Floating type precision optical measuring instrument

Abstract

The utility model discloses a floating type precision optical measuring instrument which comprises a machine frame, a laser system arranged on the machine frame, a measuring seat driving mechanism, a measuring head and a measuring seat, the measuring head comprises an outer cylinder and an inner cylinder located in the outer cylinder, a floating rod is arranged in the inner cylinder, a probe is arranged on the floating rod, and the measuring seat driving mechanism is arranged on the machine frame. The outer cylinder and the inner cylinder are provided with air floating structures, the floating rod can float in an inner hole of the inner cylinder through the air floating structures, a first reflecting mirror is installed on the floating rod, and a limiting structure for limiting rotation of the floating rod and a positioning structure for supporting the floating rod are arranged between the floating rod and the inner cylinder. The measuring seat comprises a lower seat plate and an upper seat plate, the upper seat plate is provided with a reflecting mirror II, a seat plate adjusting structure is arranged between the upper seat plate and the lower seat plate, and the reflecting mirror II can be perpendicular to a laser beam irradiated to the reflecting mirror by the laser system through the adjustment of the seat plate adjusting structure.

Description

Technical Field

[0001] The utility model relates to an optical measuring device, in particular to a floating precision optical measuring instrument. Background Art

[0002] In the ultra-precision machining production process, measurement is an important step. Whether the machined workpiece meets the requirements needs to be checked by measurement. However, for some workpieces with special shapes, the surface of the workpiece is an aspherical free-form surface. If ordinary measuring equipment (such as micrometer measurement, etc.) is used for manual measurement, not only the measurement process is time-consuming but also the measurement accuracy is difficult to meet the requirements. Therefore, the applicant uses the currently advanced laser system to design an ultra-precision optical measuring machine to measure the above structure. Utility Model Content

[0003] In order to overcome the deficiencies of the prior art, the utility model provides a floating precision optical measuring instrument.

[0004] The technical solution adopted by the utility model to solve its technical problems is:

[0005] A floating precision optical measuring instrument comprises a frame, a laser system mounted on the frame, and a measuring base drive mechanism, characterized in that it further comprises a probe and a measuring base, wherein the probe comprises an outer cylinder and an inner cylinder positioned within the outer cylinder, a floating rod being disposed within the inner cylinder, a probe being disposed on the floating rod, an air flotation structure being disposed on the outer cylinder and the inner cylinder, the floating rod being able to float within the inner hole of the inner cylinder via the air flotation structure, a first reflector being mounted on the floating rod, and a restricting structure for restricting the rotation of the floating rod and a positioning structure for supporting the floating rod being disposed between the floating rod and the inner cylinder, the measuring base comprising a lower seat plate and an upper seat plate, a second reflector being disposed on the upper seat plate, a seat plate adjustment structure being disposed between the upper and lower seat plates, the second reflector being able to be adjusted perpendicular to the laser beam irradiated onto the reflector by the laser system via the seat plate adjustment structure, the measuring base being disposed on the measuring base drive mechanism and being driven to move by the measuring base drive mechanism, the laser light emitted by the laser system being able to irradiate the first reflector and the second reflector, respectively, and be reflected back to the laser system.

[0006] The air flotation structure includes an outer air inlet hole provided on the outer cylinder, an annular air channel provided on the inner cylinder, and a plurality of inner air inlet holes provided in the annular air channel. The outer air inlet hole is communicated with the annular air channel, and the inner air inlet hole is communicated with the inner hole.

[0007] The positioning structure includes a reference plate fixed on the floating rod and a reference ball arranged on the inner cylinder. Both ends of the reference plate can contact the reference ball to support the floating rod.

[0008] The limiting structure includes limiting posts that are arranged opposite to each other, and the end of the reference plate is located between two corresponding limiting posts.

[0009] It also includes a probe lifting mechanism, the probe is arranged on the probe lifting mechanism and is lifted and lowered by the probe lifting mechanism, the probe lifting mechanism includes a lifting movable plate, a lifting air flotation guide rail and a lifting motor, the lifting motor is connected to the lifting air flotation guide rail, the lifting movable plate is installed on the lifting air flotation guide rail, and the outer cylinder is connected to the lifting movable plate through a connecting flange.

[0010] The probe also includes a connecting flange, which is connected to the probe lifting mechanism. Two elastic rings are provided at the bottom end of the connecting flange. A connecting plate is provided on the elastic ring. A locking screw hole is provided on the connecting plate. The locking rod cooperates with the locking screw hole. The end of the outer tube is located in the two elastic rings and is fixed to the connecting flange by the tightening of the elastic rings.

