Basket mechanical arm hook and silicon wafer transfer system

Abstract

The utility model discloses a basket mechanical arm hook and a silicon wafer transfer system. The basket mechanical arm hook at least comprises but is not limited to a holding part, a connecting part and a hanging part, the connecting part is arranged between the holding part and the hanging part, and a matching part detachably connected with the mechanical arm is arranged on the connecting part; a guide inclined plane is arranged between the connecting part and the hanging part; the whole hanging part is of a slender circular truncated cone structure; according to the scheme, the whole hook structure in the south area can be conveniently and rapidly assembled to the mechanical arm through the holding part, the mechanical arm can be rapidly and stably connected with a flower basket in a hanging mode, the hook is stably connected with the mechanical part through the connecting part, meanwhile, the hanging part is arranged to be of a thin and long circular truncated cone structure, and the hanging part is convenient to use. The hanging part can be better attached to the hook part of the flower basket, the flower basket cannot be scratched when the flower basket is taken by reducing the diameter of the hanging part, meanwhile, the flower basket is prevented from falling off by increasing the contact distance between the hook and the flower basket, and stable transportation of the flower basket is achieved.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer transportation, in particular to a basket-carrying mechanical arm hook and a silicon wafer transportation system. Background Art

[0002] During the preparation process of silicon wafers, the silicon wafers usually need to be placed on a flower basket for transportation. The flower basket is a structure for placing silicon wafers. The robotic arm engages with the hook on the flower basket through a hook to realize the transportation of the silicon wafers.

[0003] In the prior art, the robotic arm moves at high speeds, and due to the imperfect fit between the hook and the basket hook, the basket may fall off during movement, resulting in a large amount of debris. Utility Model Content

[0004] The purpose of this utility model is to provide a basket-lifting robot arm hook and silicon wafer transfer system to address the above-mentioned shortcomings, thereby solving the problem in the prior art that the hook and the flower basket hook are not perfectly fitted, which may cause the basket to fall during movement and cause a large amount of fragments.

[0005] The utility model is realized by the following scheme:

[0006] A basket carrying robot arm hook comprises at least a gripping portion, a connecting portion and a hanging portion; the connecting portion is arranged between the gripping portion and the hanging portion, and the connecting portion is provided with a mating portion that is detachably connected to the robot arm; a guiding inclined surface is provided between the connecting portion and the hanging portion; the hanging portion is an elongated frustum structure as a whole.

[0007] Based on the above-mentioned structure of the basket carrying robot arm hook, the hanging part includes a first end face and a second end face, and the size of the hanging part is gradually reduced from the first end face to the second end face. The first end face is connected to the connecting part, and the second end face is a free end.

[0008] Based on the above-mentioned structure of the basket carrying robot arm hook, the diameter of the first end face is 3.92 mm, and the straight-line distance from the first end face to the second end face is 27.74 mm.

[0009] Based on the above-mentioned structure of the basket carrying robot arm hook, the holding portion includes a first arcuate end, a second arcuate end, a first plane end and a second plane end; the first arcuate end, the second arcuate end, the first plane end and the second plane end are connected as a whole, the first arcuate end and the second arcuate end are arranged on opposite sides, and the first plane end and the second plane end are arranged on opposite sides, so that the holding portion has a special-shaped structure with two plane ends.

[0010] Based on the above-mentioned structure of the basket carrying robot arm hook, a connecting groove is provided between the gripping portion and the connecting portion.

[0011] Based on the above structure of the basket carrying robot arm hook, the matching portion is a thread groove or a clamping groove.

[0012] Based on the above structure of the basket carrying robot arm hook, the centers of the first end surface and the second end surface are collinear, so that the second end surface is located at the center of the first end surface.

[0013] The present invention provides a silicon wafer transfer system, including a robotic arm, a hanging plate, a hanging hook, a flower basket and a hook; the hanging plate is arranged in multiple numbers along the length direction of the robotic arm, and each hanging plate is provided with multiple hooks, and the hook is provided with a connecting hole that cooperates with the hook, and the connecting part of the hook is connected to the connecting hole as a whole; the flower basket is provided with a hook hole that cooperates with the hanging part of the hook.

[0014] Based on the structure of the above-mentioned silicon wafer transfer system, there are three hanging plates in total, the hanging plates are evenly spaced apart, and each hanging plate is provided with two hooks.

[0015] Based on the structure of the above-mentioned silicon wafer transport system, the end of the hook is in a U-shaped structure, and hook holes are respectively provided at the ends of the U-shaped hook.

