Miniature spectrum modulation system

Abstract

The utility model relates to the technical field of spectrum modulation, in particular to a miniature spectrum modulation system which comprises a modulation layer and a substrate which are sequentially connected in the longitudinal direction, the modulation layer is provided with nine modulation channels which are respectively marked as C1, C2, C3, C4, C5, C6, C7, C8 and C9, the nine modulation channels are arranged in a 3 * 3 arrangement mode, and micro lenses are arranged on the upper surfaces of part of the modulation channels; the nine modulation channels are transparent layers, semitransparent layers or opaque layers; the nine modulation channels are in a square shape or a square-like shape. The miniature spectrum modulation system and the bottom silicon-based detector are jointly controlled through the shape of the modulation channel, the modulation channel is arranged to be in a special shape, then part of pixels are exposed, the spectrum modulation curve of the miniature spectrum modulation system is controlled, and a better spectrum imaging effect is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of spectrum modulation, in particular to a micro spectrum modulation system. Background Art

[0002] Spectral modulation technology plays a vital role in modern science and technology, particularly in fiber-optic communications, remote sensing, biomedical imaging, chemical analysis, and optical sensing. Achieving superior spectral imaging requires the use of more advanced technologies and sophisticated components in traditional spectral modulation systems. This often results in bulky, costly, and operationally complex spectral modulation systems. Therefore, achieving superior spectral imaging through a streamlined structural arrangement is a pressing challenge facing existing technologies. Utility Model Content

[0003] Therefore, the technical problem to be solved by the present invention is to overcome the defects in the prior art, thereby providing a micro-spectral modulation system.

[0004] A micro-spectral modulation system includes: a modulation layer and a substrate connected in sequence longitudinally, wherein the modulation layer is provided with a total of nine modulation channels, denoted as C1, C2, C3, C4, C5, C6, C7, C8, and C9, respectively. The nine modulation channels are arranged in a 3×3 arrangement, and microlenses are provided on the upper surfaces of some modulation channels;

[0005] The 9 modulation channels are transparent layers, semi-transparent layers or opaque layers;

[0006] The shapes of the 9 modulation channels are square or quasi-square;

[0007] The square-like shapes include the following:

[0008] rounded square;

[0009] The four sides of the square are concave inwards with a certain curvature;

[0010] The four sides of the square bulge outwards with a certain curvature;

[0011] The four corners of the square are all equipped with arc-shaped corners;

[0012] The four corners of the square are equipped with square corners;

[0013] The four corners of the square are all provided with square corners, and the three corners of the square corners are arc-shaped;

[0014] The four sides of the square are concave inwards with a certain curvature, and square corners are set at the four corners;

[0015] The four sides of the square are concave inward with a certain curvature, and square corners are set at the four corners, and the three corners of the square corners are arc-shaped.

[0016] Furthermore, the shape of C1 is a square, specifically: a square with rounded corners;

[0017] Specific parameters: the side length of the square is 1.75μm, and the curvature of the four corner arcs is 33.33rad / μm;

[0018] A micro lens is provided on the upper surface of C1.

[0019] Furthermore, the shape of C2 is a square, specifically: the four sides of the square are concave inward with a certain curvature;

[0020] Specific parameters: the side length of the square is 1.67μm, and the curvature of the four-sided arc is 0.077rad / μm;

[0021] A micro lens is provided on the upper surface of C2.

[0022] Furthermore, the shape of C3 is a square, specifically: the four sides of the square bulge outward with a certain curvature;

[0023] Specific parameters: the side length of the square is 1.77μm, and the curvature of the four-sided arc is 0.05rad / μm;

[0024] A micro lens is provided on the upper surface of C3.

[0025] Furthermore, the shape of C4 is a square, specifically: the four corners of the square are provided with arc-shaped corners;

[0026] Specific parameters: the side length of the square is 1.74μm; the curvature of the arc corner is 71.42rad / μm;

[0027] The surface of C4 is provided with micro lenses.

[0028] Furthermore, the shape of the C5 is a square, and the side length of the square is 1.74 μm;

[0029] C5 is a transparent layer, and no microlenses are provided on its upper surface.

[0030] Furthermore, the shape of C6 is a square, specifically: the four corners of the square are provided with square corners;

[0031] Specific parameters: the side length of the square is 1.72μm, and the specifications of the square corners are 0.1×0.005μm;

[0032] A micro lens is provided on the upper surface of C6.

