Ultrasonic machining device

Abstract

The utility model discloses an ultrasonic machining device which comprises an installation frame. The ultrasonic machining assembly comprises a movable part and an ultrasonic tool; the movable part is movably arranged on the mounting frame, and the movable part can move in the preset direction relative to the mounting frame; the end, away from the end machining head, of the ultrasonic tool is connected to the movable part. And the flexible supporting assembly is arranged on the side, away from the ultrasonic tool, of the movable part, and the flexible supporting assembly can generate deformation parallel to the preset direction and acts on the ultrasonic machining assembly to drive the ultrasonic machining assembly to move horizontally. In the process that the ultrasonic machining device is driven by the driving mechanism to move along the surface of the workpiece, if the machining head of the ultrasonic tool touches the convex points on the surface of the workpiece, the whole ultrasonic machining assembly can move in the direction away from the workpiece and compress the flexible supporting assembly, and therefore the risk that the workpiece and / or the machining head are / is broken can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of processing equipment, in particular to an ultrasonic processing device. Background Art

[0002] Ultrasonic machining is widely used for machining difficult-to-machine materials, such as non-metals and hard, brittle materials, due to the ultrasonic energy generated by the tool tip. Wafer materials commonly used in the semiconductor industry are also often processed ultrasonically due to their high brittleness and low fracture toughness. Ultrasonic machining can produce high-quality wafer materials. However, since the surfaces of workpieces such as wafer materials are often uneven and contain irregular bumps, in actual machining, the ultrasonic tool's machining head can collide with these bumps as it moves parallel to the wafer surface, causing damage to the head and / or the workpiece. Utility Model Content

[0003] The present invention aims to solve at least one of the technical problems existing in the prior art. To this end, the present invention provides an ultrasonic machining device that can reduce the risk of damage to an ultrasonic tool and / or a workpiece.

[0004] According to some embodiments of the present invention, the ultrasonic machining device includes: a mounting frame; an ultrasonic machining assembly, the ultrasonic machining assembly including a movable part and an ultrasonic tool; the movable part is movably arranged on the mounting frame, and the movable part can move along a preset direction relative to the mounting frame; the end of the ultrasonic tool away from the end machining head is connected to the movable part; a flexible support assembly, the flexible support assembly is arranged on a side of the movable part away from the ultrasonic tool, the flexible support assembly can generate deformation parallel to the preset direction, and act on the ultrasonic machining assembly to drive the ultrasonic machining assembly to translate.

[0005] The ultrasonic machining device according to the embodiment of the present invention has at least the following beneficial effects:

[0006] When the ultrasonic machining device of the present invention is in use, the machining head of the ultrasonic tool can contact the surface of the workpiece to process the surface of the workpiece. In the process of the ultrasonic machining device being driven by a driving mechanism and moving along the surface of the workpiece, if the machining head of the ultrasonic tool touches a protrusion on the surface of the workpiece, the protrusion will press against the machining head of the ultrasonic tool so that the machining head is forced upward, and the entire ultrasonic machining assembly moves in a direction away from the workpiece and compresses the flexible support assembly. In this way, the risk of wear of the machining head of the ultrasonic tool due to inconsistent force or fracture of the workpiece and / or the machining head can be reduced. When encountering a flat area on the workpiece surface, the flexible support assembly resets to allow the entire ultrasonic machining assembly to move downward, thereby ensuring that the force exerted by the ultrasonic tool on the workpiece surface is as consistent as possible and ensuring the reliability of the machining.

[0007] According to some embodiments of the present invention, the flexible support assembly includes an elastic member, both ends of which are respectively connected to the movable member and the mounting bracket, and the elastic member can generate elastic deformation parallel to the preset direction.

[0008] According to some embodiments of the present invention, the flexible support assembly further includes a guide column connected to the mounting frame, the axis of the guide column is parallel to the preset direction, and the movable part is provided with a guide hole for the guide column to pass through.

[0009] According to some embodiments of the present invention, a linear bearing is provided in the guide hole, the guide post is passed through the linear bearing, and the guide post and the linear bearing are in sliding fit.

[0010] According to some embodiments of the present invention, the flexible support assembly further comprises a support plate and a support column, wherein the support plate is arranged on a side of the movable member away from the ultrasonic tool, and the support column is arranged on a side of the support plate away from the movable member, and both ends of the support column are respectively connected to the support plate and the mounting frame;

[0011] Wherein, the elastic member is connected between the support plate and the movable member.

