Supporting table top machining device

Abstract

The utility model provides a supporting table top machining device. The supporting table top machining device comprises a device body; the driving unit, the first grinding unit and the second grinding unit are arranged on the device body, the first grinding unit comprises a first grinding wheel and a first grinding shaft coaxially arranged with the first grinding wheel, and the second grinding unit comprises a second grinding wheel and a second grinding shaft coaxially arranged with the second grinding wheel. The first grinding shaft can drive the first grinding wheel to rotate under the driving of the driving unit, and the second grinding shaft can drive the second grinding wheel to rotate under the driving of the driving unit; a preset included angle is formed between the axis of the first grinding shaft and the axis of the second grinding shaft. According to the supporting table top machining device, the defects of edge breakage, cracks and the like in the crystal bar machining process can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a supporting table processing device. Background Art

[0002] The ingot cutting process is one of the steps in the silicon wafer production process. During this process, the ingot needs to be placed on a support table or cutting table of the cutting equipment and cut by a cutting device such as a wire cutting device or a band saw.

[0003] Typically, the support platform in a cutting device is composed of multiple V-shaped support sections, each assembled together. The flatness of the entire support platform is determined by the machining and assembly precision of each section. However, in actual production, the surface precision of the V-shaped support sections and the weight of the crystal ingot being processed on them can lead to inconsistent heights between the two V-shaped support sections located on either side of the ingot's axis at the cutting location. This can lead to processing defects such as chipping and cracking at the ingot's cutting location during the cutting process. Utility Model Content

[0004] In order to solve at least one of the above technical problems in the prior art, an embodiment of the present disclosure provides a supporting table processing device.

[0005] The technical solutions provided by the embodiments of the present disclosure are as follows:

[0006] The present disclosure provides a supporting table processing device, comprising:

[0007] the device itself; and

[0008] A driving unit, a first grinding unit and a second grinding unit are arranged on the device body, the first grinding unit includes a first grinding wheel and a first grinding shaft coaxially arranged with the first grinding wheel, the second grinding unit includes a second grinding wheel and a second grinding shaft coaxially arranged with the second grinding wheel, the first grinding shaft can drive the first grinding wheel to rotate when driven by the driving unit, and the second grinding shaft can drive the second grinding wheel to rotate when driven by the driving unit; wherein the axes of the first grinding shaft and the second grinding shaft are arranged at a predetermined angle.

[0009] Exemplarily, the supporting table processing device also includes a lifting unit, which can drive the device body to lift and lower along a first direction, wherein the first direction forms a first angle with the axis of the first grinding shaft, and the first direction forms a second angle with the axis of the second grinding shaft, and the predetermined angle is equal to the sum of the first angle and the second angle.

[0010] Exemplarily, the lifting unit includes a clamping assembly that can be lifted and lowered along the first direction, and a clamping portion that can be clamped by the clamping assembly is connected to the device body.

[0011] Exemplarily, the driving unit includes:

[0012] Drive motor;

[0013] A main transmission shaft, wherein the output shaft of the drive motor is arranged vertically therebetween;

[0014] a first transmission assembly, transmission-connected between the drive motor and the main transmission shaft;

[0015] a second transmission assembly, drivingly connected between the first grinding shaft and the axial first end of the main transmission shaft, and arranged perpendicularly between the first grinding shaft and the main transmission shaft;

[0016] a third transmission assembly, drivingly connected between the second grinding shaft and the second axial end of the main transmission shaft, and arranged perpendicularly between the second grinding shaft and the main transmission shaft;

[0017] The output shaft of the driving motor is configured to form a third angle with the axis of the first grinding shaft and a fourth angle with the axis of the second grinding shaft.

[0018] Exemplarily, the predetermined angle is equal to the sum of the third angle and the fourth angle.

[0019] Exemplarily, the second transmission assembly includes:

[0020] a third frustum gear connected to the first axial end of the main transmission shaft; and

[0021] The fourth frustum gear is connected to the first grinding shaft, and the tooth surfaces of the third frustum gear and the fourth frustum gear are both conical and mesh with each other.

