Edge polishing device

Abstract

The utility model belongs to the technical field of semiconductor equipment, and provides an edge polishing device which comprises a bearing assembly, a polishing assembly, a sliding assembly, a mechanical arm and a spraying assembly, a sheet is placed on the bearing assembly, the polishing assembly is located on the radial side of the sheet and comprises polishing cloth, a polishing block and a polishing support, and the polishing cloth is connected to the side, facing the sheet, of the polishing block; the mechanical arm is connected to the bearing assembly and used for driving the bearing assembly to move so as to polish a V-shaped groove, the polishing block is connected to the polishing support, the polishing support is connected to the sliding assembly, and the sliding assembly can drive the polishing support to move in the extending direction of the polishing support so as to polish flat edges. The edge polishing device can be compatible with two polishing functions of V-shaped groove polishing and flat edge polishing, and when the type of a positioning groove is changed, V-shaped groove polishing or flat edge polishing of a sheet can be achieved without disassembling and adjusting the polishing device.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor equipment, and in particular to an edge polishing device. Background Art

[0002] Semiconductor silicon wafers are the primary substrate material for integrated circuit manufacturing. Their preparation involves numerous and complex processes, including: polysilicon raw materials and dopants are pulled to form single-crystal silicon rods. This is followed by separate dicing, barrel grinding, rod bonding, wire cutting, cleaning, chamfering, grinding, and polishing. After multiple processing steps, the final silicon wafer is a smooth surface with good edge roughness. The polishing process includes surface polishing and edge polishing, and the edge polishing process includes positioning groove polishing and edge polishing.

[0003] With advances in semiconductor technology, semiconductor silicon wafers are gradually moving toward larger wafer sizes. Currently, in the semiconductor industry, in addition to V-grooves, flat-edge locating grooves are commonly used in large-size silicon wafers. During the silicon wafer manufacturing process, V-grooves and flat-edge locating grooves are typically polished using wide and narrow roller-type polishing cloths in conjunction with a swinging motion. Specifically, a V-groove polishing wheel and a flat-edge polishing wheel are provided, and polishing cloths are applied to the surfaces of each wheel. V-groove and flat-edge locating grooves are then formed using the V-groove polishing wheel and the flat-edge polishing wheel, respectively. However, since each polishing wheel corresponds to one type of locating groove and is incompatible with both types, the polishing wheel must be replaced simultaneously when the wafer type changes. Utility Model Content

[0004] The purpose of this application is to provide an edge polishing device to solve the problem that polishing equipment in the prior art is not compatible with two types of positioning grooves, and to be able to perform V-groove polishing and flat edge polishing on sheets without changing the polishing wheel.

[0005] To achieve the above-mentioned and other related purposes, the present application provides an edge polishing device for polishing the edge of a sheet material, wherein the edge polishing includes V-groove polishing and flat edge polishing, and is characterized in that it includes a bearing assembly, a robotic arm, a polishing assembly, a sliding assembly, and a spray assembly, wherein the axial direction of the sheet material is a first direction, the radial direction of the sheet material is a second direction, and a third direction is perpendicular to the first direction and the second direction, respectively;

[0006] The sheet is placed on the carrying assembly, the polishing assembly is located on one side of the sheet along the second direction, and includes a polishing cloth, a polishing block, and a polishing bracket. The polishing cloth is connected to the side of the polishing block facing the sheet. The robotic arm is connected to the carrying assembly, and is used to support and drive the carrying assembly to move for V-groove polishing. The polishing block is connected to a side of the polishing bracket close to the carrying assembly. The polishing bracket is connected to the sliding assembly, and the sliding assembly extends linearly along the third direction, and is used to drive the polishing bracket to move along the third direction for flat edge polishing.

[0007] The spray assembly is connected to the polishing assembly and is used to spray polishing liquid onto the polishing cloth.

