Liquid storage barrel conveying and locking device

Abstract

The utility model relates to a liquid storage barrel conveying and locking device which comprises a machine body. The lifting bearing mechanism is arranged in the machine body and is suitable for being in butt joint with an external DRUM barrel transport vehicle so as to bear the DRUM barrel; the locking mechanism is connected with the machine body, the locking mechanism comprises a locking assembly, and the locking assembly can move in the vertical direction relative to the lifting bearing mechanism; wherein one side of the lifting bearing mechanism abuts against the side wall of the side away from the machine body gate, the locking assembly comprises a locking limiting plate, a fixing space is formed between the locking limiting plate and the side wall, the DRUM barrel is suitable for being fixedly placed in the fixing space, and the side, close to the fixing space, of the locking limiting plate is concaved inwards to form an adaptive groove; the shape of the adaptive groove is consistent with the shape of the outer wall of the DRUM barrel, so that the DRUM barrel can be clamped and fixed by the locking limiting plate and the side wall of the machine body after being placed in the fixed space, the locking firmness is good, automatic locking can be achieved in a lifting mode of the locking assembly, and the automatic locking device is more convenient and stable.

Description

Technical Field

[0001] The present application relates to the field of semiconductor technology, and in particular to a liquid storage barrel conveying and locking device. Background Art

[0002] With the development of technological innovation, the application areas of electronic chemicals continue to expand. With the rapid development of the domestic semiconductor electronics industry chain, the application of electronic chemicals has touched various industries. Large-scale integrated circuit (IC) manufacturing (processes such as RCA cleaning and wet etching) requires a large number of electronic-grade chemical liquids. Currently, electronic-grade chemical liquids include three major categories: 1. Acidic chemical liquids (sulfuric acid, nitric acid, etc.); 2. Alkaline chemical liquids (sodium hydroxide, potassium hydroxide, ammonia, etc.); 3. Organic solvent chemical liquids (acetone, anhydrous ethanol, etc.). Most chemical liquids are corrosive, acidic, and highly oxidizing.

[0003] The semiconductor industry has a high demand for high-purity chemicals, and solutions are an essential part of the semiconductor manufacturing process. The production of high-quality semiconductor devices requires high-purity chemicals as raw materials, making the preparation of high-purity semiconductor chemical solutions a crucial technology. The key to preparing high-purity chemical solutions is the high purity of the raw materials and the avoidance of external impurities. The preparation process must be carried out in a high-purity environment, such as a clean room. Preparing high-purity chemical solutions is an essential step in the semiconductor manufacturing process, significantly impacting the performance and quality of semiconductor devices.

[0004] During the preparation of high-purity chemicals, drums filled with high-purity chemicals are placed in the preparation equipment. In order to fix the drums of high-purity chemicals, the current method is to use chains to fix the drums of high-purity chemicals in the preparation equipment. However, using this method, during the preparation process, the pump body will cause the conveying pipeline to vibrate, causing the chemical container to vibrate. The chain cannot completely tighten the drum, and there is a risk of tipping and leakage.

[0005] Therefore, it is necessary to improve the prior art to overcome the above defects. Utility Model Content

[0006] Based on this, it is necessary to provide a conveying locking device that can automatically and firmly lock the DRUM barrel.

[0007] To solve the above technical problems, this application provides the following technical solutions:

[0008] A liquid storage barrel conveying locking device, comprising:

[0009] body;

[0010] A lifting receiving mechanism is arranged in the machine body and is adapted to be connected with an external DRUM barrel transport vehicle to receive the DRUM barrel; and

[0011] A locking mechanism is connected with the machine body, and the locking mechanism comprises a locking assembly which is movable in a vertical direction relative to the lifting receiving mechanism;

[0012] The one side of the lifting receiving mechanism is abutted against a side wall away from the side of the machine body door, the locking assembly comprises a locking limiting plate, a fixed space is formed between the locking limiting plate and the side wall, the DRUM barrel is adapted to be fixedly placed in the fixed space, the side of the locking limiting plate close to the fixed space is recessed inward to form an adaptive groove, and the shape of the adaptive groove is consistent with the shape of the outer wall of the DRUM barrel.

[0013] Further, the locking mechanism further comprises a first driving member connecting the locking limiting plate and the machine body, the locking limiting plate is connected with a driving end of the first driving member, and the driving end is telescopic to drive the locking limiting plate to move in a vertical direction relative to the lifting receiving mechanism;

[0014] The maximum distance between the locking limiting plate and the lifting receiving mechanism is greater than the height of the DRUM barrel.

[0015] Further, the locking limiting plate comprises a locking portion connected with the DRUM barrel and a guide portion connected with the locking portion, the guide portion comprises a connecting plate connected with the first driving member and a guide rail connecting the connecting plate and the locking portion.

