Photoelectric-piezoelectric composite driven micro clamp

Abstract

The utility model discloses a photoelectric-piezoelectric composite driving micro clamp, and belongs to the field of micro clamps. The device comprises a base, a fine adjustment platform, a fine adjustment assembly, a first clamp finger and a second clamp finger, the fine adjustment assembly comprises a clamped beam amplification piece, a connecting piece, a first piezoelectric driving piece, a first PLZT driving piece, a second piezoelectric driving piece and a second PLZT driving piece, and the first piezoelectric driving piece and the second piezoelectric driving piece are fixed to the two ends of the clamped beam amplification piece in the length direction respectively; the first PLZT driving piece and the second PLZT driving piece are respectively fixed on the base, the first PLZT driving piece and the first piezoelectric driving piece are connected in series to form an electric loop, the second piezoelectric driving piece and the second PLZT driving piece are connected in series to form an electric loop, and the connecting piece is used for fixedly connecting the clamped beam amplifying piece with the fine tuning platform, the first clamp finger and the second clamp finger. According to the utility model, wire-free and non-contact control can be realized, and the device is suitable for areas susceptible to electromagnetic interference.

Description

Technical Field

[0001] The present invention relates to a micro-clamping device, in particular to a photoelectric-piezoelectric composite driven micro-clamping adjusting device. Background Art

[0002] The rapid development of microelectronics and micro-nanotechnology has significantly impacted numerous fields, including biomedicine, aerospace, and information and communications. Microgrippers, as the end-effectors of microassembly and micromanipulation systems, are traditionally categorized by the type of actuation force, including electrostatic, piezoelectric, electromagnetic, electrothermal, shape memory alloy (SMA), and vacuum gripping. However, their common drawbacks include the need for electromagnetic excitation devices and wire connections, making them susceptible to electromagnetic interference and even malfunction, resulting in assembly failure or damage to the object being manipulated. Furthermore, most traditional microgrippers can only achieve micro-movements in the clamping direction, lacking flexibility and possessing complex structures.

[0003] For example, Chinese patent application number 201310675398.4, published on September 16, 2015, discloses a light-driven micro-gripper. This patent describes a micro-gripper device driven by a lanthanum-modified lead zirconate titanate ceramic dual-chip, comprising a base, an ultraviolet light aperture, a PLZT dual-chip, a primary amplification mechanism, a secondary amplification mechanism, and a clamping arm. One end of the PLZT dual-chip is fixedly connected to the bottom of the base, and the other end is fixedly connected to the primary amplification mechanism. The primary amplification mechanism is fixedly connected to the side wall of the base via a flexible hinge, and its output end is connected to the secondary amplification mechanism, which has the clamping arm as its output end. When the upper portion of the PLZT dual-chip is exposed to ultraviolet light, the PLZT dual-chip bends downward. After being transmitted and decomposed by the primary amplification mechanism and amplified by the secondary amplification mechanism, it drives the clamping arm to achieve a clamping action. When the lower portion of the PLZT dual-chip is exposed to ultraviolet light, the PLZT dual-chip bends upward, causing the clamping arm to open. However, the structure of converting the optical drive into the mechanical drive is not flexible enough and needs to be improved.

[0004] Therefore, there is a need for improvement in the art to obtain a photoelectric-piezoelectric composite driven micro-gripper. Summary of the Invention

[0005] 1. Problems to be solved

[0006] In view of the problems existing in the prior art, the utility model provides a photoelectric-piezoelectric composite driven micro clamp, which can realize wire-free and contactless control and is suitable for areas susceptible to electromagnetic interference.

[0007] 2. Technical solution

[0008] In order to solve the above problems, the present invention adopts the following technical solutions.