[0008] Optionally, the supporting assembly includes a supporting bracket and at least three edge clamps, the sheet is placed on the supporting bracket, and the at least three edge clamps are spaced apart from each other around the periphery of the sheet and connected to the supporting bracket to clamp the sheet.

[0009] Optionally, the supporting bracket has a first surface and a second surface arranged opposite to each other, the sheet is placed on the first surface of the supporting bracket, a vacuum passage is provided in the supporting bracket, the vacuum passage has a first opening and a second opening, the second opening is located on the second surface of the supporting bracket and is connected to the vacuum pipeline, and the first opening is located on the first surface of the supporting bracket for adsorbing the sheet.

[0010] Optionally, the supporting bracket is in a cross-shaped structure and includes four edge clamps, and the four edge clamps are respectively connected to four ends of the supporting bracket cross-shaped structure.

[0011] Optionally, the polishing block is provided with a polishing groove penetrating the polishing block along the third direction, and the groove wall of the polishing groove faces the sheet;

[0012] The polishing cloth is connected to the groove wall of the polishing groove, and in a side view of the polishing assembly along the second direction, the polishing cloth is a linear structure.

[0013] Optionally, the polishing cloth comprises a polishing cloth body and a polishing cloth front end, and the polishing cloth body is located between the polishing cloth front end and the groove wall of the polishing groove;

[0014] In a cross-sectional view of the polishing cloth taken along a direction perpendicular to its extension, the polishing cloth body has a top edge, a bottom edge, and a side edge connecting the top edge and the bottom edge, the front end of the polishing cloth has a curved outer edge, the side where the bottom edge of the polishing cloth body is located is connected to the groove wall of the polishing groove, and the curved outer edge of the front end of the polishing cloth is tangent to the side edge of the polishing cloth body.

[0015] Optionally, the difference between the polishing angle of the polishing cloth and the preset angle is less than or equal to 0.5°, the height of the polishing cloth is greater than the preset depth, the width of the polishing cloth is greater than the preset width, and the aspect ratio of the polishing cloth is greater than the preset aspect ratio;

[0016] Among them, the polishing angle of the polishing cloth is the angle between the two side edges of the polishing cloth body, the height of the polishing cloth is the distance between the bottom edge of the polishing cloth body and the tangent line of the front end of the polishing cloth parallel to the bottom edge, the width of the polishing cloth is the length of the bottom edge of the polishing cloth, and the aspect ratio of the polishing cloth is the ratio between the height of the polishing cloth and the width of the polishing cloth.

[0017] Optionally, in the main view of the edge polishing device along the third direction, the groove wall of the polishing groove is an arc-shaped structure, the depth of the polishing groove is greater than three times the height of the polishing cloth, the curvature of the central area of ​​the groove wall of the polishing groove is less than the preset curvature, and the tangents at both ends of the arc-shaped structure of the polishing groove are perpendicular to the first direction.

[0018] Optionally, the polishing bracket includes a bracket body, a rotating shaft and a driving member, the rotating shaft is rotatably connected to the bracket body, and the axial direction of the rotating shaft is parallel to the axial direction of the sheet, the driving member is connected to one end of the rotating shaft for driving the rotating shaft to rotate, the rotating shaft is connected to the bracket body to drive the bracket body to rotate, and the polishing block is connected to the side of the bracket body close to the supporting component.

[0019] Optionally, the sliding assembly includes a sliding rail and a sliding block, and the sliding block is respectively connected to the sliding rail and the polishing bracket to drive the polishing assembly to move along the third direction.