[0022] Exemplarily, the third transmission assembly includes:

[0023] a fifth frustum gear connected to the second axial end of the main transmission shaft; and

[0024] The sixth frustum gear is connected to the second grinding shaft, and the tooth surfaces of the fifth frustum gear and the sixth frustum gear are both conical and mesh with each other.

[0025] Exemplarily, the device body includes a first housing, the first housing including a first side and a second side opposite to each other in the axial direction of the main transmission shaft; wherein,

[0026] The driving motor is located inside the first housing or outside the first housing;

[0027] The first transmission assembly is arranged in the first housing;

[0028] A portion of the main transmission shaft between the first axial end and the second axial end is arranged in the first housing, and the first axial end extends from a first side of the first housing, and the second axial end extends from the second side of the first housing.

[0029] Exemplarily, the first grinding unit further includes a second box body installed outside the first side of the first box body, and the second grinding unit further includes a third box body installed outside the second side of the first box body; wherein,

[0030] The second transmission assembly is located in the second housing, and the axial first end of the main transmission shaft extends into the second housing to be connected to the second transmission assembly;

[0031] The third transmission assembly is located in the third housing, and the second axial end of the main transmission shaft extends into the third housing to be connected with the third transmission assembly.

[0032] Exemplarily, the predetermined angle between the axes of the first grinding wheel and the second grinding wheel is adjustable.

[0033] The beneficial effects brought about by the embodiments of the present disclosure are as follows:

[0034] In the support table processing device provided in the embodiment of the present disclosure, two grinding units, namely a first grinding unit and a second grinding unit, are set up, a first grinding shaft and a first grinding wheel are set in the first grinding unit, and a second grinding shaft and a second grinding wheel are set in the second grinding unit. The first grinding shaft and the second grinding shaft can be driven to rotate by a driving unit to respectively drive the first grinding wheel and the second grinding wheel to rotate, and the axes of the first grinding shaft and the second grinding shaft are set at a predetermined angle, so that the first grinding wheel and the second grinding wheel can achieve the purpose of grinding the V-shaped support table with a predetermined angle. Therefore, when the heights of two adjacent V-shaped support tables in the crystal rod cutting device are inconsistent, the two grinding wheels in the support table processing device can be used to grind the higher V-shaped support table to eliminate the height difference between different V-shaped support tables caused by installation or deformation, so that when the crystal rod is placed on the V-table support table for cutting, the heights of the V-shaped support tables on both sides of the cutting position are consistent, avoiding defects such as edge collapse and cracks during processing. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 Schematic diagram showing the case where the heights on both sides of the crystal ingot cutoff position are inconsistent;

[0036] Figure 2 One of the structural schematic diagrams of the supporting table processing device according to the embodiment of the present disclosure is shown;

[0037] Figure 3 The second structural schematic diagram shows the supporting table processing device in the embodiment of the present disclosure. DETAILED DESCRIPTION

[0038] To make the purpose, technical solutions, and advantages of the embodiments of the present disclosure more clear, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below in conjunction with the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are part of the embodiments of the present disclosure, not all of the embodiments. Based on the described embodiments of the present disclosure, all other embodiments obtained by ordinary technicians in this field without creative work are within the scope of protection of the present disclosure.

[0039] Unless otherwise defined, the technical or scientific terms used in this disclosure should have the usual meanings understood by people with ordinary skills in the field to which this disclosure belongs. The words "first", "second" and similar words used in this disclosure do not indicate any order, quantity or importance, but are only used to distinguish different components. Similarly, words such as "one", "an" or "the" do not indicate a quantity limitation, but rather indicate the existence of at least one. Words such as "include" or "comprise" mean that the elements or objects appearing before the word include the elements or objects listed after the word and their equivalents, without excluding other elements or objects. Words such as "connect" or "connected" are not limited to physical or mechanical connections, but may include electrical connections, whether direct or indirect. "Up", "down", "left", "right" and the like are only used to indicate relative positional relationships. When the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0040] As used in the embodiments of the present disclosure, the terms "parallel," "perpendicular," and "identical" include the strict sense of "parallel," "perpendicular," and "identical," as well as "approximately parallel," "approximately perpendicular," and "approximately identical" with respect to a certain tolerance, which, taking into account the tolerances associated with the measurement of a particular quantity (e.g., limitations of the measurement system), means within an acceptable range of deviation for a particular value as determined by one of ordinary skill in the art. For example, "approximately" can mean within one or more standard deviations, or within 3% or 5% of the stated value.