[0009] A photoelectric-piezoelectric composite-driven micro-gripper comprises a base, a fine-tuning platform, a fine-tuning assembly, a first clamp finger, and a second clamp finger, wherein the fine-tuning platform is movably placed on the base, the first clamp finger and the second clamp finger are placed parallel to the fine-tuning platform, at least three groups of fine-tuning assemblies are provided, one end of each fine-tuning assembly is fixedly mounted on the base, and the fine-tuning platform, the first clamp finger, and the second clamp finger are all connected to the other end of at least one fine-tuning assembly, that is, at least one group of fine-tuning assemblies is provided with two ends connected to the base and the fine-tuning platform, at least one group of fine-tuning assemblies is provided with two ends connected to the base and the first clamp finger, and at least one group of fine-tuning assemblies is provided with two ends connected to the base and the second clamp finger. Among them, the fine-tuning component includes a fixed-beam amplifier, a connecting member, a first piezoelectric driver, a first PLZT driver, a second piezoelectric driver, and a second PLZT driver. The first piezoelectric driver and the second piezoelectric driver are respectively fixed at the two ends of the fixed-beam amplifier in the length direction, the first PLZT driver and the second PLZT driver are respectively fixed on the base, the first PLZT driver is connected in series with the first piezoelectric driver to form an electrical circuit, the second piezoelectric driver is connected in series with the second PLZT driver to form an electrical circuit, and the connecting member is used to fix the fixed-beam amplifier with the fine-tuning platform, the first clamp finger and the second clamp finger.

[0010] Furthermore, the fine-tuning components are respectively connected to the side surfaces of the first finger and the second finger in the length direction, and are used to control the spacing between the first finger and the second finger, thereby realizing clamping and opening between the first finger and the second finger; the fine-tuning component connected to the fine-tuning platform is located at the rear end of the first finger and the second finger in the length direction, and is used to control the forward or backward displacement of the first finger and the second finger.

[0011] Furthermore, the connecting member is fixedly connected in the middle of the length direction of the clamped beam amplifier, which is conducive to expanding the range of fine-tuning displacement.

[0012] Furthermore, the clamped beam amplifier is made of α-silicon nitride, such as Xinte Energy JP31A α-silicon nitride, which has the following advantages:

[0013] ①Simple structure, using standard silicon surface processing technology;

[0014] ② Strong adaptability, able to meet a variety of different needs;

[0015] ③ Under the premise of achieving large displacement, it has a lower driving voltage and reduces energy consumption;

[0016] ④Good speed.

[0017] Furthermore, the connecting member is made of a flexible material, and preferably, the connecting member is a flexible hinge. The reason why the connecting member requires a flexible material is mainly because its design function and role require allowing a certain degree of relative movement or deformation while connecting two parts. Moreover, the flexible link structure is compact, gapless, frictionless, and has a high displacement resolution. When driven by a piezoelectric device, a high positioning accuracy can be achieved. Although ordinary rigid materials can also be used for connection in some cases, they usually cannot provide the characteristics required for flexible links. Rigid materials will limit such movement, which may cause stress concentration and damage between the connected parts.

[0018] Furthermore, the two ends of the clamped beam magnifier in the length direction are respectively fixed on the base and the fine-tuning platform to limit the deformation of the clamped beam magnifier in the length direction and increase the fine-tuning range of the fine-tuning component.

[0019] Furthermore, a slideway assembly is provided on the fine-tuning platform, comprising guide rails and ball bearings. The guide rails are provided in two parallel configurations, and the ball bearings are placed on the guide rails. The fine-tuning platform and the first and second pliers fingers are respectively positioned above the ball bearings at corresponding positions and connected to one end of a connector. Driven by the connector, the fine-tuning platform and the first and second pliers fingers respectively move along the guide rails, thereby rolling the ball bearings to achieve their working function. The ball bearings roll freely within the guide rails, and the first and second pliers fingers move along the guide rails via the ball bearings.

[0020] Furthermore, a guide rail is provided on the fine-tuning platform, and a freely rolling ball is installed in the guide rail, and the first and second clamp fingers move along the guide rail through the ball.

