Sheet conveying system and sheet production line

Abstract

The utility model relates to the technical field of semiconductors and photovoltaics, in particular to a sheet conveying system and a sheet production line, and solves the problem that the placement direction of fed and discharged sheets cannot be accurately and rapidly adjusted in the prior art. The sheet carrying device comprises a first conveying mechanism with a first bearing area, a second conveying mechanism with a second bearing area and a carrying mechanism, and the carrying mechanism is configured to carry sheets in the first bearing area to a process position and carry sheets in the process position to the second bearing area; at least one of the first conveying mechanism and the second conveying mechanism can rotate on the horizontal plane, so that the placing direction of the sheets located in the first bearing area and the placing direction of the sheets located in the second bearing area are adjusted to be the same. According to the sheet conveying system and the sheet production line, the placing direction of the sheet can be accurately and rapidly adjusted.

Description

Technical Field

[0001] The present disclosure relates to the fields of semiconductor and photovoltaic technology, and in particular to a sheet material transmission system and a sheet material production line. Background Art

[0002] With the development of photovoltaic technology, solar cells are widely used in various fields. When processing solar cells in different processes, especially laser grooving and printing, different requirements are placed on the placement direction of the processed solar cells, which requires adjustment.

[0003] In order to adjust the placement direction of the solar cells being processed, a rotating device is installed on the work platform for processing the solar cells to adjust the placement direction of the solar cells during processing, or a rotating device is installed on the transport mechanism that transports the solar cells to the work platform to adjust the placement direction of the solar cells during processing. However, if the placement direction of the solar cells when loading and unloading the solar cells from the work platform also varies, this device cannot meet the requirements or cannot accurately and quickly adjust them. Utility Model Content

[0004] In view of this, the embodiments of the present disclosure provide a sheet material conveying system and a sheet material production line to solve the problem in the related art that the placement direction of solar cell sheets cannot be adjusted accurately and quickly during loading and unloading.

[0005] In the first aspect, an embodiment of the present disclosure provides a sheet conveying system, which is configured to transport or move sheets away from a process position, and the sheet conveying system includes: one or more first conveying mechanisms, each first conveying mechanism having a first bearing area for carrying sheets, and the sheets are moved into the first bearing area along the first conveying direction; one or more second conveying mechanisms, which are arranged on one side of the first conveying mechanism along the first direction, each second conveying mechanism having a second bearing area for carrying sheets, and the sheets are moved out of the second bearing area along the second conveying direction, the first conveying direction and the second conveying direction are opposite and perpendicular to the first direction in the horizontal plane; a conveying mechanism, which is arranged between the first conveying mechanism and the second conveying mechanism along the first direction, and the conveying mechanism is configured to convey the sheets in the first bearing area to the process position, and to convey the sheets in the process position to the second bearing area; wherein, at least one of the first conveying mechanism and the second conveying mechanism can rotate in the horizontal plane so that the placement direction of the sheets located in the first bearing area and the placement direction of the sheets located in the second bearing area are adjusted to be the same.

[0006] In some embodiments, it also includes: a first rotating mechanism, connected to one or more first transmission mechanisms, the first rotating mechanism is configured to drive the first transmission mechanism to rotate a first angle in the horizontal plane; and / or, a second rotating mechanism, connected to one or more second transmission mechanisms, the second rotating mechanism is configured to drive the second transmission mechanism to rotate a second angle in the horizontal plane, and the first angle and the second angle are complementary to each other.

[0007] In some embodiments, the rotation direction of the first rotating mechanism and the second rotating mechanism is the same, the first angle and the second angle are the same, the first angle is 90°, or the first angle and the second angle are different, one of the first angle and the second angle is 180° and the other is 0°.

[0008] In some embodiments, when the sheet transport system also includes a first rotating mechanism, the first rotating mechanism includes: a first turntable connected to the first transport mechanism; a first driving member, each first driving member is connected to a first turntable, and the first driving member is configured to drive the first turntable to rotate in a horizontal plane, thereby driving the first transport mechanism on the first turntable to rotate; when the sheet transport system also includes a second rotating mechanism, the second rotating mechanism includes: a second turntable connected to the second transport mechanism; a second driving member, each second driving member is connected to a second turntable, and the second driving member is configured to drive the second turntable to rotate in a horizontal plane, thereby driving the second transport mechanism on the second turntable to rotate.

[0009] In some embodiments, when the sheet material transmission system also includes a first rotating mechanism, multiple first transmission mechanisms are arranged in sequence along the first transmission direction, and the first rotating mechanism includes: two or more first turntables, each first turntable is connected to a first transmission mechanism; a first connecting component, connecting multiple first turntables, and the first connecting component is configured to make the multiple connected first turntables move simultaneously; a first driving member, connected to the first connecting component or any first turntable, and the first driving member is configured to make the multiple first turntables rotate synchronously in the horizontal plane under the drive of the first connecting component; when the sheet material transmission system also includes a second rotating mechanism, multiple second transmission mechanisms are arranged in sequence along the second transmission direction, and the second rotating mechanism includes: two or more second turntables, each second turntable is connected to a second transmission mechanism; a second connecting component, connecting multiple second turntables, and the second connecting component is configured to make the multiple connected second turntables move simultaneously; a second driving member, connected to the second connecting component or any second turntable, and the second driving member is configured to make the multiple second turntables rotate synchronously in the horizontal plane under the drive of the second connecting component.

[0010] In some embodiments, the first conveying mechanism and the second conveying mechanism both include: at least one conveyor belt group, the conveyor belt group includes two or more conveyor belts arranged at intervals along a first direction, the conveying directions of the two or more conveyor belts are the same, and each conveyor belt is provided with a plurality of adsorption holes evenly distributed along the extension direction of the conveyor belt; an adsorption part, including at least one vacuum port, the vacuum port is connected to the adsorption holes on the upper side of the conveyor belt to adsorb the sheet on the conveyor belt; a third driving part, connecting the two or more conveyor belts, and driving the multiple conveyor belts to move synchronously.