[0041] In addition, in this document, unless otherwise defined, the terms "substantially," "essentially," "approximately," and "about" are used to describe and explain small variations. When used in connection with an event or circumstance, these terms can encompass situations where the event or circumstance occurs exactly, as well as situations where the event or circumstance occurs approximately. For example, when used in connection with a numerical value, these terms can include a range of variation of less than or equal to 10% of the numerical value, such as less than or equal to ±5%, less than or equal to ±4%, less than or equal to ±3%, less than or equal to ±2%, less than or equal to ±1%, less than or equal to ±0.5%, less than or equal to ±0.1%, less than or equal to ±0.05%. The term "substantially coplanar" can refer to two surfaces being aligned along the same plane within the micrometer range, for example, within 40 μm, 30 μm, 20 μm, 10 μm, or 1 μm.

[0042] In related technologies, such as Figure 1 As shown, in the crystal rod cutting device, the support table can be composed of multiple sections of V-shaped support tables 1 spliced ​​and installed, and the flatness of the entire support table surface can be determined by the processing accuracy and installation accuracy of each section of the V-shaped support table 1 itself.

[0043] In actual production, when the crystal rod is cut, due to the inconsistent heights of the V-shaped support table 1 on both sides of the cut position, when the crystal rod is placed on the surface of the V-shaped support table 1, one side of the crystal rod does not contact the surface of the V-shaped support table.

[0044] During the cutting process, as the band saw 3 continues to move downward, the connection part of the crystal rod 2 at the cutting position becomes smaller and smaller, and the support force that can be provided to the side of the crystal rod 2 that is not in contact with the V-shaped support table 1 becomes smaller and smaller. When the support force that can be provided is less than the support force required for the side that is not in contact with the crystal rod 2, under the action of gravity, the side that is not in contact with the V-shaped support table 1 will move toward the surface of the V-shaped support table 1, thereby causing the connection part of the crystal rod 2 at the cutting position to break, resulting in edge collapse, cracks and other processing defects.

[0045] In order to solve the above problems, a support table processing device is provided in an embodiment of the present disclosure, which can grind a higher section of the V-shaped support table to eliminate the height difference between different V-shaped support tables caused by installation or deformation, so that when the crystal rod is placed on the V-table support table for cutting, the height of the V-shaped support table on both sides of the cutting position is consistent, avoiding defects such as edge chipping and cracks during the processing process.

[0046] like Figure 2As shown, the supporting table processing device provided by the embodiment of the present disclosure includes: a device body 100 and a driving unit 200, a first grinding unit 300 and a second grinding unit 400 arranged on the device body 100, the first grinding unit 300 includes a first grinding wheel 310 and a first grinding shaft 320 coaxially arranged with the first grinding wheel 310, the second grinding unit 400 includes a second grinding wheel 410 and a second grinding shaft 420 coaxially arranged with the second grinding wheel 410, the first grinding shaft 320 can drive the first grinding wheel 310 to rotate when driven by the driving unit 200, and the second grinding shaft 420 can drive the second grinding wheel 410 to rotate when driven by the driving unit 200; wherein the axes of the first grinding shaft 320 and the second grinding shaft 420 are arranged at a predetermined angle.

