Metal diaphragm valve capable of effectively solving non-springback problem of diaphragm

Abstract

The utility model relates to a metal diaphragm valve capable of effectively solving the problem that a diaphragm of a traditional metal diaphragm valve does not rebound, and relates to the field of metal diaphragm valves, the metal diaphragm valve comprises a valve body, a valve rod and a diaphragm, a preset groove is formed in the valve body, the diaphragm is arranged in the middle of the preset groove, a nut is arranged at the position, located at the preset groove, of the valve body, and the nut is connected with the valve rod. The nut is located on the side, away from the valve body, of the diaphragm, and the valve body and the valve rod are in threaded connection through the nut. A bearing seat is arranged on the side, close to the valve body, of the diaphragm in the preset groove, and one end of the bearing seat penetrates through the diaphragm and is connected with the diaphragm. And one end, penetrating through the diaphragm, of the bearing seat is elastically connected with the valve rod. The valve has the effects that the rebound effect of the diaphragm is improved, and reliable closing and good sealing of the valve are guaranteed.

Description

Technical Field

[0001] The present application relates to the field of metal diaphragm valves, and in particular to a metal diaphragm valve that effectively solves the problem of diaphragm non-rebound. Background Art

[0002] In many application fields of the semiconductor industry, the non-rebound phenomenon of the diaphragm of traditional metal diaphragm valves has always been a key problem that needs to be overcome, seriously restricting the performance and stable operation of the valve.

[0003] Diaphragm failure can lead to a series of serious consequences. First, it can prevent the valve from opening properly, directly disrupting the production process and causing significant losses to the company. Second, it can easily cause valve seal failure, leading to media leakage. This not only threatens production safety but also poses a serious environmental challenge. Third, it can cause flow control deviations, making it impossible to meet the stringent high-precision process requirements of semiconductor production, directly impacting product quality and production efficiency. Furthermore, diaphragm failure can accelerate wear of internal valve components, significantly shortening the valve's service life, increasing equipment maintenance costs, and increasing production downtime.

[0004] While the industry has explored numerous solutions, such as improving the diaphragm's material, number of layers, and shape, numerous issues remain. For example, these improvements significantly increase manufacturing difficulty and are prohibitively expensive, hindering widespread adoption within the industry. Alternatively, the improvements may be less than ideal, failing to fundamentally eliminate the diaphragm's non-rebounding problem. Utility Model Content

[0005] In order to improve the diaphragm rebound effect and ensure the reliable closure and good sealing of the valve, the present application provides a metal diaphragm valve that effectively solves the problem of diaphragm non-rebound.

[0006] The present application provides a metal diaphragm valve that effectively solves the problem of diaphragm non-rebound by adopting the following technical solution:

[0007] A metal diaphragm valve that effectively solves the problem of diaphragm non-rebound includes a valve body, a valve stem and a diaphragm, a preset groove is formed in the valve body, the diaphragm is arranged in the preset groove and clamped on the valve body, the valve body is provided with a nut at the preset groove, the nut is located on the side of the diaphragm away from the valve body, and the valve body and the valve stem are threadedly connected by the nut; a seat is provided in the preset groove on the side of the diaphragm close to the valve body, one end of the seat passes through the diaphragm and is connected to the diaphragm; the seat passes through one end of the diaphragm and is elastically connected to the valve stem.

[0008] By adopting this technical solution, the pre-set groove design within the valve body allows the diaphragm to be securely installed within the valve body, while the threaded connection between the nut and the valve stem ensures the valve's structural strength and operational stability. The seat design not only supports the diaphragm but also, through its elastic connection to the valve stem, enhances its resilience. This prevents problems such as valve failure to open properly, seal failure, and flow control deviation caused by diaphragm failure, thereby increasing the valve's service life and reliability. This effectively solves the problem of diaphragm failure, improves its resilience, and ensures reliable closure and a good seal for the valve.

[0009] Optionally, the seat is located on the side of the diaphragm close to the valve body and is provided with a fitting plane, and the seat is sleeved and connected with a pressure cover, which is located on the side of the diaphragm away from the valve body. The pressure cover ensures that the diaphragm and the fitting plane are always in contact.