[0011] The seat plate adjustment structure includes at least three adjustment screws, which are threadedly connected to the upper seat plate. The adjustment screws can abut against the lower seat plate to achieve position angle adjustment of the upper seat plate, and the upper seat plate and the lower seat plate are locked by a locking member.

[0012] The upper seat plate is provided with a positioning groove, the lower seat plate is provided with a positioning platform that can be located in the positioning groove, the adjusting screw can be against the positioning platform, and a plurality of steel balls are provided between the upper seat plate and the lower seat plate. The steel balls are arranged around the positioning platform and are fixed by clamping the upper seat plate and the lower seat plate.

[0013] The lower seat plate is provided with a plurality of lower pads, each of which is provided with a positioning groove. The upper seat plate is provided with a plurality of upper pads, and the steel balls are located in the corresponding positioning grooves and are fixed by clamping the upper pads and the lower pads.

[0014] A lower groove is provided on the bottom surface of the lower seat plate, and a precision displacement sensor is provided in the lower groove.

[0015] The beneficial effects of the present invention are as follows: the probe and measuring seat of the present invention are designed around the laser system, the measuring seat cooperates with the measuring seat driving mechanism to realize precise plane movement, and the probe realizes that the floating rod drives the reflector 1 to move stably up and down along with the curve change of the object surface through the air floating structure, so that the reflector 1 can accurately reflect the laser beam back to the laser system, and the measuring seat can be adjusted perpendicular to the laser beam irradiated on the reflector 2 by the laser system through the seat plate adjustment structure, thereby also ensuring the accuracy of the reflected laser beam returning to the laser system, thereby realizing the accuracy of measurement using the laser system, realizing ultra-precision automatic measurement, and greatly improving the efficiency of measurement, thereby also correspondingly improving production efficiency. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The present invention will be further described below with reference to the accompanying drawings and embodiments.

[0017] Figure 1 This is the overall structural view of the utility model;

[0018] Figure 2 This is a structural view of the part behind the hidden metal frame;

[0019] Figure 3 This is a structural view of the part in the other direction behind the hidden metal frame;

[0020] Figure 4 It is a structural view that hides the metal rack, marble table, and marble slabs.

[0021] Figure 5 It is the structural view of the probe;

[0022] Figure 6 It is a cross-sectional structural view of the probe;

[0023] Figure 7 This is a view of the internal structure of the probe;

[0024] Figure 8 Structural view of the connecting flange;

[0025] Figure 9 This is a structural view of the measuring seat;

[0026] Figure 10 This is the structural view of the measuring seat from another direction;

[0027] Figure 11 This is the exploded structural view of the lower seat plate and the upper seat plate;

[0028] Figure 12 This is a structural view of the lower seat plate and the upper seat plate exploded from another direction. DETAILED DESCRIPTION

[0029] The advantages and features of the present disclosure and its implementation methods will be illustrated by the following embodiments described with reference to the accompanying drawings. However, the present disclosure can be embodied in different forms and should not be construed as being limited to the embodiments set forth herein. On the contrary, these embodiments are provided so that the present disclosure will be comprehensive and complete and will fully convey the scope of the present disclosure to those skilled in the art. Furthermore, the present disclosure is limited only by the scope of the claims.

[0030] The shapes, sizes, proportions, angles and numbers disclosed in the drawings for describing the embodiments of the present disclosure are merely examples, and therefore the present disclosure is not limited to the details shown. Throughout this specification, the same reference numerals refer to the same elements. In the following description, when a detailed description of a related known function or configuration is determined to be unnecessary to obscure the focus of the present disclosure, the detailed description will be omitted. Where “including”, “having” and “comprising” described in this specification are used, other components may be added unless “only” is used. Unless otherwise indicated, terms in the singular may include plural forms.

[0031] When explaining an element, although not explicitly described, the element is understood to include a range of error.

[0032] When describing a positional relationship, for example, when the positional relationship is described as "on," "above," "below," and "adjacent to," one or more parts may be arranged between two other parts, unless "immediately" or "directly" is used.

[0033] When describing a temporal relationship, for example, when a temporal order is described as “after,” “subsequently,” “next,” and “before,” discontinuous cases may be included unless “just” or “directly” is used.