[0047] In the above scheme, two grinding units are provided, namely the first grinding unit 300 and the second grinding unit 400, the first grinding unit 300 is provided with the first grinding shaft 320 and the first grinding wheel 310, and the second grinding unit 400 is provided with the second grinding shaft 420 and the second grinding wheel 410, and the driving unit 200 can drive the first grinding shaft 320 and the second grinding shaft 420 to rotate, so as to respectively drive the first grinding wheel 310 and the second grinding wheel 410 to rotate, and the axes of the first grinding shaft 320 and the second grinding shaft 420 are axially spaced. The predetermined angle is set, so the first grinding wheel 310 and the second grinding wheel 410 can achieve the purpose of grinding the V-shaped support table 1 with a predetermined angle. Therefore, when the heights of two adjacent sections of the V-shaped support table 1 in the crystal rod cutting equipment are inconsistent, the two grinding wheels in the support table processing device can be used to grind the higher section of the V-shaped support table 1 to eliminate the height difference between different V-shaped support tables 1 caused by installation or deformation, so that when the crystal rod is placed on the V-table support table for cutting, the heights of the V-shaped support tables 1 on both sides of the cutting position are consistent, avoiding defects such as edge collapse and cracks during processing.

[0048] It should be noted that the predetermined angle is the same as the angle between the two surfaces of the V-shaped support table 1. Figure 2 As shown, when grinding the V-shaped support table 1 , the first grinding axis 320 may be perpendicular to one of the V-shaped support tables 1 , and the second grinding axis 420 may be perpendicular to the other of the V-shaped support tables 1 .

[0049] In some exemplary embodiments, Figure 2 As shown, the supporting table processing device further includes a lifting unit 500 , and the lifting unit 500 can drive the device body 100 to move up and down along the first direction Y.

[0050] like Figure 2 As shown, the first direction Y forms a first angle with the axis of the first grinding shaft 320 , and the first direction Y forms a second angle with the axis of the second grinding shaft 420 , and the predetermined angle is equal to the sum of the first angle and the second angle.

[0051] In the above scheme, the lifting unit 500 can drive the entire device body 100 to rise and fall along the first direction Y, and the sum of the first angle between the first direction Y and the axis of the first grinding shaft 320 and the second angle between the first direction Y and the axis of the second grinding shaft 420 is the predetermined angle. When processing the V-shaped support table 1, the first direction Y can refer to the vertical direction. In this way, when processing the V-shaped support table 1, the lifting unit 500 can drive the entire device body 100 to rise and fall along the vertical direction so that the first grinding wheel 310 and the second grinding wheel 410 contact the surface of the V-shaped support table 1, and the lifting unit 500 can also accurately control the grinding amount of the first grinding wheel 310 and the second grinding wheel 410 to ensure that the height of the V-shaped support table 1 after being ground off is roughly the same as the height of another adjacent V-shaped support table 1.

[0052] In addition, for example, Figure 1 As shown, the lifting unit 500 includes a clamping assembly 510 that can be lifted and lowered along the first direction Y. The device body 100 is connected to a clamping portion A that can be clamped by the clamping assembly 510. In this way, the device body 100 can be clamped and fixed by the lifting unit 500 to be lifted and lowered.

[0053] In the prior art, a crystal ingot can be grasped by a robot and placed on the V-shaped support table 1. In some embodiments, the lifting unit 500 can directly utilize the robot as the lifting unit 500, so that there is no need to set up a separate lifting unit 500. Only the clamping portion A structure that can be clamped can be provided on the device body 100.

[0054] In addition, it should be noted that in the related art, the V-shaped support table 1 can move in the horizontal direction. Therefore, when processing the V-shaped support table 1, after the two grinding wheels are lowered to the target position by the lifting unit 500, their absolute positions may not change, and they only perform rotational movement. The grinding of the entire table surface is completed through the horizontal movement of the V-shaped support table 1 itself.

[0055] Of course, it is understandable that in other embodiments, a translation unit may be provided to horizontally move the device body 100 or translate the grinding wheel alone to achieve horizontal relative movement between the grinding wheel and the V-shaped support table 1.

