Flow adjusting device, tail gas filtering equipment and boron diffusion system

Abstract

The utility model provides a flow adjusting device, tail gas filtering equipment and a boron diffusion system.The flow adjusting device comprises a base body provided with a through hole; first ports of the first channel, the second channel and the third channel are communicated with the through hole; and the rotating valve element is installed in the through hole and comprises an adjusting channel, a first through opening, a second through opening and a third through opening, and the three through openings communicate with the adjusting channel and correspond to the first ports of the three channels correspondingly. When the rotating valve element rotates, the adjusting channel can be driven to rotate together, so that the communicating section of the third port and the communicating section of the first port of the third channel are staggered or coincide, and therefore the communicating section of the third port and the communicating section of the first port of the third channel are changed along with rotation of the rotating valve element, and the liquid outlet rate of the third channel is adjusted. Therefore, the liquid outlet rates of the second channel and the third channel are balanced, so that the liquid adding rates of the filter bottles corresponding to the second channel and the third channel are relatively uniform, and the liquid adding efficiency of the filter system is improved.

Description

Technical Field

[0001] The present application belongs to the technical field of tail gas treatment, and in particular relates to a flow regulating device, tail gas filtering equipment and a boron diffusion system. Background Art

[0002] The boron diffusion process involved in photovoltaic cell production produces exhaust gas. To ensure safe exhaust discharge, liquid filtration can be used to treat the exhaust gas. Liquid filtration involves dissolving the exhaust gas in a filter liquid.

[0003] Specifically, filter bottles can be used to hold filtered liquid. To improve exhaust gas filtration, the filter bottles are connected in series. However, once a filter bottle at the rear end of the exhaust line has a certain amount of filtered liquid, the filtered liquid will flood the port of the air pipe within the filter bottle. This will cause a certain resistance to the gas discharge from the other filter bottle in series at the front end of the filter bottle. This will cause an imbalance in the air pressure between the two adjacent filter bottles, which in turn affects the liquid filling rate of the front filter bottle, resulting in different liquid filling rates between the two adjacent filter bottles, and thus affecting the liquid filling efficiency of the entire filtration system.

[0004] It should be noted that the above content is not necessarily prior art, nor is it intended to limit the scope of patent protection of this application. Utility Model Content

[0005] The embodiments of the present application provide a flow regulating device, an exhaust gas filtration device, and a boron diffusion system to solve or alleviate one or more technical problems in the prior art.

[0006] A first aspect of an embodiment of the present application provides a flow regulating device, comprising:

[0007] a substrate, wherein the substrate is provided with a through hole;

[0008] a first channel, wherein a first port of the first channel is connected to the through hole;

[0009] a second channel, wherein a first port of the second channel is connected to the through hole;

[0010] a third channel, wherein a first port of the third channel is connected to the through hole;

[0011] A rotating valve core is installed in the through hole, and the rotating valve core can rotate around the central axis of the through hole. The rotating valve core includes:

[0012] An adjusting channel is provided in the rotating valve core;

[0013] a first opening, located on an outer wall of the rotating valve core and communicating with the regulating channel, and arranged corresponding to the first port of the first channel;

[0014] a second opening, located on the outer wall of the rotating valve core and communicating with the regulating channel, and arranged corresponding to the first port of the second channel;

[0015] a third opening, located on the outer wall of the rotating valve core and communicating with the regulating channel, and arranged corresponding to the first port of the third channel;

[0016] Wherein, a communicating cross section between the third opening and the first port of the third channel may change as the rotating valve core rotates.

[0017] Optionally, a cross-sectional area of ​​the first opening is larger than a cross-sectional area of ​​the first port of the first channel.

[0018] Optionally, the cross-sectional area of ​​the second opening is larger than the cross-sectional area of ​​the first port of the second channel;

[0019] When the rotating valve core rotates in the first direction, the communicating cross-section between the second opening and the first port of the second channel remains unchanged; and

[0020] The communicating cross section between the third opening and the first port of the third channel gradually decreases.

[0021] Optionally, the flow regulating device includes a driving assembly, and the driving assembly is used to drive the rotating valve core to rotate.

[0022] Optionally, the outer wall of the rotating valve core is provided with a first latching tooth;

[0023] The drive assembly includes:

[0024] a gear, hinged to the first latching tooth;

[0025] A driving motor is connected to the center of one side surface of the gear and is used for driving the gear to rotate, thereby driving the rotating valve core to rotate.

