High-tantalum target cold isostatic pressing forming device

Abstract

The utility model discloses a high-tantalum target cold isostatic pressing forming device in the technical field of isostatic pressing forming machines, which comprises a forming machine base, an isostatic pressing forming machine main body is assembled on one side of the top end of the forming machine base, and a pressure-bearing turntable is assembled on the other side of the top end of the forming machine base; four fixing grooves are evenly formed in the upper end of the top end of the pressure-bearing rotary disc at equal intervals along the axis of the pressure-bearing rotary disc, and a fixing hoop is assembled in each fixing groove. A forming cylinder is installed in the fixing hoop, and a demolding opening is formed in the side wall of the forming cylinder. Fastening plates are installed at the two ends of an opening of the fixing hoop, U-shaped grooves are formed in the side walls of the fastening plates, bolts are assembled in the U-shaped grooves, and the portions, located outside the fastening plates, of the bolts are in threaded connection with nuts; according to the arrangement of the high-tantalum target cold isostatic pressing forming device, the four fixing grooves are formed in the pressure-bearing rotating disc, and the forming cylinders of different models can be arranged in the fixing grooves, so that the forming cylinders at different positions are rotated to the lower end of an isostatic pressing machine through rotation of the pressure-bearing rotating disc, and static pressing forming is carried out.

Description

Technical Field

[0001] The utility model relates to the technical field of isostatic pressing machines, in particular to a high-tantalum target material cold isostatic pressing device. Background Art

[0002] Sputtering target is an extremely important key material required for the manufacture of semiconductor chips. Its principle is to use physical vapor deposition technology (PVD) to bombard the target with high-pressure accelerated gaseous ions, so that the atoms of the target are sputtered out and deposited on the silicon wafer in the form of a thin film, eventually forming a complex wiring structure in the semiconductor chip. Sputtering target has many advantages such as uniformity and controllability of metal coating, and is widely used in the semiconductor field. With the rapid development of the semiconductor industry, the demand for sputtering target is increasing. Sputtering target has become an indispensable key material for the development of the semiconductor industry. High tantalum target needs to be formed using an isostatic press;

[0003] However, the isostatic press in the prior art still has some shortcomings. For example, it is not convenient to perform isostatic molding on multiple shapes, and it is not convenient to demould after molding. Therefore, the prior art needs to be improved. Utility Model Content

[0004] The purpose of the utility model is to provide a high tantalum target cold isostatic pressing device to solve the problems raised in the above background technology that it is inconvenient to perform isostatic pressing on multiple shapes and it is inconvenient to demould after forming.

[0005] To achieve the above-mentioned object, the present invention provides the following technical solution: a high-tantalum target material cold isostatic pressing device, comprising a molding machine base, an isostatic pressing molding machine body is mounted on one side of the top of the molding machine base, and a pressure-bearing turntable is mounted on the other side of the top of the molding machine base;

[0006] The top end of the pressure turntable is provided with four fixing grooves evenly and equidistantly along its axis, and a fixing hoop is installed inside each fixing groove;

[0007] A forming cylinder is installed inside the fixing hoop, and a demoulding port is opened on the side wall of the forming cylinder;

[0008] Both ends of the opening of the fixing hoop are equipped with fastening plates, the side walls of the fastening plates are provided with U-shaped grooves, the interior of the U-shaped grooves is equipped with bolts, and the bolts are located on the outside of the fastening plates and are screwed with nuts.

[0009] As a preferred high tantalum target cold isostatic pressing device of the present invention, a circular groove is provided on the internal thread of the nut, a circular part is placed in the circular groove, a threaded hole is provided on the circular part, and the bolt is sleeved in the threaded hole.

[0010] The utility model discloses a high tantalum target material cold isostatic pressing forming device, which comprises a forming cylinder, a fixed hoop and a fixing clamp.

[0011] The utility model discloses a high tantalum target material cold isostatic pressing forming device, which comprises a forming cylinder, a fixed hoop and a fixing clamp.

[0012] The utility model discloses a high tantalum target material cold isostatic pressing forming device, which comprises a forming cylinder, a fixed hoop and a fixing clamp.

[0013] The utility model discloses a high tantalum target material cold isostatic pressing forming device, which comprises a forming cylinder, a fixed hoop and a fixing clamp.

[0014] The utility model discloses a high tantalum target material cold isostatic pressing forming device, which comprises a forming cylinder, a fixed hoop and a fixing clamp.

[0015] Compared with the prior art, the utility model has the advantages that the high tantalum target material cold isostatic pressing forming device is provided, and the structure design is reasonable.