[0056] In addition, in some exemplary embodiments, please combine Figure 1 and Figure 2 As shown, the driving unit 200 includes:

[0057] Drive motor 210;

[0058] A main transmission shaft 220 , wherein the output shaft of the drive motor 210 is arranged vertically therebetween;

[0059] A first transmission assembly 230 , which is transmission-connected between the drive motor 210 and the main transmission shaft 220 ;

[0060] a second transmission assembly 240 , which is transmission-connected between the first grinding shaft 320 and the first axial end of the main transmission shaft 220 , and is arranged perpendicularly between the first grinding shaft 320 and the main transmission shaft 220 ;

[0061] a third transmission assembly 250 , which is transmission-connected between the second grinding shaft 420 and the second axial end of the main transmission shaft 220 , and is arranged perpendicularly between the second grinding shaft 420 and the main transmission shaft 220 ;

[0062] The output shaft of the driving motor 210 is configured to form a third angle with the axis of the first grinding shaft 320 and a fourth angle with the axis of the second grinding shaft 420 .

[0063] By adopting the above solution, the driving unit 200 utilizes the transmission cooperation between the main transmission shaft 220 and several transmission components to achieve the purpose of synchronously driving the two grinding wheels to rotate through the same drive motor 210, thereby reducing costs.

[0064] It should be noted that the output shaft of the drive motor 210 is configured to form a third angle with the axis of the first grinding shaft 320 and a fourth angle with the axis of the second grinding shaft 420. This means that the output shaft of the drive motor 210, the first grinding shaft 320, and the second grinding shaft 420 are all arranged perpendicular to the main transmission shaft 220, but are angled relative to each other. The main transmission shaft can be arranged axially horizontally.

[0065] Of course, it is understandable that in other embodiments, the driving unit 200 may also utilize two driving motors 210 to respectively drive the two grinding wheels to rotate.

[0066] In addition, in some exemplary embodiments, please combine Figure 1 and Figure 2 As shown, the first transmission assembly 230 includes:

[0067] A first frustum gear 231 connected to the output shaft of the drive motor 210; and

[0068] The second frustum gear 232 is connected to the main transmission shaft 220 . The tooth surfaces of the first frustum gear 231 and the second frustum gear 232 are both conical and mesh with each other.

[0069] In the above scheme, the meshing of two frustum-shaped gears is used to convert the rotational motion of the output shaft of the drive motor 210 into the rotational motion of the main transmission shaft 220. Due to the conical design of the gears, the two frustum-shaped gears can mesh with each other at different angles, achieving 90-degree angular transmission.

[0070] In addition, in some exemplary embodiments, please combine Figure 1 and Figure 2 As shown, the second transmission assembly 240 includes:

[0071] a third frustum gear 241 connected to a first axial end of the main transmission shaft 220; and

[0072] The fourth frustum gear 242 connected to the first grinding shaft 320 , the third frustum gear 241 and the fourth frustum gear 242 all have conical tooth surfaces and mesh with each other.

[0073] In the above solution, the meshing of two frustum-shaped gears is used to convert the rotational motion of the main transmission shaft 220 into the rotational motion of the first grinding shaft 320. Due to the conical design of the gears, the two frustum-shaped gears can mesh with each other at different angles, achieving 90-degree angular transmission.

[0074] In addition, in some exemplary embodiments, please combine Figure 1 and Figure 2 As shown, the third transmission assembly 250 includes:

[0075] a fifth frustum gear 251 connected to the second axial end of the main transmission shaft 220; and

[0076] The tooth surfaces of the sixth frustum gear 252 connected to the second grinding shaft 420 , the fifth frustum gear 251 and the sixth frustum gear 252 are all conical and mesh with each other.

[0077] In the above solution, the meshing of two frustum-shaped gears is used to convert the rotational motion of the main transmission shaft 220 into the rotational motion of the second grinding shaft 420. Due to the conical design of the gears, the two frustum-shaped gears can mesh with each other at different angles, achieving 90-degree angular transmission.

[0078] Of course, it is understandable that the specific structures of the first transmission assembly 230, the second transmission assembly 240 and the third transmission assembly 250 are not limited thereto.