[0034] It should be understood that although the terms "first," "second," etc. may be used herein to describe various elements, these elements should not be limited by these terms. These terms are only used to distinguish one element from other elements. For example, a first element may be referred to as a second element, and similarly, a second element may be referred to as a first element without departing from the scope of this disclosure.

[0035] As will be fully appreciated by those skilled in the art, the features of the different embodiments of the present disclosure may be coupled or combined with each other in part or in whole, and may cooperate with each other in various ways and be driven technically. The embodiments of the present disclosure may be performed independently of each other, or may be performed together in a mutually dependent relationship.

[0036] Reference Figures 1 to 4The present invention discloses a floating precision optical measuring instrument, including a frame 100, a laser system 200 arranged on the frame 100, a probe 300 and a measuring base 400. The frame 100 of the present application is composed of three parts: a metal frame 1 at the bottom, a marble table 2 arranged on the metal frame 1, and a marble plate 3 vertically arranged on the marble table 2. Such a structure can minimize the deformation of the frame 100 affecting the measurement. The workpiece to be measured (not shown in the figure) is placed on the measuring base 400, and the measuring base 400 drives the workpiece to be measured. The left and right and forward and backward movements allow different positions on the workpiece surface to contact the probe in the probe 300, and the probe will move up and down as the height of different positions on the workpiece surface changes. Because the probe 300 has a reflector 1, and the measuring base 400 has two reflectors 2 arranged perpendicular to each other, the laser emitted by the laser system 200 can be respectively irradiated by the reflector 1 and the reflector 2 and reflected back to the laser system 200, so that the change in displacement can be fed back to the laser system 200 through the laser beam, so that the software program can calculate the precise size data of the workpiece surface. The laser system 200 of the present application includes a laser transmitter, a laser receiver, a beam splitter and a reflector. The laser beam emitted by the laser transmitter is divided into multiple laser beams by the beam splitter, and the light path is guided by the reflector to irradiate the reflector 1 and the two reflectors 2 respectively. Of course, the laser system 200 in the present application is a product of the existing technology purchased from outside, so its specific structure and principle are not described in detail.

[0037] like Figures 5 to 8As shown, the probe 300 includes an outer cylinder 1 and an inner cylinder 2 located in the outer cylinder 1. The outer cylinder 1 and the inner cylinder 2 are both cylindrical cylinders. There is a mounting hole in the outer cylinder 1, and the inner cylinder 2 is located in the mounting hole. The outer cylinder 1 and the inner cylinder 2 can be fixed as a whole by pins. A floating rod 3 is provided in the inner cylinder 2. The floating rod 3 is a cylindrical rod and is made of a lightweight magnesium alloy, so as to minimize the contact pressure during measurement. Of course, a probe (not shown in the figure) is provided on the floating rod 3. The end face of the probe contacts the workpiece to be measured. When the measuring seat 400 moves, the floating rod has a slight rise and fall change with the height change of the workpiece surface. A reflector 17 is installed on the floating rod 3. The reflector 17 is generally installed on the floating rod 3 by pasting. When the laser of the laser system 200 is irradiated on the reflector 17, the reflector 17 will reflect the laser beam back to the laser system 200. The laser system 200 calculates the reflected laser beam data to know the precise size data of the workpiece surface. Of course, the laser system 200 and the reflector 17 are purchased equipment and are not components of this structure. Therefore, their specific structure and principle are not described in detail. The probe 300 structure adopts a combination of air flotation structure and laser detection for precise measurement. The floating rod of the probe 300 structure can float in the inner hole of the inner cylinder through the air flotation structure, thereby greatly avoiding the interference of friction resistance. The outer cylinder 1 and the inner cylinder 2 are provided with an air flotation structure. The floating rod 3 can float in the inner hole of the inner cylinder 2 through the air flotation structure, and a limiting structure for limiting the rotation of the floating rod 3 and a positioning structure for supporting the floating rod 3 are provided between the floating rod 3 and the inner cylinder 2. Of course, in this application, the position of the floating rod 3 when it contacts the positioning structure is the reference position for measurement, which is convenient for subsequent calculations.

