Mounting device for silicon wafer detection camera of photovoltaic screen printing machine

Abstract

The utility model discloses an installation device of a silicon wafer detection camera of a photovoltaic screen printing machine. The installation device comprises a supporting footstand and a camera installation frame. The camera mounting rack comprises a main frame, a middle camera arm support, a middle camera adjusting plate, a plurality of edge camera arm supports and a pair of edge camera mounting plates; the main frame is a rectangular frame; the two ends of the middle camera arm frame are respectively arranged on the top surfaces of the two Y-direction frame plates of the main frame through Y-direction adjusting screws; the middle camera adjusting plate is mounted on the middle camera arm frame through an X-direction adjusting screw; a front Y-direction sliding groove and a rear Y-direction sliding groove are formed in the top face of each edge camera arm support in the length direction, and the two ends of each edge camera arm support are installed on two X-direction frame plates of the main frame through an X-direction adjusting mechanism respectively. Each pair of edge camera mounting plates is mounted on the front Y-direction sliding groove and the rear Y-direction sliding groove of each edge camera arm support through a Y-direction adjusting mechanism. According to the utility model, coarse adjustment and fine adjustment of the position of each detection camera can be realized.

Description

Technical Field

[0001] The utility model relates to a mounting device for a silicon wafer detection camera of a photovoltaic screen printing machine. Background Art

[0002] With the development of science and technology and the improvement of industrial automation levels, the printing efficiency and quality of photovoltaic screen printing equipment are also constantly improving. Photovoltaic screen printing machines require a high-precision detection camera group for detection and positioning when printing silicon wafers at high speed; the detection camera group includes a middle detection camera and several edge detection cameras. During the initial installation and debugging stage, the installation position accuracy of the detection camera group is particularly important. Nowadays, the installation position adjustment of most detection camera groups is mostly achieved by screw-locking the camera mount. This adjustment method only roughly determines the position of the detection camera group, and is more difficult to adjust for the positioning of the detection camera group and data detection in the later stage. In addition, in the traditional installation device of the detection camera group, the middle detection camera and several edge detection cameras are usually installed on the same plane mounting frame, which easily makes the position adjustment of the middle detection camera affected by factors such as the signal line routing of the edge detection camera. Utility Model Content

[0003] The purpose of the utility model is to overcome the defects of the prior art and provide a mounting device for a silicon wafer detection camera of a photovoltaic screen printing machine, which can achieve coarse and fine adjustment of the position of each detection camera.

[0004] The technical solution for achieving the purpose of the utility model is: a mounting device for a silicon wafer inspection camera of a photovoltaic screen printing machine, which is used to install a middle inspection camera and several pairs of edge inspection cameras and includes a support foot and a camera mounting frame; wherein,

[0005] The support foot is a portal frame and includes two vertical plates and a top crossbeam connected between the tops of the two vertical plates;

[0006] The camera mounting frame includes a main frame, a middle camera arm, a middle camera adjustment plate, a plurality of edge camera arms and a plurality of pairs of edge camera mounting plates;

[0007] The main frame is formed by two X-direction frame plates and two Y-direction frame plates; the two X-direction frame plates are L-shaped plates, the horizontal portions of the two X-direction frame plates are arranged opposite each other, and the horizontal portions of the two X-direction frame plates are each provided with a plurality of X-direction coarse adjustment threaded holes at intervals; the X-direction frame plate located at the rear end of the main frame is connected across the upper portions of the two vertical plates of the support foot via a frame mounting plate; a plurality of Y-direction coarse adjustment threaded holes are provided at intervals in the middle of the top surfaces of the two Y-direction frame plates;

[0008] The surfaces of both ends of the intermediate camera arm are provided with long waist-shaped Y-axis mounting holes, which are mounted in correspondence with the Y-axis coarse adjustment threaded holes on the top surfaces of the two Y-axis frame plates of the main frame via Y-axis adjustment screws; a plurality of X-axis coarse adjustment threaded holes are provided at intervals on the middle portion of the top surface of the intermediate camera arm;

