Vacuum cavity and semiconductor device

Abstract

The utility model belongs to the technical field of semiconductor equipment, and discloses a vacuum cavity and semiconductor equipment, the vacuum cavity comprises an upper cavity, a lower cavity and a jacking assembly, the upper cavity is arranged in the lower cavity, a sealing ring is arranged between the upper cavity and the lower cavity, and the upper cavity is tightly pressed on the lower cavity through a spinning assembly; the jacking assembly is installed in the lower cavity and comprises a first driving part and a second driving part, the first driving part is arranged at the first end of the lower cavity and used for driving the first end of the upper cavity to rotate relative to the lower cavity so that the upper cavity and the lower cavity can form an included angle, and the second driving part is arranged at the second end of the lower cavity and used for driving the first end of the upper cavity to rotate relative to the lower cavity. The second driving piece is used for driving the second end of the upper cavity to ascend and descend, so that the upper cavity and the lower cavity can be arranged in parallel. Compared with existing bolt locking, the vacuum cavity is easy and convenient to operate, safe and reliable; and by arranging the jacking assembly, the automation degree of opening and closing of the vacuum cavity is improved, and the production efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor equipment, in particular to a vacuum chamber and semiconductor equipment. Background Art

[0002] Some steps in the existing semiconductor processing process require vacuum treatment, such as the evaporation process, and vacuum treatment generally requires the use of a vacuum chamber.

[0003] Most existing vacuum chambers are composed of a combination of upper and lower covers. The connection between the upper and lower covers is mostly a simple hinge structure. The chamber usually needs to be opened and closed manually. The upper cover is heavy and difficult to open. After the chamber is closed, the upper cover is mostly locked by bolts, and tightening the bolts is cumbersome.

[0004] Therefore, there is an urgent need for a vacuum chamber and a semiconductor device to solve the above technical problems. Utility Model Content

[0005] The purpose of the present utility model is to provide a vacuum chamber and semiconductor equipment, aiming to solve the problem in the prior art that the vacuum chamber needs to be opened and closed manually and the locking of the upper cavity is cumbersome. The vacuum chamber and semiconductor equipment can improve the degree of automation of the opening and closing of the vacuum chamber and the locking of the upper cavity.

[0006] To achieve this purpose, the present invention adopts the following technical solutions:

[0007] A vacuum chamber, comprising:

[0008] lower cavity;

[0009] An upper cavity is provided in the lower cavity, a sealing ring is provided between the upper cavity and the lower cavity, and the upper cavity is pressed against the lower cavity by a spinning assembly;

[0010] A lifting assembly is installed on the lower cavity, and the lifting assembly includes a first driving member and a second driving member. The first driving member is configured at the first end of the lower cavity, and the first driving member is used to drive the first end of the upper cavity to rotate relative to the lower cavity, so that the upper cavity and the lower cavity can be set at an angle. The second driving member is configured at the second end of the lower cavity, and the second driving member is used to drive the second end of the upper cavity to rise and fall, so that the upper cavity and the lower cavity can be set in parallel.

[0011] In some possible embodiments, a support rod is provided on the bottom surface of the upper cavity, the first driving member is configured on the bottom surface of the lower cavity, a support block is provided on the end of the output rod of the first driving member, and an elongated sliding hole for the support rod to pass through is provided on the lower cavity, and the end of the support rod away from the upper cavity passes through the elongated sliding hole and is in rolling contact with the support block.

[0012] In some possible implementations, the support rod is in rolling contact with the support block via a bearing.

[0013] In some possible embodiments, the spinning assembly includes a spinning cylinder and a spinning block arranged at the end of the spinning rod of the spinning cylinder, the spinning cylinder is installed in the lower cavity, and the spinning cylinder is configured to drive the spinning block to rise and rotate above the upper cavity so that the upper cavity is pressed against the lower cavity.

[0014] In some possible implementations, the vacuum chamber further includes a hinge structure installed at the second end of the upper chamber, the hinge structure and the second driving member are correspondingly arranged, and the second driving member drives the hinge structure to rise and fall.

[0015] In some possible implementations, the hinge structure is connected to the lifting rod of the second driving member via a support plate, and the support plate is slidably installed in a sliding groove of the lower cavity.