[0026] Optionally, the flow regulating device further includes an air pressure difference sensor, which is electrically connected to the drive motor and is used to control the rotation direction of the drive motor according to the air pressure difference between the filter bottles.

[0027] Optionally, the flow regulating device further includes a sealing ring, which is arranged around the outer wall of the rotating valve core and is clamped between the rotating valve core and the inner wall of the through hole.

[0028] A second aspect of the embodiments of the present application provides an exhaust gas filtering device, comprising:

[0029] A flow regulating device as described in any one of the above items;

[0030] a source liquid component, connected to the second port of the first channel, and configured to output filtered liquid to the flow regulating device;

[0031] a first filtering bottle, connected to the second port of the second channel;

[0032] The second filter bottle is communicated with the second port of the third channel, and the second filter bottle is also connected in series with the first filter bottle through a gas pipeline.

[0033] Optionally, the exhaust gas filtering device further includes:

[0034] a first on-off valve connected in series between the second port of the second channel and the first filtering bottle;

[0035] The second on-off valve is connected in series between the second port of the third channel and the second filtering bottle.

[0036] Optionally, the exhaust gas filtering device further includes a third filtering bottle;

[0037] Wherein, the first filter bottle, the second filter bottle and the third filter bottle are sequentially connected in series.

[0038] A third aspect of the embodiments of the present application provides a boron diffusion system, comprising the flow regulating device as described in any one of the above items; or

[0039] Comprising the exhaust gas filtering device as described in any one of the above items.

[0040] The above technical solution adopted in the embodiments of the present application may have the following advantages:

[0041] The first channel, the second channel, and the third channel are interconnected through a through hole. The rotating valve core in the through hole drives the regulating channel to rotate together when rotating, so that the communicating cross-sections of the third port and the first port of the third channel are staggered or overlapped with each other, so that the communicating cross-sections of the third port and the first port of the third channel change with the rotation of the rotating valve core to adjust the liquid discharge rate of the third channel, thereby balancing the liquid discharge rates of the second channel and the third channel, so that the liquid addition rates of the filter bottles corresponding to the second channel and the third channel are relatively uniform, thereby improving the liquid addition efficiency of the entire filtration system.

[0042] The above summary is for illustrative purposes only and is not intended to be limiting in any way. In addition to the illustrative aspects, embodiments and features described above, further aspects, embodiments and features of the present application will be readily apparent by reference to the accompanying drawings and the following detailed description. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In the accompanying drawings, unless otherwise specified, the same reference numerals throughout the multiple drawings represent the same or similar components or elements. These drawings are not necessarily drawn to scale. It should be understood that these drawings only depict some embodiments disclosed in this application and should not be construed as limiting the scope of this application.

[0044] Figure 1 A schematic structural diagram of a flow regulating device provided in an embodiment of the present application;

[0045] Figure 2 Another structural schematic diagram of the flow regulating device provided in an embodiment of the present application;

[0046] Figure 3 For the Figure 2 Schematic diagram of the cross section in the AA direction;

[0047] Figure 4 An exploded schematic diagram of a flow regulating device provided in an embodiment of the present application;

[0048] Figure 5 Another structural schematic diagram of the flow regulating device provided in an embodiment of the present application;

[0049] Figure 6 A schematic structural diagram of an exhaust gas filtration device provided in an embodiment of the present application;

[0050] Figure 7 A schematic structural diagram of a boron diffusion system provided in an embodiment of the present application.

[0051] Description of reference numerals:

[0052] Base 10; through hole 101; first channel 11; second channel 12; third channel 13; rotating valve core 20; regulating channel 201; first port 21; second port 22; third port 23; first latch 27; gear 41; air pressure difference sensor 30; sealing ring 51; flow regulating device 100; source liquid component 60; first filter bottle 71; second filter bottle 72; first on-off valve 711; second on-off valve 721; series pipeline 75; diffusion device 91; condensation component 93; vacuum pump 97; main discharge component 99. DETAILED DESCRIPTION

[0053] Embodiments of the present application are described in detail below, with examples of the embodiments illustrated in the accompanying drawings. In the accompanying drawings, the sizes of layers, regions, and components, as well as their relative sizes, may be exaggerated for clarity. Throughout, the same or similar reference numerals represent the same or similar components or components having the same or similar functions. The embodiments described below with reference to the accompanying drawings are illustrative and intended only to explain the present application, and are not to be construed as limiting the present application.