[0020] As described above, the edge polishing device provided by the present application has at least the following beneficial effects:

[0021] In the edge polishing device of the present application, a sheet is placed on a carrying assembly, and a polishing cloth is arranged facing the sheet. A spray assembly can be used to spray polishing liquid onto the polishing cloth during the polishing process. The carrying assembly can be controlled by a robotic arm to move along the second direction and / or the first direction, and the carrying assembly can be swung up and down so that the sheet contacts the polishing cloth and is located at a preset position, thereby achieving V-groove polishing of the sheet; the carrying assembly is connected to a sliding assembly, and the sliding assembly can drive the polishing assembly to move along a third direction, thereby achieving flat-edge polishing of the sheet. The edge polishing device of the present application is compatible with both V-groove polishing and flat-edge polishing. When the type of the sheet positioning groove changes, there is no need to disassemble and adjust the polishing device. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the following is a brief introduction to the drawings required for use in the embodiments. It should be understood that the following drawings only show certain embodiments of the present application and therefore should not be regarded as limiting the scope. For ordinary technicians in this field, other relevant drawings can be obtained based on these drawings without creative work.

[0023] Figure 1 Shown is a schematic structural diagram of the edge polishing device provided by this application.

[0024] Figure 2 Shown is a top view of a flat-edge polished sheet provided for this application.

[0025] Figure 3 Display as Figure 2 Schematic diagram of the side view structure of the sheet shown.

[0026] Figure 4 Shown is a top view of the V-groove polished sheet provided in this application.

[0027] Figure 5 Display as Figure 4 Schematic diagram of the side structure of the sheet shown.

[0028] Figure 6 Display as Figure 4 Schematic diagram of the structure of the V-groove in the sheet shown.

[0029] Figure 7 and Figure 8 A bottom view of a bearing assembly provided in an optional embodiment of the present application along a first direction is shown.

[0030] Figure 9 Shown is a front view of the polishing assembly provided by the present application along the third direction.

[0031] Figure 10 Display as Figure 9 The polishing assembly is shown as a schematic side view along the second direction.

[0032] Figure 11 Display as Figure 9 A cross-sectional view of the polishing cloth in the polishing assembly is shown along its extending direction.

[0033] Figure 12 Shown is a schematic structural diagram of the polishing assembly in the edge polishing device provided by the present application.

[0034] Reference numerals:

[0035] 10. Carrying assembly; 11. Carrying bracket; 12. Edge clamp; 13. Vacuum passage; 131. First opening; 132. Second opening; 20. Polishing assembly; 21. Polishing cloth; 211. Polishing cloth body; 212. Polishing cloth front end; 22. Polishing block; 221. Polishing groove; 23. Polishing bracket; 231. Bracket body; 232. Rotating shaft; 233. Driving member; 30. Sliding assembly; 31. Slider; 32. Slide rail; 40. Robot arm; 50. Spraying assembly. DETAILED DESCRIPTION

[0036] To make the technical objectives, technical solutions, and technical effects of this application more clear, the technical solutions of this application will be clearly and completely described below in conjunction with embodiments. Obviously, the described embodiments are only part of the embodiments of this application, not all of them. Generally, the components of the embodiments of this application described and shown in the drawings herein can be arranged and designed in various different configurations.

[0037] Therefore, the following detailed description of the embodiments of the present application is not intended to limit the scope of the claimed application, but rather merely represents selected embodiments of the present application. All other embodiments obtained by persons of ordinary skill in the art based on the embodiments in this application without creative effort are within the scope of protection of this application. In addition, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance.

[0038] In the description of this application, it should be noted that the terms "center", "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", etc., indicating the orientation or position relationship, are based on the orientation or position relationship shown in the accompanying drawings, and are only for the convenience of describing this application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation on this application.

[0039] In the description of this application, it should be noted that, unless otherwise expressly specified and limited, the terms "installed", "connected" and "connected" should be understood in a broad sense. For example, it can be a fixed connection or a detachable connection. In addition, the description with reference to the terms "one embodiment", "some embodiments", "illustrative embodiments", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in combination with the implementation or example are included in at least one implementation or example of this application. In this specification, the schematic representation of the above terms does not necessarily refer to the same implementation or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more implementations or examples in a suitable scheme.

