Graphite disc for protecting oxidation of resistance heating wire

Abstract

The utility model relates to a graphite plate for protecting oxidation of a resistance heating wire, and relates to the technical field of MOCVD equipment, the graphite plate comprises a base and a graphite plate, a bottom ring is integrally fixed at the bottom of the graphite plate, a top ring is integrally fixed at the top of the base, a first ring groove for embedding the top ring is formed in the bottom of the graphite plate, and a second ring groove for embedding the top ring is formed in the bottom of the graphite plate. The top of the base is provided with a second ring groove allowing the bottom ring to be embedded therein. According to the graphite disc, the bottom ring and the groove wall of the first annular groove are combined to form a bent contact face, the top ring and the groove wall of the second annular groove are combined to form a bent contact face, the sealing performance between the graphite disc and the base is improved, and invasion of oxidizing substances is reduced; after the base and the graphite plate are combined, the base and the graphite plate are tightly attached through the end face, the base and the graphite plate are accurately positioned through the positioning pin, and spontaneous separation of the base and the graphite plate is limited. And the sealing performance is further improved through the first ceramic sealing ring and the second ceramic sealing ring, so that the resistance heating wire is protected from being oxidized, parameter stability of the resistance heating wire is kept for a long time, and high heating efficiency is kept.

Description

Technical Field

[0001] The present application relates to the technical field of MOCVD equipment, and in particular to a graphite disk for protecting a resistance heating wire from oxidation. Background Art

[0002] MOCVD is a vapor phase epitaxial growth technology that has achieved remarkable success in the fabrication of semiconductor materials, devices, and thin films. The reaction chamber of an MOCVD device consists of a quartz tube and a graphite susceptor made of high-purity graphite and coated with a SiC layer. Heating is typically performed using high-frequency induction heating, with radiation heating being a less common method. Temperature control is achieved using thermocouples and temperature controllers.

[0003] An existing invention patent application with publication number CN104451605A discloses a tray for MOCVD equipment. The tray comprises a flat cylindrical body and a cover covering the upper surface of the body. The body can be formed of graphite and covered with a silicon carbide protective layer. The cover has a groove on its upper surface for accommodating substrates undergoing the MOCVD process. The cover can be formed of quartz.

[0004] Regarding the above-mentioned related technologies, the inventor believes that the base and the graphite disk are separate types, and the graphite disk is installed on the base. There is a large gap after installation. The oxide enters the heating wire through the gap, resulting in the formation of an oxide layer on the heating wire, which changes the physical properties of the conductor. As the oxidation time accumulates, the oxide layer will gradually thicken, reducing the effective conductive cross-sectional area of ​​the resistance heating wire. The increase in the resistance of the resistance heating wire will not only affect its heating efficiency, but also cause changes in parameters such as current and voltage, causing temperature field fluctuations to affect epitaxial performance. Utility Model Content

[0005] The present application provides a graphite disk for protecting a resistance heating wire from oxidation. By setting a sealing structure between a base and the graphite disk, the contact between external oxides and the resistance heating wire is reduced, thereby reducing the oxidation of the resistance heating wire.

[0006] The present application provides a graphite disk for protecting a resistance heating wire from oxidation, which adopts the following technical solution:

[0007] A graphite disk for protecting a resistance heating wire from oxidation comprises a base and a graphite disk. A bottom ring is integrally fixed to the bottom of the graphite disk, a top ring is integrally fixed to the top of the base, a first ring groove is provided at the bottom of the graphite disk for embedding the top ring, and a second ring groove is provided at the top of the base for embedding the bottom ring.

[0008] By adopting the above technical solution, after the base and the graphite disk are combined, the base and the graphite disk are tightly attached through the end faces, and the bottom ring and the groove wall of the ring groove one, and the top ring and the groove wall of the ring groove two are combined to form a bent contact surface, thereby improving the sealing between the graphite disk and the base, reducing the intrusion of oxidizing substances, thereby protecting the resistance heating wire from oxidation, and allowing the resistance heating wire to maintain stable parameters for a long time and maintain a high heating efficiency.

[0009] Optionally, a concave hole is provided on one side of the base and the graphite disk facing each other, and the upper and lower concave holes face each other and are both inserted with a positioning pin made of quartz material.

[0010] By adopting the above technical solution, the base and the graphite disk can be precisely docked by means of the positioning pins, and there is no radial offset after the base and the graphite disk are assembled.

[0011] Optionally, the positioning pin is interference fit with the concave hole, and six positioning pins are evenly arranged along the circumference of the base.

[0012] By adopting this technical solution, the interference fit between the locating pin and the recessed hole ensures stability after the assembly is completed. The locating pin is difficult to pull out of the recessed hole, that is, the base and the graphite disk remain in close contact and are not likely to separate spontaneously, thus maintaining a good sealing effect. By providing six locating pins, the force is more uniform and stable.

