Nozzle assembly and scribing machine

Abstract

The utility model discloses a nozzle assembly which comprises a main spraying block and a flow stabilizer, the main spraying block comprises a vertical cavity and a horizontal cavity, the top of the vertical cavity is provided with a water inlet, the first end of the horizontal cavity is communicated with the bottom of the vertical cavity, the second end of the horizontal cavity is provided with a water outlet, and the flow stabilizer is arranged in the horizontal cavity. The flow divider is used for dividing water in the horizontal cavity. During use, water flow enters the vertical cavity of the main spraying block from the water inlet, vortexes are generated when the water flow passes through the joint of the vertical cavity and the horizontal cavity, then the water flow enters the horizontal cavity and enters the flow stabilizer, the water flow is divided into a plurality of trickles, the water flow is buffered at the flow stabilizer, the vortexes are eliminated, and transverse pulsation of the water flow is weakened; and finally, the stabilized water flow forms laminar flow and is sprayed out through a water outlet. In the process, the flow stabilizer shunts water flow and provides a buffer space, so that the purposes of eliminating vortexes and improving the water outlet state of the water spraying device are achieved. The utility model also discloses a scribing machine.

Description

Technical Field

[0001] The utility model relates to the technical field of wafer processing equipment, in particular to a nozzle assembly and a dicing machine. Background Art

[0002] When a dicing machine cuts a product, the high-speed rotation of the blade generates a large amount of heat while grinding the workpiece. This high temperature can adversely affect the wafer, thereby compromising the cutting quality. Therefore, in the prior art, a water spray hood is typically installed near the blade to cool the blade. However, in practice, cooling the blade and flushing particles generated by cutting from the blade surface require a certain water flow rate. When the water flow rate for flushing the blade is low, the cooling efficiency decreases, making it difficult to quickly cool the blade and effectively clean particles attached to the blade surface. Furthermore, the water flow used to cool and clean the blade surface requires a stable, relatively strong water pressure to prevent coolant flow interruption, backflow, or unstable water pressure. Furthermore, the dicing machine needs to cool and clean the blade edge and blade side separately to improve blade cooling efficiency and ensure that the blade surface is free of particles. In summary, the water output of the water spray device significantly affects the cooling effect of the blade and the control of the dispersion of cutting waste.

[0003] Although the water outlet of the existing nozzle device can ensure that the water column does not disperse at a certain distance, vortexes and mixing will occur inside the nozzle, causing the water column at the outlet to be disordered (turbulent). When it hits the blade, the direction of the water flow is random, which can easily cause uneven force on the blade, which is not conducive to blade cooling and waste removal.

[0004] Therefore, how to improve the water discharge state of the water spraying device is a technical problem that those skilled in the art currently need to solve. Utility Model Content

[0005] In view of this, the first object of the present invention is to provide a nozzle assembly to improve the water discharge state of the water spray device;

[0006] The second purpose of the present invention is to provide a dicing machine.

[0007] In order to achieve the above first purpose, the present invention provides the following technical solutions:

[0008] A nozzle assembly includes a main spray block and a flow stabilizer, wherein the main spray block includes a vertical cavity and a horizontal cavity, wherein a water inlet is arranged at the top of the vertical cavity, a first end of the horizontal cavity is connected to the bottom of the vertical cavity, and a water outlet is arranged at the second end of the horizontal cavity;

[0009] The flow stabilizer is arranged inside the horizontal cavity and is arranged on the water flow path to divide the water in the horizontal cavity.

[0010] Optionally, the nozzle assembly further comprises a blocking piece, the first end of the horizontal cavity is a through hole, the through hole is used for mounting the flow stabilizer, and the blocking piece is used for blocking the through hole.

[0011] Optionally, the nozzle assembly comprises a mounting section, a dividing section and a water outlet section, the flow stabilizer is arranged in the dividing section, the mounting section is arranged close to the vertical cavity, and the water outlet section is arranged close to the water outlet.

[0012] A first chamfer is arranged between the mounting section and the dividing section, and the diameter of the mounting section is greater than that of the dividing section.

[0013] Optionally, the nozzle assembly comprises a mounting section, a dividing section and a water outlet section, the flow stabilizer is arranged in the dividing section, the mounting section is arranged close to the vertical cavity, and the water outlet section is arranged close to the water outlet.