[0016] By setting the pressure bearing turntable at the working position of the isostatic pressing forming machine body and setting four fixing grooves on the pressure bearing turntable, different models of forming cylinders can be arranged in each fixing groove, so that the forming cylinders at different positions are rotated to the lower end of the isostatic pressing machine through the rotation of the pressure bearing turntable, and static pressure forming is carried out.

[0017] The fixed hoop is arranged between the forming cylinder and the fixing groove, so that the forming cylinder can be fastened during the forming process, and the material after forming can be easily removed, thereby improving the overall work efficiency. ACCURACY OF DRAWINGS

[0018] Figure 1 It is a front view of the utility model;

[0019] Figure 2 It is a pressure bearing turntable of the utility model;

[0020] Figure 3 It is a forming cylinder and fixed hoop of the utility model;

[0021] Figure 4 It is a bolt and nut of the utility model.

[0022] In the figure: 1. Molding machine base; 2. Pressure-bearing base; 3. Fixing groove; 4. Pressure-bearing turntable; 5. Isostatic pressing machine body; 6. Isostatic pressing head; 7. Hydraulic cylinder; 8. Isostatic pressing table; 9. Molding cylinder; 10. Fixing hoop; 11. Bolt; 12. Nut; 13. Round groove; 14. Round part; 15. Threaded hole; 16. Slot; 17. Block; 18. U-shaped groove; 19. Fastening plate; 20. Demolding port; 21. Limit block; 22. Limit groove. DETAILED DESCRIPTION

[0023] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0024] See also Figures 1-4 , the utility model provides a technical solution:

[0025] In the present technical solution, a high-tantalum target cold isostatic pressing device includes a molding machine base 1, wherein the top side of the molding machine base 1 is equipped with an isostatic pressing molding machine body 5, and the other side of the top of the molding machine base 1 is equipped with a pressure turntable 4; the top upper end of the pressure turntable 4 is evenly and equidistantly provided with four fixing grooves 3 along its axis, and each fixing groove 3 is equipped with a fixing hoop 10; the interior of the fixing hoop 10 is equipped with a molding cylinder 9, and the side wall of the molding cylinder 9 is provided with a demolding port 20; fastening plates 19 are installed at both ends of the opening of the fixing hoop 10, and the side wall of the fastening plate 19 is provided with a U-shaped groove 18, and the interior of the U-shaped groove 18 is equipped with a bolt 11, and the bolt 11 is located on the outside of the fastening plate 19 and is screwed with a nut 12.

[0026] In this technical solution, the pressure turntable 4 can rotate on the molding machine base 1, and the four fixed grooves 3 can be rotated to the working position of the isostatic pressing molding machine body 5 respectively. The molding cylinder 9 installed in each fixed groove 3 can be installed according to different needs. The molding cylinder 9 can be unfolded through the setting of the demolding port 20, and under the action of the fixing hoop 10, it can be fastened in the fixed groove 3.

[0027] In some technical solutions, a circular groove 13 is provided on the internal thread of the nut 12, a circular part 14 is placed in the circular groove 13, a threaded hole 15 is provided on the circular part 14, and the bolt 11 is sleeved in the threaded hole 15; a clamping groove 16 is provided on the circular groove 13, a clamping block 17 is installed on the circular part 14, and the clamping block 17 is clamped in the clamping groove 16.

[0028] In this technical solution, the circular member 14 is placed into the circular groove 13, and the clamping block 17 is clamped into the clamping groove 16, so that the bolt 11 passes through the U-shaped groove 10 on the clamp 9, and the nut 12 is screwed onto the bolt 11, and the bolt 11 is screwed into the threaded hole 15 on the circular member 14, so that the nut 12 and the bolt 11 are doubly locked.

[0029] In some technical solutions, the fixing hoop 10 and the forming tube 9 are limited by a limiting structure, the number of the limiting structures is not less than four, and the limiting structures are distributed equidistantly in a ring shape; the limiting structure includes a limiting block 21 and a limiting groove 22, the limiting block 21 is installed on the forming tube 9, the limiting groove 22 is opened on the fixing hoop 10, and the limiting block 21 is clamped in the limiting groove 22.

[0030] In this technical solution, when the forming tube 9 is installed in the fixing hoop 10, the well limit block 21 is stuck in the limit groove 22, which can not only install and position the forming tube 9, but also improve the connection strength between the two.

[0031] In some technical solutions, an isostatic pressing table 8 is installed inside the isostatic pressing machine body 5, an isostatic pressing head 6 is installed at the lower end of the isostatic pressing table 8, a hydraulic cylinder 7 is installed at the top of the isostatic pressing machine body 5, and the isostatic pressing head 6 is connected to the driving end of the hydraulic cylinder 7;

[0032] In this technical solution, the isostatic pressing table 8 is driven downward by the hydraulic cylinder 7, so that the isostatic pressing head 6 is deeply inserted into the forming cylinder 9 to perform isostatic pressing.