[0079] In addition, in some exemplary embodiments, please combine Figure 1 and Figure 2 As shown, the device body 100 includes a first housing 110, and the first housing 110 includes a first side and a second side opposite to each other in the axial direction of the main transmission shaft 220; wherein, the drive motor 210 is located inside the first housing 110 or outside the first housing 110; the first transmission assembly 230 is arranged in the first housing 110; the portion of the main transmission shaft 220 located between the axial first end 221 and the axial second end 222 is arranged in the first housing 110, and the axial first end 221 extends from the first side of the first housing 110, and the axial second end 222 extends from the second side of the first housing 110.

[0080] Using this solution, the first transmission assembly 230 and the portion of the main transmission shaft 220 between the first axial end 221 and the second axial end 222 are installed within the first housing 110, which serves to protect the moving parts. Furthermore, the axial ends of the main transmission shaft 220 extend from opposite sides of the first housing 110, thereby providing transmission connections to the first grinding unit 300 and the second grinding unit 400, respectively.

[0081] In some exemplary embodiments, please combine Figure 1 and Figure 2 As shown, the first grinding unit 300 also includes a second box body 330 installed outside the first side of the first box body 110, and the second grinding unit 400 also includes a third box body 430 installed outside the second side of the first box body 110; wherein, the second transmission assembly 240 is located in the second box body 330, and the axial first end 221 of the main transmission shaft 220 extends into the second box body 330 to be connected to the second transmission assembly 240; the third transmission assembly 250 is located in the third box body 430, and the axial second end 222 of the main transmission shaft 220 extends into the third box body 430 to be connected to the third transmission assembly 250.

[0082] With the above solution, the first grinding shaft 320 and the second transmission assembly 240 are installed inside the second housing, which can protect the above-mentioned moving parts. The second grinding shaft 420 and the third transmission assembly 250 are installed inside the second housing 330, which can protect the above-mentioned moving parts. At the same time, the axial first end 221 of the main transmission shaft 220 extends into the second housing, allowing connection with the second transmission assembly 240, and the axial second end 222 of the main transmission shaft 220 extends into the second housing 330, allowing connection with the third transmission assembly 250.

[0083] Please combine Figure 1 and Figure 2 As shown, the first grinding wheel 310 is located outside the second box body 330, and the first grinding shaft 320 extends from the second box body 330 to be connected to the first grinding wheel 310, and the second grinding wheel 410 is located outside the third box body 430, and the second grinding shaft 420 extends from the third box body 430 to be connected to the second grinding wheel 410.

[0084] The second housing 330 and the third housing 430 may have the same structure and are located on opposite sides of the first housing 110 along the axial direction of the main transmission shaft 220 , and the second housing 330 and the third housing 430 may form the predetermined angle therebetween.

[0085] In some exemplary embodiments, the predetermined angle between the axes of the first grinding wheel 310 and the second grinding wheel 410 is adjustable. Figure 2 As shown, the second housing 330 and the third housing 430 can be configured to rotate about the axis of the main transmission shaft 220, so that the predetermined angle between the axes of the first grinding wheel 310 and the second grinding wheel 410 can be adjusted. This improves the applicability of the support table processing device and allows it to process V-shaped support tables 1 with different angles.

[0086] There are a few points to note:

[0087] (1) The drawings of the embodiments of the present disclosure only relate to the structures related to the embodiments of the present disclosure. Other structures may refer to conventional designs.

[0088] (2) For the sake of clarity, the thickness of layers or regions in the drawings used to describe the embodiments of the present disclosure are exaggerated or reduced, i.e., these drawings are not drawn to scale. It is understood that when an element such as a layer, film, region, or substrate is referred to as being "on" or "under" another element, the element may be "directly" "on" or "under" the other element or intervening elements may be present.

[0089] (3) In the absence of conflict, the embodiments of the present disclosure and the features therein may be combined with each other to form new embodiments.

