with a groove (231); the spring (241) is arranged in the groove (231); one end of the clamping block (242) is slidably arranged in the groove (231) and connected to the spring (241); the other end of the clamping block (242) abuts against the mounting plate (210).

7. The wafer transfer port safety indicator device according to claim 6, characterized in that: An inclined surface (243) is provided on one end of the clamping block (242) away from the spring (241).

8. The wafer transfer port safety indicator device according to claim 1, characterized in that: The port platform (120) is provided with a placement groove (121), and the sensor (130) is embedded in the placement groove (121).

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