[0033] In some technical solutions, the bottom end of the molding machine base 1 is equipped with a pressure-bearing base 2;

[0034] In this technical solution, the molding machine base 1 is supported by the bearing base 2 .

[0035] Working principle:

[0036] First, as needed, install the four forming cylinders 9 into the fixing hoop 10 in the fixing groove 3. At this time, the fixing hoop 10 wraps the forming cylinder 9, and the limit block 21 is stuck in the limit groove 22. Then, place the bolt 11 in the U-shaped groove 18, screw the nut 12 onto the bolt 11, put the circular part 14 into the circular groove 13, and at the same time, the clamping block 17 is stuck in the clamping groove 16, so that the bolt 11 passes through the U-shaped groove 10 on the clamping hoop 9, and screw the nut 12 onto the bolt 11. The bolt 11 is screwed into the threaded hole 15 on the circular part 14, so that the nut 12 and the bolt 11 are doubly imprisoned. Then, rotate the forming cylinder 9 to the lower end of the isostatic pressing head 6, and drive the isostatic pressing table 8 downward by the hydraulic cylinder 7 to perform isostatic pressing.

[0037] It is to be noted that, in the present text, relational terms such as first and second and the like can be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises", "comprising", or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but can also include other elements not expressly listed or inherent to such process, method, article, or apparatus.

[0038] Although the present application has been described with reference to the embodiments above, it is possible to make various modifications thereto and to replace components thereof with equivalents without departing from the scope of the present application. In particular, each feature disclosed in the embodiments of the present application can be used in combination with any other feature disclosed in the embodiments of the present application, provided that there is no structural conflict. The combinations of features are not exhaustively described in the present specification only for the sake of brevity and resource saving. Therefore, the present application is not limited to the specific embodiments disclosed herein but encompasses all technical solutions falling within the scope of the claims.

Claims

1. A high tantalum target cold isostatic pressing device, comprising a molding machine base (1), characterized in that: An isostatic pressing machine body (5) is mounted on one side of the top of the molding machine base (1), and a pressure-bearing turntable (4) is mounted on the other side of the top of the molding machine base (1); The top end of the pressure-bearing turntable (4) is provided with four fixing grooves (3) evenly and equidistantly along its axis, and a fixing hoop (10) is installed inside each of the fixing grooves (3); A forming cylinder (9) is installed inside the fixing hoop (10), and a demoulding port (20) is provided on the side wall of the forming cylinder (9); A fastening plate (19) is installed at both ends of the opening of the fixing hoop (10), a U-shaped groove (18) is opened on the side wall of the fastening plate (19), a bolt (11) is assembled inside the U-shaped groove (18), and the bolt (11) is located on the outside of the fastening plate (19) and is screwed with a nut (12).

2. The high tantalum target cold isostatic pressing device according to claim 1, characterized in that: A circular groove (13) is formed on the internal thread of the nut (12), a circular piece (14) is placed in the circular groove (13), a threaded hole (15) is formed on the circular piece (14), and the bolt (11) is sleeved in the threaded hole (15).

3. The high tantalum target cold isostatic pressing device according to claim 2, characterized in that: A clamping groove (16) is provided on the circular groove (13), a clamping block (17) is installed on the circular member (14), and the clamping block (17) is clamped in the clamping groove (16).

4. The high tantalum target cold isostatic pressing device according to claim 1, characterized in that: The fixing hoop (10) and the forming cylinder (9) are limited by limiting structures, the number of the limiting structures is not less than four, and the limiting structures are distributed in an annular shape with equal distances.

5. The high tantalum target cold isostatic pressing device according to claim 4, characterized in that: The limiting structure comprises a limiting block (21) and a limiting groove (22), wherein the limiting block (21) is mounted on the forming cylinder (9), the limiting groove (22) is provided on the fixing hoop (10), and the limiting block (21) is clamped in the limiting groove (22).

6. The high tantalum target cold isostatic pressing device according to claim 1, characterized in that: The interior of the isostatic pressing machine body (5) is equipped with an isostatic pressing table (8), the lower end of the isostatic pressing table (8) is equipped with an isostatic pressing head (6), the top end of the isostatic pressing machine body (5) is equipped with a hydraulic cylinder (7), and the isostatic pressing head (6) is connected to the driving end of the hydraulic cylinder (7).

7. The high tantalum target cold isostatic pressing device according to claim 1, characterized in that: The bottom end of the molding machine base (1) is equipped with a pressure-bearing base (2).

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