[0040] Reference Figure 1 This embodiment provides an edge polishing device for polishing the edge of a sheet, comprising a carrying assembly 10, a robotic arm 40, a polishing assembly 20, a sliding assembly 30 and a spray assembly 50, wherein, with reference to Figures 2 to 6 Edge polishing includes V-groove polishing and flat edge polishing. Optionally, the sheet material may be, for example, a silicon wafer or other suitable semiconductor device. In this embodiment, the axial direction of the sheet material is the first direction, the radial direction of the sheet material is the second direction, the first direction is perpendicular to the second direction, and the direction perpendicular to the first and second directions is the third direction.

[0041] In the edge polishing device of this embodiment, the carrying assembly 10 is used to place the sheet, the robotic arm 40 is used to support the carrying assembly 10, the polishing assembly 20 is used to polish the sheet, the spray assembly 50 is used to spray the polishing liquid, and the sliding assembly 30 can drive the polishing assembly 20 to move.

[0042] Specifically, a sheet is placed on a carrier assembly 10, and a polishing assembly 20 is located on one side of the sheet along the second direction. The polishing assembly 20 includes a polishing cloth 21, a polishing block 22, and a polishing bracket 23. When in use, the polishing cloth 21 contacts the sheet for polishing. The polishing cloth 21 is connected to the side of the polishing block 22 facing the sheet. A robotic arm 40 is connected to the carrier assembly 10 and can support and drive the carrier assembly 10 to move; to perform V-groove polishing on the sheet. The polishing block 22 is connected to the polishing bracket 23, which is used to support the polishing block 22 and is connected to the sliding assembly 30. The sliding assembly 30 extends linearly along the third direction and is used to drive the polishing bracket 23 to move along the third direction to polish the flat edge of the sheet. A spray assembly 50 is connected to the polishing assembly 20 and can spray polishing liquid onto the polishing cloth 21.

[0043] During use, the sheet is placed on the supporting assembly 10 and fixed by the supporting assembly 10. The robotic arm 40 can move toward or away from the polishing assembly 20, so that the sheet contacts the polishing cloth 21, and can drive the sheet to swing up and down with the third direction as the axis, thereby achieving V-groove polishing of the sheet; the sliding assembly 30 can drive the polishing assembly 20 to move along the third direction, and at the same time, the robotic arm 40 is used to make the sheet contact the polishing cloth 21, thereby achieving flat edge polishing of the sheet.

[0044] Compared with the existing technology, which requires synchronous replacement of the polishing wheel to achieve a change in the polishing type, the edge polishing device of this embodiment is compatible with both V-groove polishing and flat edge polishing. When the type of the sheet positioning groove changes, there is no need to disassemble and adjust the polishing device to achieve V-groove polishing or flat edge polishing of the sheet.

[0045] In this embodiment, refer to Figure 7 The supporting assembly 10 includes a supporting bracket 11, on which a sheet is placed. Optionally, the supporting bracket 11 has a first surface and a second surface disposed opposite each other. The sheet is placed on the first surface of the supporting bracket 11. A vacuum passage 13 is provided in the supporting bracket 11. The vacuum passage 13 has a first opening 131 and a second opening 132. The second opening 132 is located on the second surface of the supporting bracket 11 and is connected to a vacuum pipeline. The first opening 131 is located on the first surface of the supporting bracket 11. Optionally, there are multiple first openings 131, for example, at least three first openings 131 are spaced apart on the first surface of the supporting bracket 11. The vacuum passage 13 in the supporting bracket 11 is evacuated through the vacuum pipeline, so that the supporting bracket 11 can absorb the sheet through the first openings 131, thereby fixing the sheet on the supporting bracket 11.

[0046] In an optional embodiment, the support assembly 10 further includes at least three edge clamps 12, which surround the periphery of the sheet and are connected to the support bracket 11. The edge clamps 12 are capable of clamping the sheet, thereby securing the sheet to the support bracket 11. Optionally, multiple edge clamps 12 are spaced apart and disposed around the periphery of the sheet, and the edge clamps 12 are fixedly connected to the support bracket 11. The edge clamps 12 clamp the sheet, and cooperate with the support bracket 11 to absorb the sheet, effectively securing the sheet to the support bracket 11 and preventing the sheet from shifting during edge polishing.