[0054] It should be understood that when an element or layer is referred to as being "on," "adjacent to," "connected to," or "coupled to" another element or layer, it can be directly on, adjacent to, connected to, or coupled to the other element or layer, or there can be intervening elements or layers. Conversely, when an element is referred to as being "directly on," "directly adjacent to," "directly connected to," or "directly coupled to" another element or layer, there are no intervening elements or layers. It should be understood that while the terms first, second, third, etc. may be used to describe various elements, components, regions, layers, and / or portions, these elements, components, regions, layers, and / or portions should not be limited by these terms. These terms are merely used to distinguish one element, component, region, layer, or portion from another. Thus, without departing from the teachings of the present application, a first element, component, region, layer, or portion discussed below may be represented as a second element, component, region, layer, or portion. Furthermore, when a second element, component, region, layer, or portion is discussed, it does not necessarily mean that the first element, component, region, layer, or portion is present in the present application.

[0055] In this application, unless otherwise specified or limited, the terms "installed," "connected," "connect," "fixed," etc. should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two elements or interaction between two elements, unless otherwise specified. Those skilled in the art will understand the specific meanings of the above terms in this application based on specific circumstances.

[0056] It should be noted that the terms "first", "second", etc. in the specification and claims of this application and the above-mentioned drawings are used to distinguish similar objects and are not necessarily used to describe a specific order or sequence. It should be understood that the terms used in this way are interchangeable where appropriate, so that the embodiments of the application described herein can, for example, be implemented in an order other than those illustrated or described herein. In addition, the terms "including" and "having" and any variations thereof are intended to cover non-exclusive inclusions, for example, a process, method, system, product or device that includes a series of steps or units is not necessarily limited to those steps or units clearly listed, but may include other steps or units that are not clearly listed or inherent to these processes, methods, products or devices.

[0057] In the present application, when it comes to a numerical interval (i.e., a numerical range), unless otherwise specified, the distribution of the optional numerical values ​​in the numerical interval is considered to be continuous, and includes the two numerical endpoints (i.e., the minimum and maximum values) of the numerical interval, and each numerical value between the two numerical endpoints. Unless otherwise specified, when the numerical interval only refers to an integer in the numerical interval, including the two endpoint integers of the numerical range, and each integer between the two endpoints, is equivalent to directly enumerating each integer. When multiple numerical ranges are provided to describe a feature or characteristic, these numerical ranges can be merged. In other words, unless otherwise specified, the numerical range disclosed in this application should be understood to include any and all subranges included therein. The "numerical value" in the numerical interval can be any quantitative value, such as a number, a percentage, a ratio, etc. "Numerical interval" allows broadly including quantitative intervals such as percentage intervals, ratio intervals, and ratio intervals.

[0058] The present embodiment provides a flow control device 100, an exhaust gas filtration device, and a boron diffusion system. Based on this, the liquid addition rate between two adjacent filter bottles is balanced. See below for details.

[0059] Hereinafter, exemplary embodiments according to the present application will be described in more detail with reference to the accompanying drawings. It should be noted that these exemplary embodiments may be implemented in many different forms and should not be construed as being limited to the embodiments set forth herein.

[0060] The boron diffusion process used in photovoltaic cell production generates tail gas, which needs to be treated to meet safety emission standards. This embodiment uses liquid filtration as an example to illustrate.

[0061] See also Figure 1 As for Figure 5 The embodiment of the present application provides a flow regulating device 100, which includes a base 10, a first channel 11, a second channel 12, a third channel 13, and a rotating valve core 20. The following is a detailed description:

[0062] The substrate 10 is provided with a through hole 101. The substrate 10 serves as a basic carrier structure. In this embodiment, the substrate 10 may be a rectangular block structure, so that a plurality of pipes communicating with the through hole 101 can be provided inside the substrate 10.

[0063] The first end of the first channel 11 is connected to the through hole 101. The second end of the first channel 11 is used to receive liquid input, that is, the first channel 11 can be connected to the source of the filtered liquid, so that the filtered liquid enters the base 10 through the first channel 11 and is then diverted or guided through other channels.

[0064] The first port of the second channel 12 is communicated with the through hole 101. The second port of the second channel 12 can be communicated with a filter bottle so as to add filtered liquid to the filter bottle through the second channel 12.

[0065] The first port of the third channel 13 is communicated with the through hole 101. The second port of the third channel 13 can be communicated with another filtering bottle so as to add filtered liquid to the filtering bottle through the third channel 13.