[0016] In some possible embodiments, the upper cavity includes an upper cover and a first ring body arranged on the bottom surface of the upper cover, the lower cavity includes a lower cover and a second ring body arranged on the top surface of the lower cover, the first ring body and the second ring body are arranged opposite each other, and the sealing ring is installed between the first ring body and the second ring body.

[0017] In some possible implementations, the vacuum chamber further includes a vacuum pipeline, which is installed on the bottom surface of the lower chamber and communicates with the air extraction hole of the lower chamber.

[0018] In some possible implementations, the vacuum chamber further includes a handle, which is installed on the top surface of the upper chamber and located at the first end of the upper chamber.

[0019] The utility model also provides a semiconductor device, comprising the vacuum cavity described in any one of the above solutions.

[0020] The beneficial effects of the present invention are as follows: the vacuum chamber provided by the present invention is pressed against the lower chamber by a spinning assembly, which is simple to operate, safe and reliable compared with the existing bolt locking; by setting a lifting assembly, when the vacuum chamber needs to be opened, the first driving member first drives the first end of the upper chamber to rotate relative to the lower chamber, and the first end of the upper chamber moves in a direction away from the lower chamber, so that the upper chamber and the lower chamber are set at an angle, and then, the second driving member drives the second end of the upper chamber to rise, so that the upper chamber and the lower chamber are set in parallel, and when the vacuum chamber needs to be closed, the second driving member first drives the second end of the upper chamber to descend, and then, the output rod of the first driving member descends, and the first end of the upper chamber moves in a direction close to the lower chamber under the action of gravity. Such a setting improves the degree of automation of opening and closing of the vacuum chamber, improves production efficiency, and both ends of the upper chamber will be open, which will not restrict the direction of taking and discharging materials into the vacuum chamber.

[0021] The utility model also provides a semiconductor device, including the above-mentioned vacuum chamber. The semiconductor device has a high degree of automation and is applicable to various automated production environments. BRIEF DESCRIPTION OF THE DRAWINGS

[0022] Figure 1 This is a three-dimensional view of the upper cavity of the vacuum cavity provided by the embodiment of the utility model after opening;

[0023] Figure 2 This is a side view of the vacuum chamber provided by an embodiment of the present invention after the upper cavity is opened;

[0024] Figure 3 This is a three-dimensional view of the upper cavity of the vacuum cavity provided by the embodiment of the present utility model after the upper cavity is opened;

[0025] Figure 4 This is a side view of the upper cavity of the vacuum cavity provided by an embodiment of the present utility model after opening;

[0026] Figure 5 This is a cross-sectional view of the upper cavity and the lower cavity of the vacuum cavity provided by the embodiment of the present utility model, which are arranged at an angle;

[0027] Figure 6 This is a schematic structural diagram of a first driving member, a support rod, and a bearing provided in an embodiment of the present utility model;

[0028] Figure 7 This is a side view of the upper cavity and the lower cavity of the vacuum cavity provided by the embodiment of the present utility model, which are arranged at an angle;

[0029] Figure 8 This is a side view of the closed vacuum chamber provided by an embodiment of the present invention.

[0030] In the picture:

[0031] 100, lower cavity; 110, lower cover; 111, long sliding hole; 120, second ring;

[0032] 200, upper cavity; 210, upper cover; 220, first ring; 300, sealing ring;

[0033] 400, spinning assembly; 410, spinning cylinder; 420, spinning block;

[0034] 510, first driving member; 520, second driving member; 530, supporting block;

[0035] 600, support rod; 700, bearing; 800, hinge structure; 900, support plate; 1000, vacuum pipe; 1100, handle. DETAILED DESCRIPTION

[0036] The present invention will be further described in detail below with reference to the accompanying drawings and examples. It should be understood that the specific embodiments described herein are intended only to illustrate the present invention and are not intended to limit the present invention. It should also be noted that, for ease of description, the accompanying drawings only illustrate portions relevant to the present invention, not all of its components.