[0047] Further, refer to Figure 7 The supporting bracket 11 has a cross-shaped structure, and there are four edge clamps 12. The four edge clamps 12 are respectively connected to the four ends of the cross-shaped structure of the supporting bracket 11, thereby achieving adsorption and clamping of the sheet.

[0048] Further, refer to Figure 8 The supporting bracket 11 has a Y-shaped structure, and there are three edge clamps 12. The three edge clamps 12 are respectively connected to the three ends of the Y-shaped structure of the supporting bracket 11, thereby achieving adsorption and clamping of the sheet.

[0049] In this embodiment, refer to Figure 1 and Figure 9The polishing assembly 20 is located on one side of the sheet in the radial direction, wherein a polishing groove 221 is provided on the side of the polishing block 22 facing the sheet, and the polishing groove 221 penetrates the polishing block 22 along the third direction, and the polishing cloth 21 is connected to the groove wall of the polishing groove 221. Optionally, the polishing cloth 21 is fixedly connected to the polishing groove 221. The polishing cloth 21 can be fixedly connected to the groove wall of the polishing groove 221 by bonding or other acceptable methods. The structural dimensions of the polishing cloth 21 can be adaptively set according to the structural dimensions of the actual V-groove to be polished.

[0050] In an alternative embodiment, reference Figure 10 In the side view of the polishing assembly 20 along the second direction, the polishing cloth 21 is a linear structure, and the extension direction of the polishing cloth 21 is perpendicular to the third direction, which means that the plane where the long strip structure of the polishing cloth 21 is located is perpendicular to the third direction.

[0051] In an alternative embodiment, reference Figure 11 The polishing cloth 21 includes a polishing cloth body 211 and a polishing cloth front end 212. The polishing cloth body 211 is connected to the groove wall of the polishing groove 221 and is located between the groove wall of the polishing groove 221 and the polishing cloth front end 212. In a cross-sectional view perpendicular to the extending direction of the polishing cloth 21, the polishing cloth body 211 has a trapezoidal structure, having a top edge, a bottom edge, and two side edges connecting the top edge and the bottom edge. The side where the bottom edge of the polishing cloth body 211 is located is connected to the groove wall of the polishing groove 221. The polishing cloth front end 212 is connected to the polishing cloth body 211 and has an arc-shaped outer side surface. Optionally, the arc-shaped outer side surface of the polishing cloth front end 212 is tangent to the side edge of the polishing cloth body 211, and the arc-shaped outer side surface of the polishing cloth front end 212 is a circular arc structure.

[0052] Furthermore, the difference between the polishing angle of the polishing cloth 21 and a preset angle is less than or equal to 0.5°. The polishing angle of the polishing cloth 21 is the angle between the two side edges of the polishing cloth body 211. The preset angle is a preset dimension parameter of the V-groove to be polished, specifically the V-groove angle minus 2°. The V-groove angle is the angle between the two straight side edges of the V-groove to be polished in a top view of the sheet along the first direction. By controlling the polishing angle of the polishing cloth 21, the V-groove structure polished by the polishing cloth 21 can meet or substantially meet the design requirements.

[0053] Furthermore, the height of the polishing cloth 21 is greater than a preset depth. The height of the polishing cloth 21 is the distance between the bottom edge of the polishing cloth body 211 and the curved outer edge of the polishing cloth front end 212 parallel to the tangent line of the bottom edge of the polishing cloth body 211. It can also be understood as the maximum distance between the curved outer edge of the polishing cloth front end 212 and the bottom edge of the polishing cloth body 211. The preset depth is a preset dimensional parameter of the V-groove to be polished, specifically the V-groove depth, which is the distance from the opening of the V-groove to the bottom of the V-groove to be polished. By controlling the height of the polishing cloth 21, it is possible to ensure that the depth of the V-groove obtained by polishing meets the design requirements, thereby realizing the V-groove polishing function of the edge polishing device.