[0010] By adopting this technical solution, the flat surface on the seat ensures close contact between the diaphragm and the seat, thereby improving the stability of the diaphragm and reducing its deformation and displacement during operation. At the same time, the design of the gland ensures that the diaphragm always maintains a close fit with the flat surface, further enhancing the diaphragm's sealing and rebound effect, effectively solving the problem of diaphragm non-rebound and improving the valve's reliable closure and good sealing performance.

[0011] Optionally, a relief groove ring is provided on the side of the bearing seat located on the fitting plane close to the axis.

[0012] By adopting this technical solution, the recessed ring effectively reduces the contact area between the seat and the diaphragm, lowering frictional resistance and further enhancing the diaphragm's resilience, ensuring reliable closure and a good seal. Furthermore, the recessed ring design prevents diaphragm deformation from excessive compression during prolonged use, thereby extending the diaphragm's service life.

[0013] Optionally, a C-shaped buckle is provided at one end of the seat passing through the diaphragm, and the C-shaped buckle enables the seat to be elastically connected to the valve stem.

[0014] By adopting this technical solution, the C-shaped buckle provides a more stable elastic connection between the seat and the valve stem, effectively preventing the problem of loose valve closure caused by the diaphragm not rebounding, ensuring the valve has a good sealing performance in the closed state. At the same time, this design helps to improve the diaphragm's rebound effect and reduce friction between the diaphragm and the valve stem, thereby extending the valve's service life and reducing equipment maintenance costs.

[0015] Optionally, a mounting groove is formed at one end of the seat passing through the diaphragm, and the inner ring of the C-shaped buckle is embedded in the mounting groove.

[0016] By adopting this technical solution, the mounting groove design allows the C-shaped buckle to be firmly fixed to the socket, ensuring a more reliable elastic connection between the socket and the valve stem. This design not only enhances structural stability but also effectively prevents the diaphragm from not rebounding due to loose connections, thereby further improving the diaphragm's rebound effect and ensuring reliable closure and good sealing of the valve.

[0017] Optionally, a guide member is provided at one end of the nut away from the seat, and the guide member is used to guide the valve stem to move linearly.

[0018] By adopting this technical solution, the guide ensures that the valve stem moves in a straight line, preventing deviation from affecting the diaphragm's rebound effect. This design not only improves the diaphragm's rebound stability, but also ensures reliable valve closure and good sealing performance, effectively solving the problem of diaphragm non-rebound.

[0019] Optionally, an auxiliary rebound member is further provided on the seat, and the auxiliary rebound member moves in coordination with the valve stem, and the auxiliary rebound member is used to provide elastic force when the valve is closed.

[0020] By adopting this technical solution, the auxiliary rebound member moves in tandem with the valve stem, providing additional spring force when the valve closes. This significantly enhances the diaphragm's resilience, ensuring reliable closure and a good seal. This design also helps reduce diaphragm fatigue damage caused by long-term use, extending the valve's service life and reducing equipment maintenance costs and production downtime.

[0021] Optionally, the diaphragm is made of elastic fatigue-resistant material, and the shape of the diaphragm conforms to the principles of fluid mechanics.

[0022] By adopting this technical solution, the diaphragm is constructed of an elastic, fatigue-resistant material, significantly improving its durability and fatigue resistance. This effectively prevents the diaphragm from losing its elasticity due to prolonged use, ensuring that it retains its resilience even after repeated switching operations. Furthermore, the diaphragm's shape, designed in accordance with the principles of fluid mechanics, optimizes the flow path through the valve, reducing fluid resistance and pressure loss, further enhancing the valve's operating efficiency and stability.

[0023] In summary, this application includes at least one of the following beneficial technical effects:

[0024] 1. Improve the rebound effect of the diaphragm to ensure that the valve can be reliably closed after each operation, avoiding production process interruption and equipment failure caused by diaphragm failure to rebound;

[0025] 2. The elastic connection design between the seat and the valve stem enhances the close contact between the diaphragm and the valve body, effectively preventing valve seal failure, eliminating the risk of medium leakage, and ensuring production safety and environmental protection requirements;

[0026] 3. Improve the flow control accuracy of the valve so that the diaphragm can be accurately reset in each switching action, meet the strict requirements of semiconductor production for high-precision processes, and improve product quality and production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0027] Figure 1 This is a structural diagram of a metal diaphragm valve in an embodiment of the present application that effectively solves the problem of diaphragm non-rebound.

[0028] Figure 2 It is a cross-sectional view used to illustrate the positional relationship between the diaphragm and the seat in the embodiment of the present application.