[0033] Furthermore, the shape of C7 is quasi-square, specifically: square corners are provided at the four corners of the square, and the three corners of the square corners are arc-shaped;

[0034] Specific parameters: the side length of the square is 1.74μm; the specifications of the square corners are 0.13×0.005μm, and the arc curvature is 33.33rad / μm;

[0035] A micro lens is provided on the upper surface of C6.

[0036] Furthermore, the shape of the C8 is quasi-square, specifically: the four sides of the square are concave inward with a certain curvature, and square corners are provided at the four corners;

[0037] Specific parameters: the side length of the square is 1.72μm, the curvature of the four-side arc is 0.1rad / μm; the specification of the square corner is 0.13×0.005μm;

[0038] The upper surface of C8 is provided with micro lenses.

[0039] Furthermore, the shape of C9 is quasi-square, specifically: the four sides of the square are concave inward with a certain curvature, the four corners are provided with square corners, and the three corners of the square corners are arc-shaped;

[0040] Specific parameters: The side length of the square is 1.73μm, and the arc curvature of the four sides is 0.1rad / μm; the specifications of the square corners are 0.13×0.005μm, and the arc curvature is 33.33rad / μm;

[0041] A micro lens is provided on the upper surface of C9.

[0042] The technical solution of the present invention realizes controlling the spectral modulation curve of the micro-spectral modulation system by setting the modulation channel into a special shape and exposing part of the pixels, thereby achieving good spectral imaging effects. At the same time, it does not require complex structural design, further reducing the volume of the spectral modulation system and reducing the overall cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0043] In order to more clearly illustrate the specific implementation methods of the utility model or the technical solutions in the prior art, the drawings required for use in the specific implementation methods or the description of the prior art will be briefly introduced below. Obviously, the drawings described below are some implementation methods of the utility model. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0044] Figure 1 A schematic structural diagram provided in an embodiment of the present utility model;

[0045] Figure 2 Schematic diagram of the shape of the modulation channel;

[0046] Figure 3 is the response curve of silicon-based detector;

[0047] Figure 4 Modulate the spectrum for each channel of the micro-spectral modulation system. DETAILED DESCRIPTION

[0048] The following is a clear and complete description of the technical solution of the present invention in conjunction with the accompanying drawings. Obviously, the embodiments described are only some of the embodiments of the present invention, not all of them. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any creative efforts are within the scope of protection of the present invention.

[0049] In the description of this utility model, it should be noted that the terms "center," "upper," "lower," "left," "right," "vertical," "horizontal," "inner," and "outer," etc., indicating positions or relationships, are based on the positions or relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They do not indicate or imply that the devices or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations on this utility model. Furthermore, the terms "first," "second," and "third" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0050] In the description of this utility model, it should be noted that, unless otherwise expressly specified or limited, the terms "mounted," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, detachable connections, or integral connections; mechanical connections, electrical connections; direct connections, indirect connections through an intermediate medium, and internal communication between two components. Those skilled in the art will understand the specific meanings of the above terms in this utility model based on the specific circumstances.

[0051] In addition, the technical features involved in the different embodiments of the present invention described below can be combined with each other as long as they do not conflict with each other.

[0052] See also Figure 1A micro-spectral modulation system comprises: a modulation layer and a substrate connected in sequence longitudinally, wherein the substrate is a silicon-based image sensor, specifically a CMOS image sensor or a CCD image sensor; because silicon-based detectors have different quantum efficiencies in the 300-800nm ​​band, in order to obtain a required spectral modulation curve, the modulation layer is configured into nine modulation channels, denoted as C1, C2, C3, C4, C5, C6, C7, C8, and C9, respectively; the nine modulation channels are transparent, semi-transparent, or opaque layers;

[0053] The nine modulation channels are arranged in a 3×3 single-period pattern, with microlenses on the upper surfaces of some modulation channels. The nine modulation channels are made of different spectral modulation materials, and the transmittance of each spectral modulation material at wavelengths of 300-800nm ​​satisfies the following constraints:

[0054] Note: T(λ1-λ2) means the transmittance of each wavelength between λ1 and λ2, and the unit of wavelength is nm;

[0055] T C1 :Peak transmittance wavelength ≥ 600nm; T(300-380) ≤ 30%; T(400-550) ≤ 10%; T(600-700) ≥ 80%;

[0056] T C2 :The peak transmittance wavelength is 510-560nm; T(300-420)≤15%; T(530-550)≥80%; T(630-690)≤40%; T(750-800)≥40%;