[0038] As shown in the figure, the air flotation structure includes an external air inlet hole (not shown in the figure) arranged on the outer tube 1, an annular air channel 4 arranged on the inner tube 2, and a plurality of internal air inlet holes 5 arranged in the annular air channel 4. The internal air inlet holes 5 are evenly arranged around the inner hole of the inner tube 2. The external air inlet hole is connected to the annular air channel 4, and the internal air inlet hole 5 is connected to the inner hole. The external air inlet hole is connected to the external compressed air source through an air joint and an air pipe. The high-pressure gas enters the annular air channel 4 from the external air inlet hole, and then enters the internal air inlet hole 5. In this way, a multi-point air intake structure can be formed in the inner hole of the inner tube 2, and the annular air channel 4 is provided with two upper and lower ones. Of course, an external air channel connected to the annular air channel 4 is provided on the outer tube 1, and the external air inlet hole is connected to the external air channel, so that a relatively uniform high-pressure air film is formed in the inner hole, which helps to prevent eccentric micro-movement of the floating rod 3, thereby improving the measurement accuracy. As a further preferred structure, the inner air inlet hole 5 is a tapered hole, and the aperture gradually decreases from the air inlet end hole of the inner air inlet hole 5 to the air outlet end hole of the inner air inlet hole 5. By reducing the aperture, we can gradually increase the pressure of the gas entering the inner hole of the inner tube 2, thereby forming an air film with higher pressure, which helps to prevent eccentric micro-movement of the floating rod 3, thereby improving the measurement accuracy.

[0039] As shown in the figure, the positioning structure includes a reference plate 6 fixed on the floating rod 3 and a reference ball 7 arranged on the inner tube 2. The reference plate 6 is also a magnesium alloy plate and is relatively thin. The two ends of the reference plate 6 can contact with the reference ball 7 to support the floating rod 3. The reference ball 7 is a steel ball. The position where the reference plate 6 contacts the steel ball is the reference point position. The limiting structure includes relatively arranged limit columns 8. The end of the reference plate 6 is located between two corresponding limit columns 8. The limit columns 8 are made of ceramic and have a very smooth surface. The reference plate 6 can prevent the floating rod 3 from rotating and affecting the accuracy through the action of the limit columns 8, and the smooth surface of the ceramic can avoid affecting the lifting and lowering of the floating rod 3. Moreover, the limit columns 8 cooperate with the reference ball 7 to make the reference plate 6 contact with the reference ball 7 horizontally.

[0040] As shown in the figure, a connecting screw hole is provided in the floating rod 3, and a connecting thread that cooperates with the connecting screw hole is provided at the end of the probe, so that the probe is convenient to install and disassemble, and is convenient for later replacement. Furthermore, a weight-reducing hole that passes through the connecting screw hole is provided on the floating rod 3. The floating rod 3 requires a lightweight design, which is conducive to improving measurement accuracy.

[0041] As a preferred structure, an end plate 9 is provided at the end of the floating rod 3, and a plate hole is provided between the end plate 9 and the floating rod 3. The reference plate 6 is fixed to the end plate 9 through the plate hole because the weight-reducing hole just passes through the plate hole. The reference plate 6 is also fixed by bonding. In this way, the contact area between the reference plate 6 and the end face of the floating rod 3 is small, so the reference plate 6 and the end plate 9 are bonded as one. Of course, the end plate 9 is also made of magnesium alloy and is bonded as one with the floating rod 3.

[0042] As shown in the figure, it also includes a connecting flange, and the outer cylinder 1 is connected to the probe lifting mechanism through the connecting flange. Two elastic rings 11 are provided at the bottom end of the connecting flange. The end of the outer cylinder 1 is located in the two elastic rings 11 and is fixed to the connecting flange by the elastic rings 11. The elastic ring 11 is locked by the clamp 12, and the clamp 12 is a purchased part. The above structure is simple and easy to assemble and disassemble, so that it is easy to realize the maintenance and replacement of the probe structure in the later stage. The specific structure of the connecting flange of the present application is: it includes a flange plate 14 and a connecting cylinder 15, and an annular transverse slit 16 and a vertical slit 13 are cut on the connecting cylinder 15. One end of the vertical slit 13 is connected to the transverse slit 16, and the other end of the vertical slit 13 is connected to the outside world. The elastic ring 11 is formed by the division of the transverse slit 16 and the vertical slit 13. The above structure is simple to process and has low cost.