[0066] The rotating valve core 20 is installed in the through hole 101 of the base 10. In this embodiment, the shape of the rotating valve core 20 matches the through hole 101. The rotating valve core 20 can rotate around the central axis of the through hole 101. The rotating valve core 20 includes:

[0067] The regulating channel 201 is disposed in the rotating valve core 20 , and the regulating channel 201 is communicated with the first channel 11 , the second channel 12 , and the third channel 13 .

[0068] The first opening 21 is located on the outer wall of the rotating valve core 20 and is connected to the regulating channel 201. It is set corresponding to the first port of the first channel 11, that is, the first opening 21 serves as the liquid inlet of the regulating channel 201. The size of the connecting section between the first opening 21 and the first port of the first channel 11 determines the liquid inlet rate.

[0069] The second opening 22 is located on the outer wall of the rotating valve core 20 and is connected to the regulating channel 201. It is arranged corresponding to the first port of the second channel 12, that is, the second opening 22 serves as a liquid outlet of the regulating channel 201. The size of the connecting section between the second opening 22 and the first port of the second channel 12 determines the liquid outlet rate of the second channel 12.

[0070] The third opening 23 is located on the outer wall of the rotating valve core 20 and is connected to the regulating channel 201. It is arranged corresponding to the first port of the third channel 13, that is, the third opening 23 serves as a liquid outlet of the regulating channel 201. The size of the connecting section between the third opening 23 and the first port of the third channel 13 determines the liquid outlet rate of the third channel 13.

[0071] Among them, the first channel 11, the second channel 12, and the third channel 13 are interconnected through the through hole 101. When the rotating valve core 20 in the through hole 101 rotates, it will drive the adjustment channel 201 to rotate together, so that the communication cross-sections of the third opening 23 and the first port of the third channel 13 are staggered or overlapped with each other, so that the communication cross-sections of the third opening 23 and the first port of the third channel 13 change with the rotation of the rotating valve core 20 to adjust the liquid outlet rate of the third channel 13, thereby balancing the liquid outlet rates of the second channel 12 and the third channel 13, so that the liquid addition rates of the filter bottles corresponding to the second channel 12 and the third channel 13 are relatively uniform, thereby improving the liquid addition efficiency of the entire filtration system.

[0072] The filtering liquid may be water or an alkaline liquid. The following description will be made exemplarily by taking water as the filtering liquid.

[0073] Please combine Figure 3 , see Figure 5 In this embodiment, the second port of the second channel 12 is connected to the first filter bottle 71, and the second port of the third channel 13 is connected to the second filter bottle 72. The first filter bottle 71 and the second filter bottle 72 are connected in series on the exhaust pipe. The first filter bottle 71 is at the end that contacts the exhaust gas earlier than the second filter bottle 72. The exhaust pipe extends from the upper end of the first filter bottle 71 to the lower end inside the first filter bottle 71. The second filter bottle 72 is connected to the first filter bottle 71 via a series pipe 75. One end of the series pipe 75 is connected to the upper end of the first filter bottle 71, and the other end is connected to the upper end of the second filter bottle 72 and extends into the lower end inside the second filter bottle 72. That is, the air inlet end of the series pipe 75 is located at the upper end of the first filter bottle 71, and the air outlet end of the series pipe 75 is located at the lower end of the second filter bottle 72.

[0074] When water is added, water is added to the first filter bottle 71 and the second filter bottle 72 at the same time. When the water level in the second filter bottle 72 rises to the air outlet end of the series pipe 75, the water in the second filter bottle 72 will produce a certain resistance to the gas escaping from the air outlet end of the series pipe 75, increasing the difficulty of the air in the first filter bottle 71 flowing to the second filter bottle 72 through the series pipe 75, thereby hindering the addition of water to the first filter bottle 71 and reducing the water addition rate of the first filter bottle 71.

[0075] In order to balance the water addition rate between the first filter bottle 71 and the second filter bottle 72 , the valve core 20 can be rotated to reduce the connecting section between the third port 23 and the first port of the third channel 13 , thereby increasing the difficulty of liquid entering the second filter bottle 72 .

[0076] When the water inflow rate into the first channel 11 remains constant, the water addition rates between the two filter bottles are balanced. Specifically, by reducing the cross-sectional area between the third opening 23 and the first end of the third channel 13, the resistance that the air in the first filter bottle 71 must overcome to enter the second filter bottle 72 is balanced, thereby balancing the water addition rates of the two filter bottles.

[0077] In this embodiment, the flow regulating device 100 also includes a fixed shell (not shown in the figure), which is used to be fixed on both sides of the base 10 and cover the rotating valve core 20 to provide physical protection for the rotating valve core 20 and prevent the external environment from interfering with or colliding with the rotating valve core 20.