[0009] The intermediate camera adjustment plate is provided with an X-axis waist-shaped mounting hole and is mounted in the X-axis coarse adjustment threaded hole on the intermediate camera arm through an X-axis adjustment screw;

[0010] The intermediate detection camera is connected to the intermediate camera adjustment plate;

[0011] A front Y-direction slide groove and a rear Y-direction slide groove are provided on the top surface of each edge camera arm along the length direction, and the two ends of each edge camera arm are respectively mounted on the two X-direction frame plates of the main frame through an X-direction adjustment mechanism;

[0012] Each X-axis adjustment mechanism includes an X-axis adjustment block with a U-shaped plane and an X-axis fine-tuning screw; an X-axis long waist-shaped mounting hole is provided on the surface of the bottom plate of the X-axis adjustment block, and an X-axis through-hole is coaxially provided in the middle of the two side wall plates of the X-axis adjustment block; the X-axis fine-tuning screw is rotatably inserted into the X-axis through-holes of the two side wall plates of the X-axis adjustment block and is installed on the X-axis adjustment block through a spring retaining ring; a threaded through-hole engaged with the X-axis fine-tuning screw is respectively provided on the side surfaces of the two ends of each edge camera arm, so that the two ends of each edge camera arm are respectively installed on the X-axis fine-tuning screws of the two X-axis adjustment mechanisms through the threaded through-holes and are located between the two side wall plates of the X-axis adjustment block; the two ends of each edge camera arm are respectively installed through the X-axis long waist-shaped mounting hole on the X-axis adjustment block and are respectively installed in the X-axis coarse-adjustment threaded holes on the two X-axis frame plates of the main frame in a one-to-one and Y-direction manner through the X-axis adjustment screws;

[0013] Each pair of edge camera mounting plates is mounted on the front Y-direction slide groove and the rear Y-direction slide groove of each edge camera arm through a Y-direction adjustment mechanism in a one-to-one correspondence;

[0014] Each Y-axis adjustment mechanism includes a T-shaped pressure block, a Y-axis adjustment block, a locking screw, and a Y-axis fine-tuning screw; a screw through-hole is provided at the center of the top surface of the T-shaped pressure block, and the T-shaped pressure block is installed on the top surface of the edge camera arm in a manner that its vertical portion can be slidably inserted into the front Y-axis slide groove or the rear Y-axis slide groove; the Y-axis adjustment block is in the shape of a square when viewed from the side, and a threaded hole is provided in the middle of the upper plate, and a Y-axis through-hole is coaxially provided on the front plate and the rear plate of the Y-axis adjustment block; the locking screw passes through the screw through-hole of the T-shaped pressure block The Y-axis adjustment block is connected to the threaded hole on the upper plate of the Y-axis adjustment block, so that the Y-axis adjustment block is fixed to the bottom surface of the edge camera arm; the Y-axis fine-tuning screw rod is rotatably inserted into the Y-axis through-holes on the front and rear plates of the Y-axis adjustment block and is installed on the Y-axis adjustment block through a spring retaining ring; a connecting portion extends from one side of each edge camera mounting plate, and a threaded through-hole engaged with the Y-axis fine-tuning screw rod is provided in the middle of the connecting portion, so that the connecting portion of each edge camera mounting plate is inserted into the Y-axis adjustment block and then installed on the Y-axis fine-tuning screw rod through the threaded through-hole;

[0015] Several pairs of edge detection cameras are mounted on several pairs of edge camera mounting plates in a one-to-one correspondence.

[0016] The above-mentioned installation device for the silicon wafer inspection camera of the photovoltaic screen printing machine, wherein, a plurality of Z-direction coarse adjustment threaded holes are respectively provided on the front end surfaces of the two vertical plates of the supporting foot at intervals and symmetrically; a Z-direction long waist-shaped mounting hole is respectively provided on the two end surfaces of the frame mounting plate and is installed in the Z-direction coarse adjustment threaded holes of the two vertical plates one by one through Z-direction adjustment screws.