[0029] Figure 3 yes Figure 2 A is an enlarged schematic diagram.

[0030] Explanation of the accompanying reference numerals: 1. Valve body; 11. Preset groove; 2. Valve stem; 3. Diaphragm; 4. Nut; 41. Guide member; 5. Seat; 51. Fitting plane; 52. Make-shift groove ring; 53. C-type buckle; 54. Mounting groove; 55. Auxiliary rebound member; 6. Pressure cover; 7. Handle; 71. Locking bolt. DETAILED DESCRIPTION

[0031] The following is combined with Figure 1-3 This application is described in further detail.

[0032] The embodiment of the present application discloses a metal diaphragm valve that effectively solves the problem of diaphragm non-rebound. Figure 1 and Figure 2 , comprising a valve body 1, a valve stem 2, and a diaphragm 3. A preset groove 11 is formed in the valve body 1, and the diaphragm 3 is disposed in the middle of the preset groove 11. Specifically, the inner wall of the preset groove 11 is provided with multiple steps, and the diaphragm 3 is placed on one of the steps in the middle. A nut 4 is provided in the valve body 1 at the preset groove 11. The nut 4 is located on the side of the diaphragm 3 away from the valve body 1. The valve body 1 and the valve stem 2 are threadedly connected via the nut 4. The valve body 1 is threadedly connected to the outer wall of the nut 4, and the valve stem 2 is threadedly connected to the inner wall of the nut 4. A seat 5 is provided in the preset groove 11 on the side of the diaphragm 3 close to the valve body 1. One end of the seat 5 passes through the diaphragm 3 and is connected to the diaphragm 3. The seat 5 passes through one end of the diaphragm 3 and is elastically connected to the valve stem 2. This structural design effectively solves the problem of the diaphragm 3 not rebounding, and improves the reliability and sealing of the valve.

[0033] Reference Figure 2 and 3The connection between the seat 5 and the diaphragm 3 can be achieved by welding or bonding. Welding ensures a secure connection, while bonding allows for connection without affecting the elasticity of the diaphragm 3. The seat 5, located on the side of the diaphragm 3 closest to the valve body 1, can be provided with a contact surface 51. A gland 6 is sleeved and connected to the seat 5. The gland 6 is located on the side of the diaphragm 3 away from the valve body 1. The gland 6 ensures that the diaphragm 3 is always in contact with the contact surface 51. This ensures that the diaphragm 3 maintains good contact throughout the entire operation process, preventing sealing failure caused by partial separation.

[0034] The seat 5 may be provided with a relief groove 52 on the side of the contact plane 51 near the axis. This design helps reduce friction between the seat 5 and the diaphragm 3, extending the service life of the diaphragm 3. The shape and size of the relief groove 52 can be adjusted according to actual needs to suit different application scenarios.

[0035] In this embodiment, the elastic connector that connects the end of the socket 5 that passes through the diaphragm 3 to the valve stem 2 is a C-shaped buckle 53. This elastic connection between the socket 5 and the valve stem 2 is achieved. The design of the C-shaped buckle 53 simplifies assembly while providing stable elastic support. The C-shaped buckle 53 can be made of high-strength plastic or metal to ensure its reliability and durability over extended use.

[0036] Specifically, one end of the seat 5 passing through the diaphragm 3 may also be provided with a mounting groove 54, and the inner ring of the C-shaped buckle 53 is embedded in the mounting groove 54. Such a design can further improve the fixing effect of the C-shaped buckle 53 and prevent it from falling off or loosening during use.

[0037] Reference Figure 2 and Figure 3 A guide member 41 may be provided at one end of the nut 4 away from the seat 5. The guide member 41 is used to guide the valve stem 2 to move linearly. In this embodiment, the guide member 41 is an O-ring, and the nut 4 is provided with a groove. A portion of the O-ring is embedded in the groove, and the O-ring is in contact with the valve stem 2.

[0038] The seat 5 may also be provided with an auxiliary resilient member 55, which moves in conjunction with the valve stem 2 and is used to provide a spring force when the valve is closed. The auxiliary resilient member 55 may be designed using a spring or other elastic element to provide appropriate elastic support. The material and shape of the auxiliary resilient member 55 can be selected based on actual needs to suit different application scenarios.

