Magnetic control double-winding aluminum copper plating equipment

Abstract

The utility model discloses magnetic control double-winding aluminum copper plating equipment, which relates to the technical field of sputter coating, and comprises a fixed platform and a working cover, the surface of the fixed platform is fixedly connected with a control cabinet and a support plate, the surface of the control cabinet is rotatably connected with a guide roller and a main roller, the surface of the control cabinet is provided with two groups of power mechanisms, and the two groups of power mechanisms are connected with the support plate. The power mechanism comprises a power roller and a clamping head, an adjusting mechanism is arranged in the middle of the control cabinet, the adjusting mechanism comprises a deviation rectifying roller and a tension roller, the magnetic control double-winding aluminum copper plating equipment has the advantages that a film is electrified through the main roller, sputter coating work is better completed, the coating efficiency is improved, the power roller is fixed and positioned through the clamping head, and the magnetic control double-winding aluminum copper plating equipment is convenient to use. The power roller is controlled to rotate through the clamping head to complete unwinding and winding operation, a film is corrected through the deviation correcting roller, the deviation phenomenon in the transmission process is avoided, and the problem of film coating quality caused by stretching, extension, deformation and the like of the film is solved through the tension roller.

Description

Technical Field

[0001] The utility model relates to the technical field of sputtering coating, in particular to a magnetically controlled double-winding aluminum copper plating device. Background Art

[0002] Sputtering is the process of bombarding a target material with ions. The process of dislodging atoms from the target is called sputtering. The deposition of these atoms on the substrate to form a film is called sputtering. This process typically involves gas discharge to generate ionized gas. The resulting positive ions, under the influence of an electric field, bombard a cathode target at high speed, knocking atoms or molecules from the target away. These atoms or molecules then fly to the substrate, where they deposit as a thin film.

[0003] When coating thin film substrates, there is a certain deviation in the power system control transmission, which can easily cause the substrate to deviate or wrinkle, thereby increasing the production cost of sputtering coating and reducing the efficiency of sputtering coating. To this end, we provide magnetically controlled double-winding aluminum-copper plating equipment to solve the above problems. Summary of the Invention

[0004] The purpose of the utility model is to provide a magnetically controlled double-winding aluminum copper plating device to solve the problem in the prior art that the substrate is prone to deviation.

[0005] To achieve the above-mentioned purpose, the utility model provides the following technical solutions: a magnetically controlled double-winding aluminum copper plating equipment, comprising a fixed platform and a working cover, the surface of the fixed platform is fixedly connected to a control cabinet and a support plate, the surface of the control cabinet is rotatably connected to a guide roller and a main roller, the surface of the control cabinet is provided with two groups of power mechanisms, the power mechanisms include power rollers and chucks, and the chucks are rotatably connected to the control cabinet, an adjustment mechanism is provided in the middle of the control cabinet, the adjustment mechanism includes a correction roller and a tension roller, and the correction roller is movably connected to the support plate.

[0006] Preferably, the top of the control cabinet is fixedly connected to a support rod, and one end of the support rod is fixedly connected to the support plate, the bottom end of the working cover is slidably connected to the fixed platform, and the top end of the working cover is slidably connected to the support rod, and the support plate is supported and fixed by the support rod, and support capability is provided to the working cover.

[0007] Preferably, the ends of the guide roller and the main roller away from the control cabinet are rotatably connected to the support plate, the surface of the support plate is fixedly connected to a bearing seat, and one end of the power roller is rotatably connected to the bearing seat through a bearing. One end of the power roller is fixed through the bearing seat, which reduces the difficulty of disassembling and installing the power roller.

[0008] Preferably, the other end of the power roller is fixedly connected to a clamping block, and the clamping block is clamped with the clamping head. The inside of the control cabinet is fixedly connected to a motor that controls the rotation of the clamping head. The motor controls the rotation of the clamping head, and then the clamping block controls the rotation of the power roller.

[0009] Preferably, the surface of the control cabinet is provided with a first sliding groove, the inside of the first sliding groove is movably connected with a movable block, and the other end of the deviation rectifying roller is rotatably connected with the movable block.