[0011] In some embodiments, there are two conveyor belt sets, the two conveyor belt sets are spaced apart along the first direction, and the third driving member is respectively connected to the two conveyor belt sets to enable the two conveyor belt sets to move synchronously.

[0012] In some embodiments, the transport mechanism further includes: a base, the base is rotatably connected to a rotating shaft, and the rotating shaft is configured to be able to rotate in a horizontal plane; one or more support rods, connected to the rotating shaft; one or more grabbing components, each support rod is provided with one or more grabbing components, each grabbing component includes one or more sub-grabbing components, and the sub-grabbing components in each grabbing component respectively pick up and place sheets in the same load-bearing area.

[0013] In some embodiments, the transport mechanism also includes: a support plate connected to the end of the support rod away from the rotating shaft, the support plate includes a first sub-support plate and a second sub-support plate arranged symmetrically in the horizontal plane relative to the support rod, the first sub-support plate and / or the second sub-support plate are detachably connected to a grabbing assembly, and the sub-grabbing assemblies in the grabbing assembly are symmetrical relative to the support rod.

[0014] In some embodiments, the number of support rods includes two, and the central axes of the two support rods have a 90° angle in the horizontal plane. When the grabbing assembly connected to one of the support rods is located above the first conveying mechanism to grab the sheet in the first loading area, the grabbing assembly connected to the other support rod is located above the process position to grab the sheet in the process position. After the rotating shaft rotates the two support rods 90°, one of the support rods drives the sheet grabbed from the first loading area to move above the process position to place the sheet in the process position, and the other support rod drives the processed sheet grabbed from the process position to move above the second conveying mechanism to place the processed sheet in the second loading area.

[0015] In the second aspect, the embodiment of the present disclosure also provides a sheet production line, including: a process table, which is provided with at least one process position, and the sheet is processed at the process position; the sheet conveying system described above, the sheet conveying system is arranged on one side of the process table, and the sheet conveying system is configured to transport the sheet to the process position, or to transport the sheet away from the process position, a loading mechanism, which is arranged on one side of the first conveying mechanism along the first conveying direction; and an unloading mechanism, which is arranged on one side of the second conveying mechanism along the second conveying direction.

[0016] The embodiments of the present disclosure provide a sheet material conveying system and a sheet material production line, which enable at least one of the first conveying mechanism and the second conveying mechanism to rotate in the horizontal plane, so as to adjust the placement direction of the substrate in the first supporting area and the placement direction of the substrate in the second supporting area by controlling the rotation of the first conveying mechanism and the second conveying mechanism. The placement direction of the silicon wafer can be adjusted to be the same conveniently, accurately and quickly, thereby keeping the placement direction of the substrate during feeding and the placement direction during discharging the same, so that the silicon wafer can continue to move along the assembly line without changing direction. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] The above and other purposes, features, and advantages of the present disclosure will become more apparent through a more detailed description of the embodiments of the present disclosure in conjunction with the accompanying drawings. The accompanying drawings are intended to provide a further understanding of the embodiments of the present disclosure and constitute a part of the specification. Together with the embodiments of the present disclosure, they are used to explain the present disclosure and are not intended to limit the present disclosure. In the drawings, the same reference numerals generally represent the same components or steps.

[0018] Figure 1 Shown is a schematic diagram of the arrangement of a sheet material transport system provided by an embodiment of the present disclosure in a sheet material production line.

[0019] Figure 2 Shown is a schematic diagram of a sheet material transport system provided by an embodiment of the present disclosure.

[0020] Figure 3 Shown is a schematic diagram of the cooperation between a sheet material transport system and a laser slotting device provided in one embodiment of the present disclosure.

[0021] Figure 4 Shown is a schematic diagram of a first rotating mechanism in a sheet material transport system provided by an embodiment of the present disclosure.

[0022] Figure 5 Shown is a schematic diagram of a first rotating mechanism in a sheet material transport system provided by another embodiment of the present disclosure.

[0023] Figure 6 Shown is a schematic diagram of a first transport mechanism in a sheet transport system provided by an embodiment of the present disclosure.

[0024] Figure 7 Shown is a schematic diagram of a first transport mechanism in a sheet transport system provided in another embodiment of the present disclosure.

[0025] Figure 8 Shown is a schematic diagram of a transport mechanism in a sheet material transport system provided by an embodiment of the present disclosure.

[0026] Figure 9 Shown is a schematic diagram of a sheet material transport system provided by an embodiment of the present disclosure.

[0027] Reference numerals:

[0028] 100. Sheet production line; 10. Processing area; 101. First process area; 102. Second process area; 103. Third process area; 1. Sheet transport system; 11. First transport mechanism; 11A. First carrying area; 111. Transport belt assembly; 1111. Transport belt; 1112. Exhaust port; 1113. Adsorption hole; 112. First rotating mechanism; 1121. First turntable; 1121a. Synchronous belt; 1121b. Driving wheel; 113. Third driving member; 12. Second transport mechanism; 12A. Second carrying area; 122. Second rotating mechanism; 13. Transport mechanism; 131. Base; 1 311. rotating shaft; 132. support rod; 133. grabbing assembly; 1331. sub-grabbing assembly; 134. support plate; 1341. first sub-support plate; 1342. second sub-support plate; 14. loading mechanism; 141. cache position; 142. aligning position; 143. sheet loading and unloading position; 15. unloading mechanism; 2. laser slotting equipment; 21. process position; 211. first process position; 212. second process position; 22. rotating workbench; 20. assembly line; 30. substrate; 30a. first end; 301. half sheet; Q, transport direction; R, first transport direction; S, second transport direction; X, second direction; Y, first direction. DETAILED DESCRIPTION

[0029] The following will clearly and completely describe the technical solutions in the embodiments of the present disclosure in conjunction with the accompanying drawings. Obviously, the described embodiments are only part of the embodiments of the present disclosure, not all of the embodiments. All other embodiments obtained by ordinary technicians in this field based on the embodiments of the present disclosure without making any creative efforts shall fall within the scope of protection of the present disclosure.