[0016] Further, the locking mechanism further comprises a guide member connected with the machine body, the guide member is formed with a guide hole, the guide rail passes through the guide hole to be guided by the guide hole, and the guide direction is a vertical direction.

[0017] Further, the adaptive groove is provided with at least two adaptive grooves, and the distance between the middle portions of the at least two adaptive grooves is greater than the maximum diameter of the DRUM barrel.

[0018] Further, the lifting receiving mechanism comprises a second driving member connected with the machine body and a receiving assembly connected with the second driving member, and the receiving assembly is movable in a vertical direction relative to the machine body under the driving of the second driving member.

[0019] Further, the receiving assembly comprises a receiving tray connected with the driving end of the second driving member and a receiving member placed on the receiving tray, and the DRUM barrel is adapted to be placed on the receiving member.

[0020] Furthermore, the receiving member includes a receiving frame and a plurality of rollers evenly distributed on the receiving frame. The rollers can rotate relative to the receiving frame, and the rotation direction of the rollers is consistent with the feeding direction of the DRUM barrel.

[0021] Furthermore, the receiving frame includes a receiving portion suitable for placing the roller and a partition portion vertically connected to the receiving portion. When at least two DRUM barrels are placed on the receiving portion, the partition portion is located between the two DRUM barrels.

[0022] Furthermore, the first driving member and the second driving member are one of an air cylinder, an electric cylinder, an oil cylinder or a hydraulic cylinder.

[0023] Compared with the prior art, the liquid storage barrel conveying locking device of the present application is provided with a body, a lifting and receiving mechanism provided in the body, and a locking mechanism connected to the body. The lifting and receiving mechanism is suitable for docking with an external DRUM barrel transport vehicle to receive the DRUM barrel. The locking mechanism includes a locking assembly, and the locking assembly can move in the vertical direction relative to the lifting and receiving mechanism, wherein one side of the lifting and receiving mechanism is against the side wall away from the body door. The locking assembly includes a locking limit plate, and a fixed space is formed between the locking limit plate and the side wall. The DRUM barrel is suitable for being fixed in the fixed space. The side of the locking limit plate close to the fixed space is recessed inward to form an adaptation groove. The shape of the adaptation groove is consistent with the shape of the outer wall of the DRUM barrel, so that after the DRUM barrel is placed in the fixed space, it can be clamped and fixed by the locking limit plate and the side wall of the body. The locking firmness is good, and automatic locking can be achieved by lifting and lowering the locking assembly, which is more convenient and stable.

[0024] The above description is only an overview of the technical solution of the present invention. In order to more clearly understand the technical means of the present invention and to implement it according to the contents of the specification, the following is a detailed description of the preferred embodiments of the present invention in conjunction with the accompanying drawings. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] In order to more clearly illustrate the embodiments of the present application or the technical solutions in the conventional technology, the following briefly introduces the drawings required for use in the embodiments or the conventional technology descriptions. Obviously, the drawings described below are only some embodiments of the present application. For ordinary technicians in this field, other drawings can be obtained based on these drawings without creative work.

[0026] Figure 1 This is a schematic diagram of the structure of the liquid storage barrel delivery locking device provided in this application;

[0027] Figure 2 for Figure 1 Another state structural diagram of ;

[0028] Figure 3 for Figure 1 Schematic diagram of part of the structure;

[0029] Figure 4 for Figure 1 Another part of the structural diagram. DETAILED DESCRIPTION

[0030] To make the above-mentioned objects, features, and advantages of the present application more clearly understood, the specific embodiments of the present application are described in detail below with reference to the accompanying drawings. The following description sets forth many specific details to facilitate a full understanding of the present application. However, the present application can be implemented in many other ways than those described herein, and those skilled in the art can make similar improvements without violating the scope of the present application. Therefore, the present application is not limited to the specific embodiments disclosed below.

[0031] It should be noted that when a component is referred to as being "fixed to" or "disposed on" another component, it may be directly on the other component or there may be a central component. When a component is considered to be "connected to" another component, it may be directly connected to the other component or there may be a central component at the same time. The terms "vertical", "horizontal", "upper", "lower", "left", "right" and similar expressions used in the specification of this application are for illustrative purposes only and do not represent the only implementation method.

[0032] Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the number of the technical features being referred to. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one of such features. Throughout the description of this application, "plurality" means at least two, for example, two, three, etc., unless otherwise specifically defined.

[0033] In this application, unless otherwise expressly specified or limited, a first feature being “above” or “below” a second feature may mean that the first feature is directly in contact with the second feature, or that the first feature and the second feature are indirectly in contact through an intermediate medium. Furthermore, a first feature being “above,” “above,” or “above” a second feature may mean that the first feature is directly above or obliquely above the second feature, or simply means that the first feature is higher in level than the second feature. A first feature being “below,” “below,” or “below” a second feature may mean that the first feature is directly below or obliquely below the second feature, or simply means that the first feature is lower in level than the second feature.