[0010] Preferably, the inside of the control cabinet is hingedly connected with an electric push rod for controlling the movement of the movable block, both ends of the tension roller are rotatably connected with sliding blocks, the movement of the movable block is controlled by the electric push rod, the movable block drives one end of the deviation rectifying roller to move, and the deviation rectifying roller is adjusted to different angles.

[0011] Preferably, the surface of the control cabinet and the supporting plate are both provided with a second sliding groove, and the two sliding blocks slide in the two second sliding grooves, the inside of each second sliding groove is fixedly connected with a pneumatic push rod for buffering the sliding block, the pushing force borne by the sliding block is adjusted by controlling the internal air pressure of the pneumatic push rod, and then the tension of the film is controlled.

[0012] Compared with the prior art, the utility model has the advantages that:

[0013] 1、The both ends of the working cover are in close contact with the control cabinet and the supporting plate respectively, so that a sealed space is formed in the inside, a plurality of guide rollers can flatten and transfer the film, the main roller can electrify the film, the film can better complete sputtering and coating work, the sputtering and coating efficiency of the film is improved, the clamping head can fix and position the power roller, the power roller rotates through the clamping head control, coating unwinding and winding operation are completed, the deviation rectifying roller can correct the deviation of the film, avoids the occurrence of deviation phenomenon in the transmission process, the tension roller can generate a pushing force on the film, solves the problems of coating quality caused by film stretching, extension and deformation, and improves the success rate of coating.

[0014] 2、The supporting rod can support and fix the supporting plate and provide support for the working cover, so that the sliding of the working cover is more stable and smooth, the bearing seat can fix one end of the power roller, reduces the dismounting and mounting difficulty of the power roller, improves the stability of the power roller operation, the clamping block can clamp the power roller and the clamping head together, the clamping head rotates through the control of the motor, so that the clamping block controls the rotation of the power roller, the first sliding groove can support the movable block and avoid the upward and downward movement of the movable block, and the stability of the movement of the movable block is improved.

[0015] 3. The present application controls the movement of the movable block through an electric push rod, so that the movable block drives one end of the correcting roller to move, and adjusts the correcting roller to different angles, which is convenient for correcting the movement of the film, avoids the occurrence of deviation during the transmission process, and improves the stability of the surface film transmission. The sliding block is fixed through the second slide groove, and then the tension roller is fixed. By controlling the internal air pressure of the pneumatic push rod, the thrust borne by the sliding block is adjusted, and then the tension of the film is controlled, which solves the problem of coating quality caused by film stretching, extension, deformation, etc., and improves the success rate of coating. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic structural diagram of a magnetically controlled double-winding aluminum copper plating device according to the present invention;

[0017] Figure 2 This is a schematic diagram of the drive roller structure of a magnetically controlled double-winding aluminum-copper plating device of the utility model;

[0018] Figure 3 This is a schematic diagram of a group of transmission roller structures of a magnetically controlled double-winding aluminum copper plating device of the present invention;

[0019] Figure 4 This is a schematic diagram of the connection structure of the power roller and the deviation correction roller of a magnetically controlled double-winding aluminum copper plating device of the present invention;

[0020] Figure 5 This is a schematic diagram of the tension roller connection structure of a magnetically controlled double-winding aluminum copper plating device of the present invention.

[0021] Numbers in the figure: 1. Fixed platform; 2. Control cabinet; 3. Support plate; 4. Working cover; 5. Support rod; 6. Guide roller; 7. Main roller; 8. Power mechanism; 801. Power roller; 802. Bearing seat; 803. Clamping block; 804. Clamping head; 805. Motor; 9. Adjusting mechanism; 901. Correcting roller; 902. Tension roller; 903. First slide; 904. Movable block; 905. Electric push rod; 906. Second slide; 907. Sliding block; 908. Pneumatic push rod. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] like Figure 1 - Figure 5As shown, the utility model provides a technical solution for a magnetically controlled double-winding aluminum copper plating device, comprising a fixed platform 1 and a working cover 4, wherein the surface of the fixed platform 1 is fixedly connected to a control cabinet 2 and a support plate 3, and the surface of the control cabinet 2 is rotatably connected to a guide roller 6 and a main roller 7, wherein a plurality of guide rollers 6 are provided, and the ends of the guide rollers 6 and the main rollers 7 away from the control cabinet 2 are both rotatably connected to the support plate 3, and the two ends of the working cover 4 are in close contact with the control cabinet 2 and the support plate 3 respectively, so that a sealed space is formed inside the working cover 4, and the film can be flattened and transferred through the multiple guide rollers 6, and the film is energized through the main roller 7, so that the film can better complete the sputtering coating work and improve the sputtering coating efficiency of the film.