[0037] In the description of this utility model, unless otherwise specified or limited, the terms "connected," "connect," and "fixed" should be understood in a broad sense. For example, they can refer to fixed connection, detachable connection, or integration; mechanical connection or electrical connection; direct connection or indirect connection through an intermediate medium; internal communication between two components or interaction between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0038] In the present invention, unless otherwise expressly specified or limited, a first feature being "above" or "below" a second feature may include the first and second features being in direct contact, or may include the first and second features being in contact not directly but through another feature between them. Moreover, a first feature being "above," "above," and "above" a second feature may include the first feature being directly above or obliquely above the second feature, or may simply mean that the first feature is higher in level than the second feature. A first feature being "below," "below," and "below" a second feature may include the first feature being directly below or obliquely below the second feature, or may simply mean that the first feature is lower in level than the second feature.

[0039] In the description of this embodiment, the terms "upper," "lower," "right," and other orientations or positional relationships are based on the orientations or positional relationships shown in the accompanying drawings and are intended solely for ease of description and simplified operation. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on the present invention. Furthermore, the terms "first" and "second" are used solely for descriptive purposes and have no special meaning.

[0040] This embodiment provides a vacuum chamber, which aims to solve the problems in the prior art that the vacuum chamber needs to be opened and closed manually and the locking of the upper chamber is cumbersome. The vacuum chamber can improve the degree of automation of the opening and closing of the vacuum chamber and the locking of the upper chamber.

[0041] like Figures 1 to 8 As shown, the vacuum chamber includes an upper chamber 200, a lower chamber 100 and a lifting assembly, the upper chamber 200 is arranged in the lower chamber 100, a sealing ring 300 is arranged between the upper chamber 200 and the lower chamber 100, and the upper chamber 200 is pressed against the lower chamber 100 by a spinning assembly 400; the lifting assembly is installed in the lower chamber 100, and the lifting assembly includes a first driving member 510 and a second driving member 520, the first driving member 510 is arranged at the first end of the lower chamber 100, the first driving member 510 is used to drive the first end of the upper chamber 200 to rotate relative to the lower chamber 100, so that the upper chamber 200 and the lower chamber 100 can be arranged at an angle, the second driving member 520 is arranged at the second end of the lower chamber 100, the second driving member 520 is used to drive the second end of the upper chamber 200 to rise and fall, so that the upper chamber 200 and the lower chamber 100 can be arranged in parallel. During actual installation, the first driving member 510 can be installed on the external machine or the first end of the lower chamber 100 , and the second driving member 520 can be installed on the external machine or the second end of the lower chamber 100 , as required.

[0042] In the above-mentioned vacuum chamber, the upper chamber 200 is pressed against the lower chamber 100 by the spinning assembly 400. Compared with the existing bolt locking, it is easy to operate, safe and reliable. By setting the lifting assembly, when the vacuum chamber needs to be opened, the first driving member 510 first drives the first end of the upper chamber 200 to rotate relative to the lower chamber 100, and the first end of the upper chamber 200 moves in a direction away from the lower chamber 100, so that the upper chamber 200 and the lower chamber 100 are set at an angle. Then, the second driving member 520 drives the second end of the upper chamber 200 to rotate relative to the lower chamber 100. When the vacuum chamber needs to be closed, the second driving member 520 first drives the second end of the upper chamber 200 to descend, and then the output rod of the first driving member 510 descends. The first end of the upper chamber 200 moves toward the lower chamber 100 under the action of gravity. This arrangement improves the degree of automation of opening and closing the vacuum chamber and improves production efficiency. In addition, both ends of the upper chamber 200 will be open, and will not limit the direction of taking and discharging materials into the vacuum chamber.