[0017] In the above-mentioned installation device for the silicon wafer inspection camera of the photovoltaic screen printing machine, the supporting foot further includes a lower crossbeam connected between the lower parts of the two vertical plates.

[0018] In the above-mentioned installation device for the silicon wafer inspection camera of the photovoltaic screen printing machine, the intermediate inspection camera is installed on an intermediate camera mounting plate vertically connected to the bottom surface of the intermediate camera adjustment plate.

[0019] The installation device of the silicon wafer inspection camera of the photovoltaic screen printing machine of the utility model has the following characteristics:

[0020] 1. Installing the middle detection camera on the upper layer of the main frame and the edge detection camera on the lower layer of the main frame makes the layout of the detection cameras more reasonable. This not only solves the problem of interference caused by the position limitation of the edge detection camera during position adjustment of the middle detection camera, but also expands the adjustable range of the middle detection camera.

[0021] 2. All inspection cameras have not only coarse adjustment mechanisms in the X and Y directions, but also fine adjustment mechanisms, which enable coarse and fine adjustment of the position of each inspection camera. The fine adjustment mechanism of the edge inspection camera adopts a screw mechanism, which is convenient for operators to adjust and can effectively improve the installation accuracy of the initial position of each inspection camera, thereby ensuring the inspection accuracy of silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a three-dimensional diagram of the installation device of the silicon wafer detection camera of the photovoltaic screen printing machine of the present invention;

[0023] Figure 2 It is a top view of the camera mounting bracket in the mounting device of the present utility model;

[0024] Figure 3 yes Figure 2 CC view in the figure;

[0025] Figure 4 yes Figure 2 DD view in the;

[0026] Figure 5 yes Figure 2 An enlarged view of part E in FIG;

[0027] Figure 6 yes Figure 3 An enlarged view of the F portion in FIG;

[0028] Figure 7 yes Figure 4 GG view in . DETAILED DESCRIPTION

[0029] The present invention will be further described below with reference to the accompanying drawings.

[0030] See also Figures 1 to 7 The installation device of the silicon wafer detection camera of the photovoltaic screen printing machine of the present invention is used to install a middle detection camera 100 and four pairs of edge detection cameras 200 and includes a supporting foot 1 and a camera mounting frame 2.

[0031] The support foot 1 is a portal frame and includes two vertical plates 10, a top crossbeam 11 connected between the tops of the two vertical plates 10, and a lower crossbeam 12 connected between the lower parts of the two vertical plates 10; a plurality of Z-direction coarse adjustment threaded holes 10a are respectively provided on the front end surfaces of the two vertical plates 10 at intervals and symmetrically.

[0032] The camera mounting frame 2 includes a main frame, a middle camera arm 23 , a middle camera adjustment plate 24 , four edge camera arms 25 and four pairs of edge camera mounting plates 26 .

[0033] The main frame is a rectangular frame whose width is adapted to the spacing between the two vertical plates 10 of the support foot 1. The main frame is surrounded by two X-direction frame plates 21 and two Y-direction frame plates 22. The X-direction frame plates 21 and the Y-direction frame plates 22 are both upright slats; the two X-direction frame plates 21 are both L-shaped plates with vertical and horizontal parts, the horizontal parts of the two X-direction frame plates 21 are arranged opposite to each other, and the horizontal parts of the two X-direction frame plates 21 are respectively provided with a plurality of X-direction coarse adjustment threaded holes 21a at intervals; the vertical part of the X-direction frame plate 21 located at the rear end of the main frame is fixed to a frame mounting plate 20, and a plurality of Z-direction long waist-shaped mounting holes 21b are respectively provided on the two end surfaces of the frame mounting plate 20, and are installed in the Z-direction coarse adjustment threaded holes 10a of the two vertical plates 10 of the support foot 1 one by one through Z-direction adjustment screws 210; a plurality of Y-direction coarse adjustment threaded holes 22a are provided at intervals in the middle of the top surfaces of the two Y-direction frame plates 22;