[0014] Optionally, the nozzle assembly further comprises a fixing piece and a fixing hole, the fixing hole is arranged in the main nozzle block and is communicated with the dividing section in the direction perpendicular to the axis of the dividing section, and when the fixing piece is matched with the fixing hole, the fixing piece abuts against the flow stabilizer.

[0015] Optionally, the nozzle assembly comprises a mounting section, a dividing section and a water outlet section, the flow stabilizer is arranged in the dividing section, the mounting section is arranged close to the vertical cavity, and the water outlet section is arranged close to the water outlet.

[0016] Optionally, the nozzle assembly comprises a mounting section, a dividing section and a water outlet section, the flow stabilizer is arranged in the dividing section, the mounting section is arranged close to the vertical cavity, and the water outlet section is arranged close to the water outlet.

[0017] Optionally, the nozzle assembly comprises a mounting section, a dividing section and a water outlet section, the flow stabilizer is arranged in the dividing section, the mounting section is arranged close to the vertical cavity, and the water outlet section is arranged close to the water outlet.

[0018] Optionally, the nozzle assembly comprises a mounting section, a dividing section and a water outlet section, the flow stabilizer is arranged in the dividing section, the mounting section is arranged close to the vertical cavity, and the water outlet section is arranged close to the water outlet.

[0019] The nozzle assembly provided by the present invention, when in use, water flows from the water inlet into the vertical cavity of the main spray block, generates a vortex when passing through the connection between the vertical cavity and the horizontal cavity, then enters the horizontal cavity and enters the flow stabilizer. Under the diversion effect of the flow stabilizer, the water flow is divided into multiple streams. The water flow is buffered at the flow stabilizer, thereby eliminating vortices and reducing the lateral pulsation of the water flow. Finally, the stabilized water flow forms a laminar flow and is sprayed out through the water outlet. In the above process, the flow stabilizer diverts the water flow and provides a buffer space, thereby achieving the purpose of eliminating vortices and improving the water output state of the water spray device.

[0020] The dicing machine provided by the present invention has all the technical effects of the above-mentioned nozzle assembly due to its inclusion, and will not be described in detail herein. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the following briefly introduces the drawings required for use in the embodiments or the description of the prior art. Obviously, the drawings described below are only some embodiments of the present invention. For ordinary technicians in this field, other drawings can be obtained based on these drawings without paying any creative work.

[0022] Figure 1 This is an overall structural diagram of the nozzle assembly disclosed in an embodiment of the present utility model;

[0023] Figure 2 This is a front view of the nozzle assembly disclosed in an embodiment of the present utility model;

[0024] Figure 3 This is a schematic structural diagram of a flow stabilizer disclosed in an embodiment of the present utility model;

[0025] in:

[0026] Main spray block 100, flow stabilizer 200, through hole 201, vertical cavity 300, horizontal cavity 400, water outlet 401, installation section 402, diversion section 403, water outlet section 404, first chamfer 405, second chamfer 406, installation step 407, water inlet pipe joint 500, fixing part 600, and blocking part 700. DETAILED DESCRIPTION

[0027] The following will be combined with the accompanying drawings of the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making any novel efforts shall fall within the scope of protection of the present invention.

[0028] In the description of this utility model, it should be understood that the terms "upper," "lower," "top," and "bottom" and the like, indicating positions or positional relationships, are based on the positions or positional relationships shown in the accompanying drawings and are intended solely to facilitate the description of this utility model and simplify the description. They are not intended to indicate or imply that the positions or components referred to must have a specific orientation, be constructed, or operate in a specific orientation. Therefore, they should not be construed as limitations of this utility model. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance.