[0024] The top of the control cabinet 2 is fixedly connected to a support rod 5, and one end of the support rod 5 is fixedly connected to the support plate 3. The bottom end of the working cover 4 is slidably connected to the fixed platform 1, and the top of the working cover 4 is slidably connected to the support rod 5. The support plate 3 is supported and fixed by the support rod 5, and the working cover 4 is provided with support capabilities, making the sliding of the working cover 4 more stable and smooth.

[0025] Two sets of power mechanisms 8 are provided on the surface of the control cabinet 2. The power mechanism 8 includes a power roller 801 and a clamping head 804, and the clamping head 804 is rotatably connected to the control cabinet 2. The two power rollers 801 are respectively a winding roller and an unwinding roller. The power roller 801 is fixed and positioned by the clamping head 804. The power roller 801 is controlled to rotate by the clamping head 804 to complete the coating unwinding and winding operations.

[0026] The surface of the support plate 3 is fixedly connected to a bearing seat 802, and one end of the power roller 801 is rotatably connected to the bearing seat 802 through a bearing. One end of the power roller 801 is fixed through the bearing seat 802, which reduces the difficulty of disassembly and installation of the power roller 801 and improves the stability of the operation of the power roller 801.

[0027] The other end of the power roller 801 is fixedly connected to a clamping block 803, and the clamping block 803 is clamped with the clamping head 804. The inside of the control cabinet 2 is fixedly connected to a motor 805 for controlling the rotation of the clamping head 804. The power roller 801 and the clamping head 804 are clamped together through the clamping block 803, and the rotation of the clamping head 804 is controlled by the motor 805, and then the clamping block 803 controls the rotation of the power roller 801.

[0028] An adjustment mechanism 9 is provided in the middle of the control cabinet 2. The adjustment mechanism 9 includes a correction roller 901 and a tension roller 902, and the correction roller 901 is movably connected to the support plate 3. The correction roller 901 is used to correct the deviated film, so that the coating position is kept within a relatively fixed range, avoiding the occurrence of deviation during the transmission process. The tension roller 902 is used to generate a thrust on the film, solving the problem of coating quality caused by film stretching, extension, deformation, etc., and improving the success rate of coating.

[0029] A first slide groove 903 is provided on the surface of the control cabinet 2, and a movable block 904 is movably connected inside the first slide groove 903, and the other end of the correcting roller 901 is rotatably connected to the movable block 904. The control cabinet 2 is internally hinged with an electric push rod 905 for controlling the movement of the movable block 904. The movable block 904 is supported by the first slide groove 903 to prevent the movable block 904 from moving up and down, thereby improving the stability of the movement of the movable block 904. The movable block 904 is controlled to move by the electric push rod 905, so that the movable block 904 drives one end of the correcting roller 901 to move, and the correcting roller 901 is adjusted to different angles, which is convenient for correcting the movement of the film and improving the stability of the surface film transmission.

[0030] Both ends of the tension roller 902 are rotatably connected to sliding blocks 907, and the surfaces of the control cabinet 2 and the support plate 3 are provided with second slide grooves 906, and the two sliding blocks 907 slide inside the two second slide grooves 906. The inside of each second slide groove 906 is fixedly connected to a pneumatic push rod 908 with a buffer sliding block 907. The sliding block 907 is fixed through the second slide groove 906, and then the tension roller 902 is fixed. By controlling the internal air pressure of the pneumatic push rod 908, the thrust borne by the sliding block 907 is adjusted, thereby controlling the tension of the film and improving the stability of the film transmission.

[0031] There are two sets of guide rollers 6, main rollers 7, power mechanisms 8 and adjustment mechanisms 9, which can carry out two sets of coating operations at the same time.

[0032] The motor 805 and the electric push rod 905 are prior art, and this application will not go into details about their detailed parameters and models.