[0078] Further, see Figure 3 In this embodiment, the cross-sectional area of ​​the first opening 21 is larger than the cross-sectional area of ​​the first end of the first channel 11. Specifically, when the rotary valve core 20 rotates within a certain angle, the cross-sectional area of ​​the first opening 21 moves only within the cross-sectional area of ​​the first end of the first channel 11. The overlapping area of ​​the first opening 21 and the first end of the first channel 11 always equals the cross-sectional area of ​​the entire first end of the first channel 11. The connecting cross-sectional area between the first opening 21 and the first end of the first channel 11 does not change. Therefore, the water addition rate is not affected by the rotation of the rotary valve core 20, thus preventing the rotation of the rotary valve core 20 from affecting the overall water addition rate.

[0079] In an optional embodiment, the cross-sectional area of ​​the second opening 22 is not greater than the cross-sectional area of ​​the first port of the second channel 12. When the rotary valve core 20 rotates in the first direction, the cross-sectional area of ​​the communication between the second opening 22 and the first port of the second channel 12 remains unchanged, and the cross-sectional area of ​​the communication between the third opening 23 and the first port of the third channel 13 gradually decreases.

[0080] For example, see Figure 3 The first direction is counterclockwise based on the figure. When the rotating valve core 20 rotates counterclockwise within a predetermined angle, the overlapping area between the second opening 22 and the first end of the second channel 12 always equals the cross-sectional area of ​​the first end of the entire second channel 12. This ensures that the rotating valve core 20 does not affect the liquid flow cross-sectional area of ​​the second channel 12 during rotation. The gradually decreasing cross-sectional area between the third opening 23 and the first end of the third channel 13 increases the resistance to liquid entering the second filter bottle 72 through the third channel 13, thereby balancing the water addition rate between the first filter bottle 71 and the second filter bottle 72. Preferably, in this embodiment, the cross-sectional area of ​​the third opening 23 is the same as the cross-sectional area of ​​the first end of the third channel 13.

[0081] In other embodiments, the cross-sectional area of ​​the first port of the first channel 11 may be larger than the cross-sectional area of ​​the first opening 21. When the rotating valve core 20 rotates, the cross-sectional area of ​​the second opening 22 moves accordingly within the cross-sectional area of ​​the first port of the second channel 12, so that the rotating valve core 20 does not affect the size of the liquid flow cross-sectional area of ​​the second channel 12 when rotating.

[0082] In a preferred embodiment, the first opening 21, the second opening 22, the third opening 23, the first end of the first channel 11, the first end of the second channel 12, and the first end of the third channel 13 all have circular cross-sections. These circular cross-sections allow the first opening 21 to move along the diameter of the first end of the first channel 11 during rotation of the rotary valve core 20, moving from one end of the first end of the first channel 11 to the other end. This prevents changes in the interconnected area between the two ends during movement, reducing the likelihood of fluctuations in the amount of liquid added to the filter bottle.

[0083] A circular cross-section minimizes resistance to fluid flow, thereby improving fluid flow efficiency in pipes. Compared to other cross-section shapes (such as square or rectangular), a circular cross-section evenly distributes pressure, reduces friction on the pipe wall, minimizes energy loss, and improves fluid flow efficiency in pipes.

[0084] Furthermore, in this embodiment, the flow regulating device 100 includes a driving assembly, and the driving assembly is used to drive the rotating valve core 20 to rotate.

[0085] By driving the rotary valve core 20 to rotate through the driving assembly, the rotation angle of the rotary valve core 20 can be precisely controlled, thereby more precisely regulating the liquid addition balance between the first filter bottle 71 and the second filter bottle 72 .

[0086] Specifically, the drive assembly can be monitored and controlled by a remote control system, allowing operators to perform liquid balancing and flow monitoring at a distance from the equipment. The drive assembly can quickly respond to control commands, thereby achieving rapid rotation and adjustment of the rotary valve core 20.

[0087] The drive assembly may include an electric drive, such as an electric motor, a stepper motor, a servo motor, etc.; the drive assembly may also be a pneumatic drive, a hydraulic drive, etc.

[0088] Furthermore, in this embodiment, the outer wall of the rotating valve core 20 is provided with a first latching tooth 27 , and the base body 10 is further provided with a receiving groove, which is communicated with the inner wall of the through hole 101 .

