Protective device for semiconductor equal-height column spraying workpiece tool

Abstract

The utility model discloses a tool protection device for a semiconductor equal-height column spraying workpiece, which belongs to the technical field of protection devices, and comprises a base, a bottom cap, a first threaded hole, a second threaded hole, a second threaded hole, a second threaded hole, a second threaded hole, a third threaded hole and a fourth threaded hole, and the bottom cap is in threaded connection with the second threaded hole and is used for protecting the bottom of the equal-height column spraying workpiece; the top cap is installed at the top of the equal-height column spraying workpiece in a threaded mode and used for protecting the top of the equal-height column spraying workpiece; the supporting column is in threaded connection with the bottom cap and is used for supporting the equal-height column spraying workpiece; the lifting assembly is mounted on the base and used for adjusting the height of the equal-height column spraying workpiece; wherein the lifting assembly comprises a rotating disc, a screw cylinder and an inserting rod, the screw cylinder is in threaded connection to the supporting column, the inserting rod is fixedly connected to the base, and the inserting rod is inserted into the supporting column and slides on the supporting column in a limited mode; according to the tool protection device, tool protection is set for high column spraying workpieces such as cylinders, and the upper tops and the lower bottoms of the high column spraying workpieces are protected.

Description

Technical Field

[0001] The utility model belongs to the technical field of protective devices, in particular to a protective device for high-column spraying workpieces such as semiconductors. Background Art

[0002] In the field of semiconductor plasma spraying, there are various types of workpieces to be sprayed. All plasma sprayed workpieces need to protect the non-sprayed areas. Ordinary workpieces can be shielded and protected by high-temperature resistant tapes, while special workpieces require the development of processing equipment for protection.

[0003] In semiconductor plasma spraying, it is time-consuming and labor-intensive to use conventional high-temperature resistant tape to mask and protect the non-spraying areas of high-column workpieces. The high-temperature resistant tape is expensive and has low work efficiency. The tape masking protection is not reliable. During the spraying process, the high temperature generated by the plasma flame will burn the tape, causing the tape to crack, and the spraying area of ​​the workpiece will show a black mark caused by the burnt tape, which greatly affects the cleanliness of the spraying area of ​​the workpiece. At the same time, when high-temperature resistant tape is used to mask the non-spraying area, removing the masking tape after the workpiece is sprayed is likely to cause the coating at the edge where the spraying area and the tape meet to fall off, resulting in rework of the workpiece. Utility Model Content

[0004] In view of the deficiencies in the prior art, the utility model provides a tooling protection device for high-column spraying workpieces such as semiconductors, which solves the above-mentioned problems.

[0005] To achieve the above objectives, the present invention is implemented through the following technical solutions: a protective device for semiconductor and other high-column spraying workpieces, including a base and:

[0006] The bottom cap is threadedly connected to the second threaded hole on the workpiece for spraying with the same height column, and is used to protect the bottom of the workpiece for spraying with the same height column;

[0007] Top cap, threaded and installed on the top of the workpiece sprayed with equal height column, is used to protect the top of the workpiece sprayed with equal height column;

[0008] The support column is connected to the bottom cap with threads and is used to support the workpiece sprayed with the same height column;

[0009] Lifting assembly, installed on the base, used to adjust the height of the workpiece sprayed with the same height column;

[0010] Among them, the lifting assembly includes a rotating disk, a screw barrel and an insertion rod. The rotating disk is fixedly connected to the screw barrel, and the rotating disk is embedded and rotatably installed in a rotating groove opened on the base. The screw barrel is threadedly connected to the support column, and the insertion rod is fixedly connected to the base. The insertion rod is inserted into the support column and slides with the support column in a limited position.

[0011] On the basis of the above technical solutions, the present invention also provides the following optional technical solutions:

[0012] Further technical solution: The bottom cap is fixedly connected with a first threaded column which is threadedly connected to a second threaded hole provided on the equal height column spraying workpiece.

[0013] Further technical solution: A second threaded column is fixedly connected to the support column and is threadedly connected to the first threaded hole provided on the bottom cap.

[0014] Further technical solution: The support column is provided with a limiting sliding groove that slidably cooperates with a limiting bar fixedly connected to the insertion rod.

[0015] Further technical solution: the diameter and height of the top cap and the bottom cap are both 2 centimeters and 1.8 centimeters.

[0016] Further technical solution: The diameter and height of the support column are ten centimeters and twelve centimeters respectively, and the support column is made of cylindrical aluminum material.

[0017] The utility model provides a protective device for high-column spraying workpieces such as semiconductors, which has the following beneficial effects compared with the existing technology:

[0018] 1. Tooling protection is developed for cylindrical and other high-column spraying workpieces to protect their top and bottom, solving the various disadvantages of conventional high-temperature resistant tapes on spraying workpieces, thereby better preventing and controlling the non-spraying areas of spraying workpieces. This independently developed high-column protection device saves time and effort, has low cost, high work efficiency, and is reusable. BRIEF DESCRIPTION OF THE DRAWINGS

[0019] Figure 1 It is a schematic diagram of the three-dimensional structure of the utility model.

[0020] Figure 2 It is a schematic diagram of the overall structure of the utility model.

[0021] Figure 3 For this utility model Figure 2 A schematic diagram of the enlarged structure of part A.

[0022] Figure 4 For this utility model Figure 2 Schematic diagram of the enlarged structure of part B.

