Thin film dielectric constant test fixture

Abstract

The utility model relates to the technical field of film testing, in particular to a film dielectric constant testing clamp. Comprising a seat body, the lower portion of the seat body is provided with an inner cavity, the top of the seat body is provided with an insulating plate, one side of the seat body is provided with a lower metal sheet, an upper metal sheet is arranged above the lower metal sheet, the top surface of the insulating plate is provided with a nut, the nut is in threaded connection with a screw rod, the lower end of the screw rod is provided with an upper electrode, and the upper electrode is provided with a lower electrode. The upper metal sheet is electrically connected with the upper electrode, the bottom surface of the inner cavity of the seat body is provided with an electrode holder, the electrode holder is rotatably connected with a lower electrode, two sides of the lower electrode are provided with lower extension arms, two sides of the screw rod are provided with insulated upper extension arms, and the lower extension arms are slidably connected with the upper extension arms through push rods. No weight is needed, so that the problem that the weight falls off does not need to be worried about.

Description

Technical Field

[0001] The utility model relates to the technical field of thin film testing, in particular to a thin film dielectric constant testing fixture. Background Art

[0002] The dielectric constant is the most important technical indicator of organic films used for capacitors. Generally speaking, when other conditions remain unchanged, the greater the dielectric constant of the film, the greater the capacitance of the capacitor. Therefore, it is necessary to test the dielectric constant of the film used for capacitors. The patent with application number 202322548817.X discloses an organic film dielectric constant test fixture based on weight pressure, including a fixture seat, an upper electrode, an upper metal sheet, a lower electrode, a lower electrode seat, a lower metal sheet, a pressure rod, a compression spring, a weight plate and a weight. The lower part of the fixture seat is provided with an inner cavity, the lower electrode seat is installed in the inner cavity of the fixture seat, the lower electrode is installed on the lower electrode seat, the upper electrode is placed directly above the lower electrode, one end of the upper metal sheet is conductively connected to the upper electrode, and one end of the lower metal sheet is conductively connected to the lower electrode. The electrodes are conductively connected, the lower end of the pressure rod is connected to the upper electrode, the upper end of the pressure rod passes through the corresponding through hole on the fixture seat from bottom to top and is connected to the weight disk, and weights are placed on the weight disk. The compression spring is set outside the pressure rod and is located between the top of the fixture seat and the bottom of the weight disk. The pressure rod does not need to be rotated, so that the upper electrode and the pressure rod can be fixed together. There is no need to put the upper electrode in the correct position during testing. However, if the weight accidentally falls during the removal and placement process, the capacitance meter may be damaged. Utility Model Content

[0003] The technical problem to be solved by the present invention is to provide a thin film dielectric constant testing fixture in view of the above-mentioned technical deficiencies.

[0004] In order to solve the above technical problems, the technical solution adopted by the present invention is: a thin film dielectric constant testing fixture, including a base body, an inner cavity is provided at the lower part of the base body, an insulating plate is provided at the top of the base body, a lower metal sheet is provided on one side of the base body, an upper metal sheet is provided above the lower metal sheet, a nut is provided on the top surface of the insulating plate, the nut is threadedly connected to a screw, the lower end of the screw is provided with an upper electrode, the upper metal sheet is electrically connected to the upper electrode, an electrode seat is provided on the bottom surface of the inner cavity of the base body, a lower electrode is rotatably connected to the electrode seat, lower protruding arms are provided on both sides of the lower electrode, and insulating upper protruding arms are provided on both sides of the screw, and the lower protruding arm and the upper protruding arm are slidably connected by a push rod.

[0005] To further optimize this technical solution, the push rod is arranged at both ends of the lower extending arm and is located on the outside of the lower electrode. Through holes are provided at both ends of the upper extending arm. The push rod passes through the through holes and the extension directions of the two are parallel to the axis of the screw.

[0006] To further optimize this technical solution, the push rod is arranged at both ends of the upper extending arm and is located on the outside of the upper electrode, and through holes are provided at both ends of the lower extending arm. The push rod passes through the through holes and the extension directions of the two are parallel to the axis of the screw.

[0007] Compared with the prior art, the utility model has the following advantages: the lower electrode is rotatably connected to the electrode seat, and lower protruding arms are provided on both sides of the lower electrode, the lower end of the screw is provided with an upper electrode, and insulated upper protruding arms are provided on both sides of the screw, the upper protruding arm and the lower protruding arm are slidably connected by a push rod, so that the lower electrode and the upper electrode can rotate synchronously, thereby not damaging the thin film sample, and since no weights are needed, there is no need to worry about the weights falling. BRIEF DESCRIPTION OF THE DRAWINGS

[0008] Figure 1 This is a schematic diagram of the structure of a thin film dielectric constant test fixture.

[0009] In the figure: 1. base; 2. insulating plate; 3. screw; 31. upper electrode; 32. upper extension arm; 4. nut; 5. upper metal sheet; 6. lower metal sheet; 7. lower electrode; 71. lower extension arm; 72. push rod; 8. electrode base. DETAILED DESCRIPTION

[0010] To make the objectives, technical solutions, and advantages of the present invention more clearly understood, the present invention is further described below in conjunction with specific embodiments and with reference to the accompanying drawings. It should be understood that these descriptions are merely illustrative and are not intended to limit the scope of the present invention. Furthermore, descriptions of known structures and technologies are omitted in the following description to avoid unnecessary confusion regarding the concepts of the present invention.