[0021] Furthermore, a slideway assembly is provided on the base, comprising a guide rail and a ball bearing. The ball bearing rolls freely in the guide rail, and the fine-tuning platform moves along the guide rail through the ball bearing.

[0022] Furthermore, a guide rail is provided on the base, and a freely rolling ball is installed in the guide rail, and the fine-tuning platform moves along the guide rail through the ball.

[0023] 3. Beneficial effects

[0024] Compared with the prior art, the beneficial effects of the present invention are:

[0025] (1) The driving source of the present invention is an ultraviolet light source, which can realize wireless non-contact control and avoid electromagnetic interference; it utilizes the photovoltage effect of the PLZT driver and the inverse piezoelectric effect of the piezoelectric driver to directly convert light energy into mechanical energy, eliminating intermediate losses and making the structure simpler. The photovoltage effect of the PLZT driver has a fast response speed.

[0026] (2) The photoelectric-piezoelectric composite drive regulating device of the present invention utilizes the photoelectric voltage effect of the photoelectric ceramic PLZT (PLZT driver) and the inverse piezoelectric effect of the piezoelectric driver to directly convert light energy into mechanical energy, eliminating the intermediate mechanical transmission link and making the structure simple and compact;

[0027] (3) The driving source of the device of the present invention is ultraviolet light, which can realize light-controlled non-contact driving, avoid electromagnetic noise interference, and is suitable for working in various media environments;

[0028] (4) The photovoltage effect of the PLZT driver used in the present invention has a faster response speed than the photostrictive effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0029] Figure 1 A three-dimensional diagram of the photoelectric-piezoelectric composite driven micro-gripper of the present invention;

[0030] Figure 2 Schematic diagram of the photoelectric-piezoelectric composite driven micro-gripper of the present invention;

[0031] Figure 3 Schematic diagram of the structure of the slideway assembly in the photoelectric-piezoelectric composite driven micro-gripper of the present invention;

[0032] Figure 4 This is a schematic diagram of the fine-tuning component in the photoelectric-piezoelectric composite driven micro-gripper of the present invention before illumination;

[0033] Figure 5 This is a schematic diagram of the fine-tuning component in the photoelectric-piezoelectric composite driven micro-clamp of the present invention after illumination.

[0034] In the picture:

[0035] 1. Base; 2. Fine-tuning platform; 3. Fine-tuning assembly; 31. Fixture beam amplifier; 32. Connector; 33. First piezoelectric driver; 34. First PLZT driver; 35. Second piezoelectric driver; 36. Second PLZT driver; 4. First clamp finger; 5. Second clamp finger; 6. Slide assembly; 61. Guide rail; 62. Ball. DETAILED DESCRIPTION

[0036] The present invention is described in detail below with reference to the accompanying drawings and specific embodiments.

[0037] Example 1

[0038] like Figure 1 、 Figure 2As shown, a photoelectric-piezoelectric composite driven micro-gripper of this embodiment includes a base 1, a fine-tuning platform 2, a fine-tuning assembly 3, a first finger 4 and a second finger 5. The fine-tuning platform 2 is placed on the base 1. Applying external force to the fine-tuning platform 2 will cause displacement on the base; the first finger 4 and the second finger 5 are arranged in parallel and are respectively placed on the fine-tuning platform 2. Similarly, applying external force to the first finger 4 or the second finger 5 facilitates displacement on the fine-tuning platform 2. Under the above layout, the purpose of this embodiment is to control the spacing between the first finger 4 and the second finger 5, and the overall outward extension or inward shortening of the first finger 4 and the second finger 5, so there are at least three groups of fine-tuning components 3. Three groups of fine-tuning components 3 are provided here: one group of fine-tuning components is connected to the base 1 and the fine-tuning platform 2, and is used to control the overall outward extension or inward shortening of the first finger 4 and the second finger 5 on the fine-tuning platform 2; the second group of fine-tuning components is connected to the base 1 and the first finger 4, to achieve fine-tuning of the lateral displacement of the first finger 4 on the fine-tuning platform 2; the third group of fine-tuning components is connected to the base 1 and the second finger 5, to achieve fine-tuning of the lateral displacement of the second finger 5 on the fine-tuning platform 2, and finally the second group of fine-tuning components and the third group of fine-tuning components jointly achieve clamping and opening between the two fingers.