[0054] Furthermore, the width of the polishing cloth 21 is greater than a preset width, and the aspect ratio of the polishing cloth 21 is greater than a preset aspect ratio. The width of the polishing cloth 21 is the base dimension of the trapezoidal structure of the polishing cloth body 211, and the aspect ratio of the polishing cloth 21 is the ratio between the height of the polishing cloth 21 and the width of the polishing cloth 21. Both the preset width and the preset aspect ratio are preset dimensional parameters of the V-groove to be polished. Specifically, the preset width is the opening width of the V-groove to be polished, and the preset aspect ratio is the ratio between the V-groove depth and the opening width of the V-groove to be polished. By controlling the preset width and aspect ratio of the polishing cloth 21, it is ensured that the polishing cloth 21 can be processed to form the bottom structure of the V-groove to be polished, thereby ensuring that the edge polishing device can perform the V-groove polishing function.

[0055] Furthermore, the polishing angle of the polishing cloth 21 can be set to be equal to the preset angle, and the aspect ratio of the polishing cloth 21 can be set to be slightly larger than the preset aspect ratio. Specifically, for example, the V-groove angle of the V-groove to be polished is 62°, the preset angle is 60°, the V-groove depth of the V-groove to be polished is 1 mm, the preset depth is 1 mm, the height of the polishing cloth 21 can be set to 1.5 mm, for example, the opening width of the V-groove to be polished is 1 mm, the preset width is 1 mm, the preset aspect ratio is 1, the width of the polishing cloth 21 can be set to 1.3, for example, and the aspect ratio is 1.5 / 1.3.

[0056] In an alternative embodiment, reference Figure 9 In the front view of the edge polishing device along the third direction, the groove wall of the polishing groove 221 is an arc-shaped structure, the depth of the polishing groove 221 is greater than three times the height of the polishing cloth 21, the curvature of the central area of ​​the groove wall of the polishing groove 221 is less than the preset curvature, and the tangent lines at both ends of the arc structure of the polishing groove 221 are perpendicular to the first direction, so that the groove bottom of the polishing groove 221 has a small curvature. Figures 4 to 6By making the polishing groove 221 have a relatively small curvature, the sheet can be fully in contact with the polishing cloth 21 located at the bottom of the polishing groove 221, ensuring the polishing effect of the edge polishing device on the sheet by performing V-groove polishing, and making the V-groove wall obtained by polishing form an arc surface tangent to the upper surface and / or lower surface of the sheet.

[0057] Furthermore, in a front view of the edge polishing device along the third direction, the center region of the polishing groove 221 is an arc-shaped structure, the edge regions of the polishing groove 221 at both ends of the center region are arc-shaped structures, and the arc structures of the edge regions of the polishing groove 221 are tangent to the connection between the arc structures of the center region; or, in a front view of the edge polishing device along the first direction, the groove wall of the polishing groove 221 is an arc-shaped structure. During use, the robot arm 40 drives the supporting assembly 10 close to the polishing cloth 21 so that the sheet contacts the polishing cloth 21, and the robot arm 40 is controlled to swing up and down. While maintaining contact between the sheet and the polishing cloth 21, the robot arm 40 is controlled to move along the axial direction of the sheet and in a direction close to or away from the polishing cloth 21 to perform V-groove polishing on the sheet.