[0039] The shape of the diaphragm 3 can be designed to conform to the principles of fluid mechanics, such as an elliptical or conical shape, to reduce fluid resistance and improve flow efficiency. Highly elastic and fatigue-resistant new materials such as Elgiloy, C-22, and MP35N are used, and the shape conforms to fluid mechanics. SR50-70mm is preferred.

[0040] The implementation principle of this embodiment is:

[0041] The implementation principle of the metal diaphragm valve of the embodiment of the present application, which effectively solves the problem of diaphragm non-rebound, is as follows: the connection method between the seat 5 and the diaphragm 3 ensures that the diaphragm 3 always maintains a good contact state during the entire working process, avoiding sealing failure caused by local detachment. Secondly, the elastic connection design between the seat 5 and the valve stem 2 provides sufficient elastic support, so that the diaphragm 3 can quickly return to its original state after each closure. In addition, the provision of the auxiliary rebound member 55 further enhances the rebound performance of the diaphragm 3 and improves the reliability and sealing of the valve. Finally, the material and shape design of the diaphragm 3 not only improves its elasticity and fatigue resistance, but also reduces fluid resistance and improves flow efficiency. These designs work together to enable the metal diaphragm valve of the present invention to exhibit excellent performance and reliability in the semiconductor production process, greatly improving production efficiency and product quality.

[0042] The above are all preferred embodiments of the present application, and are not intended to limit the scope of protection of the present application. Therefore, any equivalent changes made based on the structure, shape, and principle of the present application should be included in the scope of protection of the present application.

Claims

1. A metal diaphragm valve that effectively solves the problem of diaphragm (3) not rebounding, characterized by: The valve body (1) comprises a valve body (1), a valve stem (2) and a diaphragm (3), wherein a preset groove (11) is formed in the valve body (1), the diaphragm (3) is arranged in the preset groove (11) and is clamped on the valve body (1), a nut (4) is provided on the valve body (1) at the preset groove (11), the nut (4) is located on the side of the diaphragm (3) away from the valve body (1), and the valve body (1) and the valve stem (2) are threadedly connected via the nut (4); a seat (5) is provided on the side of the diaphragm (3) close to the valve body (1) in the preset groove (11), one end of the seat (5) passes through the diaphragm (3) and is connected to the diaphragm (3); the seat (5) passes through one end of the diaphragm (3) and is elastically connected to the valve stem (2).

2. A metal diaphragm valve that effectively solves the problem of diaphragm (3) not rebounding according to claim 1, characterized in that: The seat (5) is located on the diaphragm (3) and is provided with a fitting plane (51) on the side close to the valve body (1). A pressure cover (6) is sleeved and connected to the seat (5). The pressure cover (6) is located on the side of the diaphragm (3) away from the valve body (1). The pressure cover (6) allows the diaphragm (3) to always be in contact with the fitting plane (51).

3. A metal diaphragm valve that effectively solves the problem of diaphragm (3) not rebounding according to claim 2, characterized in that: The seat (5) is provided with a relief groove ring (52) on one side of the fitting plane (51) close to the axis.

4. A metal diaphragm valve that effectively solves the problem of diaphragm (3) not rebounding according to claim 1, characterized in that: One end of the seat (5) passing through the diaphragm (3) is provided with a C-shaped buckle (53), and the C-shaped buckle (53) elastically connects the seat (5) to the valve stem (2).

5. A metal diaphragm valve that effectively solves the problem of diaphragm (3) not rebounding according to claim 4, characterized in that: The seat (5) is provided with a mounting groove (54) at one end passing through the diaphragm (3), and the inner ring of the C-shaped buckle (53) is embedded in the mounting groove (54).

6. A metal diaphragm valve that effectively solves the problem of diaphragm (3) not rebounding according to claim 1, characterized in that: A guide member (41) is provided at one end of the nut (4) away from the seat (5), and the guide member (41) is used to guide the valve stem (2) to move linearly.

7. A metal diaphragm valve that effectively solves the problem of diaphragm (3) not rebounding according to claim 1, characterized in that: The seat (5) is also provided with an auxiliary rebound member (55), which moves in coordination with the valve stem (2) and is used to provide elastic force when the valve is closed.

8. A metal diaphragm valve that effectively solves the problem of diaphragm (3) not rebounding according to claim 1, characterized in that: The diaphragm (3) is made of elastic fatigue-resistant material, and the shape of the diaphragm (3) complies with the principles of fluid mechanics.

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