[0034] The intermediate camera arm 23 has a Y-axis waist-shaped mounting hole 23b formed on each end thereof. The intermediate camera arm 23 is mounted in a one-to-one correspondence with the Y-axis coarse adjustment threaded holes 22a on the top surfaces of the two Y-axis frame plates 22 of the main frame via Y-axis adjustment screws 230. A plurality of X-axis coarse adjustment threaded holes 23a are also formed at intervals in the middle portion of the top surface of the intermediate camera arm 23.

[0035] The rear portion of the surface of the middle camera adjustment plate 24 is provided with an X-axis waist-shaped mounting hole 24b and is mounted in the X-axis coarse adjustment threaded hole 23a of the middle camera arm 23 via an X-axis adjustment screw 240;

[0036] The intermediate detection camera 100 is mounted on an intermediate camera mounting plate 100A, which is vertically connected to the bottom front of the intermediate camera adjustment plate 24;

[0037] A front Y-direction slide groove 251 and a rear Y-direction slide groove 252 are provided on the top surface of each edge camera arm 25 along the length direction, and each end of each edge camera arm 25 is connected to an X-direction adjustment mechanism;

[0038] Each X-direction adjustment mechanism includes an X-direction adjustment block 253, an X-direction fine-tuning screw rod 254 and a spring retaining ring 255; the plane of the X-direction adjustment block 253 is U-shaped and includes a base plate and two side plates connected to the two ends of the base plate in a one-to-one correspondence. An X-direction long waist-shaped mounting hole 25b is provided on the surface of the base plate of the X-direction adjustment block 253, and an X-direction through hole is coaxially provided in the middle of the two side wall plates of the X-direction adjustment block 253; the X-direction fine-tuning screw rod 254 can be rotated The edge camera arm 25 is movably inserted into the X-direction through-holes of the two side panels of the X-direction adjustment block 253 and is mounted on the X-direction adjustment block 253 via a spring retaining ring 255; a threaded through-hole is respectively provided on the side surfaces of both ends of each edge camera arm 25 for engaging with the X-direction fine-tuning screw rod 254, so that the two ends of each edge camera arm 25 are mounted on the X-direction fine-tuning screw rods 254 of the two X-direction adjustment mechanisms through the threaded through-holes in a one-to-one correspondence and located between the two side panels of the X-direction adjustment block 253;

[0039] The two ends of the four edge camera arms 25 are respectively installed in the X-direction coarse adjustment threaded holes 21a on the two X-direction frame plates 21 of the main frame through the X-direction long waist-shaped mounting holes 25b on the X-direction adjustment block 253 and the X-direction adjustment screws 250 respectively.

[0040] The four pairs of edge camera mounting plates 26 are respectively mounted on the front Y-direction slide grooves 251 and the rear Y-direction slide grooves 252 of the four edge camera arms 25 via a Y-direction adjustment mechanism.