[0011] Specific implementation method: Figure 1As shown, a thin film dielectric constant test fixture includes a base body 1, the lower part of the base body 1 is provided with an inner cavity, the top of the base body 1 is provided with an insulating plate 2, a lower metal sheet 6 is provided on one side of the base body 1, an upper metal sheet 5 is provided above the lower metal sheet 6, a nut 4 is provided on the top surface of the insulating plate 2, and the nut 4 is threadedly connected with a screw 3, the screw 3 passes through the top of the base body 1 and the insulating plate 2. A through hole is provided, and the screw 3 does not contact the base body 1, and an upper electrode 31 is provided at the lower end of the screw 3, and the upper electrode 31 is located in the inner cavity of the base body 1, and the upper metal sheet 5 is electrically connected to the upper electrode 31. The screw 3 and the nut 4 are both made of metal, and one end of the upper metal sheet 5 is connected to the nut 4 to achieve its electrical connection with the upper electrode 31. An electrode holder 8 is provided on the bottom surface of the inner cavity 1, and a lower electrode 7 is rotatably connected to the electrode holder 8. The lower metal sheet 6 is electrically connected to the lower electrode 7. The holder body 1 and the electrode holder 8 are both made of metal. The electrode holder 8 is cylindrical. A cylindrical cavity is provided at the bottom of the lower electrode 7. When the lower electrode 7 is pressed downward, the lower electrode 7 and the lower metal sheet 6 can be reliably conductive. Lower protruding arms 71 are provided on both sides of the lower electrode 7. Insulated upper protruding arms 32 are provided on both sides of the screw 3. The lower protruding arms 71 and the upper protruding arms 32 are slidably connected by a push rod 72. When the screw 3 rotates, the upper electrode 31 and the lower electrode 7 (and the thin film sample placed on the lower electrode 7) can rotate synchronously, so that there is no relative rotation between the two electrodes, thereby preventing damage to the thin film sample. During the test, the upper metal sheet 5 and the lower metal sheet 6 are connected to the positive and negative poles of the capacitance meter respectively, and a thin film sample with a diameter larger than that of the lower electrode 7 is placed on the lower electrode 7. Then, the screw 3 is rotated to make the upper electrode 31 descend to press the thin film sample, and make the thin film sample fit tightly with the upper electrode 31 and the lower electrode 7. Then, the capacitance meter is turned on to obtain the dielectric constant value of the thin film sample.

[0012] There are two possible structures in which the lower extending arm 71 and the upper extending arm 32 are slidably connected via a push rod 72: first, the push rod 72 is provided at both ends of the lower extending arm 71 and is located outside the lower electrode 7, and through holes are provided at both ends of the upper extending arm 32, through which the push rod 72 passes, and the extension directions of both are parallel to the axis of the screw 3; second, the push rod 72 is provided at both ends of the upper extending arm 32 and is located outside the upper electrode 31, and through holes are provided at both ends of the lower extending arm 71, through which the push rod 72 passes, and the extension directions of both are parallel to the axis of the screw 3. When the screw 3 is raised or lowered, relative sliding can occur between the push rod 72 and the through hole in the up and down directions. The first connection structure is preferred, in which case the push rod 72 does not move up and down.

[0013] It should be understood that the above-described specific embodiments of the present invention are merely illustrative of or explanation of the principles of the present invention and do not constitute limitations of the present invention. Therefore, any modifications, equivalent substitutions, improvements, etc. made without departing from the spirit and scope of the present invention shall be included within the scope of protection of the present invention. In addition, the appended claims of the present invention are intended to cover all variations and modifications that fall within the scope and metes and bounds of the appended claims, or equivalents thereof.

Claims

1. A thin film dielectric constant test fixture, comprising a base (1), wherein an inner cavity is provided at the lower portion of the base (1), an insulating plate (2) is provided at the top of the base (1), a lower metal sheet (6) is provided on one side of the base (1), and an upper metal sheet (5) is provided above the lower metal sheet (6), characterized in that: The top surface of the insulating plate (2) is provided with a nut (4), the nut (4) is threadedly connected to a screw (3), the lower end of the screw (3) is provided with an upper electrode (31), the upper electrode (31) is located in the inner cavity of the base body (1), the upper metal sheet (5) is electrically connected to the upper electrode (31), the bottom surface of the inner cavity of the base body (1) is provided with an electrode seat (8), the electrode seat (8) is rotatably connected to a lower electrode (7), the lower metal sheet (6) is electrically connected to the lower electrode (7), lower extension arms (71) are provided on both sides of the lower electrode (7), and insulating upper extension arms (32) are provided on both sides of the screw (3), and the lower extension arms (71) and the upper extension arms (32) are slidably connected via a push rod (72).

2. The thin film dielectric constant test fixture according to claim 1, characterized in that: The push rod (72) is arranged at both ends of the lower extending arm (71) and is located outside the lower electrode (7). Through holes are provided at both ends of the upper extending arm (32). The push rod (72) passes through the through holes, and the extension directions of the two are parallel to the axis of the screw rod (3).

3. The thin film dielectric constant test fixture according to claim 1, characterized in that: The push rod (72) is arranged at both ends of the upper extending arm (32) and is located outside the upper electrode (31). Through holes are provided at both ends of the lower extending arm (71). The push rod (72) passes through the through holes, and the extension directions of the two are parallel to the axis of the screw rod (3).

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