Low-temperature pump cleaning device

Abstract

A low-temperature pump cleaning device comprises a position adjusting device, a positioning device, a gas nozzle, a nitrogen pump, a drying filter, a gas heater, a pressure valve, a multi-way gas adapter, an exhaust device, a gas inlet pipe and an exhaust pipe. A plurality of air inlet holes, an in-pump airflow channel and an exhaust hole are formed in the periphery of the low-temperature pump, a hot purging device is additionally arranged, freezing in the low-temperature pump is avoided, purging is thorough, and efficiency is high. The position of an air nozzle in the hot blowing device is adjustable, the hot blowing device can be suitable for various hole positions of air inlet holes and exhaust holes, the limiting guide rails are detachably connected to the positioning ring, the corresponding number of the limiting guide rails are installed according to the number of the air holes, and the adaptability of the hot blowing device is greatly improved; the dry filter is additionally arranged, harmful and volatile liquid left in the pump is prevented from being discharged into the air, application is environmentally friendly, and cost is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of equipment cleaning, in particular to a cryogenic pump cleaning device. Background Art

[0002] Cryogenic pumps are special pumps used to transport cryogenic liquids in petroleum, air and chemical plants. They transport cryogenic liquids from low pressure areas to high pressure areas. During the operation of the cryogenic pump, moisture in the air will freeze inside the pump, seriously affecting the efficiency of the cryogenic pump. Currently, purge gas is generally used to eliminate ice, such as Figure 1 As shown, the cryopump is equipped with air inlets, air outlets, and internal airflow channels. Due to structural limitations within the pump, purging air from a single direction is inefficient and results in poor deicing. Multiple air inlets, air outlets, and internal airflow channels are typically required, requiring multiple air pumps to purge simultaneously, resulting in a complex and costly structure. Furthermore, the purge process inevitably releases harmful, volatile liquids remaining within the pump into the air, potentially harming the environment and worker health. Utility Model Content

[0003] In view of the deficiencies of the prior art, the utility model provides a cryogenic pump cleaning device which has strong adaptability, can purge holes of various sizes and different positions, and is environmentally friendly.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] The cryopump cleaning device includes a position adjustment device, a positioning device, a gas nozzle, a nitrogen pump, a filter dryer, a gas heater, a pressure valve, a multi-way gas adapter, an exhaust device, an air inlet pipe, and an exhaust pipe. The position adjustment device includes a base, with support legs fixedly connected to both sides of the base bottom. A second linear module is fixedly mounted on the top of the position adjustment device, and a first linear module is fixedly mounted on one side of the second linear module's movable base. The positioning device is movably connected to the top of the first linear module's movable base. The first and second linear modules are perpendicular to each other and can be driven by a motor screw or a cylinder.

[0006] The positioning device includes a positioning ring, a limiting guide rail, a limiting slider, a limiting rod, a positioning slider, and a gas nozzle connector. There are two positioning rings, arranged vertically. N (N ≥ 1) limiting guide rails are arranged around the positioning ring and are detachably connected to the positioning ring. A corresponding number of limiting guide rails can be installed based on the number of air inlet holes on the cryopump. Each limiting guide rail can slide circumferentially along the positioning ring, and the position of the limiting guide rails can be adjusted to accommodate different air inlet hole locations. The limiting guide rails can be fastened to the positioning ring with bolts. The limiting slider is slidably mounted on the limiting guide rail, allowing the gas nozzle to be inserted into or removed from the air inlet hole on the cryopump. The limiting slider can be fixed to the limiting guide rail with bolts. The limiting rod is parallel to the centerline of the positioning device, and the limiting sliders at both ends of the positioning device are connected to the limiting rod. The positioning slider is slidably connected to the limiting rod. The air nozzle is fixedly connected to the positioning slider through an air nozzle connecting piece.

[0007] The exhaust device consists of two interlocking semicircular exhaust assemblies. A semicircular exhaust cavity is defined on the inner surface of each exhaust assembly, communicating with the exhaust hole on the cryopump. An outlet hole is defined on the outer surface of each exhaust assembly, communicating with the exhaust pipe. Locking plates with locking holes are secured to both ends of the exhaust assembly.

[0008] The cryopump cleaning device also includes a nitrogen pump, a filter drier, a gas heater, a pressure valve, and a multi-way gas adapter. The exhaust pipe is connected to the filter drier, the pressure valve, the gas heater, the multi-way gas adapter, and the inlet pipe. The nitrogen pump is connected to the pressure valve for replenishing nitrogen. The multi-way gas adapter can be connected to multiple inlet pipes to supply hot nitrogen to each gas nozzle.