[0041] Each Y-axis adjustment mechanism includes a T-shaped pressure block 261, a Y-axis adjustment block 262, a locking screw 263, a Y-axis fine-tuning screw rod 264 and a spring retaining ring 265; a screw through-hole is provided in the middle of the top surface of the T-shaped pressure block 261, and the T-shaped pressure block 261 is arranged on the top surface of the edge camera arm 25 in a manner that its vertical portion can be slidably inserted into the front Y-axis slide groove 251 or the rear Y-axis slide groove 252; the Y-axis adjustment block 262 is in the shape of a square when viewed from the side, and a threaded hole is provided in the middle of the upper plate of the Y-axis adjustment block 262, and a Y-axis through-hole is coaxially provided on the front plate and the rear plate of the Y-axis adjustment block 262; the locking screw 263 passes through the T-shaped pressure block 261 and the Y-axis fine-tuning screw rod 264; the locking screw 263 passes through the T-shaped pressure block 261 and the Y-axis fine-tuning screw rod 264; the Y-axis fine-tuning ... The screws of block 261 are pierced and connected with the threaded holes on the upper plate of the Y-axis adjustment block 262, so that the Y-axis adjustment block 262 is fixed on the bottom surface of the edge camera arm 25; the Y-axis fine-tuning screw rod 264 is rotatably inserted into the Y-axis through-holes on the front plate and the rear plate of the Y-axis adjustment block 262 and is installed on the Y-axis adjustment block 262 through the spring retaining ring 265; a connecting portion extends from one side of each edge camera mounting plate 26, and a threaded through-hole engaged with the Y-axis fine-tuning screw rod 264 is opened in the middle of the connecting portion, so that the connecting portion of each edge camera mounting plate 26 is inserted into the Y-axis adjustment block 262 and installed on the Y-axis fine-tuning screw rod 264 through the threaded through-hole.

[0042] The four pairs of edge detection cameras 200 are mounted on the four pairs of edge camera mounting plates 26 in a one-to-one correspondence.

[0043] When the intermediate detection camera 100 needs to be adjusted in the X direction, first loosen the X-direction adjustment screw 240 on the intermediate camera adjustment plate 24, so that the intermediate camera adjustment plate 24 slides along the X direction on the top surface of the intermediate camera arm 23. After reaching the required position, connect the X-direction adjustment screw 240 to the X-direction coarse adjustment threaded hole 23a on the intermediate camera arm 23 at the corresponding position to lock the intermediate camera adjustment plate 24, and fine-tune the X-direction position of the intermediate detection camera 100 through the X-direction long waist-shaped mounting hole 24b on the intermediate camera adjustment plate 24. When the intermediate detection camera 100 needs to be adjusted in the Y direction, loosen the Y-direction adjustment screws 230 at both ends of the intermediate camera arm 23, so that the intermediate camera arm 23 slides in the Y direction on the top surfaces of the two Y-direction frame plates 22 of the main frame. When it reaches the required position, connect the Y-direction adjustment screws 230 to the Y-direction coarse adjustment threaded holes 22a at the corresponding positions on the top surfaces of the two Y-direction frame plates 22 to lock the intermediate camera arm 23, and realize fine adjustment of the Y-direction position of the intermediate detection camera 100 through the Y-direction long waist-shaped mounting holes 23b at both ends of the intermediate camera arm 23.

[0044] When the X-axis position of a pair of edge detection cameras 200 is to be adjusted, the X-axis adjustment screws 250 on the X-axis adjustment blocks 253 at both ends of the edge camera arm 25 on which the pair of edge detection cameras 200 are mounted are first loosened. Then, the edge camera arm 25 is pushed to move the pair of edge detection cameras 200 along the X-axis on the two X-axis frame plates 21 of the main frame. After reaching the approximate position, the X-axis adjustment screws 250 are connected to the X-axis coarse adjustment threaded holes 21a on the two X-axis frame plates 21. Then, the X-axis fine adjustment screws 254 at both ends of the edge camera arm 25 are manually adjusted with an Allen wrench to drive the edge camera arm 25 to fine-tune along the X-axis until the pair of edge detection cameras 200 reach the accurate X-axis position.

[0045] When the Y-direction position of a certain edge detection camera 200 needs to be adjusted, first loosen the locking screw 263 on the T-shaped pressure block 261 on which the edge detection camera 200 is installed, so that the Y-direction adjustment block 262 connected to the locking screw 263 can move along the front Y-direction slide groove 251 or the rear Y-direction slide groove 252 on the bottom surface of the edge camera arm 25. When the Y-direction adjustment block 262 reaches the approximate position, tighten the locking screw 263 to lock the Y-direction adjustment block 262, and then use the hexagonal wrench to manually adjust the Y-direction fine-tuning screw 264 to drive the corresponding edge camera mounting plate 26 to be fine-tuned along the Y-direction until the edge detection camera 200 installed on the edge camera mounting plate 26 reaches the accurate Y-direction position.