[0057] T C3 :Trough transmittance wavelength is 520-580nm; T(300-350)≤15%; T(400-440)≥50%; T(520-570)≤20%; T(610-800)≥60%;

[0058] T C4 : Peak transmittance wavelength is 430-470nm; T(300-360)≤10%; T(410-480)≥60%; T(510-550)≤40%; T(550-750)≤15%; T(750-800)≤60%;

[0059] T C5 : T(300-350)≤40%; T(420-800)≥80%;

[0060] T C6 : T(300-350)≤10%; T(400-640)≤20%; T(640-700)≤40%; T(700-

[0061] 800)≤75%;

[0062] T C7 :Trough transmittance wavelength is 520-580nm; T(300-350)≤25%; T(400-440)≥60%; T(520-570)≤15%; T(610-800)≥60%;

[0063] T C8 :The peak transmittance wavelength is 440-500m; T(300-400)≤60%; T(420-520)≥80%; T(580-700)≤20%; T(700-800)≤90%;

[0064] T C9 : Peak transmittance wavelength ≥ 510nm; T (300-400) ≤ 40%; T (400-460) ≤ 20%; T (520-800) ≥ 80%;

[0065] The micro-spectral modulation system is controlled by the shape of the modulation channel and the underlying silicon-based detector. The response curve of the silicon-based detector is as follows: Figure 3 As shown, this application sets the modulation channel into a special shape and exposes part of the pixel to achieve the control of the spectral modulation curve of the micro spectral modulation system. For the specific modulation channel shape, please refer to Figure 2 , the shape of the 9 modulation channels may be square or quasi-square;

[0066] The square-like shapes include the following:

[0067] rounded square;

[0068] The four sides of the square are concave inwards with a certain curvature;

[0069] The four sides of the square bulge outwards with a certain curvature;

[0070] The four corners of the square are all equipped with arc-shaped corners;

[0071] The four corners of the square are equipped with square corners;

[0072] There are square corners at the four corners of the square, and the three corners of the square corners are arc-shaped;

[0073] The four sides of the square are concave inwards with a certain curvature, and square corners are set at the four corners;

[0074] The four sides of the square are concave inward with a certain curvature, and square corners are set at the four corners, and the three corners of the square corners are arc-shaped.

[0075] The specific parameters and specifications of C1-C9 in this embodiment are shown in Table 1. The shape of C1 is a square, specifically a rounded square; specific parameters: the side length of the square is 1.75μm, and the curvature of the four corner arcs is 33.33rad / μm; a microlens is provided on the upper surface of C1.

[0076] The shape of C2 is quasi-square, specifically: the four sides of the square are concave inward with a certain curvature; specific parameters: the side length of the square is 1.67 μm, and the curvature of the four sides is 0.077 rad / μm; a microlens is provided on the upper surface of C2.

[0077] The shape of C3 is quasi-square, specifically: the four sides of the square bulge outward with a certain curvature; specific parameters: the side length of the square is 1.77 μm, and the curvature of the four sides is 0.05 rad / μm; a microlens is provided on the upper surface of C3.

[0078] The shape of C4 is quasi-square, specifically: arc-shaped corners are provided at the four corners of the square; specific parameters: the side length of the square is 1.74 μm; the curvature of the arc-shaped corner is 71.42 rad / μm; and micro lenses are provided on the surface of C4.

[0079] The shape of C5 is a square with a side length of 1.74 μm. C5 is a transparent layer, and no microlens is provided on its upper surface.

[0080] The shape of the C6 is quasi-square, specifically: square corners are provided at the four corners of the square; specific parameters: the side length of the square is 1.72 μm, the specification of the square corner is 0.1×0.005 μm; and a microlens is provided on the upper surface of the C6.

[0081] The shape of C7 is quasi-square, specifically: square corners are provided at the four corners of the square, and the three corners of the square corners are arc-shaped; specific parameters: the side length of the square is 1.74μm; the specifications of the square corners are 0.13×0.005μm, and the arc curvature is 33.33rad / μm; the upper surface of C6 is provided with a microlens.

[0082] The shape of the C8 is quasi-square, specifically: the four sides of the square are concave inward with a certain curvature, and square corners are set at the four corners; specific parameters: the side length of the square is 1.72μm, the curvature of the four sides is 0.1rad / μm; the specifications of the square corners are 0.13×0.005μm; and a microlens is set on the upper surface of C8.