[0043] As shown in the figure, as a further structure, a probe lifting mechanism is also included. The probe lifting mechanism is mounted on the marble slab 3 on the frame 100. The probe lifting mechanism includes a lifting plate 19, a lifting air-floating guide rail, and a lifting motor. The lifting motor is connected to the lifting air-floating guide rail. The lifting plate 19 is mounted on the lifting air-floating guide rail. The connecting flange is connected to the lifting plate 19. Through the above structure, the inner cylinder 2 and the outer cylinder 1 can make compensatory corresponding movements as the floating rod 3 moves. Because the pressure of the air film formed around the floating rod 3 in the inner cylinder 2 is not absolutely uniform, when the floating rod 3 moves and rises during the measurement process, the pressure of the air film on the floating rod 3 will vary, affecting the measurement accuracy. Therefore, to ensure that the pressure of the air film on the floating rod 3 is consistent during the measurement process, the probe lifting mechanism will follow the changes in the probe data in real time and make compensatory corresponding movements as the probe moves, so that the position of the probe and the floating rod 3 relative to the inner cylinder 2 and the outer cylinder 1 remains unchanged, thereby ensuring that the measurement position remains unchanged and the contact pressure during measurement remains unchanged. Thereby improving the measurement accuracy, the above-mentioned lifting motor can be a linear servo motor. Of course, the lifting motor and the lifting air-floating guide rail are existing technology products, so the specific structure and connection relationship are not described in detail.

[0044] As shown in the figure, a lens adjustment mechanism is provided between the connecting flange and the lifting movable plate 19. The lens adjustment mechanism is used to adjust the angle of the reflector 17. The lens adjustment mechanism includes an adjusting spring (not shown in the figure), a plurality of adjusting screw holes provided on the connecting flange, and an adjusting screw 20 that cooperates with the adjusting screw holes. In the present application, there are three adjusting screw holes and three adjusting screws 20 that cooperate with the adjusting screw holes, which are evenly arranged around the inner cylinder 2. The adjusting screw 20 can be pressed against the lifting movable plate 19 to control the relative angle between the connecting flange and the lifting movable plate 19. After adjustment, the connecting flange and the lifting movable plate 19 are locked by screws to maintain the angle. In order to facilitate adjustment, the connecting flange and the adjusting screw 20 are always in close contact. One end of the adjusting spring is against the connecting flange and the other end is against the lifting movable plate 19, so that adjustment is more convenient and accurate.

[0045] As shown in the figure, from 9 to Figure 12As shown, the measuring seat 400 described in the present application includes a measuring seat driving mechanism 21, a lower seat plate 22 and an upper seat plate 23. The lower seat plate 22 and the upper seat plate 23 are driven to move by the measuring seat driving mechanism 21, so that the workpiece to be measured placed on the upper seat plate 23 can be moved forward, backward, left and right. The measuring seat driving mechanism 21 is a prior art product, mainly composed of two sets of servo motors and two sets of precision air-floating guide rails and other components, which can realize unidirectional movement in the X direction or Y direction, or planar movement in the X direction and Y direction. The servo motors and air-floating guide rails are both prior art, so their specific structure and installation method are not described in detail.

[0046] As shown in the figure, a reflector 24 is provided on the upper seat plate 23. Of course, for the convenience of installation, a mirror seat 25 is provided on the upper seat plate 23, and the reflector 24 is installed on the mirror seat 25. An adjustment structure is provided between the upper seat plate 23 and the lower seat plate 22. The reflector 24 can be adjusted perpendicular to the laser beam irradiated on the reflector 24 by the laser system 200 through the adjustment of the adjustment structure. In the above structure, the precision drive mechanism 1 adopts two servo motors and two sets of precision air-floating guide rails, which can realize unidirectional movement in the X direction or Y direction, or planar movement in the X direction and Y direction. The servo motor and the air-floating guide rail are both existing technologies, so their specific structure and installation method are not described in detail. Of course, the laser system 200 is also a purchased equipment, so the specific structure and installation method of the laser system 200 are not described in detail.

[0047] As shown in the figure, the adjustment structure includes at least three adjusting screws (not shown in the figure), and three are preferred in this application. The adjusting screws are threadedly connected to the upper seat plate 23. Of course, there are adjusting screw holes 26 on the upper seat plate that cooperate with the adjusting screws. The adjusting screws can be abutted against the lower seat plate 22 to achieve position angle adjustment of the upper seat plate 23. The three adjusting screws are evenly arranged around the center of the upper seat plate 23. By screwing in the adjusting screws, they abut against the lower seat plate 22, thereby lifting the corresponding side of the upper seat plate 23 to achieve adjustment of the angular position of the upper seat plate 23, so that the reflector 24 is perpendicular to the laser beam to ensure accurate measurement. After the adjustment is completed, the upper seat plate 23 and the lower seat plate 22 are locked by a locking member, which is also a screw.