[0034] Unless otherwise defined, all technical and scientific terms used in the specification of this application have the same meaning as commonly understood by those skilled in the art to which this application belongs. The terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application. The term "and / or" used in the specification of this application includes any and all combinations of one or more of the relevant listed items.

[0035] See also Figures 1 to 4 As shown, the present application provides a liquid storage barrel conveying and locking device, comprising a body 1, a lifting and receiving mechanism 2 disposed within the body 1, and a locking mechanism 3 connected to the body 1. The lifting and receiving mechanism 2 is adapted to dock with an external DRUM barrel transport vehicle to receive a DRUM barrel 4. The locking mechanism 3 includes a locking assembly 31 that is movable vertically relative to the lifting and receiving mechanism 2. In this embodiment, the body 1 is a mixing device capable of providing high cleanliness, and the aforementioned components are all housed within the mixing device.

[0036] One side of the lifting and supporting mechanism 2 rests against the side wall 11 away from the door of the body 1. The locking assembly 31 includes a locking limit plate 311. A fixed space 5 is formed between the locking limit plate 311 and the side wall 11. The DRUM barrel 4 is suitable for being fixed in the fixed space 5. The side of the locking limit plate 311 close to the fixed space 5 is recessed inward to form an adaptation groove 3111. The shape of the adaptation groove 3111 is consistent with the shape of the outer wall of the DRUM barrel 4. Therefore, after the DRUM barrel 4 is pushed and placed in the fixed space 5 by an external DRUM barrel transport vehicle, it can be clamped and fixed by the locking limit plate 311 and the side wall 11 of the body 1. The locking firmness is good, and automatic locking can be achieved by lifting and lowering the locking assembly 31, which is more convenient and stable.

[0037] Specifically, the above-mentioned locking mechanism 3 also includes a first driving member 32 connecting the locking limit plate 311 and the body 1. In this embodiment, the locking limit plate 311 is connected to the driving end of the first driving member 32. The driving end can be extended and retracted to drive the locking limit plate 311 to move in the vertical direction relative to the lifting supporting mechanism 2, and the maximum distance between the locking limit plate 311 and the lifting supporting mechanism 2 is greater than the height of the DRUM barrel 4. Therefore, when the DRUM barrel 4 is pushed and placed in the fixed space 5 by an external DRUM barrel transport vehicle, the locking limit plate 311 can be driven to a high place, thereby preventing the locking limit plate 311 from affecting the normal entry of the DRUM barrel 4.

[0038] The locking limiting plate 311 comprises a locking portion 3112 connected with the DRUM barrel 4 and a guide portion 3113 connected with the locking portion 3112, the guide portion 3113 comprises a connecting plate 3114 connected with the first driving member 32 and a guide rail 3115 connecting the connecting plate 3114 and the locking portion 3112. The locking mechanism 3 further comprises a guide member 33 connected with the machine body 1, the guide member 33 is formed with a guide hole 331, the guide rail 3115 passes through the guide hole 331 to be guided by the guide hole 331, in the embodiment, the guide direction is the vertical direction, so that the locking portion 3112 can move along the guide direction of the guide hole 331 when the first driving member 32 drives the locking portion 3112 through the guide rail 3115, and the stability and the direction accuracy in the moving process are ensured.

[0039] In the embodiment, the adapting groove 3111 is provided with at least two, the distance between the middle portions of the at least two adapting grooves 3111 is greater than the maximum diameter of the DRUM barrel 4, so that a plurality of DRUM barrels 4 can be fixed at the same time, and the applicable range is increased.

[0040] The lifting receiving mechanism 2 comprises a second driving member 21 connected with the machine body 1 and a receiving assembly 22 connected with the second driving member 21, the receiving assembly 22 can be lifted along the vertical direction relative to the machine body 1 under the driving of the second driving member 21, so that the lifting receiving mechanism 2 can be accurately docked with the external DRUM barrel transport vehicle of different heights. The receiving assembly 22 comprises a receiving tray 221 connected with the driving end of the second driving member 21 and a receiving member 222 placed on the receiving tray 221, and the DRUM barrel 4 is adapted to be placed on the receiving member 222.

[0041] As mentioned above, the receiving member 222 comprises a receiving frame 2221 and a plurality of rollers 2222 evenly arranged on the receiving frame 2221, the rollers 2222 can rotate relative to the receiving frame 2221, and the rotating direction of the rollers 2222 is consistent with the feeding direction of the DRUM barrel 4. Thus, the movement of the DRUM barrel 4 can be assisted during feeding, the required pushing force of the external DRUM barrel transport vehicle is reduced, and the smoothness of the movement of the DRUM barrel 4 is increased.