[0013] Optionally, the base includes a bottom column and a support plate, the support plate is integrally fixed to the top of the bottom column, and the outer diameter of the support plate is larger than the outer diameter of the bottom column.

[0014] By adopting the above technical solution, the area of ​​the top of the base contacting the graphite disk is expanded through the support disk, which facilitates the arrangement of the sealing structure and the positioning structure.

[0015] Optionally, a ceramic sealing ring 1 is embedded in the inner top of the ring groove 1, and the ceramic sealing ring 1 contacts the top surface of the top ring through the bottom surface.

[0016] By adopting the above technical solution, the sealing between the ring groove 1 and the top ring is further strengthened through the ceramic sealing ring 1.

[0017] Optionally, a second ceramic sealing ring is embedded in the inner bottom of the second ring groove, and the second ceramic sealing ring contacts the bottom surface of the bottom ring through the top surface.

[0018] By adopting the above technical solution, the sealing between the second ring groove and the bottom ring is further strengthened through the second ceramic sealing ring.

[0019] Optionally, the material of the ceramic sealing ring 1 and the ceramic sealing ring 2 is silicon carbide.

[0020] By adopting the above technical solutions, silicon carbide ceramics not only have excellent high-temperature mechanical properties, but also have high flexural strength, excellent oxidation resistance, good corrosion resistance, etc.

[0021] Optionally, the base is made of quartz.

[0022] By adopting the above technical solution, quartz is resistant to high temperatures, has low thermal conductivity, and has good thermal insulation, which reduces heat loss in the resistance heating wire.

[0023] In summary, this application includes at least one of the following beneficial technical effects:

[0024] 1. The bottom ring and the groove wall of the first ring, and the top ring and the groove wall of the second ring form a curved contact surface, which improves the sealing between the graphite disk and the base and reduces the intrusion of oxidizing substances;

[0025] 2. After the base and the graphite disk are combined, the base and the graphite disk are tightly attached through the end faces, and the base and the graphite disk are accurately positioned by the positioning pins, and the spontaneous separation of the base and the graphite disk is restricted;

[0026] 3. The sealing performance is further improved by using ceramic sealing ring 1 and ceramic sealing ring 2, thereby protecting the resistance heating wire from oxidation, so that the resistance heating wire can maintain stable parameters for a long time and maintain high heating efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 is a perspective view of a graphite disk for protecting a resistance heating wire from oxidation according to an embodiment;

[0028] Figure 2 is an exploded view of an embodiment;

[0029] Figure 3 is a cross-sectional view of an embodiment;

[0030] Figure 4 yes Figure 3 Enlarged view of point A.

[0031] Explanation of the accompanying reference numerals: 1. base; 2. graphite disk; 13. bottom column; 14. support disk; 11. bottom ring; 21. top ring; 22. ring groove 1; 12. ring groove 2; 23. ceramic sealing ring 1; 15. ceramic sealing ring 2; 3. recessed hole; 4. positioning pin. DETAILED DESCRIPTION

[0032] The present application is further described in detail below with reference to the accompanying drawings.

[0033] Reference Figure 1This embodiment discloses a graphite disk for protecting a resistance heating wire from oxidation, including a base 1 and a graphite disk 2. The graphite disk 2 is installed on the top of the base 1. The base 1 is made of quartz. Quartz is resistant to high temperatures, has low thermal conductivity, and has good thermal insulation, thereby reducing heat loss from the resistance heating wire.

[0034] Reference Figure 2 The base 1 includes a bottom column 13 and a support plate 14. The support plate 14 is integrally fixed to the top of the bottom column 13. The outer diameter of the support plate 14 is larger than the outer diameter of the bottom column 13, so that the base 1 is T-shaped when viewed from the front. The support plate 14 expands the area of ​​the top of the base 1 that contacts the graphite plate 2, which facilitates the setting of the sealing structure and the positioning structure.

[0035] Reference Figure 3 and Figure 4 A bottom ring 11 is integrally fixed to the bottom of the graphite disk 2, and a top ring 21 is integrally fixed to the top of the base 1. A first ring groove 22 is defined at the bottom of the graphite disk 2 for the top ring 21 to fit into, and a second ring groove 12 is defined at the top of the base 1 for the bottom ring 11 to fit into. When the graphite disk 2 and base 1 are assembled, the bottom ring 11 and the walls of the first ring groove 22, and the top ring 21 and the walls of the second ring groove 12, form a curved contact surface, improving the seal between the graphite disk 2 and base 1 and reducing the intrusion of oxidizing substances.