[0048] As shown in the figure, the upper seat plate 23 is provided with a positioning groove 27, and the lower seat plate 22 is provided with a positioning platform 28 that can be located in the positioning groove 27. The adjusting screw can be offset against the positioning platform 28. Through the cooperation of the positioning platform 28 and the positioning groove 27, we can achieve preliminary positioning during assembly. In this application, the positioning groove 27 is preferably a cylindrical groove, and the positioning platform 28 is a cylindrical platform, and the diameter of the positioning groove 27 is slightly larger than the positioning platform 28. The two can be loosely fitted, and the height value of the cylindrical platform is also larger than the depth value of the positioning groove 27. In this way, there is a gap between the upper seat plate 23 and the lower seat plate 22, so that there is adjustment space. As a preferred structure, three positioning holes are provided on the positioning platform 28 (not shown in the figure), and the end of the adjusting screw is located in the positioning hole, so that the adjusting screw will not shift during adjustment and after the adjustment is completed, thereby ensuring the adjustment accuracy.

[0049] As shown in the figure, a number of steel balls 29 are arranged between the upper seat plate 23 and the lower seat plate 22. The steel balls 29 are arranged around the positioning platform 28, and the steel balls 29 are fixed by clamping the upper seat plate 23 and the lower seat plate 22. With the support of the steel balls 29, we can more easily adjust the angle of the upper seat plate 23, and the contact between the steel balls 29 and the upper seat plate 23 and the lower seat plate 22 is always point contact, so it does not affect the adjustment of the upper seat plate 23, and after the upper seat plate 23 and the lower seat plate 22 are locked, the suspended area of ​​the upper seat plate 23 is supported and is not easy to bend and deform.

[0050] As a further structure, the lower seat plate 22 is provided with a plurality of lower pads 30, and the lower pads 30 are provided with positioning grooves 27. The upper seat plate 23 is provided with a plurality of upper pads 31. The steel balls 29 are located in the corresponding positioning grooves 27 and are fixed by clamping the upper pads 31 and the lower pads 30. The positioning grooves 27 not only facilitate the installation and positioning of the steel balls 29 during assembly, but also facilitate processing through the setting of the pads.

[0051] As a further structure, an upper groove 32 is provided on the upper seat plate 23 , and the pad and the steel ball 29 are located in the corresponding upper groove 32 , which can reduce the thickness of the measuring seat 400 as a whole.

[0052] As shown in the figure, a lower groove 33 is provided on the bottom surface of the lower seat plate 22, and a precision displacement sensor 34 is provided in the lower groove 33. The precision displacement sensor 34 is preferably an ultra-precision capacitive displacement sensor. The precision displacement sensor 34 can detect the tiny up and down offset of the upper seat plate 23, and provide it to the laser system 200 as a correction compensation value for the measurement value in this direction.

[0053] In summary, the probe 300 and the measuring base 400 are specially designed for precision measurement. The floating rod of the probe 300 structure can float in the inner hole of the inner cylinder through the air flotation structure, thereby greatly avoiding the interference of friction resistance. A reflector is installed on the floating rod, and the reflector is used in conjunction with the laser system 200, so that the slightest lifting and lowering changes of the floating rod can be detected and calculated by the laser system 200, thereby achieving precise measurement; the measuring base 400 includes a lower seat plate and an upper seat plate, and the upper seat plate is provided with a reflector. An adjustment structure is provided between the upper seat plate and the lower seat plate, and the reflector can be precisely matched with the laser system 200 through adjustment of the adjustment structure, so that the measuring base 400 is well adapted to the laser system 200, thereby achieving precise measurement of the workpiece.

[0054] The above is a detailed introduction to a floating precision optical measuring instrument provided by an embodiment of the present invention. Specific examples are used herein to illustrate the principles and implementation methods of the present invention. The description of the above embodiments is only used to help understand the method and core idea of ​​the present invention. At the same time, for those skilled in the art, according to the idea of ​​the present invention, there may be changes in the specific implementation method and application scope. In summary, the content of this specification should not be understood as limiting the present invention.