[0043] For specific implementation, see Figure 5 and Figure 7 Optionally, a support rod 600 is provided on the bottom surface of the upper cavity 200, and the first driving member 510 is disposed on the bottom surface of the lower cavity 100. A support block 530 is provided at the end of the output rod of the first driving member 510. The lower cavity 100 is provided with an elongated sliding hole 111 for the support rod 600 to pass through. The end of the support rod 600 away from the upper cavity 200 passes through the elongated sliding hole 111 and rolls in contact with the support block 530. When the upper cavity 200 is opened, the output rod of the first driving member 510 slowly drives the support block 530 upward, causing it to contact the bearing 700. Under the thrust of the output rod, the bearing 700 slowly rolls along the support block 530, while the support rod 600 slides along the elongated sliding hole 111. The support rod 600 lifts the upper cavity 200, so that the upper cavity 200 and the lower cavity 100 are at a certain angle. It is easy to think that the length of the elongated sliding hole 111 matches the maximum stroke of the upper cavity 200 to avoid the problem of instability after the upper cavity 200 is opened due to the excessive length of the elongated sliding hole 111. Preferably, two first drive members 510 and two second drive members 520 are provided, and the two first drive members 510 are respectively provided on both sides of the first end of the upper cavity 200, and the two second drive members 520 are respectively provided on both sides of the second end of the upper cavity 200 to ensure the smoothness of the opening process of the upper cavity 200. Optionally, the support rod 600 is in rolling contact with the support block 530 through the bearing 700. Alternatively, the support rod 600 can also be in contact with the support block 530 through a roller, etc., as long as rolling contact can be achieved. For example, when the bearing 700 is installed, it can be connected to the support rod 600 by a pin.

[0044] Optionally, the spinning assembly 400 includes a spinning cylinder 410 and a spinning block 420 provided at the end of the spinning rod of the spinning cylinder 410. The spinning cylinder 410 is installed on the lower cavity 100. The spinning cylinder 410 is configured to drive the spinning block 420 to rise and rotate above the upper cavity 200 so that the upper cavity 200 is pressed against the lower cavity 100. The spinning cylinder 410 can achieve precise control of the position and angle of the spinning block 420 to ensure the accuracy of the locking operation of the upper cavity 200. Preferably, the spinning assembly 400 is provided with two groups, and the two groups of spinning assemblies 400 are respectively located on both sides of the upper cavity 200 to ensure reliable locking.

[0045] The vacuum chamber also includes a hinge structure 800 installed at the second end of the upper chamber 200. The hinge structure 800 and the second drive member 520 are correspondingly arranged, and the second drive member 520 drives the hinge structure 800 to rise and fall. When the upper chamber 200 is opened, the first drive member 510 first drives the first end of the upper chamber 200 to rotate relative to the lower chamber 100, so that the upper chamber 200 and the lower chamber 100 are arranged at an angle. Then, the second drive member 520 drives the second end of the upper chamber 200 to rise, so that the upper chamber 200 and the lower chamber 100 are arranged in parallel. Finally, the first end of the upper chamber 200 can be manually lifted to open the upper chamber 200 at a larger angle relative to the lower chamber 100, so as to facilitate the inspection or debugging of the structure in the vacuum chamber. Preferably, the vacuum chamber also includes a handle 1100, which is installed on the top surface of the upper chamber 200 and is located at the first end of the upper chamber 200. The handle 1100 is provided for easy gripping. Specifically, the handle 1100 can be configured to have a U-shaped, L-shaped, or I-shaped structure extending in a direction away from the upper cavity 200 .

[0046] Optionally, the hinge structure 800 is connected to the lifting rod of the second driving member 520 via a support plate 900, and the support plate 900 is slidably mounted within a slide groove of the lower cavity 100. In this embodiment, the hinge structure 800 includes a connector and a cam. The coupling protrusion of the cam extends into the connecting groove of the connector and is rotatably connected to the connector via a rotating shaft. The connector is mounted on the upper cavity 200, and the cam is connected to the support plate 900.

[0047] Preferably, the upper chamber 200 includes an upper cover 210 and a first ring body 220 disposed on the bottom surface of the upper cover 210. The lower chamber 100 includes a lower cover 110 and a second ring body 120 disposed on the top surface of the lower cover 110. The first ring body 220 and the second ring body 120 are disposed opposite each other, and the sealing ring 300 is installed between the first ring body 220 and the second ring body 120. The upper cover 210, the first ring body 220, the sealing ring 300, the second ring body 120, and the lower cover 110 together form a sealed vacuum chamber. The size of the vacuum chamber can be determined by changing the shapes of the first ring body 220 and the second ring body 120.

[0048] The vacuum chamber also includes a vacuum line 1000, which is installed on the bottom surface of the lower chamber 100 and communicates with the exhaust port of the lower chamber 100. When the vacuum chamber needs to be opened, a gas-breaking gas is first injected into the chamber through the vacuum line 1000 to break the vacuum, bringing the pressure inside the chamber to the same level as the atmospheric pressure outside. After the chamber is closed, the vacuum chamber can be evacuated through the vacuum line 1000.