[0029] like Figure 1-Figure 2 As shown, the nozzle assembly disclosed in the present invention includes a main spray block 100 and a flow stabilizer 200. The main spray block 100 includes a vertical cavity 300 and a horizontal cavity 400. A water inlet is arranged at the top of the vertical cavity 300. The first end of the horizontal cavity 400 is connected to the bottom of the vertical cavity 300. A water outlet 401 is arranged at the second end of the horizontal cavity 400. The flow stabilizer 200 is arranged inside the horizontal cavity 400 and is set on the water flow path to divert the water inside the horizontal cavity 400. Specifically, the water outlet 401 of the horizontal cavity 400 is the water spray port of the main spray block 100. The nozzle assembly also includes a water inlet pipe connector 500, which is threadedly connected to the water inlet. When the nozzle assembly provided by the present invention is used, water flows from the water inlet into the vertical cavity 300 of the main spray block 100, generates a vortex when passing through the connection between the vertical cavity 300 and the horizontal cavity 400, then enters the horizontal cavity 400 and the flow stabilizer 200. Under the diversion effect of the flow stabilizer 200, the water flow is divided into multiple streams. The water flow is buffered at the flow stabilizer 200, thereby eliminating vortices and reducing the lateral pulsation of the water flow. Finally, the stabilized water flow forms a laminar flow and is sprayed out through the water outlet 401. In the above process, the flow stabilizer 200 diverts the water flow and provides a buffer space, thereby achieving the purpose of eliminating vortices and improving the water output state of the water spray device.

[0030] In order to optimize the above technical solution, the nozzle assembly also includes a blocking piece 700. The first end of the horizontal cavity 400 is a through hole, and the through hole is used to install the flow stabilizer 200. The blocking piece 700 is used to block the through hole. Specifically, the utility model preferably adopts a cylindrical design for the vertical cavity 300 and the horizontal cavity 400, and the shape of the flow stabilizer 200 is also a cylindrical design, so as to facilitate pushing the flow stabilizer 200 into the horizontal cavity 400. During use, the operator uses an installation tool to push the flow stabilizer 200 into the horizontal cavity 400 through the through hole. After the flow stabilizer 200 reaches the preset position, the blocking piece 700 is used to block the through hole. At the same time, the volume of the blocking piece 700 needs to be controlled so that the vertical cavity 300 and the horizontal cavity 400 remain connected. Such an arrangement can realize the convenient and rapid installation, disassembly and maintenance of the flow stabilizer 200, thereby improving the installation efficiency and maintenance efficiency of the nozzle assembly.

[0031] In order to optimize the above technical solution, the horizontal cavity 400 includes an installation section 402, a diversion section 403 and a water outlet section 404. The flow stabilizer 200 is arranged in the diversion section 403, the installation section 402 is arranged close to the vertical cavity 300, the water outlet section 404 is arranged close to the water outlet 401, and a first chamfer 405 is arranged between the installation section 402 and the diversion section 403. The diameter of the installation section 402 is larger than the diameter of the diversion section 403. Specifically, the first chamfer 405 makes the diameter of the mounting section 402 slightly larger than the diameter of the diverter section 403. Because the flow stabilizer 200 needs to pass through the mounting section 402 and be arranged in the diverter section 403, when the operator pushes in the flow stabilizer 200, the larger diameter of the mounting section 402 will make it easier to install the flow stabilizer 200. After the flow stabilizer 200 passes through the mounting section 402, the arrangement of the first chamfer 405 will cause the diverter section 403 to clamp the flow stabilizer 200, thereby achieving preliminary fixation of the flow stabilizer 200.

[0032] In order to optimize the above technical solution, a second chamfer 406 is arranged between the diverter section 403 and the water outlet section 404, and the diameter of the diverter section 403 is larger than the diameter of the water outlet section 404. Specifically, the second chamfer 406 makes the diameter of the diverter section 403 slightly larger than the diameter of the water outlet section 404. During use, when the water flow is mixed at the connection between the vertical cavity 300 and the horizontal cavity 400, it will flow rapidly toward the flow stabilizer 200 under the action of gravity and pressure. By arranging the second chamfer 406, the flow stabilizer 200 can be supported and prevented from being rushed toward the water outlet section 404, so that the water flow can be stably buffered at the flow stabilizer 200, thereby achieving the purpose of eliminating vortices and improving the water outlet state of the water spraying device while further limiting the flow stabilizer 200.