[0009] Working process: First, according to the number of the air inlet holes on the cryopump, a corresponding number of the limiting guide rails are installed. The position adjustment mechanism moves the positioning device to a suitable position through the first linear module and the second linear module. Then, the air nozzle is adjusted to correspond to the corresponding air inlet hole position by sliding the limiting guide rail and the positioning slider. Then, the limiting slider is slid to insert the air nozzle into the air inlet hole. Then, the nitrogen pump is turned on. Nitrogen passes through the pressure valve, the multi-way gas adapter, the air inlet pipe and the air nozzle and enters the cryopump to purge the cryopump. The nitrogen after purge is discharged through the exhaust device and passes through the drying filter, the pressure valve, the gas heater, the multi-way gas adapter, the air inlet pipe and the air nozzle in sequence, and enters the cryopump again for recycling.

[0010] The beneficial effects of the present invention are as follows: the technical solution has a stable and simple structure, is easy to operate, and saves costs. By arranging multiple air inlet holes, air flow channels inside the pump, and exhaust holes on the periphery of the cryogenic pump, and installing a thermal purge device, ice formation inside the cryogenic pump is avoided, normal production operation and equipment safety and reliability are ensured, and the purge is thorough and efficient.

[0011] Due to the different structures of cryopumps, the locations of the air inlet and exhaust holes vary greatly. The position of the air nozzle in the thermal purge device of the present invention is adjustable, and the exhaust device has strong adaptability to the position of the exhaust holes, and can be applied to various positions of the air inlet and exhaust holes. Moreover, the limiting guide rail is detachably connected to the positioning ring, and the corresponding number of the limiting guide rails can be installed according to the number of air holes, which greatly improves the adaptability of the thermal purge device.

[0012] After the purge, the nitrogen is discharged through the exhaust device and passes through the filter drier, the pressure valve, the gas heater, the multi-way gas adapter, the inlet pipe, and the gas nozzle, before re-entering the cryopump for recycling. This prevents harmful and volatile liquids remaining in the pump from being discharged into the air, preventing damage to the environment and the health of workers, and is environmentally friendly and cost-effective. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0014] Figure 1 This is a schematic structural diagram of a cryogenic pump of the present utility model;

[0015] Figure 2 This is a structural diagram of an embodiment of the present utility model;

[0016] Figure 3 This is a schematic structural diagram of an embodiment of the position adjustment device, positioning device and air nozzle in the utility model;

[0017] Figure 4 It is a cross-sectional view of the exhaust assembly in the present utility model. DETAILED DESCRIPTION

[0018] The cryopump cleaning device includes a position adjustment device 2, a positioning device 3, a gas nozzle 4, a nitrogen pump 5, a drying filter 6, a gas heater 7, a pressure valve 8, a multi-way gas adapter 9, an exhaust device 10, an air inlet pipe 12, and an exhaust pipe 13. The position adjustment device 2 includes a base 201, with support legs 202 fixedly connected to both sides of the bottom of the base 101. A second linear module 203 is fixedly mounted on the top of the position adjustment device 2, and a first linear module 204 is fixedly mounted on one side of the movable seat of the second linear module 203. The positioning device 3 is movably connected to the top of the movable seat of the first linear module 204. The first linear module 204 and the second linear module 203 are perpendicular to each other and can be driven by a motor screw or a cylinder.

[0019] The positioning device 3 includes a positioning ring 301, a limiting guide rail 302, a limiting slider 303, a limiting rod 304, a positioning slider 305, and a gas nozzle connector 306. There are two positioning rings 301, which are arranged vertically. N (N ≥ 1) limiting guide rails 302 are arranged around the positioning ring 301. The limiting guide rails 302 are detachably connected to the positioning ring 301. A corresponding number of limiting guide rails 302 can be installed according to the number of the air inlet holes 101 on the cryopump 1. Each limiting guide rail 302 can slide circumferentially along the positioning ring 11. The position of the limiting guide rail 302 can be adjusted to accommodate different air inlet hole positions by sliding the limiting guide rail 302. The limiting guide rail can be fastened to the positioning ring 301 by bolts. The limiting slider 303 is slidably mounted on the limiting guide rail 302. The gas nozzle 4 can be inserted into or removed from the gas inlet 101 of the cryopump 1 by sliding the limiting slider 303. The limiting slider 303 can be fixed to the limiting guide rail 302 via bolts. The limiting rod 304 is parallel to the centerline of the positioning device 3. The limiting sliders 303 at both ends of the positioning device 3 are respectively connected to the ends of the limiting rod 304. The positioning slider 305 is slidably connected to the limiting rod 304. The gas nozzle 4 is fixedly connected to the positioning slider 305 via a gas nozzle connector 306.

[0020] The exhaust device 10 consists of two semicircular exhaust assemblies 11 that snap together. A semicircular exhaust cavity 110 is defined on the inner surface of each exhaust assembly 11 and communicates with the exhaust port 102 on the cryopump 1. An air outlet 111 is defined on the outer surface of each exhaust assembly 11 and communicates with the exhaust pipe 13. Locking plates 112 are secured to both ends of each exhaust assembly 11, each with a locking through hole 113.