[0039] Specifically, the fine-tuning component 3 includes a fixed-beam amplifier 31, a connecting member 32, a first piezoelectric driver 33, a first PLZT driver 34, a second piezoelectric driver 35, and a second PLZT driver 36. The first piezoelectric driver 33 and the second piezoelectric driver 35 are respectively fixed at the two ends of the fixed-beam amplifier 31 in the length direction, and the first PLZT driver 34 and the second PLZT driver 36 are respectively fixed on the base 1. The first PLZT driver 34 is connected in series with the first piezoelectric driver 33 to form an electrical circuit, and the second piezoelectric driver 35 is connected in series with the second PLZT driver 36 to form an electrical circuit. The connecting member 32 is used to fixedly connect the fixed-beam amplifier 31 with the fine-tuning platform 2, the first clamp finger 4 and the second clamp finger 5. Among them, in order to expand the scale range of fine-tuning displacement, one end of the connecting member 32 is fixedly connected to the middle of the length direction of the fixed beam amplifier 31, and the other end of the connecting member 32 is respectively connected to the side surfaces of the first finger 4 and the second finger 5 in the length direction to control the spacing between the first finger 4 and the second finger 5, and realize the clamping and opening between the first finger 4 and the second finger 5; the connecting member 32 connecting the fine-tuning platform 2 is located at the rear end of the first finger 4 and the second finger 5 in the length direction to control the forward or backward displacement of the first finger 4 and the second finger 5.

[0040] Optionally, the clamped beam amplifier 31 of this embodiment can achieve micro-displacement adjustment by selecting a deformable material, such as soft metal. In particular, the clamped beam amplifier 31 is made of a polycrystalline silicon-silicon nitride composite. The advantage is that it is not only easy to bend and deform, but more importantly, under the premise of achieving large displacement, the polycrystalline silicon-silicon nitride composite material has a lower driving voltage, thereby reducing energy consumption.

[0041] Optionally, the connector 32 of this embodiment is made of a rigid or flexible material. Preferably, the connector 32 is a flexible hinge. Although ordinary rigid materials can be used for connection in some cases, rigid materials will restrict such movement and may cause stress concentration and damage between the connected parts. The reason why the connector requires a flexible material is mainly because its design function and role require a certain degree of relative movement or deformation while connecting two parts. In addition, the flexible link structure is compact, gapless, frictionless, and has a high displacement resolution. When driven by a piezoelectric device, it can achieve high positioning accuracy.

[0042] It should be noted that in order to expand the fine-tuning range of the fine-tuning component 3, the two ends of the fixed beam amplifier 31 in the length direction are fixed on the base 1 or the fine-tuning platform 2 to limit the deformation of the fixed beam amplifier 31 in its length direction. The limit plates can be vertically fixed at the corresponding positions of the base 1 and the fine-tuning platform 2, and the two ends of the fixed beam amplifier 31 are fixed on the limit plates.