[0033] In order to optimize the above technical solution, the nozzle assembly also includes a fixing member 600 and a fixing hole. The fixing hole is provided in the main spray block 100 and is connected to the diversion section 403 perpendicular to the axial direction of the diversion section 403. When the fixing member 600 is adapted to the fixing hole, the fixing member 600 abuts against the flow stabilizer 200. Specifically, the fixing hole is provided in the main spray block 100 and is connected to the side wall of the diversion section 403. During use, when the flow stabilizer 200 is pushed into the diversion section 403 and initially fixed, the operator passes the fixing member 600 through the fixing hole until it abuts against the side wall of the flow stabilizer 200, thereby radially limiting the flow stabilizer 200 and further fixing the flow stabilizer 200, thereby improving the structural stability of the nozzle assembly during use and further improving the water output state of the water spraying device.

[0034] In order to optimize the above technical scheme, the fixing hole is a threaded hole; the fixing member 600 is a top screw; the through hole is a threaded hole; and the plugging member 700 is a top screw. In use, the operator first arranges the flow stabilizer 200 on the flow dividing section 403, then uses the top screw to screw into the through hole, and after tightening, the sealing of the through hole is realized to prevent water leakage from the through hole, and then the top screw is screwed into the fixing hole. With the screwing of the top screw, the flow stabilizer 200 is tightly attached to the side wall of the flow dividing section 403, thereby realizing the fixation of the flow stabilizer 200. Such an arrangement can facilitate the operator to install and dismount the flow stabilizer 200, facilitate the maintenance and replacement of the flow stabilizer 200, and thereby improve the service life of the nozzle assembly.

[0035] Further, the outer surface of the flow stabilizer 200 can be arranged with a clamping platform, which abuts against the end of the fixing member 600 to limit the fixing member 600.

[0036] In order to optimize the above technical scheme, the flow dividing section 403 is provided with an installation step 407 for clamping the flow stabilizer 200. Specifically, after arranging the installation step 407, the diameter of one side of the flow dividing section 403 close to the water outlet section 404 is smaller than the diameter of the other side close to the installation section 402. In use, the operator pushes the flow stabilizer 200 into the flow dividing section 403 through the installation section 402, and the flow stabilizer 200 first passes through the side with larger diameter of the flow dividing section 403, and then the front end of the flow stabilizer 200 is clamped at the installation step 407 and is in close contact with the installation step 407. Such an arrangement can avoid the direct contact between the flow stabilizer 200 and the second chamfer 406, thereby increasing the base area of the flow stabilizer 200, reducing the wear of the flow stabilizer 200, and improving the service life of the flow stabilizer 200.

[0037] As shown in Figure 3 In order to optimize the above technical scheme, the flow stabilizer 200 is cylindrical, and its axis direction is uniformly arranged with a plurality of through holes 201. Specifically, the flow stabilizer 200 is honeycomb-shaped. In some embodiments, the diameters of the plurality of through holes 201 are the same, and the shapes of the plurality of through holes 201 are cylindrical, so as to uniformly disperse the water flow. In other embodiments, the diameters of the plurality of through holes 201 are different, and the shapes of the plurality of through holes 201 are circular truncated cones, and the side close to the installation section 402 is the end with larger diameter of the through hole 201, and the side away from the installation section 402 is the end with smaller diameter of the through hole 201, so as to accelerate the dispersion of the water flow and make the water flow out in smaller flow. It should be noted that the shape, position and number of the through holes 201 are not limited, as long as the water flow can be divided. In use, the diameter of the flow stabilizer 200 is the same as the diameter of the larger side of the flow dividing section 403, so as to be tightly installed on the flow dividing section 403, and avoid the dispersion of the water flow outside the flow stabilizer 200, thereby further improving the water outlet state of the water spraying device.

[0038] In order to optimize the above technical solution, the number of flow stabilizers 200 is two or more, and a buffer chamber is arranged between two adjacent flow stabilizers 200. Specifically, when the number of flow stabilizers 200 is two or more, the shape, opening position and number of the through holes 201 of the flow stabilizers 200 can be flexibly changed according to the needs of use. The buffer chamber between the flow stabilizers 200 is used to buffer the water flow out of one flow stabilizer 200. Before this water flow enters another flow stabilizer 200 again, the flow rates of the several parts of this water flow are almost equal. After the diversion by another flow stabilizer 200, the water finally sprayed out of the water outlet is laminar flow. Such an arrangement can improve the flexibility of the nozzle assembly and enable it to be applied to a variety of working conditions.

[0039] The present invention also discloses a dicing machine, comprising the nozzle assembly as described above. Since the nozzle assembly has the above effects, the dicing machine comprising the nozzle assembly has corresponding effects, which will not be described in detail here.