[0030] The present disclosure provides a sheet material transport system. Figures 1 to 3 The sheet material transport system 1 is applied to a sheet material production line 100 , which has a process position 21 . The sheet material transport system 1 is configured to transport or move the sheet material away from the process position 21 .

[0031] Optionally, the sheet material can be a solar cell, which needs to be processed through different processes to finally become a usable solar cell product. The shape of the solar cell can be, for example, a rectangle, a square with a direction mark, and a circle with a direction mark, etc., without specific limitation. In the embodiment of the present disclosure, for ease of description, the solar cell is set to be rectangular, and the rectangular solar cell is referred to as a "substrate". The substrate 30 can be prepared, for example, with silicon material as the main material of the substrate, or with perovskite material as the main material of the substrate, without specific limitation.

[0032] The sheet production line 100 has a plurality of different process processing areas 10, such as a first process processing area 101, a second process processing area 102, and a third process processing area 103 arranged in sequence along the transport direction Q of the assembly line 20. Each process processing area 10 is provided with corresponding process processing equipment, and the process processing equipment is provided with at least one process position 21, so that when the substrate 30 flows to a certain process processing area 10, the substrate 30 can be further transferred to the process position 21 of the process processing equipment for corresponding process processing to complete the corresponding processing step. The process processing area 10 can be, for example, a laser grooving process processing area, a printing process processing area, etc. For ease of understanding, the embodiment of the present disclosure is described in detail by taking the process processing area 10 as a laser grooving process processing area as an example.

[0033] A sheet material transport system 1 is provided in the laser slotting process area. The sheet material transport system 1 is configured to transport the substrate 30 to the process station 21 of the laser slotting equipment 2 and to remove the substrate 30 processed by the laser slotting equipment 2 from the process station 21. It is understood that the laser slotting equipment 2 may include a rotary table 22 having a first process station 211 and a second process station 212 disposed opposite each other. The first process station 211 may be, for example, a photographing process station, and the second process station 212 may be, for example, a laser slotting process station. The sheet material transport system 1 is configured to transport the substrate 30 to be laser slotted to the first process station 211. After photographing, the rotary table 22 is rotated 180°, and the substrate 30 in the first process station 211 is moved to the second process station 212 for laser drilling. After completion, the rotary table 22 is controlled to rotate another 180°, returning the laser-punched substrate 30 to the first process position 211. The sheet transport system 1 then transports the laser-punched substrate 30 away from the first process position 211. It is understood that the process positions 21 arranged on the rotary table 22 of the laser slotting equipment 2 may also be arranged in other forms, which are not specifically limited.

[0034] Optionally, each process position 21 can place multiple substrates 30 at the same time. The sheet transport system 1 can transport multiple substrates 30 to the process position 21 at the same time, and can transport multiple substrates 30 away from the process position 21 at the same time. It can be adaptively adjusted according to actual needs without specific limitation.

[0035] The sheet material transmission system 1 includes a first transmission mechanism 11, a second transmission mechanism 12 and a transport mechanism 13. The first transmission mechanism 11 has a first carrying area 11A for carrying the substrate 30. The first transmission mechanism 11 has a first transmission direction R. The substrate 30 is moved from the assembly line 20 along the first transmission direction R into the first carrying area 11A; the second transmission mechanism 12 is arranged on one side of the first transmission mechanism 11 along the first direction Y. It has a second carrying area 12A for carrying the substrate 30. The second transmission mechanism 12 has a second transmission direction S. The substrate 30 is moved out of the second carrying area 12A along the second transmission direction S and returns to the assembly line 20. The transport direction R is opposite to the second transport direction S and is perpendicular to the first direction Y in the horizontal plane; the transport mechanism 13 is arranged between the first transport mechanism 11 and the second transport mechanism 12 along the first direction Y, and the transport mechanism 13 is configured to transport the substrate 30 in the first carrying area 11A to the process position 21, and to transport the substrate 30 in the process position 21 to the second carrying area 12A; wherein, at least one of the first transport mechanism 11 and the second transport mechanism 12 can be rotated in the horizontal plane so that the placement direction of the substrate 30 located in the first carrying area 11A and the placement direction of the substrate 30 located in the second carrying area 12A are adjusted to be the same.

[0036] It is understandable that Figure 1 The direction indicated by the middle arrow Q is the transport direction Q of the substrate 30 on the assembly line 20. When the substrate 30 moves along the transport direction Q to the corresponding process processing area 10, the substrate 30 is transferred to the sheet conveying system 1 and moved into the first supporting area 11A of the first conveying mechanism 11 via the loading mechanism 14 along the first transport direction R (also known as the feed direction). The conveying mechanism 13 conveys the substrate 30 processed at the process station 21 to the second supporting area 12A of the second conveying mechanism 12. The substrate 30 in the second supporting area 12A is removed along the second transport direction S (also known as the discharge direction) via the unloading mechanism 15 and then returned to the assembly line 20 to continue moving along the transport direction Q to the next process processing area 10. For square substrates 30, it is necessary to ensure that the feed direction and discharge direction of the substrate 30 are consistent so that the placement direction of the substrate 30 on the assembly line 20 remains consistent before and after processing in the process processing area 10.

[0037] Optionally, the first conveying direction R is parallel to the second direction X, and the first direction Y and the second direction X are perpendicular to each other. The laser slotting process area is located on one side of the assembly line 20 along the second direction X, and the laser slotting equipment 2 is located on a side of the sheet conveying system 1 away from the assembly line 20 along the second direction X. The first conveying mechanism 11, the second conveying mechanism 12, and the laser slotting equipment 2 form a U-shape, and the conveying mechanism 13 is located within the enclosed U-shape, that is, the first conveying mechanism 11, the second conveying mechanism 12, and the laser slotting equipment 2 are arranged around the conveying mechanism 13, and the first process position 211 of the laser slotting equipment 2 faces the conveying mechanism 13.