[0023] Notes on the figure markings: 1. Base; 2. Bottom cap 2; 201. First threaded column; 202. First threaded hole; 3. Top cap 3; 4. Support column; 401. Second threaded column; 5. Contour column spraying workpiece; 501. Second threaded hole; 6. Lifting assembly; 601. Rotating disk; 602. Screw barrel; 603. Insert rod. DETAILED DESCRIPTION

[0024] In order to make the purpose, technical solutions and advantages of the present invention more clearly understood, the present invention is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present invention and are not intended to limit the present invention.

[0025] The specific implementation of the present invention is described in detail below with reference to specific embodiments.

[0026] See also Figures 1 to 4 , provided in one embodiment of the present invention, is a protective device for a semiconductor high-column spraying workpiece, comprising a base 1, and further comprising:

[0027] The bottom cap 2 is threadedly connected to the second threaded hole 501 provided on the workpiece 5 for spraying the height column, and is used to protect the bottom of the workpiece 5 for spraying the height column. The bottom cap 2 is fixedly connected to a first threaded column 201 threadedly connected to the second threaded hole 501 provided on the workpiece 5 for spraying the height column;

[0028] A top cap 3 is threadedly mounted on the top of the workpiece 5 for spraying with a column of equal height to protect the top of the workpiece 5 for spraying with a column of equal height;

[0029] The support column is threadedly connected to the bottom cap 2 and is used to support the workpiece 5 of equal height column spraying. The support column 4 is fixedly connected to a second threaded column 401 threadedly connected to the first threaded hole 202 provided on the bottom cap 2;

[0030] A lifting assembly 6 is mounted on the base 1 and is used to adjust the height of the workpiece 5 for spraying with a column of equal height;

[0031] Among them, the lifting assembly 6 includes a rotating disk 601, a screw barrel 602 and an insertion rod 603. The rotating disk 601 is fixedly connected to the screw barrel 602. The rotating disk 601 is embedded in a rotating groove (not marked in the figure) opened on the base 1. The screw barrel 602 is threadedly connected to the support column 4. The insertion rod 603 is fixedly connected to the base 1. The insertion rod 603 is inserted into the support column 4 and slides with the support column 4. The support column 4 is provided with a limiting groove (not marked in the figure) that slides with the limiting bar (not marked in the figure) fixedly connected to the insertion rod 603.

[0032] Preferably, the diameter and height of the top cap 3 and the bottom cap 2 are 2 centimeters and 1.8 centimeters respectively, the diameter and height of the support column 4 are 10 centimeters and 12 centimeters respectively, and the support column 4 is made of cylindrical aluminum material.

[0033] In the embodiment of the utility model, the high column protection device is developed independently, which is time-saving, labor-saving, low in cost, high in work efficiency and reusable.

[0034] It should be noted that, in this document, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0035] Although the embodiments of the utility model have been shown and described, it should be understood by those of ordinary skill in the art that various changes, modifications, replacements and variations can be made to these embodiments without departing from the principles and spirits of the utility model, and the scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A protective device for semiconductor high-column spraying workpieces, comprising a base (1), characterized in that: Also includes: A bottom cap (2) is threadedly connected to a second threaded hole (501) provided on the height column spraying workpiece (5) and is used to protect the bottom of the height column spraying workpiece (5); A top cap (3) is threadedly mounted on the top of the workpiece (5) sprayed with the same height column, and is used to protect the top of the workpiece (5) sprayed with the same height column; A support column is threadedly connected to the bottom cap (2) and is used to support a workpiece (5) sprayed with a column of equal height; A lifting assembly (6) is mounted on the base (1) and is used to adjust the height of the workpiece (5) sprayed with a column of equal height; The lifting assembly (6) comprises a rotating disk (601), a screw barrel (602) and an insertion rod (603), wherein the rotating disk (601) is fixedly connected to the screw barrel (602), the rotating disk (601) is embedded and rotatably mounted in a rotating groove provided on the base (1), the screw barrel (602) is threadedly connected to the support column (4), the insertion rod (603) is fixedly connected to the base (1), and the insertion rod (603) is inserted into the support column (4) and slides with the support column (4) in a limited manner.

2. The protective device for semiconductor high-column spraying workpieces according to claim 1 is characterized in that: The bottom cap (2) is fixedly connected to a first threaded column (201) threadedly connected to a second threaded hole (501) provided on the equal-height column spraying workpiece (5).

3. The protective device for semiconductor high-column spraying workpieces according to claim 1 is characterized in that: A second threaded column (401) is fixedly connected to the support column (4) and is threadedly connected to a first threaded hole (202) provided on the bottom cap (2).

4. The protective device for semiconductor high-column spraying workpieces according to claim 1 is characterized in that: The support column (4) is provided with a limiting sliding groove that slidably cooperates with a limiting bar fixedly connected to the insertion rod (603).

5. The protective device for semiconductor high-column spraying workpieces according to any one of claims 1 to 4, characterized in that: The diameter and height of the top cap (3) and the bottom cap (2) are both 2 centimeters and 1.8 centimeters.

6. The protective device for semiconductor high-column spraying workpieces according to any one of claims 1 to 4, characterized in that: The diameter and height of the support column (4) are ten centimeters and twelve centimeters respectively, and the support column (4) is made of cylindrical aluminum material.

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