[0040] The advantages of the utility model are:

[0041] (1) It can eliminate vortexes and improve the water output of the water spray device;

[0042] (2) High installation and maintenance efficiency, and stable structure;

[0043] (3) High flexibility in use and long service life.

[0044] It should be noted that the nozzle assembly and dicing machine provided by the present invention can be used in the field of wafer processing equipment technology or other fields. Other fields are any fields other than the field of wafer processing equipment technology. The above is only an example and does not limit the application fields of the nozzle assembly and dicing machine provided by the present invention.

[0045] The various embodiments in this specification are described in a progressive manner, and each embodiment focuses on the differences from other embodiments. The same or similar parts between the various embodiments can be referenced to each other.

[0046] The above description of the disclosed embodiments will enable one skilled in the art to implement or use the present invention. Various modifications to these embodiments will be readily apparent to one skilled in the art, and the general principles defined herein may be implemented in other embodiments without departing from the spirit or scope of the present invention. Therefore, the present invention is not limited to the embodiments shown herein but is intended to conform to the widest scope consistent with the principles and novel features disclosed herein.

[0047] Throughout this specification, references to terms such as "one embodiment," "example," or "specific example" indicate that a specific feature, structure, material, or characteristic described in conjunction with that embodiment or example is included in at least one embodiment or example of the present invention. In this specification, schematic representations of these terms do not necessarily refer to the same embodiment or example. Furthermore, the specific features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.

[0048] The preferred embodiments of the present invention disclosed above are intended only to help illustrate the present invention. These preferred embodiments do not exhaustively describe all details, nor do they limit the present invention to specific embodiments. Obviously, numerous modifications and variations are possible based on the contents of this specification. These embodiments are selected and described in detail in this specification to better explain the principles and practical applications of the present invention, thereby enabling those skilled in the art to better understand and utilize the present invention. The present invention is limited only by the claims and their full scope and equivalents.

Claims

1. A nozzle assembly, characterized in that: The main spray block includes a vertical cavity and a horizontal cavity. The top of the vertical cavity is provided with a water inlet. The first end of the horizontal cavity is connected to the bottom of the vertical cavity. The second end of the horizontal cavity is provided with a water outlet. The flow stabilizer is arranged inside the horizontal cavity and is provided on the flow path of water, and is used for diverting the water inside the horizontal cavity.

2. The nozzle assembly according to claim 1, wherein It also includes a blocking piece. The first end of the horizontal cavity is a through hole. The through hole is used to install the flow stabilizer. The blocking piece is used to block the through hole.

3. The nozzle assembly according to claim 2, wherein The horizontal cavity includes a mounting section, a diversion section, and a water outlet section. The flow stabilizer is arranged in the diversion section. The mounting section is arranged close to the vertical cavity. The water outlet section is arranged close to the water outlet. A first chamfer is arranged between the mounting section and the diverter section, and a diameter of the mounting section is larger than a diameter of the diverter section.

4. The nozzle assembly according to claim 3, wherein A second chamfer is arranged between the diverter section and the water outlet section, and the diameter of the diverter section is greater than the diameter of the water outlet section.

5. The nozzle assembly according to claim 3, wherein: It also includes a fixing member and a fixing hole. The fixing hole is opened in the main spray block and is connected to the diversion section perpendicular to the axial direction of the diversion section. When the fixing member is adapted to the fixing hole, the fixing member abuts against the flow stabilizer.

6. The nozzle assembly according to claim 5, wherein The fixing hole is a threaded hole; the fixing piece is a top screw; the through hole is a threaded hole; and the blocking piece is a top screw.

7. The nozzle assembly according to claim 3, wherein: The diversion section is provided with an installation step, and the installation step is used for clamping the flow stabilizer.

8. The nozzle assembly according to any one of claims 1 to 7, wherein: The flow stabilizer is cylindrical, and has a plurality of through holes evenly arranged in the axial direction thereof.

9. The nozzle assembly according to claim 8, wherein The number of the flow stabilizers is two or more, and a buffer chamber is arranged between two adjacent flow stabilizers.

10. A dicing machine, characterized in that: The nozzle assembly comprises the nozzle assembly according to any one of claims 1 to 9.

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