[0016] In summary, due to the adoption of the above technical solution, the beneficial effects of the present invention are:

[0017] 1. This solution can facilitate the entire hook structure in the South District through the gripping part, and can quickly assemble the hook structure to the robotic arm, so that the robotic arm can quickly and stably hang with the flower basket. The hook is firmly connected to the mechanical part through the connecting part. At the same time, the hanging part is set to a slender frustum structure, which can make the hanging part better fit with the hook part of the flower basket. By reducing the diameter of the hanging part, it will not scratch the flower basket when taking it out. At the same time, by increasing the contact distance between the hook and the flower basket, the flower basket is prevented from falling, and stable transportation of the flower basket is achieved. BRIEF DESCRIPTION OF THE DRAWINGS

[0018] Figure 1 This is a schematic diagram of the three-dimensional structure of the hook of the utility model;

[0019] Figure 2 This is a schematic diagram of the top view of the gripping portion of the present invention;

[0020] Figure 3 It is a structural diagram of the operating system in the utility model;

[0021] Description of the drawings: 1. Gripping part; 2. Connecting part; 3. Hanging part; 4. Fitting part; 5. Guide slope; 6. Connecting groove; 7. Robotic arm; 8. Hanging plate; 9. Hook; 10. Flower basket; 11. First arc-shaped end; 12. Second arc-shaped end; 13. First plane end; 14. Second plane end; 31. First end face; 32. Second end face. DETAILED DESCRIPTION

[0022] All features disclosed in this specification, and / or all steps of any methods or processes disclosed in this specification, can be combined in any combination, except combinations where at least some of such features and / or steps are mutually exclusive.

[0023] Any feature in the present specification, including any accompanying claims, abstract, and drawings, can be replaced by alternative features serving the same, equivalent or similar purpose, unless expressly stated otherwise. That is, unless expressly stated otherwise, every feature disclosed in this specification is one example only of a generic series of equivalent or similar features.

[0024] In the description of the present application, it is to be understood that the orientations or positional relationships indicated by the terms "upper", "lower", "left", "right", etc. are based on the orientations or positional relationships shown in the drawings, and are only for the convenience of describing the present application and simplifying the description, and therefore cannot be understood as indicating or implying that the devices or elements referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as limiting the present application.

[0025] In addition, the terms "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Therefore, the features defined with "first", "second", etc. can explicitly or implicitly include one or more of the features.

[0026] Embodiment 1

[0027] As shown in the drawings, the present application provides a technical scheme: Figures 1 and 2

[0028] A basket mechanical arm hook, which at least includes but is not limited to a holding part 1, a connecting part 2 and a hooking part 3; the connecting part 2 is arranged between the holding part 1 and the hooking part 3, and the connecting part 2 is provided with a matching part 4 which is detachably connected with a mechanical arm 7; a guide inclined surface 5 is arranged between the connecting part 2 and the hooking part 3; the hooking part 3 is an overall elongated circular truncated cone structure;

[0029] Based on the above structure, the whole hook structure can be conveniently held by the holding part 1, and the hook structure can be quickly assembled on the mechanical arm 7, so that the mechanical arm 7 can be quickly and stably connected with the flower basket 10. The hook is stably connected with the mechanical part through the connecting part 2, and the hooking part 3 is arranged as an elongated circular truncated cone structure, which can better match the hook part of the flower basket 10. By reducing the diameter of the hooking part 3, the flower basket 10 will not be scratched when taking the flower basket 10. By increasing the contact distance between the hook and the flower basket 10, the flower basket 10 is prevented from falling, and the stable transportation of the flower basket 10 is realized.

[0030] ​As an example, the hanging part 3 can include a first end surface 31 and a second end surface 32, the size of the hanging part 3 gradually decreases from the first end surface 31 to the second end surface 32, the first end surface 31 is connected with the connecting part 2, and the second end surface 32 is a free end.

[0031] The diameter of the first end surface 31 is 3.92mm, and the straight line distance from the first end surface 31 to the second end surface 32 is 27.74mm.

[0032] Based on the above structure, the size of the original first end surface 31 is adjusted from a diameter of 7.92mm to a diameter of 3.92mm, the overall diameter is reduced, which can effectively avoid scratching the flower basket 10 when taking the flower basket 10, and the length of the first end surface 31 in the prior art from the second end surface 32 is adjusted from 24.74mm to 27.74mm, which can effectively avoid the flower basket 10 from falling when the flower basket 10 is hung.

[0033] As an example, the holding part 1 can include a first arc-shaped end 11, a second arc-shaped end 12, a first flat end 13 and a second flat end 14; the first arc-shaped end 11, the second arc-shaped end 12, the first flat end 13 and the second flat end 14 are connected as a whole, and the first arc-shaped end 11 and the second arc-shaped end 12 are arranged on opposite sides, and the first flat end 13 and the second flat end 14 are arranged on opposite sides, so that the holding part 1 has a special-shaped structure of two flat ends.