[0046] When the Z-direction position of the middle detection camera 100 and the four pairs of edge detection cameras 200 needs to be adjusted, loosen the Z-direction adjustment screw 210 between the frame mounting plate 20 and the support foot 1, move the main frame in the Z-direction along the two vertical plates 11 of the support foot 1, and then connect the Z-direction adjustment screw 210 to the Z-direction coarse adjustment threaded hole 10a on the two vertical plates 11 after it is in place, and realize fine adjustment of the Z-direction position of the middle detection camera 100 and the four pairs of edge detection cameras 200 through the Z-direction long waist-shaped mounting hole 21b on the frame mounting plate 20.

[0047] The utility model discloses an installation device for a silicon wafer detection camera of a photovoltaic screen printing machine, which installs a middle detection camera and an edge detection camera in layers, making the arrangement of the detection cameras more reasonable, solving the problem that the middle detection camera is easily interfered with by the position limitation of the edge detection camera during position adjustment, and expanding the adjustable range of the middle detection camera; fine-tuning mechanisms are provided for the positions of the edge detection camera in the X direction and the Y direction, and the fine-tuning mechanisms adopt a screw mechanism, which is convenient for the operator to adjust and can improve the installation accuracy of the initial position of the edge detection camera, thereby ensuring the detection accuracy of the silicon wafer.

[0048] The above embodiments are only used to illustrate the present invention, rather than to limit the present invention. Those skilled in the art may make various changes or modifications without departing from the spirit and scope of the present invention. Therefore, all equivalent technical solutions should also fall within the scope of the present invention and should be defined by the claims.