[0021] The cryopump cleaning device also includes a nitrogen pump 5, a filter drier 6, a gas heater 7, a pressure valve 8, and a multi-way gas adapter 9. The exhaust pipe 13 connects the filter drier 6, the pressure valve 8, the gas heater 7, the multi-way gas adapter 9, and the inlet pipe 12. The nitrogen pump 5 is connected to the pressure valve 8 for replenishing nitrogen. The multi-way gas adapter can be connected to multiple inlet pipes 12 to supply hot nitrogen to each gas nozzle 4.

[0022] Working process: First, according to the number of the air inlet holes 101 on the cryopump 1, the corresponding number of the limiting guide rails 302 are installed. The position adjustment mechanism 2 moves the positioning device 3 to the appropriate position through the first linear module 204 and the second linear module 203. Then, by sliding the limiting guide rails 302 and the positioning slider 305, the gas nozzle 4 is adjusted to correspond to the position of the corresponding air inlet hole 101. Then, the limiting slider 303 is slid to insert the gas nozzle 4 into the air inlet hole 101. Then, the nitrogen pump 5 is turned on. Nitrogen passes through the pressure valve 8, the multi-way gas adapter 9, the air inlet pipe 12 and the air nozzle 4 and enters the cryopump 1 to purge the cryopump 1. The purged nitrogen is discharged through the exhaust device 10 and passes through the drying filter 6, the pressure valve 8, the gas heater 7, the multi-way gas adapter 9, the air inlet pipe 12 and the air nozzle 4 in sequence, and enters the cryopump again for recycling.

[0023] The above is only a preferred specific implementation method of the present invention, but the protection scope of the present invention is not limited to this. Any technician familiar with the technical field within the technical scope disclosed by the present invention can make equivalent replacements or changes based on the technical solution and technical concept of the present invention, which should be covered by the protection scope of the present invention.

Claims

1. A cryopump cleaning device, characterized in that: The invention comprises a position regulating device (2), a positioning device (3), a gas nozzle (4), a nitrogen pump (5), a drying filter (6), a gas heater (7), a pressure valve (8), a multi-way gas adapter (9), an exhaust device (10), an air inlet pipe (12) and an exhaust pipe (13); the position regulating device (2) comprises a base (201), both sides of the bottom of the base (201) are fixedly connected with supporting legs (202), the top of the position regulating device (2) is fixedly equipped with a second linear module (203), and one side of the movable seat of the second linear module (203) is fixedly equipped with a second linear module (203). A straight line module (204), the first straight line module (204) is movably connected to a positioning device (3) on the top of the movable seat, the first straight line module (204) and the second straight line module (203) are perpendicular to each other; the positioning device (3) includes a positioning ring (301), a limiting guide rail (302), a limiting slider (303), a limiting rod (304), a positioning slider (305), and an air nozzle connector (306); the number of the positioning rings (301) is two, and they are vertically arranged; N (N≥1) limiting guide rails (302) are arranged around the positioning ring (301), The limiting guide rail (302) is detachably connected to the positioning ring (301), and a corresponding number of the limiting guide rails (302) are installed according to the number of the air inlet holes (101) on the cryogenic pump (1), and each limiting guide rail (302) slides circumferentially along the positioning ring (301). The position of the limiting guide rail (302) is adapted to different air inlet hole positions by sliding the position of the limiting guide rail (302). The limiting guide rail can be fastened to the positioning ring (301) by bolts, and the limiting slider (303) is slidably provided on the limiting guide rail (302). The limiting slider (303) is slidably provided to realize the above The gas nozzle (4) is inserted into or pulled out of the gas inlet hole (101) on the cryogenic pump (1), and the limiting slider (303) can be fixed on the limiting guide rail (302) by means of bolts; the limiting rod (304) is parallel to the center line of the positioning device (3), and the limiting sliders (303) at both ends of the positioning device (3) are respectively connected to the two ends of the limiting rod (304); the positioning slider (305) is slidably connected to the limiting rod (304); the gas nozzle (4) is fixedly connected to the positioning slider (305) via the gas nozzle connector (306).

2. The cryopump cleaning device according to claim 1, wherein: The exhaust device (10) is composed of two semicircular exhaust components (11) that are buckled together, and a semicircular exhaust cavity (110) is provided on the inner surface of the exhaust component (11), and the exhaust cavity (110) is communicated with the exhaust hole (102) on the cryogenic pump (1), and an air outlet hole (111) is provided on the outer surface of the exhaust component (11), and the air outlet hole (111) is communicated with the exhaust pipe (13); locking plates (112) are fixed at both ends of the exhaust component (11), and a locking through hole (113) is provided on the locking plate (112).

3. The cryopump cleaning device according to claim 1, wherein: The exhaust pipe (13) is connected to the drying filter (6), the pressure valve (8), the gas heater (7), the multi-way gas adapter (9) and the air inlet pipe (12) in sequence; the nitrogen pump (5) is connected to the pressure valve (8) for replenishing nitrogen; the multi-way gas adapter can be connected to a plurality of the air inlet pipes (12) to supply hot nitrogen to each of the gas nozzles (4).

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