Anti-static battery silicon wafer ceramic insertion mechanism
By using zirconium oxide ceramic material and a silicon wafer transfer mechanism designed with vacuum adsorption holes, the problems of damage and static electricity to silicon wafers during transfer are solved, efficient and lossless automated transfer is achieved, and the quality and efficiency of silicon wafer production are improved.
Patent Information
- Application Number
- CN202422198910.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-09
- Publication Date
- 2025-10-03
- Estimated Expiration
- 2034-09-09
AI Technical Summary
The existing silicon wafer transfer structure easily causes damage to the silicon wafer, and it is difficult to avoid the generation of static electricity during the transfer process, which affects the performance of the silicon wafer.
The internal and external inserts are made of zirconia ceramic material, combined with vacuum adsorption holes and roller design to achieve high-precision positioning and anti-static protection of silicon wafers, and avoid silicon wafer damage and static damage through the automated transfer system.
It realizes efficient and lossless automatic transportation of silicon wafers, improves production efficiency and quality, and ensures the cleanliness and safety of silicon wafers.
Smart Images
Figure CN223408926U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of solar cell panel production and processing equipment, in particular to an anti-static battery silicon wafer ceramic inserting mechanism. Background Art
[0002] During processing, solar cell silicon wafers need to be transferred to quartz boats (carriers) for transport. The thinness and brittleness of silicon wafers dictate that high-precision positioning and non-destructive clamping must be achieved during handling. This requires the handling system to have advanced positioning technology and appropriate clamping tools to avoid wafer damage or performance degradation due to improper handling.
[0003] The silicon wafer production environment requires stringent cleanliness standards; even the slightest contamination can severely impact cell performance. Therefore, handling equipment and processes must be performed in an ultra-clean environment, utilizing dust-proof and anti-static materials and technologies to ensure absolute cleanliness during wafer handling.
[0004] Silicon wafers are prone to static electricity during handling, and static discharge can damage the internal structure of the wafers. Therefore, the handling system must integrate advanced anti-static design and implement vibration protection through precise mechanical structure and control system to ensure the safety of silicon wafers during handling.
[0005] The existing silicon wafer transfer and conveying structure is prone to damage to the battery silicon wafers during positioning and transfer, and it is difficult to avoid the generation of static electricity during transfer. Therefore, an anti-static battery silicon wafer ceramic inserting mechanism is needed. Utility Model Content
[0006] The purpose of the utility model is to provide an anti-static battery silicon wafer ceramic insert mechanism, which can adapt to the automatic transfer and transportation of battery silicon wafers, avoid material damage and static damage, and improve the production efficiency and production quality of battery silicon wafers.
[0007] In order to achieve the above-mentioned purpose, the utility model provides the following technical solutions: an anti-static battery silicon wafer ceramic inserting mechanism, comprising a feeding base, a correction base and a carrier, the feeding base is fixedly connected to a first linear module and a two-axis movable module, the movable platform of the first linear module is fixedly connected to a lifting cylinder, the piston rod of the lifting cylinder is fixedly connected to a lifting seat, the lifting seat is fixedly connected to two parallel internal plug teeth, the movable platform of the two-axis movable module is fixedly connected to two parallel second linear modules, the movable platform of each second linear module is fixedly connected to an external plug tooth, the internal and external plug teeth are both made of zirconia ceramic, the correction base is fixedly connected to a bidirectional slide, the two movable platforms of the bidirectional slide are rotatably connected to rollers, and the internal and external plug teeth and the carrier are all provided with a plurality of vacuum adsorption holes.
[0008] Furthermore, the lifting seat is slidably connected to the moving platform of the first linear module, and the internal inserting gear is located between the two external inserting gears in its extending direction.
[0009] Furthermore, there are two carriers, and the two carriers are distributed on both sides of the first linear module. A positioning groove is opened on the carrier, and the vacuum adsorption hole on the carrier is located in the positioning groove.
[0010] Furthermore, there are multiple rollers, and the multiple rollers are evenly distributed on the two moving platforms of the bidirectional slide.
[0011] The beneficial effects of the utility model are: it can adapt to the automatic transfer and transportation of battery silicon wafers, can avoid material damage and static damage, and improve the production efficiency and production quality of battery silicon wafers. BRIEF DESCRIPTION OF THE DRAWINGS
[0012] Figure 1 The utility model is an axonometric diagram of an anti-static battery silicon wafer ceramic insert mechanism.
[0013] Figure 2 This is a schematic diagram of the feeding base of an anti-static battery silicon wafer ceramic insert mechanism of the present invention.
[0014] Figure 3 This is a schematic diagram of the feeding base of an anti-static battery silicon wafer ceramic insert mechanism of the present invention.
[0015] In the figure: 1. Feeding base; 2. Alignment base; 3. First linear module; 301. Lifting cylinder; 302. Lifting seat; 303. Internal gear; 4. Two-axis moving module; 401. Second linear module; 402. External gear; 5. Carrier; 501. Positioning slot; 6. Bidirectional slide; 601. Roller. DETAILED DESCRIPTION
[0016] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below in conjunction with the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.