[0012] According to some embodiments of the present invention, the mounting frame includes a first cover plate, a second cover plate spaced apart from the first cover plate along the preset direction, and a connecting plate connected to the first cover plate and the second cover plate, wherein the second cover plate is provided with an avoidance hole;

[0013] The movable part is arranged between the first cover plate and the second cover plate, the ultrasonic tool can be movably passed through the avoidance hole, and the processing head of the ultrasonic tool is extended to the side of the second cover plate away from the first cover plate, and the flexible support component is connected between the first cover plate and the movable part.

[0014] According to some embodiments of the present invention, the mounting frame further includes a cover body connected to the first cover plate, the second cover plate and the connecting plate, and the cover body, the first cover plate, the second cover plate and the connecting plate jointly define a accommodating cavity for accommodating the ultrasonic machining component and the flexible support component.

[0015] According to some embodiments of the present invention, the ultrasonic machining device further includes a power supply module, which is connected to the movable part and is used to supply power to the ultrasonic tool.

[0016] According to some embodiments of the present invention, the ultrasonic machining device further includes a pressure sensor, and the pressure sensor is disposed on the mounting frame, the ultrasonic machining component, or the flexible support component.

[0017] According to some embodiments of the present invention, the pressure sensor is disposed on the flexible support assembly, and the pressure sensor is coaxially disposed with the processing head of the ultrasonic tool.

[0018] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0020] Figure 1 This is a structural diagram of an ultrasonic machining device according to an embodiment of the present invention;

[0021] Figure 2 This is a schematic diagram of the three-dimensional structure of a hidden cover of an ultrasonic machining device according to an embodiment of the present invention;

[0022] Figure 3 This is a side structural diagram of a hidden cover of an ultrasonic machining device according to an embodiment of the present invention;

[0023] Figure 4 This is a side structural diagram of a hidden cover of an ultrasonic machining device according to another embodiment of the present invention.

[0024] Figure Number:

[0025] 10. Ultrasonic machining device;

[0026] 100, mounting frame; 110, first cover plate; 120, second cover plate; 130, connecting plate; 140, cover body;

[0027] 200, ultrasonic machining assembly; 210, movable part; 220, ultrasonic tool; 221, machining head; 230, linear bearing;

[0028] 300, flexible support assembly; 310, elastic member; 320, guide post; 330, support plate; 340, support post;

[0029] 400, power supply module;

[0030] 500, connector;

[0031] 600. Pressure sensor. DETAILED DESCRIPTION

[0032] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0033] In the description of the present invention, it should be understood that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "axial", "radial", "circumferential" and the like indicate orientations or positional relationships based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention. In addition, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, unless otherwise specified, "multiple" means two or more.

[0034] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0035] like Figure 1 、 Figure 2 As shown, an ultrasonic machining device 10 provided by an embodiment of the present invention includes a mounting frame 100 and an ultrasonic machining assembly 200 . The mounting frame 100 is used to mount the ultrasonic machining assembly 200 , and the ultrasonic machining assembly 200 is used to machine a workpiece.

[0036] The workpiece may be a wafer, and the ultrasonic machining device 10 may be mounted on a drive mechanism capable of driving the ultrasonic machining device 10 to move longitudinally or horizontally. In other words, the ultrasonic machining assembly 200 may be driven by the drive mechanism to move up and down, left and right, and forward and backward, thereby machining the surface of the workpiece. The drive mechanism may be a conventional drive mechanism, such as a drive mechanism used in a CNC machine tool.

[0037] It should be noted that the type of workpiece is not limited to the above-mentioned wafer, and the ultrasonic machining assembly 200 can polish or grind the surface of the workpiece.

[0038] Combine Figure 2 and Figure 3 The ultrasonic machining assembly 200 includes a movable part 210 and an ultrasonic tool 220. The movable part 210 can be movably arranged on the mounting frame 100. The movable part 210 can move along a preset direction relative to the mounting frame 100. One end of the ultrasonic tool 220 away from the end machining head 221 of the ultrasonic tool 220 is connected to the movable part 210.

[0039] It should be noted that the ultrasonic tool 220 includes an ultrasonic spindle capable of generating ultrasonic waves and a processing head 221 connected to one end of the ultrasonic spindle. The ultrasonic spindle is capable of generating ultrasonic waves, and the processing head 221 is used to contact and process a workpiece. The processing head 221 is a tool, specifically a grinding head or a polishing head.

[0040] It is understandable that the movable member 210 can move relative to the mounting frame 100 along a preset direction, so that the ultrasonic machining assembly 200 as a whole moves relative to the mounting frame 100 along the preset direction.

[0041] Specifically in this embodiment, the movable member 210 is a movable plate. The end of the ultrasonic tool 220 away from the processing head 221 is fixedly connected to the movable member 210. The ultrasonic tool 220 and the movable member 210 can be fixed by welding, clamping or threading.