[0038] Optionally, the number of the first conveying mechanism 11 and the second conveying mechanism 12 provided may be one, or two or more, and may be adaptively adjusted according to actual needs. When the first conveying mechanism 11 and the second conveying mechanism 12 are provided as a plurality of the same number, the plurality of first conveying mechanisms 11 and the plurality of second conveying mechanisms 12 are respectively arranged in sequence along the second direction X, and the transport mechanism 13 is capable of simultaneously transporting the substrates 30 on the plurality of first conveying mechanisms 11 to the first process position 211, and is capable of simultaneously transporting the plurality of substrates 30 on the first process position 211 to the corresponding plurality of second conveying mechanisms 12. In the embodiment of the present disclosure, the first conveying mechanism 11 and the second conveying mechanism 12 are both provided as two. At this time, the first process position 211 and the second process position 212 of the laser slotting equipment 2 are respectively provided with two sub-process positions arranged along the first direction Y to correspond to the two substrates 30 transported simultaneously.

[0039] In the embodiment of the present disclosure, at least one of the first conveying mechanism 11 and the second conveying mechanism 12 is enabled to rotate in a horizontal plane, so that the placement direction of the substrate 30 in the first supporting area 11A and the placement direction of the second supporting area 12A can be adjusted by controlling the rotation of the first conveying mechanism 11 and the second conveying mechanism 12. The placement direction of the silicon wafer can be adjusted to be the same conveniently, accurately and quickly, thereby keeping the placement direction of the substrate 30 during feeding and the placement direction during discharging the same, so that the silicon wafer can continue to move along the assembly line 20 without changing direction.

[0040] In some embodiments, only the first transmission mechanism 11 can rotate in the horizontal plane. The sheet transmission system 1 may include a first rotating mechanism 112, which is connected to one or more first transmission mechanisms 11, and the first rotating mechanism 112 is configured to drive the first transmission mechanism 11 to rotate a first angle in the horizontal plane. The first rotating mechanism 112 is set up so that the first transmission mechanism 11 can be accurately and quickly rotated to the desired first angle. It can be understood that after the first rotating mechanism 112 rotates the first transmission mechanism 11 by the first angle, the placement direction of the rotated first bearing area 11A and the placement direction of the second bearing area 12A are adjusted to be the same. At this time, the first angle can be selected according to actual needs. For example, the first angle can be 180°, which is not specifically limited.

[0041] In some embodiments, only the second transport mechanism 12 is capable of rotating in the horizontal plane. The sheet transport system 1 includes a second rotation mechanism 122, which is connected to one or more second transport mechanisms 12. The second rotation mechanism 122 is configured to rotate the second transport mechanisms 12 in the horizontal plane by a second angle, such that the substrates 30 carried by the second loading area 12A are placed in the same orientation as the substrates 30 carried by the first loading area 11A. Similarly, the second angle can be selected based on actual needs. For example, the second angle can be 180°, without specific limitation.

[0042] In some embodiments, the first transmission mechanism 11 and the second transmission mechanism 12 are both capable of rotating in the horizontal plane. The sheet transport system 1 includes a first rotating mechanism 112 and a second rotating mechanism 122, which are respectively connected to one or more first transmission mechanisms 11 and one or more second transmission mechanisms 12. The first rotating mechanism 112 is configured to drive the first transmission mechanism 11 to rotate in the horizontal plane by a first angle, and the second rotating mechanism 122 is configured to drive the second transmission mechanism 12 to rotate in the horizontal plane by a second angle, the second angle being complementary to the first angle. The rotation of the first rotating mechanism 112 and the second rotating mechanism 122 can respectively adjust the placement direction of the substrates 30 placed in the first carrying area 11A and the second carrying area 12A, so that the placement direction of the substrates 30 placed in the two carrying areas can be accurately and quickly adjusted to be the same. The following describes the specific structure of the sheet transport system 1 in detail, taking the sheet transport system 1 including the first rotating mechanism 112 and the second rotating mechanism 122 as an example.

[0043] It should be emphasized that, in the cooperation between the first rotating mechanism 112 and the second rotating mechanism 122 and the first transmission mechanism 11 and the second transmission mechanism 12, respectively, when the first transmission mechanism 11 is set to two or more, the first rotating mechanism 112 can drive the two or more first transmission mechanisms 11 to rotate as a whole in the horizontal plane to a certain desired angle, and the first rotating mechanism 112 can also drive each first transmission mechanism 11 to rotate around its own center line in the horizontal plane to a certain desired angle. Similarly, when the second transmission mechanism 12 is set to two or more, the second rotating mechanism 122 can also drive multiple second transmission mechanisms 12 to rotate as a whole, or can cause multiple second transmission mechanisms 12 to rotate individually. It can be adaptively adjusted according to actual needs and is not specifically limited. In the embodiment of the present disclosure, the first rotating mechanism 112 and the second rotating mechanism 122 are set to a cooperation structure that causes the two first transmission mechanisms 11 to rotate individually and the two second transmission mechanisms 12 to rotate individually.

[0044] It is understandable that if Figure 3 As shown by the dotted circle arrow in the first transmission mechanism 11, the first rotating mechanism 112 can drive each first transmission mechanism 11 to rotate around the dotted circle with its own center. The direction shown by the arrow is only an exemplary direction of rotation. It can also rotate in the opposite direction of the arrow, that is, it can rotate clockwise or counterclockwise. The first rotation angle can be adaptively adjusted according to the specific requirements of the placement direction of the substrate 30 during feeding and unloading. As long as the placement direction of the substrate 30 during feeding and unloading is the same, no specific limitation is made. It should be emphasized that Figure 3 The placement direction of the middle substrate 30 is a schematic diagram after at least one of the first conveying mechanism 11 and the second conveying mechanism 12 is rotated, and the placement direction of the substrate 30 is consistent during loading and unloading.

[0045] Continue as Figure 3 As shown by the dotted circle arrow in the second transmission mechanism 12, the second rotating mechanism 122 can drive the second transmission mechanism 12 to rotate around the dotted circle with its own center. The direction shown by the arrow is only an exemplary direction of rotation. It can also rotate in the opposite direction of the arrow, that is, it can rotate clockwise or counterclockwise, and the second rotation angle can be adaptively adjusted according to the specific requirements of the placement direction of the substrate 30 during feeding and unloading. As long as the placement direction of the substrate 30 during feeding and unloading is the same, no specific limitation is made.