[0017] refer to Figure 1-Figure 3The anti-static battery silicon wafer ceramic inserting mechanism shown includes a feeding base 1, a correction base 2 and a carrier 5. The feeding base 1 is fixedly connected to a first linear module 3 and a two-axis movable module 4. The movable platform of the first linear module 3 is fixedly connected to a lifting cylinder 301. The piston rod of the lifting cylinder 301 is fixedly connected to a lifting seat 302. Two parallel internal inserting teeth 303 are fixedly connected to the lifting seat 302. Two parallel second linear modules 401 are fixedly connected to the movable platform of the two-axis movable module 4. Each movable platform of the second linear module 401 is fixedly connected to an external inserting tooth 402. The material of the internal inserting tooth 303 and the external inserting tooth 402 are both made of zirconia ceramic. A bidirectional slide 6 is fixedly connected to the correction base 2. Rollers 601 are rotatably connected to the two movable platforms of the bidirectional slide 6. Multiple vacuum adsorption holes are provided on the internal inserting teeth 303, the external inserting teeth 402 and the carrier 5.
[0018] The lifting seat 302 is slidably connected to the moving platform of the first linear module 3, and the internal tooth 303 is located between the two external teeth 402 in its extension direction to avoid interference between the internal tooth 303 and the external tooth 402 during transportation.
[0019] There are two carriers 5, and the two carriers 5 are distributed on both sides of the first linear module 3. A positioning groove 501 is opened on the carrier 5, and the vacuum adsorption hole on the carrier 5 is located in the positioning groove 501. The vacuum adsorption hole can prevent the battery silicon wafer from shifting in the positioning groove 501 after correction.
[0020] There are multiple rollers 601, and the multiple rollers 601 are evenly distributed on the two moving platforms of the bidirectional slide 6. The rollers 601 can be used to correct the battery silicon wafers, guide the feeding of the battery silicon wafers, and avoid surface wear of the battery silicon wafers.
[0021] The working principle of the present invention is as follows: first, the lifting cylinder 301 drives the lifting seat 302 to rise to receive the battery silicon wafer, and the external flip feeding mechanism feeds the flipped battery to the two internal insert teeth 303. After vacuum adsorption and fixation, the first linear module 3 drives the lifting seat 302 to slide above the carrier 5, and the piston rod of the lifting cylinder 301 is retracted, and the battery silicon wafer is placed on the carrier 5. The vertical direction of the battery silicon wafer is positioned by the positioning groove 501. Then, the rollers 601 on the two moving platforms of the two-way slide 6 approach each other to align the battery silicon wafer. After that, the two-axis moving module 4 cooperates with the second linear module 401 to drive the external insert teeth 402 to lift and adsorb the battery silicon wafer for transportation. Then, the horizontal feeding can be placed in the material trough corresponding to the quartz boat of the battery silicon wafer. During the entire transportation process, the internal insert teeth 303 and external insert teeth 402 of zirconia ceramic material can avoid the generation of static electricity.
[0022] The above embodiments are used to further illustrate the present invention, but do not limit the present invention to these specific embodiments. Any modifications, equivalent replacements, and improvements made within the spirit and principles of the present invention should be understood to be within the scope of protection of the present invention.
Claims
1. An anti-static battery silicon wafer ceramic insert mechanism, characterized by: The invention comprises a feeding base (1), a return base (2) and a carrier (5), wherein the feeding base (1) is fixedly connected to a first linear module (3) and a two-axis movable module (4), a lifting cylinder (301) is fixedly connected to the movable platform of the first linear module (3), a lifting seat (302) is fixedly connected to the piston rod of the lifting cylinder (301), two parallel internal inserting teeth (303) are fixedly connected to the lifting seat (302), and a two-axis movable module (4) is fixedly connected to the movable platform of the two-axis movable module (4). There are two second linear modules (401) arranged in parallel, and the movable platform of each second linear module (401) is fixedly connected to an external tooth (402), and the materials of the internal tooth (303) and the external tooth (402) are both zirconia ceramics. A bidirectional slide (6) is fixedly connected to the alignment base (2), and rollers (601) are rotatably connected to the two movable platforms of the bidirectional slide (6), and a plurality of vacuum adsorption holes are provided on the internal tooth (303), the external tooth (402) and the carrier (5).
2. The anti-static battery silicon wafer ceramic insert mechanism according to claim 1, characterized in that: The lifting seat (302) is slidably connected to the moving platform of the first linear module (3), and the internal inserting tooth (303) is located between the two external inserting teeth (402) in its extension direction.
3. The anti-static battery silicon wafer ceramic insert mechanism according to claim 1, characterized in that: Specifically, there are two carriers (5), and the two carriers (5) are distributed on both sides of the first linear module (3). A positioning groove (501) is opened on the carrier (5), and the vacuum adsorption hole on the carrier (5) is located in the positioning groove (501).
4. The anti-static battery silicon wafer ceramic insert mechanism according to claim 1, characterized in that: Specifically, there are multiple rollers (601), and the multiple rollers (601) are evenly distributed on the two moving platforms of the bidirectional slide (6).