[0089] The drive assembly includes a gear 41 and a drive motor, wherein the gear 41 is accommodated in the accommodation groove and is hinged to the first latching tooth 27. The drive motor is connected to the center of one side of the gear 41 to drive the gear 41 to rotate, thereby driving the rotating valve core 20 to rotate.

[0090] The gear 41 drives the latch teeth to rotate relative to each other, so as to accurately control the rotation angle of the rotating valve core 20. The driving motor can adjust the position of the gear 41 through slight rotation, thereby finely controlling the rotation of the valve core.

[0091] In addition, the connection between the gear 41 and the latch has a relatively large torque transmission capacity. The torque transmitted to the valve core by the motor through the gear 41 can better overcome the resistance generated when the filtered liquid flows through, so that the rotating valve core 20 can still rotate and work stably under high pressure or high flow.

[0092] In an optional embodiment, the flow regulating device 100 further includes an air pressure difference sensor 30 , which is electrically connected to the driving motor and is used to control the rotation direction of the driving motor according to the air pressure difference between the filter bottles.

[0093] The pressure differential sensor 30 monitors the pressure difference between the first filter bottle 71 and the second filter bottle 72. When the pressure in one filter bottle is higher than the other, the pressure differential indicates an imbalance in the liquid flow rate. The pressure differential sensor 30 automatically drives the motor to adjust the angle of the rotating valve core 20 based on the pressure difference between the two filter bottles, automatically balancing the liquid flow rates of the two filter bottles. This significantly reduces the complexity of adjusting the rotating valve core 20 and enables automated flow rate regulation. Specifically, the pressure differential sensor 30 can be fixed to the side of the base 10.

[0094] In an optional embodiment, the flow regulating device 100 further includes a sealing ring 51 , which is disposed around the outer wall of the rotating valve core 20 and is clamped between the rotating valve core 20 and the inner wall of the through hole 101 .

[0095] Specifically, there are two sealing rings 51, both of which surround the outer wall of the rotating valve core 20, and sandwich the first opening 21, the second opening 22 and the third opening 23 of the rotating valve core 20 in the middle. The sealing ring 51 is used to seal the gap between the rotating valve core 20 and the inner wall of the through hole 101 to prevent the filtered liquid from leaking through the gap between the rotating valve core 20 and the inner wall of the through hole 101.

[0096] Furthermore, the sealing ring 51 can also serve as a buffer element, which can reduce direct friction between the rotating valve core 20 and the inner wall of the through hole 101 during rotation, thereby reducing component wear and extending the service life of the device.

[0097] See also Figure 6 The present application also provides an exhaust gas filtration device, comprising the flow regulating device 100, the source liquid component 60, the first filter bottle 71 and the second filter bottle 72 described in any of the above embodiments. Detailed description is given below:

[0098] The source liquid component 60 is in communication with the second port of the first channel 11 and is used to output filtered liquid to the flow regulating device 100 .

[0099] The first filter bottle 71 is communicated with the second port of the second channel 12 .

[0100] The second filter bottle 72 is communicated with the second port of the third channel 13 , and the second filter bottle 72 is also connected in series with the first filter bottle 71 through a gas pipeline.

[0101] In this embodiment, the second port of the second channel 12 is connected to the first filter bottle 71, and the second port of the third channel 13 is connected to the second filter bottle 72. The first filter bottle 71 and the second filter bottle 72 are connected in series on the exhaust pipe, with the first filter bottle 71 being located at the end that is exposed to the exhaust gas earlier than the second filter bottle 72. The exhaust pipe extends from the upper end of the first filter bottle 71 to the lower end of the interior of the first filter bottle 71. The second filter bottle 72 is connected to the first filter bottle 71 via a series pipe 75. One end of the series pipe 75 is connected to the upper end of the first filter bottle 71, and the other end is connected to the upper end of the second filter bottle 72 and extends into the lower end of the interior of the second filter bottle 72. In other words, the air inlet end of the series pipe 75 is located at the upper end of the first filter bottle 71, and the air outlet end of the series pipe 75 is located at the lower end of the second filter bottle 72.

[0102] When water is added, water is added to the first filter bottle 71 and the second filter bottle 72 at the same time. When the water level in the second filter bottle 72 rises to the air outlet end of the series pipe 75, the water in the second filter bottle 72 will produce a certain resistance to the gas escaping from the air outlet end of the series pipe 75, increasing the difficulty of the air in the first filter bottle 71 flowing to the second filter bottle 72 through the series pipe 75, thereby hindering the addition of water to the first filter bottle 71 and reducing the water addition rate of the first filter bottle 71.