[0046] Specifically, a rectangular substrate 30 is transported along the first transport direction R into the first supporting area 11A, with the length of the substrate 30 parallel to the second direction X. The end of the substrate 30 facing the laser slotting apparatus 2 serves as the first end 30a, and the opposite end serves as the second end. When the substrate 30 is transported by the transport mechanism 13 to the process station 21 and then to the second supporting area 12A of the second transport mechanism 12, the length of the substrate 30 in the second supporting area 12A may not be parallel to the second direction X, or it may be parallel to the second direction X, but the first end 30a of the substrate 30 may be located away from the laser slotting apparatus 2, resulting in inconsistent placement orientations of the substrate 30 in the first supporting area 11A and the second supporting area 12A. In this case, each first transport mechanism 11 can be controlled to rotate by a first angle, and each second transport mechanism 12 by a second angle, so that the first ends 30a of both substrates 30 ultimately face the laser slotting apparatus 2 and are parallel to the second direction X, thereby aligning the placement orientations of the substrates 30 in the two supporting areas. This can be adjusted adaptively based on specific needs and is not specifically limited.

[0047] Optionally, the first rotating mechanism 112 and the second rotating mechanism 122 have the same rotation direction, the first angle and the second angle are the same, and both are 90°, or the first angle and the second angle are different, one of the first angle and the second angle is 180° and the other is 0°. Adaptive adjustment can be made according to actual needs without specific limitation.

[0048] In some embodiments, as Figure 2 and Figure 3 When the sheet transport system further includes a first rotating mechanism 112, the first rotating mechanism 112 includes one or more first turntables and one or more first driving members. Each first turntable is connected to a first transport mechanism 11, and each first driving member is connected to a first turntable. The first driving member is configured to drive the first turntable to rotate in a horizontal plane, thereby driving the first transport mechanism 11 on the first turntable to rotate. The coordinated first driving member and first turntable enable relatively precise and rapid rotation of each first transport mechanism 11, thereby improving the control accuracy of adjusting the placement direction of the substrate 30 in the first loading area 11A.

[0049] In some embodiments, the second rotation mechanism 122 includes one or more second turntables and one or more second driving members. Each second turntable is connected to the second transmission mechanism 12, and each second driving member is connected to a second turntable. The second driving member is configured to drive the second turntable to rotate in a horizontal plane, thereby driving the second transmission mechanism 12 on the second turntable to rotate. The coordinated second driving member and second turntable can achieve relatively precise and rapid rotation of each second transmission mechanism 12, thereby improving the control accuracy of the placement direction adjustment of the substrate 30 in the second loading area 12A.

[0050] It is understood that the structure of the second rotating mechanism 122 can be configured to be identical to that of the first rotating mechanism 112, differing only in the direction and angle of rotation. The specific matching structure of the turntable and the driving member in the first rotating mechanism 112 and the second rotating mechanism 122 can refer to conventional rotating components and will not be further described.

[0051] Optionally, when there are multiple first transmission mechanisms 11, the first turntables are correspondingly set to the same number as the first transmission mechanisms 11, so that each first turntable is connected to a first transmission mechanism 11; when there are multiple second transmission mechanisms 12, the second turntables are correspondingly set to the same number as the second transmission mechanisms 12, so that each second turntable is connected to a second transmission mechanism 12, so that through this matching structure, the multiple first transmission mechanisms 11 can each rotate about the axis of the first turntable to which they are connected, and the multiple second transmission mechanisms 12 can each rotate about the axis of the second turntable to which they are connected.

[0052] Specifically, if Figure 4 and Figure 5 Taking the first rotating mechanism 112 provided in the first transmission mechanism 11 as an example, the first turntables 1121 connected to the two first transmission mechanisms 11 can be driven by a common first driving member, and the first turntables 1121 can be connected by a first connecting component, so that the two first transmission mechanisms 11 can be driven by a common first driving member to achieve synchronous rotation. For example, Figure 4 The two first turntables 1121 can be connected by a first connecting assembly consisting of a synchronous belt 1121a, a rack, a connecting rod or a transmission wheel, and the first driving member drives the rotation of one of the first turntables 1121 to make the other first turntable 1121 rotate synchronously, or, as Figure 5 A driving wheel 1121b can be set between the two first turntables 1121, and a first driving member is used to drive the driving wheel 1121b to rotate. The driving wheel 1121b is connected to the two first turntables 1121 respectively through a synchronous belt, a rack, a connecting rod or a transmission wheel to form a first connecting assembly. The first driving member drives the driving wheel 1121b to rotate, so that the two first turntables 1121 can rotate synchronously. The appropriate solution can be selected according to needs and is not specifically limited. Similarly, the second turntables connected by the two second transmission mechanisms 12 can share a second driving member for driving. Multiple second turntables can be connected through a second connecting assembly so that multiple second turntables can rotate synchronously. No further details will be given.

[0053] In some embodiments, as Figure 6 and Figure 7The first transmission mechanism 11 and the second transmission mechanism 12 each include at least one set of transmission belt groups 111. The transmission belt group 111 includes two or more transmission belts 1111 arranged at intervals along the first direction Y. The transmission directions of the two or more transmission belts 1111 are the same. The transmission belts 1111 are configured to carry the substrate 30, and each transmission belt 1111 is provided with a plurality of adsorption holes 1113 uniformly arranged along the extension direction of the transmission belt 1111. The first transmission belt group 111 also includes: an adsorption member and a third driving member 113. The adsorption member includes at least one suction port 1112. The suction port 1112 is connected to the adsorption holes 1113 on the upper side of the transmission belt 1111 to adsorb the substrate 30 on the transmission belt 1111. The third driving member 113 connects two or more transmission belts 1111 and drives the multiple transmission belts 1111 to move synchronously. The multiple transmission belts 1111 can improve the stability of the substrate 30 when it is transmitted on the transmission belt, and prevent the substrate 30 from shifting during the transmission process. Furthermore, by cooperating with the adsorption member and the adsorption hole 1113, after the substrate 30 moves to the corresponding supporting area, the adsorption member can adsorb the substrate 30 through the adsorption hole 1113 and stop the conveyor 1111 from moving. The substrate 30 is then adsorbed in the corresponding supporting area. When the substrate 30 needs to be transported by the transport mechanism 13, the adsorption of the substrate 30 is released by the adsorption member.