[0049] This embodiment further provides a semiconductor device, including the above-mentioned vacuum chamber. The semiconductor device has a high degree of automation and is applicable to a variety of automated production environments.

[0050] Obviously, the above-described embodiments of the present invention are merely examples for the purpose of clearly illustrating the present invention and are not intended to limit the manner in which the present invention is to be implemented. A person skilled in the art would be able to make various obvious changes, readjustments, and substitutions without departing from the scope of protection of the present invention. It is not necessary and impossible to enumerate all embodiments here. Any modifications, equivalent substitutions, and improvements made within the spirit and principles of the present invention shall be included within the scope of protection of the claims of the present invention.

Claims

1. A vacuum chamber, characterized in that: include: Lower cavity (100); An upper cavity (200) is disposed on the lower cavity (100), a sealing ring (300) is disposed between the upper cavity (200) and the lower cavity (100), and the upper cavity (200) is pressed against the lower cavity (100) via a spinning assembly (400); A lifting assembly is installed on the lower cavity (100), and the lifting assembly includes a first driving member (510) and a second driving member (520). The first driving member (510) is arranged at the first end of the lower cavity (100), and the first driving member (510) is used to drive the first end of the upper cavity (200) to rotate relative to the lower cavity (100), so that the upper cavity (200) and the lower cavity (100) can be arranged at an angle. The second driving member (520) is arranged at the second end of the lower cavity (100), and the second driving member (520) is used to drive the second end of the upper cavity (200) to rise and fall, so that the upper cavity (200) and the lower cavity (100) can be arranged in parallel.

2. The vacuum chamber according to claim 1, wherein: A support rod (600) is provided on the bottom surface of the upper cavity (200), the first driving member (510) is arranged on the bottom surface of the lower cavity (100), a support block (530) is provided at the end of the output rod of the first driving member (510), and an elongated sliding hole (111) for the support rod (600) to pass through is provided on the lower cavity (100), and the end of the support rod (600) away from the upper cavity (200) passes through the elongated sliding hole (111) and is in rolling contact with the support block (530).

3. The vacuum chamber according to claim 2, wherein: The support rod (600) is in rolling contact with the support block (530) via a bearing (700).

4. The vacuum chamber according to claim 1, wherein: The spinning assembly (400) includes a spinning cylinder (410) and a spinning block (420) arranged at the end of a spinning rod of the spinning cylinder (410). The spinning cylinder (410) is installed on the lower cavity (100). The spinning cylinder (410) is configured to drive the spinning block (420) to rise and rotate to above the upper cavity (200) so that the upper cavity (200) is pressed against the lower cavity (100).

5. The vacuum chamber according to claim 1, wherein: The vacuum chamber further comprises a hinge structure (800) mounted on the second end of the upper chamber (200), the hinge structure (800) and the second driving member (520) being arranged correspondingly, and the second driving member (520) drives the hinge structure (800) to rise and fall.

6. The vacuum chamber according to claim 5, wherein: The hinge structure (800) is connected to the lifting rod of the second driving member (520) through a support plate (900), and the support plate (900) is slidably installed in the sliding groove of the lower cavity (100).

7. The vacuum chamber according to claim 1, wherein: The upper cavity (200) includes an upper cover (210) and a first ring body (220) arranged on the bottom surface of the upper cover (210); the lower cavity (100) includes a lower cover (110) and a second ring body (120) arranged on the top surface of the lower cover (110); the first ring body (220) and the second ring body (120) are arranged opposite each other, and the sealing ring (300) is installed between the first ring body (220) and the second ring body (120).

8. The vacuum chamber according to claim 1, wherein: The vacuum cavity further comprises a vacuum pipeline (1000), wherein the vacuum pipeline (1000) is installed on the bottom surface of the lower cavity (100) and is in communication with the air extraction hole of the lower cavity (100).

9. The vacuum chamber according to claim 1, wherein: The vacuum chamber further comprises a handle (1100), wherein the handle (1100) is mounted on the top surface of the upper chamber (200) and is located at the first end of the upper chamber (200).

10. A semiconductor device, characterized in that The vacuum chamber comprises the vacuum chamber according to any one of claims 1 to 9.

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