[0034] Based on the above structure, due to the special-shaped structure of the holding part 1, on the one hand, the two flat ends can be conveniently held or clamped, and on the other hand, the resistance during rotation can be increased, compared with the usual circular structure, faster adjustment can be realized.

[0035] As an example, a connecting groove 6 can be arranged between the holding part 1 and the connecting part 2; the holding part 1 and the connecting part 2 are isolated from each other through the connecting groove 6, which facilitates the subsequent fixation of the connecting part 2.

[0036] As an example, the fitting part 4 can be a threaded groove or a clamping groove, which cooperates with the hole on the mechanical arm 7 to realize quick disassembly and assembly of the connecting part 2.

[0037] As an example, the centers of the first end surface 31 and the second end surface 32 are collinear, so that the second end surface 32 is at the center position of the first end surface 31, which can ensure that the support force in each direction is balanced.

[0038] The hook of the present scheme can be quickly connected with the mechanical arm 7, and can be stably, quickly and safely connected with the scraper of the mechanical arm 7, and will not scratch the flower basket 10 when taking the flower basket 10, and can also avoid the flower basket 10 from sliding, thereby improving the safety of transporting silicon wafers.

[0039] Embodiment 2

[0040] Based on the above embodiment 1, Figure 3 As shown, the utility model provides a technical solution:

[0041] A silicon wafer transfer system includes a robotic arm 7, a hanging plate 8, a hook 9, a flower basket 10 and a hook; the hanging plate 8 is arranged in multiple numbers along the length direction of the robotic arm 7, each hanging plate 8 can be provided with multiple hooks, the hook is provided with a connecting hole that cooperates with the hook, and the connecting part 2 of the hook is connected to the connecting hole as a whole; the flower basket 10 is provided with a hook hole that cooperates with the hanging part 3 of the hook.

[0042] Based on the above structure, by passing the hook portion through the hook hole, the hook is fixed to the flower basket 10, and the robot arm 7 can ensure that the flower basket 10 will not fall out when the robot arm 7 moves quickly.

[0043] As an example, there are three hanging plates 8 in total, which are evenly spaced apart, and each hanging plate 8 is provided with two hooks.

[0044] The ends of the hooks are U-shaped structures, and hook holes are respectively arranged at the ends of the U-shaped hooks.

[0045] The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention. Any modifications, equivalent replacements and improvements made within the spirit and principles of the present invention should be included in the scope of protection of the present invention.

Claims

1. A basket carrying robot arm hook, characterized in that: It at least includes a gripping part, a connecting part and a hanging part; the connecting part is arranged between the gripping part and the hanging part, and the connecting part is provided with a matching part that is detachably connected to the robotic arm; a guiding slope is provided between the connecting part and the hanging part; the hanging part is an elongated frustum structure as a whole.

2. The basket carrying robot arm hook according to claim 1, characterized in that: The hanging portion includes a first end face and a second end face, and the size of the hanging portion is gradually reduced from the first end face to the second end face. The first end face is connected to the connecting portion, and the second end face is a free end.

3. The basket carrying robot arm hook according to claim 2, characterized in that: The diameter of the first end surface is 3.92 mm, and the straight-line distance from the first end surface to the second end surface is 27.74 mm.

4. The basket carrying robot arm hook according to claim 3, characterized in that: The holding portion includes a first arcuate end, a second arcuate end, a first plane end and a second plane end; the first arcuate end, the second arcuate end, the first plane end and the second plane end are connected as a whole, the first arcuate end and the second arcuate end are arranged on opposite sides, and the first plane end and the second plane end are arranged on opposite sides, so that the holding portion has a special-shaped structure with two plane ends.

5. The basket carrying robot arm hook according to claim 4, characterized in that: A connecting groove is provided between the gripping portion and the connecting portion.

6. The basket carrying robot arm hook according to claim 5, characterized in that: The matching portion is a thread groove or a clamping groove.

7. A basket handling robot arm hook according to any one of claims 2 to 6, characterized in that: The centers of the first end surface and the second end surface are collinear, so that the second end surface is located at the center of the first end surface.

8. A silicon wafer transport system, characterized in that: It comprises a robotic arm, a hanging plate, a hanging hook, a flower basket and a hook as described in any one of claims 1 to 7; the hanging plates are arranged in plurality along the length direction of the robotic arm, each hanging plate is provided with a plurality of hooks, the hooks are provided with connecting holes that cooperate with the hooks, and the connecting part of the hook is connected to the connecting hole as a whole; the flower basket is provided with a hook hole that cooperates with the hanging part of the hook.

9. The silicon wafer transport system according to claim 8, wherein: There are three hanging plates in total, which are evenly spaced apart, and each hanging plate is provided with two hooks.

10. The silicon wafer transport system according to claim 9, wherein: The ends of the hooks are U-shaped structures, and hook holes are respectively provided at the ends of the U-shaped hooks.

Images