[0054] It is understandable that if Figure 6 The transmission belt group 111 can be set as a group to be used for the transmission and bearing of the entire substrate 30. Figure 7 The conveyor belt groups 111 can also be provided as multiple groups spaced apart along the first direction Y. Multiple conveyor belt groups 111 can be used to transport and carry multiple sub-substrates after the whole substrate 30 is cut. The number of conveyor belt groups 111 can be matched to the number of sub-substrates after the whole substrate 30 is cut, and is not specifically limited. In the disclosed embodiment, the sheet material transport system 1 is described using the example of a whole substrate 30 cut into two half-sheets 301.

[0055] like Figure 7 There are two conveyor belt sets 111, which are spaced apart along the first direction Y. The third driving member 113 is connected to each of the two conveyor belt sets 111 to synchronize their movement. This allows the two halves to move synchronously, ensuring the consistency of their placement directions and preventing them from shifting.

[0056] Optionally, a plurality of adsorption holes 1113 may be arranged at intervals along the second direction X on the corresponding conveyor belt 1111 . The hole size, shape and specific arrangement of the adsorption holes 1113 may be adaptively adjusted according to actual needs and are not specifically limited.

[0057] Optionally, the adsorption member may be a component for vacuum adsorption, for example, and the adsorption hole 1113 serves as a vacuum adsorption hole to adsorb the half sheet 301 at a position corresponding to the carrying area on the conveyor belt 1111 , which will not be described in detail.

[0058] Optionally, the distance between two adjacent transmission belt groups 111 in the first direction Y can be adaptively adjusted according to the positions of the two half-sheets, and is not specifically limited.

[0059] In some embodiments, as Figure 3 、 Figure 7 and Figure 8 The transport mechanism 13 includes a base 131, one or more support rods 132, and one or more grabbing assemblies 133. The base 131 is rotatably connected to a rotating shaft 1311, which is configured to rotate in a horizontal plane. One or more support rods 132 are connected to the rotating shaft 1311. Each support rod 132 is equipped with one or more grabbing assemblies 133, and each grabbing assembly 133 includes one or more sub-grabbing assemblies 1331. The sub-grabbing assemblies 1331 in each grabbing assembly 133 are respectively used to pick up and place substrates 30 in the same carrying area. The sub-grabbing assemblies 1331 can be used to grab substrates 30, thereby achieving simultaneous transport of multiple substrates 30, and the placement direction of the multiple substrates 30 will not be changed during the transport process.

[0060] Optionally, the transport mechanism further includes a support plate 134 connected to an end of the support rod 132 away from the rotating shaft 1311. The support plate 134 includes a first sub-support plate 1341 and a second sub-support plate 1342 that are symmetrically arranged in the horizontal plane relative to the support rod 132. The first sub-support plate 1341 and / or the second sub-support plate 1342 are detachably connected to the grabbing assembly 133, and the sub-grabbing assemblies 1331 in the grabbing assembly 133 are symmetrical relative to the support rod 132. The sub-grabbing assemblies 1331 for grabbing different sheets are independently and detachably connected to the corresponding sub-support plates, which helps to improve the stability and strength of the connection of the sub-grabbing assemblies 1331 and prevent shaking when the sub-grabbing assemblies 1331 grab the substrate 30. In addition, the sub-grabbing components 1331 are symmetrically distributed on the two sub-support plates relative to the support rods 132, which further improves the support stability and strength of the sub-grabbing components 1331 to avoid shaking when grasping the substrate 30.

[0061] In some embodiments, the number of support rods 132 includes two, and the central axes of the two support rods 132 have a 90° angle in the horizontal plane. When the grabbing assembly 133 connected to one of the support rods 132 is located above the first conveying mechanism 11 to grab the substrate 30 in the first carrying area 11A, the grabbing assembly 133 connected to the other support rod 132 is located above the process position 21 to grab the substrate 30 in the process position 21. After the rotating shaft 1311 rotates the two support rods 132 90°, one of the support rods 132 drives the substrate 30 grabbed from the first carrying area 11A to move above the process position 21 to place the substrate 30 in the process position 21, and the other support rod 132 drives the processed substrate 30 grabbed from the process position 21 to move above the second conveying mechanism 12 to place the processed substrate 30 in the second carrying area 12A. By setting up two support rods 132, the grabbing components 133 connected to the two support rods 132 can work simultaneously, and when the rotating shaft 1311 drives the support rods 132 to rotate, the grabbing component 133 of one of the support rods 132 is used to transport the substrate 30 between the first supporting area 11A and the process position 21, while the grabbing component 133 of the other support rod 132 is used to transport the substrate 30 between the process position 21 and the second supporting area 12A, thereby improving work efficiency.

[0062] Optionally, when both the first conveying mechanism 11 and the second conveying mechanism 12 are used to convey two substrate halves 301, two sub-grasping assemblies 1331 are also provided, and the distance between the two sub-grasping assemblies 1331 can be matched to the distance between the two substrate halves 301 in the same loading area. The number and positional relationship of each sub-grasping assembly can be adaptively adjusted based on the specific conditions of the substrates 30 carried in the same loading area, and are not specifically limited.

[0063] In the embodiment of the present disclosure, the first transmission mechanism 11 and the second transmission mechanism 12 are both used to transmit two half-pieces 301, the number of transmission belt groups 111 is two, the two transmission belt groups 111 are arranged at intervals along the first direction Y, and the third driving member 113 is respectively connected to the two transmission belt groups 111 to make the two transmission belt groups 111 move synchronously.