Claims

1. A mounting device for a silicon wafer inspection camera of a photovoltaic screen printer, used to mount a middle inspection camera and several pairs of edge inspection cameras and comprising a support foot and a camera mounting frame; characterized in that: The support foot is a portal frame and includes two vertical plates and a top crossbeam connected between the tops of the two vertical plates; The camera mounting frame includes a main frame, a middle camera arm, a middle camera adjustment plate, a plurality of edge camera arms and a plurality of pairs of edge camera mounting plates; The main frame is formed by two X-direction frame plates and two Y-direction frame plates; the two X-direction frame plates are L-shaped plates, the horizontal portions of the two X-direction frame plates are arranged opposite each other, and the horizontal portions of the two X-direction frame plates are each provided with a plurality of X-direction coarse adjustment threaded holes at intervals; the X-direction frame plate located at the rear end of the main frame is connected across the upper portions of the two vertical plates of the support foot via a frame mounting plate; a plurality of Y-direction coarse adjustment threaded holes are provided at intervals in the middle of the top surfaces of the two Y-direction frame plates; The surfaces of both ends of the intermediate camera arm are provided with long waist-shaped Y-axis mounting holes, which are mounted in correspondence with the Y-axis coarse adjustment threaded holes on the top surfaces of the two Y-axis frame plates of the main frame via Y-axis adjustment screws; a plurality of X-axis coarse adjustment threaded holes are provided at intervals on the middle portion of the top surface of the intermediate camera arm; The intermediate camera adjustment plate is provided with an X-axis waist-shaped mounting hole and is mounted in the X-axis coarse adjustment threaded hole on the intermediate camera arm through an X-axis adjustment screw; The intermediate detection camera is connected to the intermediate camera adjustment plate; A front Y-direction slide groove and a rear Y-direction slide groove are provided on the top surface of each edge camera arm along the length direction, and the two ends of each edge camera arm are respectively mounted on the two X-direction frame plates of the main frame through an X-direction adjustment mechanism; Each X-axis adjustment mechanism includes an X-axis adjustment block with a U-shaped plane and an X-axis fine-tuning screw; an X-axis long waist-shaped mounting hole is provided on the surface of the bottom plate of the X-axis adjustment block, and an X-axis through-hole is coaxially provided in the middle of the two side wall plates of the X-axis adjustment block; the X-axis fine-tuning screw is rotatably inserted into the X-axis through-holes of the two side wall plates of the X-axis adjustment block and is installed on the X-axis adjustment block through a spring retaining ring; a threaded through-hole engaged with the X-axis fine-tuning screw is respectively provided on the side surfaces of the two ends of each edge camera arm, so that the two ends of each edge camera arm are respectively installed on the X-axis fine-tuning screws of the two X-axis adjustment mechanisms through the threaded through-holes and are located between the two side wall plates of the X-axis adjustment block; the two ends of each edge camera arm are respectively installed through the X-axis long waist-shaped mounting hole on the X-axis adjustment block and are respectively installed in the X-axis coarse-adjustment threaded holes on the two X-axis frame plates of the main frame in a one-to-one and Y-direction manner through the X-axis adjustment screws; Each pair of edge camera mounting plates is mounted on the front Y-direction slide groove and the rear Y-direction slide groove of each edge camera arm through a Y-direction adjustment mechanism in a one-to-one correspondence; Each Y-axis adjustment mechanism includes a T-shaped pressure block, a Y-axis adjustment block, a locking screw, and a Y-axis fine-tuning screw; a screw through-hole is provided at the center of the top surface of the T-shaped pressure block, and the T-shaped pressure block is installed on the top surface of the edge camera arm in a manner that its vertical portion can be slidably inserted into the front Y-axis slide groove or the rear Y-axis slide groove; the Y-axis adjustment block is in the shape of a square when viewed from the side, and a threaded hole is provided in the middle of the upper plate, and a Y-axis through-hole is coaxially provided on the front plate and the rear plate of the Y-axis adjustment block; the locking screw passes through the screw through-hole of the T-shaped pressure block The Y-axis adjustment block is connected to the threaded hole on the upper plate of the Y-axis adjustment block, so that the Y-axis adjustment block is fixed to the bottom surface of the edge camera arm; the Y-axis fine-tuning screw rod is rotatably inserted into the Y-axis through-holes on the front and rear plates of the Y-axis adjustment block and is installed on the Y-axis adjustment block through a spring retaining ring; a connecting portion extends from one side of each edge camera mounting plate, and a threaded through-hole engaged with the Y-axis fine-tuning screw rod is provided in the middle of the connecting portion, so that the connecting portion of each edge camera mounting plate is inserted into the Y-axis adjustment block and then installed on the Y-axis fine-tuning screw rod through the threaded through-hole; Several pairs of edge detection cameras are mounted on several pairs of edge camera mounting plates in a one-to-one correspondence.

2. The installation device for a silicon wafer inspection camera of a photovoltaic screen printing machine according to claim 1, characterized in that: A plurality of Z-direction coarse adjustment threaded holes are respectively provided on the front end surfaces of the two vertical plates of the support foot at intervals and symmetrically; a Z-direction long waist-shaped mounting hole is respectively provided on the two end surfaces of the frame mounting plate and is installed in the Z-direction coarse adjustment threaded holes of the two vertical plates one by one through Z-direction adjustment screws.

3. The installation device for a silicon wafer inspection camera of a photovoltaic screen printing machine according to claim 1 or 2, characterized in that: The support foot also includes a lower crossbeam connected between the lower parts of the two vertical plates.

4. The installation device for a silicon wafer inspection camera of a photovoltaic screen printing machine according to claim 1, characterized in that: The intermediate detection camera is mounted on an intermediate camera mounting plate vertically connected to the bottom surface of the intermediate camera adjustment plate.

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