[0103] At this point, the valve core 20 can be rotated to reduce the cross-sectional area between the third opening 23 and the first port of the third channel 13, thereby increasing the difficulty for liquid to enter the second filter bottle 72 and balancing the water addition rates between the first filter bottle 71 and the second filter bottle 72. Specifically, by reducing the cross-sectional area between the third opening 23 and the first port of the third channel 13, the resistance that the air in the first filter bottle 71 needs to overcome to enter the second filter bottle 72 is balanced, thereby balancing the water addition rates of the two filter bottles.

[0104] Furthermore, in this embodiment, the exhaust gas filtration device further includes a first on-off valve 711 and a second on-off valve 721. The first on-off valve 711 is connected in series between the second port of the second channel 12 and the first filter bottle 71. The second on-off valve 721 is connected in series between the second port of the third channel 13 and the second filter bottle 72.

[0105] The first on-off valve 711 and the second on-off valve 721 can control the flow of liquid into the first filter bottle 71 and the second filter bottle 72 respectively.

[0106] In actual liquid addition, due to various factors, the liquid addition rates between the filter bottles may eventually be inconsistent, causing one of the filter bottles to reach the preset liquid volume first. At this time, the on-off valve of the filter bottle that has reached the preset liquid volume can be closed to quickly add liquid to the other filter bottle so that it quickly reaches the preset liquid volume to complete the overall liquid addition.

[0107] In an optional embodiment, the exhaust gas filtering device further includes a third filter bottle, wherein the first filter bottle 71, the second filter bottle 72, and the third filter bottle are sequentially connected in series.

[0108] In this embodiment, the source liquid component 60 does not need to add liquid to the third filter bottle. The exhaust gas to be filtered will carry a certain amount of water vapor after passing through the first filter bottle 71 and the second filter bottle 72. After entering the third filter bottle, part of the water vapor condenses in the third filter bottle, reducing the water vapor content in the exhaust gas. At the same time, the water formed by the condensation can also filter the exhaust gas again.

[0109] In addition, the third filter bottle can also be used to accommodate the filtered liquid in the first filter bottle 71 and the second filter bottle 72 to prevent the first filter bottle 71 and the second filter bottle 72 from flowing back into other components.

[0110] See also Figure 7 , an embodiment of the present application also provides a boron diffusion system, including the flow regulating device described in any of the above embodiments; or including the exhaust gas filtration equipment described in any of the above embodiments.

[0111] The boron diffusion system may further include a boron diffusion device 91, a condensation component 93, a vacuum pump 97, a main exhaust component 99, etc.

[0112] During the diffusion process of the solar cells in the boron diffusion device 91, the corresponding exhaust gas is discharged to the condensation component 93 for cooling, and then the exhaust gas is input into the filter bottle for filtration, thereby filtering the exhaust gas through liquid filtration. The vacuum pump 97 can be used to evacuate the vacuum according to process requirements, for example, to reduce the pressure in the pipeline from 100,000 Pa to 10,000 Pa. The vacuum pump 97 can also be used to guide the flow of the exhaust gas so that the exhaust gas is ultimately discharged through the main exhaust component 99. The main exhaust component 99 can be multiple large exhaust pipes to discharge the filtered exhaust gas to the outdoors or the exhaust system.

[0113] In some embodiments, the boron diffusion system may further include various devices or components for performing a boron diffusion process on the solar cell, such as:

[0114] The gas supply device is used to provide boron source gas (BBr3, boron tribromide) and carrier gas (oxygen, nitrogen) to the furnace body, and to control the flow rate and mixing ratio of the gases.

[0115] The boat is used to load the cells and place them in the furnace for processing. The boat can be made of quartz to avoid reaction with the cells or the gas in the furnace.

[0116] The temperature control component is used to adjust the temperature inside the furnace body according to the diffusion process requirements of the battery cell, for example, to control the temperature inside the furnace body at 800℃~1100℃.

[0117] In other embodiments, the boron diffusion system may be further supplemented with other devices, components, or systems as required.

[0118] It should be noted that the terms "center", "longitudinal", "lateral", "length", "width", "thickness", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inside", "outside", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. are only for the convenience of describing the present application and simplifying the description, and are not intended to indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be understood as limiting the present application. The directional terms "inside" and "outside" refer to the inside and outside relative to the outline of the component itself. For example, if the device in the drawing is inverted, the device described as "above other devices or structures" or "on top of other devices or structures" will be positioned as "below other devices or structures" or "below other devices or structures". Therefore, the exemplary term "above..." can include both "above..." and "below..." orientations. The device can also be positioned in other different ways (rotated 90 degrees or in other orientations), and the spatial relative descriptions used here will be interpreted accordingly.