[0042] In order to ensure that the plurality of DRUM barrels 4 placed in the fixed space 5 do not interfere with each other, in the embodiment, the receiving frame 2221 comprises a receiving portion 2223 adapted to place the rollers 2222 and a separation portion 2224 connected perpendicularly with the receiving portion 2223, when at least two DRUM barrels 4 are placed on the receiving portion 2223, the separation portion 2224 is located between the two DRUM barrels 4, so that the two DRUM barrels 4 can be separated, the friction between them due to vibration is avoided, and the fixing effect is improved.

[0043] It is worth noting that the first driving member 32 and the second driving member 21 are one of a pneumatic cylinder, an electric cylinder, an oil cylinder or a hydraulic cylinder, which can be determined according to actual conditions as long as they can meet actual needs, and no specific limitation is made here.

[0044] The technical features of the above-mentioned embodiments can be combined arbitrarily. In order to make the description concise, not all possible combinations of the technical features in the above-mentioned embodiments are described. However, as long as there is no contradiction in the combination of these technical features, they should be considered to be within the scope of this specification.

[0045] The above-described embodiments merely represent several implementation methods of the present application. While the descriptions are relatively specific and detailed, they should not be construed as limiting the scope of the patent application. It should be noted that a person of ordinary skill in the art may make various modifications and improvements without departing from the spirit of the present application, all of which fall within the scope of protection of the present application. Therefore, the scope of patent protection for the present application shall be determined by the appended claims.

Claims

1. A liquid storage barrel conveying locking device, characterized in that: include: body; A lifting receiving mechanism is disposed in the machine body and is adapted to dock with an external DRUM barrel transport vehicle to receive the DRUM barrel; as well as A locking mechanism connected to the body, the locking mechanism including a locking assembly, the locking assembly being movable in a vertical direction relative to the lifting and receiving mechanism; Among them, one side of the lifting and supporting mechanism rests on the side wall away from the machine body door, and the locking assembly includes a locking limit plate, and a fixed space is formed between the locking limit plate and the side wall. The DRUM barrel is suitable for being fixed in the fixed space, and the locking limit plate is concave inward on the side close to the fixed space to form an adaptation groove, and the shape of the adaptation groove is consistent with the shape of the outer wall of the DRUM barrel.

2. The liquid storage barrel conveying locking device according to claim 1, characterized in that: The locking mechanism further includes a first driving member connecting the locking limit plate and the body, the locking limit plate being connected to a driving end of the first driving member, and the driving end being retractable to drive the locking limit plate to move in a vertical direction relative to the lifting support mechanism; The maximum distance between the locking limit plate and the lifting support mechanism is greater than the height of the DRUM barrel.

3. The liquid storage barrel conveying locking device according to claim 2, characterized in that: The locking limit plate includes a locking portion connected to the DRUM barrel and a guide portion connected to the locking portion. The guide portion includes a connecting plate connected to the first driving member and a guide rail connecting the connecting plate and the locking portion.

4. The liquid storage barrel conveying locking device according to claim 3, characterized in that: The locking mechanism further includes a guide member connected to the body, a guide hole is formed on the guide member, the guide rail passes through the guide hole to be guided by the guide hole, and the guide direction is a vertical direction.

5. The liquid storage barrel conveying locking device according to claim 4, characterized in that: There are at least two adapting grooves, and the distance between the middle parts of at least two of the adapting grooves is greater than the maximum diameter of the DRUM barrel.

6. The liquid storage barrel conveying locking device according to claim 5, characterized in that: The lifting support mechanism includes a second driving member connected to the machine body and a support assembly connected to the second driving member. The support assembly can be lifted and lowered relative to the machine body in a vertical direction under the drive of the second driving member.

7. The liquid storage barrel conveying locking device according to claim 6, characterized in that: The receiving assembly includes a receiving tray connected to the driving end of the second driving member and a receiving member placed on the receiving tray, and the DRUM barrel is suitable for being placed on the receiving member.

8. The liquid storage barrel conveying locking device according to claim 7, characterized in that: The receiving member includes a receiving frame and a plurality of rollers evenly arranged on the receiving frame. The rollers can rotate relative to the receiving frame, and the rotation direction of the rollers is consistent with the feeding direction of the DRUM barrel.

9. The liquid storage barrel conveying locking device according to claim 8, characterized in that: The receiving frame includes a receiving portion suitable for placing the roller and a partition portion vertically connected to the receiving portion. When at least two DRUM barrels are placed on the receiving portion, the partition portion is located between the two DRUM barrels.

10. The liquid storage barrel conveying locking device according to claim 9, characterized in that: The first driving member and the second driving member are one of an air cylinder, an electric cylinder, an oil cylinder or a hydraulic cylinder.

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