[0064] It should be emphasized that, for the specific structures of the first transmission mechanism 11 and the second transmission mechanism 12 for transmitting two or more half-sheets 301 , reference can be made to the relevant descriptions in the above embodiments, and no further details will be given.

[0065] The present disclosure also provides a sheet production line, such as Figure 1 、 Figure 2 and Figure 9The sheet production line 100 includes a process table, which is provided with at least one process position 21. The substrate 30 is processed at the process position 21. The sheet conveying system 1 described in the above embodiments is arranged on one side of the process table. The sheet conveying system 1 is configured to transport the sheet to the process position 21 or to transport the sheet away from the process position 21. The loading mechanism 14 is arranged on one side of the first conveying mechanism 11 along the first conveying direction R; the unloading mechanism 15 is arranged on one side of the second conveying mechanism 12 along the second conveying direction S.

[0066] Optionally, the loading mechanism 14 and the unloading mechanism 15 are respectively provided with a buffer position 141, a tidying position 142 and a wafer loading and unloading position 143 along the transmission direction to achieve smooth loading and unloading of silicon wafers, which will not be described in detail.

[0067] For example, if a half-sheet 301 is fed along the first conveying direction R, with its first end 30a facing the laser slotting apparatus 2 and its length parallel to the second direction X, and the half-sheet 301 is placed in the first loading area 11A with its length parallel to the second direction X and its first end 30a facing the laser slotting apparatus 2, then if it is desired to place the half-sheet 301 placed in the first process station 211 in the same orientation, the first conveying mechanism 11 can be controlled to rotate counterclockwise 90°. After the transfer mechanism 13 rotates 90°, it will grab the half-sheet 301 from the first loading area 11A, which has been rotated 90° counterclockwise, and place it in the first process station 211. At this point, the placement orientation of the multiple half-sheets 301 in the first process station 211 is the same as the placement orientation of the half-sheets 301 in the first loading area 11A before the first conveying mechanism 11 rotated. After laser slotting, the half-sheets 301 return to the first process station 211, and their placement orientation remains unchanged. The transport mechanism 13 rotates 90° from the first process station 211 to the top of the second loading area 12A, placing the half-wafer 301 in the corresponding second loading area 12A. The length of the half-wafer 301 is now parallel to the first direction Y, and the first end 3011 is located on the side away from the first transport mechanism 11. In this case, the second transport mechanism 12 is controlled to rotate 90° counterclockwise, so that the orientation of the half-wafer 301 in the first loading area 11A during feeding is adjusted to the same orientation as the half-wafer 301 in the second loading area 12A before discharge.

[0068] In other examples, when there is no requirement for the placement direction of the half-sheet 301 at the first process position 211, that is, the two groups of half-sheets 301 transported by different first conveying mechanisms 11 can be arranged along the first direction Y (the length direction of the half-sheet 301 at the first process position 211 is parallel to the first direction Y), only one of the first conveying mechanism 11 and the second conveying mechanism 12 can be rotated 180°, and the other does not rotate to achieve the adjustment of the placement direction of the half-sheet 301 during loading and unloading to be consistent, which will not be repeated.

[0069] It can be understood that the sheet production line 100 can refer to the relevant descriptions in the above embodiments and will not be described in detail.

[0070] In the various embodiments of the present disclosure, unless otherwise specified, the connection may be in the form of bolts and nuts, screws, snaps, magnets, etc. For some connections, if there is no particular requirement for a detachable connection, a non-detachable connection may be achieved by welding, bonding, etc.

[0071] The basic principles of the present disclosure have been described above in conjunction with specific embodiments. However, it should be noted that the advantages, strengths, and effects mentioned in this disclosure are merely illustrative and not restrictive, and should not be construed as necessarily possessed by each embodiment of the present disclosure. Furthermore, the specific details disclosed above are provided for illustrative purposes and to facilitate understanding, rather than as limitations. These details do not limit the present disclosure to necessarily being implemented using these specific details.

[0072] The block diagrams of the devices, devices, equipment, and systems involved in this disclosure are merely illustrative examples and are not intended to require or imply that they must be connected, arranged, or configured in the manner shown in the block diagrams. As will be appreciated by those skilled in the art, these devices, devices, equipment, and systems can be connected, arranged, or configured in any manner. Words such as "include," "comprise," "have," and the like are open-ended words, meaning "including but not limited to," and can be used interchangeably therewith. The words "or" and "and" used herein refer to the words "and / or" and can be used interchangeably therewith, unless the context clearly indicates otherwise. The word "such as" used herein refers to the phrase "such as but not limited to," and can be used interchangeably therewith.

[0073] It should also be noted that in the apparatus, device, and method of the present disclosure, each component or each step can be decomposed and / or recombined. Such decomposition and / or recombination should be regarded as equivalent solutions of the present disclosure.

[0074] The above description of the disclosed aspects is provided to enable any person skilled in the art to make or use the present disclosure. Various modifications to these aspects will be readily apparent to those skilled in the art, and the general principles defined herein may be applied to other aspects without departing from the scope of the present disclosure. Therefore, the present disclosure is not intended to be limited to the aspects shown herein, but rather to be accorded the widest scope consistent with the principles and novel features disclosed herein.

[0075] The above description has been provided for the purpose of illustration and description. In addition, this description is not intended to limit the embodiments of the present disclosure to the forms disclosed herein. Although a number of example aspects and embodiments have been discussed above, those skilled in the art will recognize certain variations, modifications, alterations, additions, and sub-combinations thereof.

Claims

1. A sheet material transport system configured to transport or move sheet materials away from a process location, characterized in that: The sheet material transport system comprises: One or more first transport mechanisms, each of which has a first carrying area for carrying the sheet, and the sheet is moved into the first carrying area along a first transport direction; One or more second transport mechanisms are arranged on one side of the first transport mechanism along a first direction, each second transport mechanism having a second carrying area for carrying the sheet material, the sheet material is moved out of the second carrying area along a second transport direction, the first transport direction and the second transport direction are opposite and perpendicular to the first direction in a horizontal plane; a transport mechanism disposed between the first transport mechanism and the second transport mechanism along the first direction, the transport mechanism being configured to transport the sheet material in the first loading area to the process position, and to transport the sheet material in the process position to the second loading area; At least one of the first transport mechanism and the second transport mechanism can rotate in a horizontal plane so that the placement direction of the sheet located in the first supporting area and the placement direction of the sheet located in the second supporting area are adjusted to be the same.