[0043] In another optional embodiment, in order to control the fine-tuning direction of the displacement, a slide assembly 6 is provided on the fine-tuning platform 2, including a guide rail 61 and a ball 62. The guide rail 61 is provided with two parallel sets, and the ball 62 is placed on the guide rail. The fine-tuning platform 2 and the first and second pliers 4 and 5 are respectively above the ball 62 at corresponding positions and connected to one end of the connector 32. Driven by the connector 32, the fine-tuning platform 2 and the first and second pliers 4 and 5 will move along the guide rail 61 respectively, so that the ball 62 rolls freely in the guide rail 61, and the first and second pliers 4 and 5 move along the guide rail 61 through the ball 62. Of course, in order to reduce the number of components, such as Figure 3 As shown, a V-shaped guide rail 61 is opened on the upper surface of the fine-tuning platform 2, and a V-shaped guide rail 61 is opened at the bottom of the first clamp finger 4 and the second clamp finger 5. A free-rolling ball 62 is installed in the guide rail 61 on the upper surface of the fine-tuning platform 2, and the first clamp finger 4 and the second clamp finger 5 move along the guide rail 61 through the ball 62.

[0044] Similarly, a slide assembly 6 is provided on the base 1, comprising a guide rail 61 and a ball bearing 62. The ball bearing 62 rolls freely in the guide rail 61, and the fine-tuning platform 2 moves along the guide rail 61 through the ball bearing 62. In order to reduce the number of components, such as Figure 3As shown, a V-shaped guide rail 61 is provided on the upper surface of the base 1 , and a V-shaped guide rail 61 is provided on the bottom surface of the fine-tuning platform 2 . Free-rolling balls 62 are installed in the guide rail 61 , and the fine-tuning platform 2 moves along the guide rail 61 through the balls 62 .

[0045] The method of using the photoelectric-piezoelectric composite driven micro clamp of this embodiment is as follows: Figure 4 and Figure 5 As shown, the first PLZT driver 34 and the second PLZT driver 36 generate voltage according to the photovoltage effect under the irradiation of the ultraviolet light source, and transmit the voltage to the first piezoelectric driver 33 and the second piezoelectric driver 35 respectively through wires. According to the inverse piezoelectric effect, the two piezoelectric drivers generate strain to cause the deflection of the fixed beam amplifier 31 to change, and amplify the strain, and through the flexible hinge, the fine-tuning platform is translated back and forth, thereby lengthening or shortening the two clamp fingers; or the first clamp finger 4 and the second clamp finger 5 are translated left and right, thereby realizing the clamping and opening of the micro clamp according to the control of the irradiation and closing of the ultraviolet light source.

[0046] The micro-clamp of this embodiment can realize non-contact control without wires and is suitable for areas susceptible to electromagnetic interference. As can be seen from the above, the photoelectric-piezoelectric composite driven micro-clamp device of the present invention is the result of the combined action of the photovoltage effect of the PLZT driver and the inverse piezoelectric effect of the piezoelectric driver, eliminating the intermediate mechanical loss and making the structure simpler. The driving source of the present invention is an ultraviolet light source, which can realize wireless non-contact control and avoid electromagnetic interference. The micro-clamp device of the present invention can realize autonomous control of clamping, releasing, extending, shortening and other actions.

[0047] It should be noted that the terms such as "upper", "lower", "left", "right", "middle" etc. cited in this specification are only for the convenience of description, and are not used to limit the scope of implementation. Changes or adjustments in their relative relationships should also be regarded as the scope of implementation of this application without substantial changes in the technical content. The above descriptions are only some preferred embodiments of the present disclosure and an explanation of the technical principles used. Those skilled in the art should understand that the scope of the invention involved in the embodiments of the present disclosure is not limited to the technical solutions formed by the specific combination of the above-mentioned technical features, but should also cover other technical solutions formed by any combination of the above-mentioned technical features or their equivalent features without departing from the above-mentioned inventive concept. For example, the above-mentioned features are replaced with the technical features with similar functions disclosed in the embodiments of the present disclosure (but not limited to).