[0042] Furthermore, the ultrasonic machining device 10 also includes a flexible support component 300, which is arranged on the side of the movable part 210 away from the ultrasonic tool 220. The flexible support component 300 can generate deformation parallel to a preset direction and act on the ultrasonic machining component 200 to drive the ultrasonic machining component 200 to translate.

[0043] When the ultrasonic machining device 10 of the present invention is in use, the machining head 221 of the ultrasonic tool 220 can contact the surface of the workpiece to machine the surface of the workpiece. When the ultrasonic machining device 10 is driven by a driving mechanism and moves along the surface of the workpiece, if the machining head 221 of the ultrasonic tool 220 touches a protrusion on the surface of the workpiece, the protrusion will press against the machining head 221 of the ultrasonic tool 220, causing the machining head 221 to be forced upward, and the entire ultrasonic machining assembly 200 will move in a direction away from the workpiece and compress the flexible support assembly 300. This can reduce the risk of wear of the machining head 221 of the ultrasonic tool 220 due to inconsistent force, or the risk of fracture of the workpiece and / or the machining head 221. When encountering a flat area on the workpiece surface, the flexible support assembly 300 resets to allow the entire ultrasonic machining assembly 200 to move downward, thereby ensuring that the force exerted by the ultrasonic tool 220 on the workpiece surface is as consistent as possible, thereby ensuring machining reliability.

[0044] Combine Figure 1 and Figure 3 In some embodiments, the mounting frame 100 covers the ultrasonic machining assembly 200 and the flexible support assembly 300 , and the machining head 221 of the ultrasonic tool 220 extends out of the mounting frame 100 .

[0045] It is understandable that the mounting frame 100 covers the ultrasonic machining assembly 200 and can provide protection for the ultrasonic machining assembly 200. In addition, the machining head 221 of the ultrasonic tool 220 extends out of the mounting frame 100, and the mounting frame 100 will not hinder the ultrasonic tool 220 from machining the workpiece.

[0046] Specifically, the mounting frame 100 includes a first cover plate 110, a second cover plate 120, a connecting plate 130 and a cover body 140, the second cover plate 120 and the first cover plate 110 are spaced apart along a preset direction, the connecting plate 130 is connected between the first cover plate 110 and the second cover plate 120, and the cover body 140 is connected to the first cover plate 110, the second cover plate 120 and the connecting plate 130, wherein the cover body 140, the first cover plate 110, the second cover plate 120 and the connecting plate 130 jointly define an accommodating cavity; the ultrasonic machining assembly 200 and the flexible support assembly 300 are arranged in the accommodating cavity, wherein the machining head 221 of the ultrasonic tool 220 extends out of the accommodating cavity.

[0047] Furthermore, the second cover plate 120 is provided with an avoidance hole; the movable part 210 is arranged between the first cover plate 110 and the second cover plate 120, and the end of the ultrasonic tool 220 away from the processing head 221 of the ultrasonic tool 220 is connected to the movable part 210, and the ultrasonic tool 220 can be movably passed through the avoidance hole, and the processing head 221 of the ultrasonic tool 220 extends to the side of the second cover plate 120 away from the first cover plate 110.

[0048] It should be noted that the flexible support assembly 300 is connected between the first cover plate 110 and the movable part 210. When the ultrasonic tool 220 is squeezed by the protrusions on the surface of the workpiece and moves toward the first cover plate 110, the movable part 210 will move with the ultrasonic tool 220 and squeeze the flexible support assembly 300, causing the flexible support assembly 300 to deform along a preset direction. When encountering a flat area on the surface of the workpiece, the flexible support assembly 300 is reset to allow the ultrasonic tool 220 to move downward, thereby ensuring that the force exerted by the ultrasonic tool 220 on the surface of the workpiece is as consistent as possible, thereby ensuring the reliability of the processing.

[0049] like Figure 3 As shown, the flexible support assembly 300 includes an elastic member 310. The elastic member 310 is located on the side of the movable member 210 away from the ultrasonic tool 220. The two ends of the elastic member 310 are respectively connected to the movable member 210 and the mounting bracket 100. The elastic member 310 can generate elastic deformation parallel to a predetermined direction. The elastic member 310 can be a spring, elastic rubber, or a spring.

[0050] It should be noted that there can be multiple elastic members 310, and the multiple elastic members 310 are arranged at intervals along a direction perpendicular to the preset direction. The multiple elastic members 310 are commonly connected to the movable member 210, which is beneficial to improving the uniformity of force applied to various parts of the movable member 210.