[0058] In an alternative embodiment, reference Figure 12 The polishing bracket 23 includes a bracket body 231, a rotating shaft 232 and a driving member 233. The rotating shaft 232 is rotatably connected to the bracket body 231, and the axial direction of the rotating shaft 232 is parallel to the first direction. The driving member 233 is connected to one end of the rotating shaft 232 for driving the rotating shaft 232 to rotate. The rotating shaft 232 is connected to the bracket body 231 and can drive the bracket body 231 to rotate around the rotating shaft 232. The polishing block 22 is connected to the side of the bracket body 231 close to the supporting assembly 10; optionally, the rotating shaft 232 is located at the end of the bracket body 231 away from the supporting assembly 10, and the rotating shaft 232 is driven to rotate by the driving member 233, which can drive the polishing block 22 to rotate around the rotating shaft 232 through the bracket body 231, thereby changing the angle at which the polishing cloth 21 polishes the sheet, ensuring that the edge polishing device can polish a V-groove that meets the design requirements.

[0059] In an optional embodiment, the sliding assembly 30 includes a slide rail 32 and a slider 31. The slide rail 32 extends along a third direction. The slider 31 is slidingly connected to the slide rail 32. The polishing bracket 23 is connected to the slide rail 32. The slider 31 can drive the polishing bracket 23 to move along the third direction, and then drive the polishing block 22 to move along the third direction to achieve flat edge polishing of the sheet.

[0060] In summary, in the edge polishing device of this embodiment, a polishing cloth 21 is provided in the polishing assembly 20, and a mechanical arm 40 is used to make the sheet contact with the polishing cloth 21 and drive the sheet to swing up and down, thereby realizing V-groove polishing of the sheet, and the sliding assembly 30 can drive the polishing assembly 20 to move along the third direction, thereby realizing flat edge polishing of the sheet; the bearing assembly 10 includes a bearing bracket 11 and an edge clamp 12, and a vacuum passage 13 is provided in the bearing bracket 11, which realizes the dual fixing effect of adsorption and clamping of the sheet, effectively preventing the sheet from shifting during the polishing process; the polishing cloth 21 is a long strip structure, and by adjusting the structure of the polishing cloth 21 and the structure of the polishing groove 221, the polishing effect of the polishing cloth 21 can be guaranteed, sufficient swing space is reserved for the sheet, and the groove wall of the V-groove obtained by polishing is simultaneously curved; a rotating shaft 232 is provided in the polishing bracket 23, which can drive the polishing block 22 to rotate, thereby adjusting the angle at which the polishing cloth 21 polishes the sheet, thereby ensuring that the V-groove obtained by polishing can meet the design requirements. Therefore, the edge polishing device provided in this embodiment can be compatible with both V-groove polishing and flat edge polishing. When the type of the positioning groove changes, there is no need to disassemble and adjust the polishing device.

[0061] The above embodiments are merely illustrative of the principles and effects of this application and are not intended to limit this application. Anyone skilled in the art may modify, alter, or combine the above embodiments without departing from the spirit and scope of this application. Therefore, all equivalent modifications or variations accomplished by a person of ordinary skill in the art without departing from the spirit and technical concepts disclosed in this application shall be covered by the claims of this application.

Claims

1. An edge polishing device for polishing the edge of a sheet, wherein the edge polishing includes V-groove polishing and flat edge polishing, characterized in that: It includes a bearing assembly, a robotic arm, a polishing assembly, a sliding assembly, and a spray assembly, wherein the axial direction of the sheet is the first direction, the radial direction of the sheet is the second direction, and the third direction is perpendicular to the first direction and the second direction respectively; The sheet is placed on the carrying assembly, the polishing assembly is located on one side of the sheet along the second direction, and includes a polishing cloth, a polishing block, and a polishing bracket. The polishing cloth is connected to the side of the polishing block facing the sheet. The robotic arm is connected to the carrying assembly, and is used to support and drive the carrying assembly to move for V-groove polishing. The polishing block is connected to a side of the polishing bracket close to the carrying assembly. The polishing bracket is connected to the sliding assembly, and the sliding assembly extends linearly along the third direction, and is used to drive the polishing bracket to move along the third direction for flat edge polishing. The spray assembly is connected to the polishing assembly and is used to spray polishing liquid onto the polishing cloth.