Claims

1. A photoelectric-piezoelectric composite driven micro-gripper, characterized by: The invention comprises a base (1), a fine-tuning platform (2), a fine-tuning assembly (3), a first clamp finger (4) and a second clamp finger (5); the fine-tuning platform (2) is movably placed on the base (1); the first clamp finger (4) and the second clamp finger (5) are placed in parallel on the fine-tuning platform (2); the fine-tuning assembly (3) is provided with at least three groups; one end of each fine-tuning assembly (3) is fixedly mounted on the base (1); the fine-tuning platform (2), the first clamp finger (4) and the second clamp finger (5) are all connected to the other end of at least one fine-tuning assembly (3); wherein the fine-tuning assembly (3) comprises a fixed beam amplifier (31), a connector (32), a first piezoelectric driver (33), a first PLZT driver (34), a second A piezoelectric driver (35) and a second PLZT driver (36) are provided. The first piezoelectric driver (33) and the second piezoelectric driver (35) are respectively fixed to the two ends of the fixed beam amplifier (31) in the length direction. The first PLZT driver (34) and the second PLZT driver (36) are respectively fixed to the base (1). The first PLZT driver (34) and the first piezoelectric driver (33) are connected in series to form an electric circuit. The second piezoelectric driver (35) and the second PLZT driver (36) are connected in series to form an electric circuit. The connector (32) is used to fixedly connect the fixed beam amplifier (31) with the fine-tuning platform (2), the first clamp finger (4) and the second clamp finger (5).

2. The photoelectric-piezoelectric composite driven micro-gripper according to claim 1, characterized in that: The fine-tuning components (3) are respectively connected to the side surfaces of the first pliers finger (4) and the second pliers finger (5) in the length direction, and are used to control the spacing between the first pliers finger (4) and the second pliers finger (5); the fine-tuning components (3) connected to the fine-tuning platform (2) are located at the rear end of the first pliers finger (4) and the second pliers finger (5) in the length direction, and are used to control the forward or backward displacement of the first pliers finger (4) and the second pliers finger (5).

3. The photoelectric-piezoelectric composite driven micro-gripper according to claim 1, characterized in that: The connecting member (32) is fixedly connected to the middle of the fixed beam enlarger (31) in the length direction.

4. The photoelectric-piezoelectric composite driven micro-gripper according to claim 1, characterized in that: The clamped beam magnifying member (31) is made of α-silicon nitride.

5. The photoelectric-piezoelectric composite driven micro-gripper according to claim 1, characterized in that: The connecting piece (32) is made of flexible material.

6. The photoelectric-piezoelectric composite driven micro-gripper according to claim 5, characterized in that: The connecting member (32) is a flexible hinge.

7. The photoelectric-piezoelectric composite driven micro-gripper according to claim 5, characterized in that: The two ends of the fixed beam magnifying member (31) in the length direction are respectively fixed on the base (1) and the fine-tuning platform (2).

8. The photoelectric-piezoelectric composite driven micro-gripper according to claim 1, characterized in that: A slideway assembly (6) is provided on the fine-tuning platform (2), comprising a guide rail (61) and a ball bearing (62). The ball bearing (62) rolls freely in the guide rail (61), and the first clamp finger (4) and the second clamp finger (5) move along the guide rail (61) via the ball bearing (62).

9. The photoelectric-piezoelectric composite driven micro-gripper according to claim 1, characterized in that: A guide rail (61) is provided on the fine-tuning platform (2), and a freely rolling ball (62) is installed in the guide rail (61). The first clamp finger (4) and the second clamp finger (5) move along the guide rail (61) via the ball (62).

10. The photoelectric-piezoelectric composite driven micro-gripper according to claim 1, characterized in that: A slideway assembly (6) is provided on the base (1), comprising a guide rail (61) and a ball bearing (62). The ball bearing (62) rolls freely in the guide rail (61), and the fine-tuning platform (2) moves along the guide rail (61) via the ball bearing (62).

11. The photoelectric-piezoelectric composite driven micro-gripper according to claim 1, characterized in that: A guide rail (61) is provided on the base (1), a freely rolling ball (62) is installed in the guide rail (61), and the fine-tuning platform (2) moves along the guide rail (61) via the ball (62).

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