[0051] It is understood that when the ultrasonic machining device 10 is driven by a driving mechanism and moves along the surface of a workpiece, if the machining head 221 of the ultrasonic tool 220 touches a raised point on the workpiece surface, the raised point will press against the machining head 221 of the ultrasonic tool 220, causing the machining head 221 to be forced upward, and the entire ultrasonic machining assembly 200 will move in a direction away from the workpiece and compress the elastic member 310. This can reduce the risk of wear of the machining head 221 of the ultrasonic tool 220 due to inconsistent force, or the risk of fracture of the workpiece and / or the machining head 221. When encountering a flat area on the workpiece surface, the elastic member 310 resets and drives the entire ultrasonic machining assembly 200 to translate downward, thereby ensuring that the force exerted by the ultrasonic tool 220 on the workpiece surface is as consistent as possible, thereby ensuring machining reliability.

[0052] Furthermore, the flexible support assembly 300 further includes a guide post 320 connected to the mounting frame 100 . The axial direction of the guide post 320 is parallel to the preset direction, and the movable member 210 is provided with a guide hole for the guide post 320 to pass through.

[0053] Specifically, the depth of the guide hole is parallel to the preset direction and extends through both sides of the movable member 210. The guide post 320 is connected to the mounting bracket 100 and extends through the guide hole. The guide post 320 can guide the movable member 210 to move in the preset direction, thereby improving the accuracy of the movable member 210's movement direction.

[0054] Furthermore, a linear bearing 230 is provided in the guide hole, and the guide column 320 is passed through the linear bearing 230 and slidably engaged with the linear bearing 230 .

[0055] It should be noted that the flexible support assembly 300 also includes a support plate 330 and a support column 340, wherein the support plate 330 is arranged on the side of the movable part 210 away from the ultrasonic tool 220, and the support column 340 is arranged on the side of the support plate 330 away from the movable part 210, and the two ends of the support column 340 are respectively connected to the support plate 330 and the mounting frame 100; the elastic part 310 is arranged between the support plate 330 and the movable part 210, and one end of the elastic part 310 is connected to the support plate 330, and the other end is connected to the movable part 210.

[0056] Specifically, the support plate 330 is located on a side of the first cover plate 110 close to the movable member 210 , and a support column 340 is connected between the support plate 330 and the first cover plate 110 . The support plate 330 is connected to the first cover plate 110 by the support column 340 .

[0057] like Figure 3 As shown, in some embodiments, the ultrasonic machining device 10 further includes a power supply module 400 . The power supply module 400 is connected to the movable part 210 , and the power supply module 400 is used to supply power to the ultrasonic tool 220 .

[0058] Specifically in this embodiment, the power supply module 400 is a wireless power supply module, and the power supply module 400 can wirelessly power the ultrasonic tool 220 .

[0059] Furthermore, a connecting part 500 is connected to the movable part 210, the power supply module 400 is connected to the connecting part 500, a wireless power receiving module is integrated inside the ultrasonic tool 220, and the distance between the power supply module 400 and the wireless power receiving module meets the requirement that the power supply module 400 supplies power to the ultrasonic tool 220 through the wireless power receiving module.

[0060] like Figure 4 As shown, of course, in other embodiments, the ultrasonic machining device 10 may not be provided with the above-mentioned power supply module 400, and the ultrasonic machining device 10 may be connected to an external ultrasonic power supply through a wire.

[0061] In some embodiments, the ultrasonic machining device 10 further includes a pressure sensor 600 . The pressure sensor 600 is used to detect the reaction force exerted on the ultrasonic tool 220 by the workpiece, that is, the machining pressure exerted by the ultrasonic tool on the workpiece can be obtained.

[0062] Specifically, the pressure sensor 600 may be disposed on the mounting bracket 100 , the ultrasonic machining assembly 200 , or the flexible support assembly 300 .

[0063] It should be noted that when the processing head 221 of the ultrasonic tool 220 processes the surface of the workpiece, the reaction force from the workpiece received by the processing head 221 of the ultrasonic tool 220 will be transmitted to the various structures of the ultrasonic processing device. The pressure sensor 600 is set on the mounting frame 100, the ultrasonic processing component 200 or the flexible support component 300 to detect the reaction force from the workpiece received by the ultrasonic tool 220.

[0064] Specifically in this embodiment, the pressure sensor 600 is arranged on the flexible support component 300, specifically on the side of the support plate 330 away from the movable part 210, and the pressure sensor 600 is coaxially arranged with the processing head 221 of the ultrasonic tool 220, so that the pressure value detected by the pressure sensor 600 is more accurate.