2. The sheet material transport system according to claim 1, wherein: Also includes: a first rotating mechanism connected to one or more first transmission mechanisms, wherein the first rotating mechanism is configured to drive the first transmission mechanism to rotate in a horizontal plane by a first angle; and / or The second rotating mechanism is connected to one or more second transmission mechanisms. The second rotating mechanism is configured to drive the second transmission mechanism to rotate a second angle in a horizontal plane. The second angle and the first angle are complementary to each other.

3. The sheet material transport system according to claim 2, characterized in that: The first rotating mechanism and the second rotating mechanism have the same rotation direction, The first angle and the second angle are the same, the first angle is 90°, or, The first angle and the second angle are different, one of the first angle and the second angle is 180°, and the other is 0°.

4. The sheet material transport system according to claim 2, wherein: In the case where the sheet material transport system further includes the first rotating mechanism, the first rotating mechanism includes: a first turntable connected to the first transmission mechanism; a first driving member, each of the first driving members being connected to one of the first turntables, the first driving member being configured to drive the first turntable to rotate in a horizontal plane, thereby driving the first transmission mechanism on the first turntable to rotate; In the case where the sheet material transport system further includes the second rotating mechanism, the second rotating mechanism includes: a second turntable connected to the second transmission mechanism; The second driving member is connected to each second turntable. The second driving member is configured to drive the second turntable to rotate in a horizontal plane, thereby driving the second transmission mechanism on the second turntable to rotate.

5. The sheet material transport system according to claim 2, wherein: In the case where the sheet material transport system further includes the first rotating mechanism, a plurality of the first transport mechanisms are sequentially arranged along the first transport direction, and the first rotating mechanism includes: Two or more first turntables, each of which is connected to one of the first transmission mechanisms; a first connecting component, connecting the plurality of first turntables, wherein the first connecting component is configured to enable the plurality of connected first turntables to move simultaneously; a first driving member connected to the first connecting assembly or any of the first turntables, the first driving member being configured to cause the plurality of first turntables to rotate synchronously in a horizontal plane under the drive of the first connecting assembly; In the case where the sheet material transport system further includes the second rotating mechanism, a plurality of the second transport mechanisms are sequentially arranged along the second transport direction, and the second rotating mechanism includes: Two or more second turntables, each of the second turntables is connected to a second transmission mechanism; a second connecting component, connecting the plurality of second turntables, wherein the second connecting component is configured to enable the plurality of connected second turntables to move simultaneously; The second driving member is connected to the second connecting assembly or any of the second turntables. The second driving member is configured to make the plurality of second turntables rotate synchronously in a horizontal plane under the drive of the second connecting assembly.

6. The sheet material transport system according to claim 1, wherein: The first transmission mechanism and the second transmission mechanism both include: At least one conveyor belt group, the conveyor belt group comprising two or more conveyor belts spaced apart along the first direction, the conveying directions of the two or more conveyor belts being the same, and each conveyor belt being provided with a plurality of adsorption holes uniformly distributed along the extending direction of the conveyor belt; An adsorption member comprising at least one air extraction port, wherein the air extraction port is connected to the adsorption hole on the upper side of the conveyor belt to adsorb the sheet material on the conveyor belt; The third driving member connects two or more of the transmission belts and drives the multiple transmission belts to move synchronously.

7. The sheet material transport system according to claim 6, characterized in that: There are two transmission belt groups, which are spaced apart along the first direction. The third driving member is respectively connected to the two transmission belt groups to enable the two transmission belt groups to move synchronously.

8. The sheet material transport system according to claim 1, wherein: The transport mechanism comprises: a base, the base being rotatably connected to a rotating shaft, the rotating shaft being configured to rotate in a horizontal plane; One or more support rods connected to the rotating shaft; More than one grabbing assembly, each support rod is provided with more than one grabbing assembly, each grabbing assembly includes one or more sub-grabbing assemblies, and the sub-grabbing assemblies in each grabbing assembly respectively pick up and place the sheets in the same bearing area.

9. The sheet material transport system according to claim 8, characterized in that: The transport mechanism further comprises: A support plate is connected to one end of the support rod away from the rotating shaft, and the support plate includes a first sub-support plate and a second sub-support plate that are symmetrically arranged in a horizontal plane relative to the support rod. The first sub-support plate and / or the second sub-support plate are detachably connected to the grabbing assembly, and the sub-grabbing assemblies in the grabbing assembly are respectively symmetrical relative to the support rod.

10. The sheet material transport system according to claim 8, wherein: The number of the support rods includes two, and the central axes of the two support rods form an angle of 90° in the horizontal plane; When the grabbing assembly connected to one of the support rods is located above the first conveying mechanism to grab the sheet in the first bearing area, the grabbing assembly connected to the other support rod is located above the process position to grab the sheet in the process position. After the rotating shaft rotates the two support rods 90°, one of the support rods drives the sheet grabbed from the first bearing area to move above the process position to place the sheet in the process position, and the other support rod drives the processed sheet grabbed from the process position to move above the second conveying mechanism to place the processed sheet in the second bearing area.

11. A sheet production line, characterized in that: include: A process table is provided with at least one process position, where the sheet is processed; The sheet material transport system according to any one of claims 1 to 10, wherein the sheet material transport system is arranged on one side of the process table, and the sheet material transport system is configured to transport the sheet material to the process position or to transport the sheet material away from the process position; a feeding mechanism, which is arranged on one side of the first conveying mechanism along the first conveying direction; The unloading mechanism is arranged on one side of the second conveying mechanism along the second conveying direction.

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