[0036] A ceramic sealing ring 23 is embedded in the inner top of ring groove 12, its bottom surface contacting the top surface of top ring 21. A ceramic sealing ring 15 is embedded in the inner bottom of ring groove 21, its top surface contacting the bottom surface of bottom ring 11. Both sealing rings 23 and 15 are made of silicon carbide. These rings further strengthen the seal between graphite disk 2 and base 1. Ceramic sealing rings are conventional and high-temperature resistant materials. Silicon carbide ceramic not only possesses excellent high-temperature mechanical properties, but also boasts high flexural strength, excellent oxidation resistance, and good corrosion resistance.

[0037] Reference Figure 2 and Figure 3 The base 1 and the graphite disk 2 are provided with a recessed hole 3 on one side facing each other, and the upper and lower recessed holes 3 face each other and are jointly inserted with a positioning pin 4 made of quartz. The positioning pin 4 is interference fit with the recessed hole 3, and six positioning pins 4 are evenly arranged along the circumference of the base 1, that is, a recessed hole 3 is designed every 60° in the circumference of the top surface of the base 1 and the bottom surface of the graphite disk 2. The positioning pin 4 made of quartz is resistant to high temperature. The positioning pin 4 can accurately connect the base 1 and the graphite disk 2. There is no radial offset after the base 1 and the graphite disk 2 are assembled, and the interference fit between the positioning pin 4 and the recessed hole 3 makes the assembly stable. The positioning pin 4 is difficult to pull out from the recessed hole 3, that is, the base 1 and the graphite disk 2 remain in a close contact state and are not easy to separate spontaneously, thereby maintaining a good sealing effect.

[0038] The implementation principle of the graphite disk for protecting the resistance heating wire from oxidation in the embodiment of the present application is as follows: after the base 1 and the graphite disk 2 are combined, the base 1 and the graphite disk 2 are tightly attached through the end faces, and the base 1 and the graphite disk 2 are accurately positioned by the positioning pin 4, and the spontaneous separation of the base 1 and the graphite disk 2 is restricted. The bottom ring 11 and the groove wall of the ring groove 1 22, and the top ring 21 and the groove wall of the ring groove 2 12 are combined to form a bent contact surface, which improves the sealing between the graphite disk 2 and the base 1 and reduces the intrusion of oxidizing substances. The sealing is further improved by the ceramic sealing ring 1 23 and the ceramic sealing ring 2 15, thereby protecting the resistance heating wire from oxidation, allowing the resistance heating wire to maintain stable parameters for a long time, and maintaining a high heating efficiency.

[0039] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A graphite disk for protecting a resistance heating wire from oxidation, characterized in that: The invention comprises a base (1) and a graphite disk (2), wherein a bottom ring (11) is integrally fixed to the bottom of the graphite disk (2), and a top ring (21) is integrally fixed to the top of the base (1). The bottom of the graphite disk (2) is provided with a first ring groove (22) for the top ring (21) to be embedded, and the top of the base (1) is provided with a second ring groove (12) for the bottom ring (11) to be embedded.

2. The graphite disk for protecting a resistance heating wire from oxidation according to claim 1, characterized in that: A concave hole (3) is respectively provided on one side of the base (1) and the graphite disk (2) facing each other, and the upper and lower concave holes (3) face each other and are both provided with a positioning pin (4) made of quartz material.

3. The graphite disk for protecting a resistance heating wire from oxidation according to claim 2, characterized in that: The positioning pin (4) is interference-fitted with the concave hole (3), and six positioning pins (4) are evenly arranged along the circumference of the base (1).

4. The graphite disk for protecting a resistance heating wire from oxidation according to claim 1, characterized in that: The base (1) comprises a bottom column (13) and a support plate (14); the support plate (14) is integrally fixed to the top of the bottom column (13); and the outer diameter of the support plate (14) is larger than the outer diameter of the bottom column (13).

5. The graphite disk for protecting a resistance heating wire from oxidation according to claim 1, characterized in that: A ceramic sealing ring (23) is embedded in the inner top of the annular groove (22), and the ceramic sealing ring (23) contacts the top surface of the top ring (21) through the bottom surface.

6. The graphite disk for protecting a resistance heating wire from oxidation according to claim 5, characterized in that: A second ceramic sealing ring (15) is embedded in the inner bottom of the second ring groove (12), and the second ceramic sealing ring (15) contacts the bottom surface of the bottom ring (11) through the top surface.

7. The graphite disk for protecting a resistance heating wire from oxidation according to claim 6, characterized in that: The material of the ceramic sealing ring 1 (23) and the ceramic sealing ring 2 (15) is silicon carbide.

8. The graphite disk for protecting a resistance heating wire from oxidation according to claim 1, characterized in that: The base (1) is made of quartz.

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