[0065] When the ultrasonic machining device 10 of the present invention is in use, the machining head 221 of the ultrasonic tool 220 can contact the surface of the workpiece to machine the surface of the workpiece. When the ultrasonic machining device 10 is driven by a driving mechanism and moves along the surface of the workpiece, if the machining head 221 of the ultrasonic tool 220 touches a protrusion on the surface of the workpiece, the protrusion will press against the machining head 221 of the ultrasonic tool 220, causing the machining head 221 to be forced upward, and the entire ultrasonic machining assembly 200 will move in a direction away from the workpiece and compress the flexible support assembly 300. This can reduce the risk of wear of the machining head 221 of the ultrasonic tool 220 due to inconsistent force, or the risk of fracture of the workpiece and / or the machining head 221. When encountering a flat area on the workpiece surface, the flexible support assembly 300 resets to allow the entire ultrasonic machining assembly 200 to move downward, thereby ensuring that the force exerted by the ultrasonic tool 220 on the workpiece surface is as consistent as possible, thereby ensuring machining reliability.

[0066] Throughout this specification, reference to terms such as "one embodiment," "some embodiments," "illustrative embodiments," "examples," "specific examples," or "some examples" means that the specific features, structures, materials, or characteristics described in conjunction with that embodiment or example are included in at least one embodiment or example of the present invention. In this specification, the illustrative use of the above terms does not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0067] Although the embodiments of the present invention have been shown and described, those skilled in the art will appreciate that various changes, modifications, substitutions and variations may be made to the embodiments without departing from the principles and purpose of the present invention, and that the scope of the present invention is defined by the claims and their equivalents.

Claims

1. An ultrasonic machining device, characterized in that: include: Mounting rack; An ultrasonic machining assembly, comprising a movable member and an ultrasonic tool; the movable member is movably disposed on the mounting frame and is capable of moving relative to the mounting frame in a preset direction; an end of the ultrasonic tool remote from the end machining head is connected to the movable member; A flexible support component is arranged on a side of the movable part away from the ultrasonic tool. The flexible support component can generate deformation parallel to the preset direction and act on the ultrasonic machining component to drive the ultrasonic machining component to move horizontally.

2. The ultrasonic machining device according to claim 1, wherein: The flexible support assembly includes an elastic member, two ends of which are respectively connected to the movable member and the mounting bracket, and the elastic member can generate elastic deformation parallel to the preset direction.

3. The ultrasonic machining device according to claim 2, wherein: The flexible support assembly further includes a guide column connected to the mounting frame, the axis of the guide column is parallel to the preset direction, and the movable member is provided with a guide hole for the guide column to pass through.

4. The ultrasonic machining device according to claim 3, wherein: A linear bearing is provided in the guide hole, the guide post is passed through the linear bearing, and the guide post and the linear bearing are slidably matched.

5. The ultrasonic machining device according to claim 2, wherein: The flexible support assembly further includes a support plate and a support column, wherein the support plate is arranged on a side of the movable member away from the ultrasonic tool, and the support column is arranged on a side of the support plate away from the movable member, and both ends of the support column are respectively connected to the support plate and the mounting frame; Wherein, the elastic member is connected between the support plate and the movable member.

6. The ultrasonic machining device according to claim 1, wherein: The mounting frame includes a first cover plate, a second cover plate spaced apart from the first cover plate along the preset direction, and a connecting plate connected to the first cover plate and the second cover plate, wherein the second cover plate is provided with an avoidance hole; The movable part is arranged between the first cover plate and the second cover plate, the ultrasonic tool can be movably passed through the avoidance hole, and the processing head of the ultrasonic tool is extended to the side of the second cover plate away from the first cover plate, and the flexible support component is connected between the first cover plate and the movable part.

7. The ultrasonic machining device according to claim 6, wherein: The mounting frame further includes a cover body connected to the first cover plate, the second cover plate and the connecting plate. The cover body, the first cover plate, the second cover plate and the connecting plate jointly define an accommodating cavity for accommodating the ultrasonic machining assembly and the flexible support assembly.

8. The ultrasonic machining device according to claim 1, wherein: It also includes a power supply module, which is connected to the movable part and is used to supply power to the ultrasonic tool.

9. The ultrasonic machining device according to claim 1, wherein: It also includes a pressure sensor, which is arranged on the mounting bracket, the ultrasonic machining component or the flexible support component.

10. The ultrasonic machining device according to claim 9, wherein: The pressure sensor is arranged on the flexible support component, and the pressure sensor is coaxially arranged with the processing head of the ultrasonic tool.

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