[0033] When the present invention is in use: first, the film substrate is fixed on the surface of the unwinding roller, and then the corresponding clamping block 803 is inserted into the inside of the clamping head 804, and then the two ends of the power roller 801 are fixed through the bearing seat 802, and the clamping head 804 is controlled to rotate by the motor 805, and then the clamping block 803 controls the rotation of the power roller 801, so that the unwinding roller releases the film, and the film can be flattened and transferred through multiple guide rollers 6, and the winding roller winds up the film, and the pneumatic push rod 908 is used to adjust the tension on the film to keep the film flat, and the film is energized through the main roller 7, and metal ions are sprayed through the sputtering coating device inside the device to coat the film. Through the above device, the problem of coating quality caused by film stretching, extension, deformation, etc. is solved, the coating process is accelerated, and the occurrence of deviation during transmission is avoided, ensuring the normal production of coated products.

[0034] It is apparent for a person skilled in the art that the present application is not restricted to the details of the above exemplary embodiments, but that it can be implemented in other concrete forms without departing from the spirit or the essential characteristics of the present application. Therefore, the embodiments should be considered as exemplary only, and not limiting, the scope of the present application being defined by the appended claims rather than the above description, and all changes coming within the meaning and range of equivalency of the claims are therefore intended to be embraced therein. Any reference signs in the claims should not be construed as limiting the claims concerned.

Claims

1. A magnetically controlled double-winding aluminum copper plating device, comprising a fixed platform (1) and a working cover (4), characterized in that: The surface of the fixed platform (1) is fixedly connected to a control cabinet (2) and a support plate (3); the surface of the control cabinet (2) is rotatably connected to a guide roller (6) and a main roller (7); the surface of the control cabinet (2) is provided with two sets of power mechanisms (8); the power mechanisms (8) include a power roller (801) and a clamping head (804); and the clamping head (804) is rotatably connected to the control cabinet (2); an adjustment mechanism (9) is provided in the middle of the control cabinet (2); the adjustment mechanism (9) includes a deviation correction roller (901) and a tension roller (902); and the deviation correction roller (901) is movably connected to the support plate (3).

2. The magnetically controlled double-winding aluminum copper plating equipment according to claim 1, characterized in that: The top end of the control cabinet (2) is fixedly connected to a support rod (5), and one end of the support rod (5) is fixedly connected to the support plate (3); the bottom end of the working cover (4) is slidably connected to the fixed platform (1), and the top end of the working cover (4) is slidably connected to the support rod (5).

3. The magnetically controlled double-winding aluminum copper plating equipment according to claim 1, characterized in that: The ends of the guide roller (6) and the main roller (7) away from the control cabinet (2) are both rotatably connected to the support plate (3), a bearing seat (802) is fixedly connected to the surface of the support plate (3), and one end of the power roller (801) is rotatably connected to the bearing seat (802) via a bearing.

4. The magnetically controlled double-winding aluminum copper plating equipment according to claim 1, characterized in that: The other end of the power roller (801) is fixedly connected to a clamping block (803), and the clamping block (803) is clamped to a clamping head (804). The interior of the control cabinet (2) is fixedly connected to a motor (805) for controlling the rotation of the clamping head (804).

5. The magnetically controlled double-winding aluminum copper plating equipment according to claim 1, characterized in that: A first chute (903) is provided on the surface of the control cabinet (2), a movable block (904) is movably connected inside the first chute (903), and the other end of the deviation-correcting roller (901) is rotatably connected to the movable block (904).

6. The magnetically controlled double-winding aluminum copper plating equipment according to claim 5, characterized in that: An electric push rod (905) for controlling the movement of the movable block (904) is hinged inside the control cabinet (2), and both ends of the tension roller (902) are rotatably connected to sliding blocks (907).

7. The magnetically controlled double-winding aluminum copper plating equipment according to claim 6, characterized in that: The surfaces of the control cabinet (2) and the support plate (3) are both provided with second slide grooves (906), and two sliding blocks (907) slide inside the two second slide grooves (906), and a pneumatic push rod (908) of the buffer sliding block (907) is fixedly connected inside each of the second slide grooves (906).

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