[0119] It should also be noted that references to "one embodiment," "another embodiment," "an embodiment," etc., in this application refer to specific features, structures, or characteristics described in conjunction with that embodiment as included in at least one embodiment generally described in this application. The appearance of the same expression in multiple places in the specification does not necessarily refer to the same embodiment. Furthermore, when a specific feature, structure, or characteristic is described in conjunction with any embodiment, it is intended that such feature, structure, or characteristic, when implemented in conjunction with other embodiments, also fall within the scope of this application.

[0120] In the above embodiments, the description of each embodiment has its own focus. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0121] It should also be noted that the above are only preferred embodiments of the present application and do not limit the scope of patent protection of the present application. Any equivalent structure or equivalent process transformation made using the contents of the description and drawings of this application, or directly or indirectly applied in other related technical fields, are also included in the scope of patent protection of the present application.

Claims

1. A flow regulating device, characterized in that: include: a substrate, wherein the substrate is provided with a through hole; a first channel, wherein a first port of the first channel is connected to the through hole; a second channel, wherein a first port of the second channel is connected to the through hole; a third channel, wherein a first port of the third channel is connected to the through hole; A rotating valve core is installed in the through hole, and the rotating valve core can rotate around the central axis of the through hole. The rotating valve core includes: An adjusting channel is provided in the rotating valve core; a first opening, located on an outer wall of the rotating valve core and communicating with the regulating channel, and arranged corresponding to the first port of the first channel; a second opening, located on the outer wall of the rotating valve core and communicating with the regulating channel, and arranged corresponding to the first port of the second channel; a third opening, located on the outer wall of the rotating valve core and communicating with the regulating channel, and arranged corresponding to the first port of the third channel; Wherein, a communicating cross section between the third opening and the first port of the third channel may change as the rotating valve core rotates.

2. The flow regulating device according to claim 1, characterized in that: A cross-sectional area of ​​the first opening is larger than a cross-sectional area of ​​the first end of the first channel.

3. The flow regulating device according to claim 1, characterized in that: The cross-sectional area of ​​the second opening is larger than the cross-sectional area of ​​the first port of the second channel; When the rotating valve core rotates in the first direction, the communicating cross-section between the second opening and the first port of the second channel remains unchanged; and The communicating cross section between the third opening and the first port of the third channel gradually decreases.

4. The flow regulating device according to claim 1, characterized in that: The flow regulating device includes a driving assembly, and the driving assembly is used to drive the rotating valve core to rotate.

5. The flow regulating device according to claim 4, characterized in that: The outer wall of the rotating valve core is provided with a first latching tooth; The drive assembly includes: a gear, hinged to the first latching tooth; A driving motor is connected to the center of one side surface of the gear and is used for driving the gear to rotate, thereby driving the rotating valve core to rotate.

6. The flow regulating device according to claim 1, characterized in that: The flow regulating device further comprises an air pressure difference sensor, which is electrically connected to the driving motor and is used to control the rotation direction of the driving motor according to the air pressure difference between the filter bottles.

7. The flow regulating device according to claim 1, characterized in that: The flow regulating device further comprises a sealing ring, which is arranged around the outer wall of the rotating valve core and is clamped between the rotating valve core and the inner wall of the through hole.

8. An exhaust gas filtration device, characterized in that: include: The flow regulating device according to any one of claims 1 to 7; a source liquid component, connected to the second port of the first channel, and configured to output filtered liquid to the flow regulating device; a first filtering bottle, connected to the second port of the second channel; The second filter bottle is communicated with the second port of the third channel, and the second filter bottle is also connected in series with the first filter bottle through a gas pipeline.

9. The exhaust gas filtering device according to claim 8, characterized in that: The exhaust gas filtering equipment further comprises: a first on-off valve connected in series between the second port of the second channel and the first filtering bottle; The second on-off valve is connected in series between the second port of the third channel and the second filtering bottle.

10. The exhaust gas filtering device according to claim 8, characterized in that: The exhaust gas filtering device further includes a third filter bottle; Wherein, the first filter bottle, the second filter bottle and the third filter bottle are sequentially connected in series.

11. A boron diffusion system, characterized in that: comprising the flow regulating device according to any one of claims 1 to 7; or It comprises the exhaust gas filtering device according to any one of claims 8 to 10.

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