2. The edge polishing device according to claim 1, characterized in that: The bearing assembly includes a bearing bracket and at least three edge clamps. The sheet is placed on the bearing bracket. The at least three edge clamps are spaced apart from each other and surround the outer circumference of the sheet and are connected to the bearing bracket to clamp the sheet.

3. The edge polishing device according to claim 2, characterized in that: The supporting bracket has a first surface and a second surface arranged opposite to each other, the sheet is placed on the first surface of the supporting bracket, a vacuum passage is provided in the supporting bracket, the vacuum passage has a first opening and a second opening, the second opening is located on the second surface of the supporting bracket and is connected to the vacuum pipeline, and the first opening is located on the first surface of the supporting bracket and is used to adsorb the sheet.

4. The edge polishing device according to claim 2, characterized in that: The supporting bracket is in a cross-shaped structure and includes four edge clamps, and the four edge clamps are respectively connected to the four ends of the supporting bracket cross-shaped structure.

5. The edge polishing device according to claim 1, characterized in that: The polishing block is provided with a polishing groove penetrating the polishing block along the third direction, and the groove wall of the polishing groove faces the sheet; The polishing cloth is connected to the groove wall of the polishing groove, and in a side view of the polishing assembly along the second direction, the polishing cloth is a linear structure.

6. The edge polishing device according to claim 5, characterized in that: The polishing cloth comprises a polishing cloth body and a polishing cloth front end, wherein the polishing cloth body is located between the polishing cloth front end and the groove wall of the polishing groove; In a cross-sectional view of the polishing cloth taken along a direction perpendicular to its extension, the main body of the polishing cloth has a trapezoidal structure, having a top edge, a bottom edge, and a side edge connecting the top edge and the bottom edge. The front end of the polishing cloth has an arc-shaped outer edge, and the side where the bottom edge of the main body of the polishing cloth is located is connected to the groove wall of the polishing groove. The arc-shaped outer edge of the front end of the polishing cloth is tangent to the side edge of the main body of the polishing cloth.

7. The edge polishing device according to claim 6, characterized in that: The difference between the polishing angle of the polishing cloth and the preset angle is less than or equal to 0.5°, the height of the polishing cloth is greater than the preset depth, the width of the polishing cloth is greater than the preset width, and the aspect ratio of the polishing cloth is greater than the preset aspect ratio; Among them, the polishing angle of the polishing cloth is the angle between the two side edges of the polishing cloth body, the height of the polishing cloth is the distance between the bottom edge of the polishing cloth body and the tangent line of the front end of the polishing cloth parallel to the bottom edge, the width of the polishing cloth is the length of the bottom edge of the polishing cloth, and the aspect ratio of the polishing cloth is the ratio between the height of the polishing cloth and the width of the polishing cloth.

8. The edge polishing device according to claim 7, characterized in that: In the main view of the edge polishing device along the third direction, the groove wall of the polishing groove is an arc-shaped structure, the depth of the polishing groove is greater than three times the height of the polishing cloth, the curvature of the central area of ​​the groove wall of the polishing groove is less than the preset curvature, and the tangents at both ends of the arc-shaped structure of the polishing groove are perpendicular to the first direction.

9. The edge polishing device according to claim 1, characterized in that: The polishing bracket includes a bracket body, a rotating shaft and a driving member. The rotating shaft is rotatably connected to the bracket body, and the axial direction of the rotating shaft is parallel to the first direction. The driving member is connected to one end of the rotating shaft to drive the rotating shaft to rotate. The rotating shaft is connected to the bracket body to drive the bracket body to rotate. The polishing block is connected to the side of the bracket body close to the supporting component.

10. The edge polishing device according to claim 1, characterized in that: The sliding assembly includes a sliding rail and a sliding block, and the sliding block is respectively connected to the sliding rail and the polishing bracket to drive the polishing assembly to move along the third direction.

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