Claims

1. A floating precision optical measuring instrument comprising a frame and a laser system mounted on the frame, characterized in that: The measuring seat further comprises a probe and a measuring seat, wherein the probe comprises an outer cylinder and an inner cylinder located in the outer cylinder, a floating rod is provided in the inner cylinder, a probe is provided on the floating rod, an air flotation structure is provided on the outer cylinder and the inner cylinder, and the floating rod can float in the inner hole of the inner cylinder through the air flotation structure, a reflector 1 is installed on the floating rod, and a limiting structure for limiting the rotation of the floating rod and a positioning structure for supporting the floating rod are provided between the floating rod and the inner cylinder, the measuring seat comprises a measuring seat driving mechanism, a lower seat plate and an upper seat plate, a reflector 2 is provided on the upper seat plate, a seat plate adjustment structure is provided between the upper seat plate and the lower seat plate, the reflector 2 can be adjusted perpendicular to the laser beam irradiated on the reflector by the laser system through the adjustment of the seat plate adjustment structure, the measuring seat is provided on the measuring seat driving mechanism and is moved by the measuring seat driving mechanism, and the laser emitted by the laser system can respectively irradiate the reflector 1 and the reflector 2 and reflect back to the laser system.

2. The floating precision optical measuring instrument according to claim 1, characterized in that: The air flotation structure includes an outer air inlet hole provided on the outer cylinder, an annular air channel provided on the inner cylinder, and a plurality of inner air inlet holes provided in the annular air channel. The outer air inlet hole is communicated with the annular air channel, and the inner air inlet hole is communicated with the inner hole.

3. The floating precision optical measuring instrument according to claim 1, characterized in that: The positioning structure includes a reference plate fixed on the floating rod and a reference ball arranged on the inner cylinder. Both ends of the reference plate can contact the reference ball to support the floating rod.

4. The floating precision optical measuring instrument according to claim 3, characterized in that: The limiting structure includes limiting posts that are arranged opposite to each other, and the end of the reference plate is located between two corresponding limiting posts.

5. The floating precision optical measuring instrument according to claim 1, characterized in that: It also includes a connecting flange, the bottom end of which is provided with two elastic rings and a clamp for locking the two elastic rings, the end of the outer tube is located in the two elastic rings and is fixed to the connecting flange by the elastic rings, the connecting flange includes a flange plate and a connecting tube, a horizontal slit and a vertical slit are cut on the connecting tube, one end of the vertical slit is connected to the horizontal slit, and the other end of the vertical slit is connected to the outside world, and the elastic ring is formed by dividing the horizontal slit and the vertical slit.

6. The floating precision optical measuring instrument according to claim 5, characterized in that: It also includes a probe lifting mechanism, which includes a lifting movable plate, a lifting air flotation guide rail and a lifting motor. The lifting motor is connected to the lifting air flotation guide rail, the lifting movable plate is installed on the lifting air flotation guide rail, and the connecting flange is connected to the lifting movable plate.

7. The floating precision optical measuring instrument according to claim 5, characterized in that: A lens adjustment mechanism is provided between the connecting flange and the lifting movable plate. The lens adjustment mechanism includes an adjustment spring, a plurality of adjustment screw holes provided on the connecting flange, and an adjustment screw matched with the adjustment screw holes. One end of the adjustment spring is against the connecting flange and the other end is against the lifting movable plate.

8. The floating precision optical measuring instrument according to claim 1, characterized in that: The seat plate adjustment structure includes at least three adjusting screws, which are threadedly connected to the upper seat plate. The adjusting screws can be abutted against the lower seat plate to adjust the position angle of the upper seat plate, and the upper seat plate and the lower seat plate are locked by a locking member. The upper seat plate is provided with a positioning groove, and the lower seat plate is provided with a positioning platform that can be located in the positioning groove. The adjusting screws can abut against the positioning platform, and a number of steel balls are provided between the upper seat plate and the lower seat plate. The steel balls are arranged around the positioning platform, and the steel balls are fixed by clamping the upper seat plate and the lower seat plate.

9. The floating precision optical measuring instrument according to claim 8, characterized in that: The lower seat plate is provided with a plurality of lower pads, each of which is provided with a positioning groove. The upper seat plate is provided with a plurality of upper pads, and the steel balls are located in the corresponding positioning grooves and are fixed by clamping the upper pads and the lower pads.

10. The floating precision optical measuring instrument according to claim 9, characterized in that: An upper groove is provided on the upper seat plate, and the pad and the steel ball are located in the corresponding upper groove. A lower groove is provided on the bottom surface of the lower seat plate, and a precision displacement sensor is provided in the lower groove.

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