[0083] The shape of the C9 is quasi-square, specifically: the four sides of the square are concave inward with a certain curvature, and square corners are set at the four corners, and the three corners of the square corners are arc-shaped; specific parameters: the side length of the square is 1.73μm, the curvature of the four-side arc is 0.1rad / μm; the specifications of the square corner are 0.13×0.005μm, and the arc curvature is 33.33rad / μm; a microlens is set on the upper surface of C9.

[0084] Table 1:

[0085]

[0086]

[0087] The modulation spectrum of each channel of the micro-spectral modulation system in this embodiment is as follows Figure 4 shown.

[0088] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will readily appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A micro spectral modulation system, characterized in that: include: A modulation layer and a substrate are connected in sequence longitudinally, wherein the modulation layer is provided with a total of 9 modulation channels, denoted as C1, C2, C3, C4, C5, C6, C7, C8 and C9, and the 9 modulation channels are arranged in a 3×3 arrangement. Micro lenses are provided on the upper surfaces of some modulation channels; The 9 modulation channels are transparent layers, semi-transparent layers or opaque layers; The shapes of the 9 modulation channels are square or quasi-square; The square-like shapes include the following: rounded square; The four sides of the square are concave inwards with a certain curvature; The four sides of the square bulge outwards with a certain curvature; The four corners of the square are all equipped with arc-shaped corners; The four corners of the square are equipped with square corners; There are square corners at the four corners of the square, and the three corners of the square corners are arc-shaped; The four sides of the square are concave inwards with a certain curvature, and square corners are set at the four corners; The four sides of the square are concave inward with a certain curvature, and square corners are set at the four corners, and the three corners of the square corners are arc-shaped.

2. The micro spectral modulation system according to claim 1, characterized in that: The shape of C1 is a square, specifically a rounded square; Specific parameters: the side length of the square is 1.75μm, and the curvature of the four corner arcs is 33.33rad / μm; A micro lens is provided on the upper surface of C1.

3. The micro-spectral modulation system according to claim 2, characterized in that: The shape of C2 is a square, specifically: the four sides of the square are concave inward with a certain curvature; Specific parameters: the side length of the square is 1.67μm, and the curvature of the four-sided arc is 0.077rad / μm; A micro lens is provided on the upper surface of C2.

4. The micro-spectral modulation system according to claim 3, characterized in that: The shape of C3 is a square, specifically: the four sides of the square are convex outward with a certain curvature; Specific parameters: the side length of the square is 1.77μm, and the curvature of the four-sided arc is 0.05rad / μm; A micro lens is provided on the upper surface of C3.

5. The micro-spectral modulation system according to claim 4, characterized in that: The shape of the C4 is a square, specifically: the four corners of the square are provided with arc-shaped corners; Specific parameters: the side length of the square is 1.74μm; the curvature of the arc corner is 71.42rad / μm; The surface of C4 is provided with micro lenses.

6. The micro-spectral modulation system according to claim 5, characterized in that: The shape of the C5 is a square with a side length of 1.74 μm; C5 is a transparent layer, and no microlenses are provided on its upper surface.

7. The micro-spectral modulation system according to claim 6, characterized in that: The shape of the C6 is a square, specifically: the four corners of the square are provided with square corners; Specific parameters: the side length of the square is 1.72μm, and the specifications of the square corners are 0.1×0.005μm; A micro lens is provided on the upper surface of C6.

8. The micro-spectral modulation system according to claim 7, characterized in that: The shape of the C7 is quasi-square, specifically: the four corners of the square are provided with square corners, and the three corners of the square corners are arc-shaped; Specific parameters: the side length of the square is 1.74μm; the specifications of the square corners are 0.13×0.005μm, and the arc curvature is 33.33rad / μm; A micro lens is provided on the upper surface of C6.

9. The micro-spectral modulation system according to claim 8, characterized in that: The shape of the C8 is a square, specifically: the four sides of the square are concave inward with a certain curvature, and square corners are provided at the four corners; Specific parameters: the side length of the square is 1.72μm, the curvature of the four-side arc is 0.1rad / μm; the specification of the square corner is 0.13×0.005μm; The upper surface of C8 is provided with micro lenses.

10. The micro-spectral modulation system according to claim 9, characterized in that: The shape of C9 is quasi-square, specifically: the four sides of the square are concave inward with a certain curvature, and the four corners are provided with square corners, and the three corners of the square corners are arc-shaped; Specific parameters: The side length of the square is 1.73μm, and the arc curvature of the four sides is 0.1rad / μm; the specifications of the square corners are 0.13×0.005μm, and the arc curvature is 33.33rad / μm; A micro lens is provided on the upper surface of C9.

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