[0090] The above are only specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. The protection scope of the present disclosure should be based on the protection scope of the claims.

Claims

1. A supporting table processing device, characterized in that: include: device body; and A driving unit, a first grinding unit, and a second grinding unit are provided on the device body, wherein the first grinding unit includes a first grinding wheel and a first grinding shaft coaxially arranged with the first grinding wheel, and the second grinding unit includes a second grinding wheel and a second grinding shaft coaxially arranged with the second grinding wheel, the first grinding shaft can drive the first grinding wheel to rotate when driven by the driving unit, and the second grinding shaft can drive the second grinding wheel to rotate when driven by the driving unit; The axes of the first grinding shaft and the second grinding shaft are arranged at a predetermined angle.

2. The supporting table processing device according to claim 1, characterized in that: The supporting table processing device also includes a lifting unit, which can drive the device body to rise and fall along a first direction, wherein the first direction forms a first angle with the axis of the first grinding shaft, and the first direction forms a second angle with the axis of the second grinding shaft, and the predetermined angle is equal to the sum of the first angle and the second angle.

3. The supporting table processing device according to claim 2, characterized in that: The lifting unit includes a clamping assembly that can be lifted and lowered along the first direction, and the device body is connected to a clamping portion that can be clamped by the clamping assembly.

4. The supporting table processing device according to claim 1, characterized in that: The driving unit includes: Drive motor; A main transmission shaft, wherein the output shaft of the drive motor is arranged vertically therebetween; a first transmission assembly, transmission-connected between the drive motor and the main transmission shaft; a second transmission assembly, drivingly connected between the first grinding shaft and the axial first end of the main transmission shaft, and arranged perpendicularly between the first grinding shaft and the main transmission shaft; a third transmission assembly, drivingly connected between the second grinding shaft and the second axial end of the main transmission shaft, and arranged perpendicularly between the second grinding shaft and the main transmission shaft; The output shaft of the driving motor is configured to form a third angle with the axis of the first grinding shaft and a fourth angle with the axis of the second grinding shaft.

5. The supporting table processing device according to claim 4, characterized in that: The first transmission assembly includes: a first frustum gear connected to the output shaft of the drive motor; and A second frustum gear is connected to the main transmission shaft, and the tooth surfaces of the first frustum gear and the second frustum gear are both conical and mesh with each other.

6. The supporting table processing device according to claim 4, characterized in that: The second transmission assembly includes: a third frustum gear connected to the first axial end of the main transmission shaft; and The fourth frustum gear is connected to the first grinding shaft, and the tooth surfaces of the third frustum gear and the fourth frustum gear are both conical and mesh with each other.

7. The supporting table processing device according to claim 4, characterized in that: The third transmission assembly includes: a fifth frustum gear connected to the second axial end of the main transmission shaft; and The sixth frustum gear is connected to the second grinding shaft, and the tooth surfaces of the fifth frustum gear and the sixth frustum gear are both conical and mesh with each other.

8. The supporting table processing device according to claim 4, characterized in that: The device body includes a first housing, and the first housing includes a first side and a second side opposite to each other in the axial direction of the main transmission shaft; wherein, The driving motor is located inside the first housing or outside the first housing; The first transmission assembly is arranged in the first housing; A portion of the main transmission shaft between the first axial end and the second axial end is arranged in the first housing, and the first axial end extends from a first side of the first housing, and the second axial end extends from the second side of the first housing.

9. The supporting table processing device according to claim 8, characterized in that: The first grinding unit further includes a second box body installed outside the first side of the first box body, and the second grinding unit further includes a third box body installed outside the second side of the first box body; wherein, The second transmission assembly is located in the second housing, and the axial first end of the main transmission shaft extends into the second housing to be connected to the second transmission assembly; The third transmission assembly is located in the third housing, and the second axial end of the main transmission shaft extends into the third housing to be connected with the third transmission assembly.

10. The supporting table processing device according to claim 1, characterized in that: The predetermined angle between the axes of the first grinding wheel and the second grinding wheel is adjustable.

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