High-purity hydrogen bromide negative pressure ventilation and EPS emergency device

Abstract

The utility model discloses a high purity hydrogen bromide negative pressure ventilation and EPS emergency device which comprises a rectification purification system, a device sealing system, a circulation absorption system, a negative pressure ventilation system and an EPS emergency power supply device, the device sealing system comprises a sealing shell, the rectification purification system is arranged in the sealing system, and the circulation absorption system is arranged in the sealing shell. The circulating absorption system is connected with the device sealing system through a negative pressure ventilation system, and the EPS emergency power supply device supplies power to the circulating absorption system. The EPS emergency power supply device has the advantages that when leakage occurs, the negative pressure ventilation system absorbs leaked gas to the circulation absorption system to be collected, the gas is effectively prevented from drifting into the air, and when power is cut off, the EPS emergency power supply device can provide electric power, and normal operation of the system is guaranteed.

Description

TECHNICAL FIELD

[0001] The utility model relates to hydrogen bromide processing technical field, specifically relates to a kind of high-purity hydrogen bromide negative pressure ventilation and EPS emergency device. BACKGROUND

[0002] Hydrogen bromide, also known as hydrobromic acid, is a binary compound of HBr. It has strong corrosive properties and can react with some active metal powders. It is a basic raw material for the production of various inorganic bromides and some alkyl bromides. Due to its high selectivity in etching and precise control over etching patterns and angles, high-purity electronic-grade hydrogen bromide has become one of the core gases for etching N-type polysilicon doped with phosphorus, single-crystal silicon doped with phosphorus, or two-dimensional semiconductors. Therefore, the development of high-purity hydrogen bromide is of great practical significance for the future development of China's electronic industry. Chemical production devices generally use open type for ventilation requirements. For toxic, harmful, and highly corrosive gases, device leaks can cause poisoning of personnel, environmental pollution, and other major safety incidents. The existing technology for hydrogen bromide purification systems basically uses low-temperature rectification. In the event of a power outage, system power loss, or other conditions, liquid hydrogen bromide will rapidly vaporize, causing the pressure in the purification system device to rapidly increase, leading to safety accidents beyond the design pressure of the equipment. SUMMARY

[0003] To solve the above technical problems, the utility model provides a kind of high-purity hydrogen bromide negative pressure ventilation and EPS emergency device, in power failure timely power supply, the gas absorption of leakage, avoid having hydrogen bromide gas into to the environment, avoid leakage.

[0004] Specifically, the utility model discloses a kind of high-purity hydrogen bromide negative pressure ventilation and EPS emergency device, comprising: rectification purification system, device sealing system, circulating absorption system, negative pressure ventilation system and EPS emergency power supply device, the device sealing system includes sealed shell, the rectification purification system is arranged in the device sealing system, the circulating absorption system is connected with the device sealing system by negative pressure ventilation system, the EPS emergency power supply device is for the power supply of the circulating absorption system.

[0005] The beneficial effects of the above technical solution are that when leakage occurs, the negative pressure ventilation system absorbs the leaked gas into the circulating absorption system for collection, effectively preventing the gas from dispersing into the air. In the event of a power outage, the EPS emergency power supply device can provide power to ensure normal operation of the system.

[0006] Further, the rectification purification system includes two purification towers, and the top of each purification tower is provided with a discharge pipeline connected to the circulating absorption system.

[0007] The beneficial effect of the above technical scheme is that in the abnormal state, the gas can be discharged from the top exhaust pipe, realizing the top pressure relief, until the pressure is within the specified range, protecting the equipment from causing large-scale leakage accidents due to power failure and the like.

[0008] Further, the negative pressure ventilation system comprises a plurality of connecting pipes arranged on the side of the sealed shell, and the connecting pipes are connected with the circulating absorption system.

[0009] The beneficial effect of the above technical scheme is that the connecting pipes of the negative pressure ventilation system are connected with the sealed shell, so that the negative pressure state in the sealed shell is maintained, and gas leakage is prevented.

[0010] Further, the circulating absorption system is connected with a fan, and the rear side of the fan is connected with a tail gas chimney.

[0011] The beneficial effect of the above technical scheme is that the fan is used to ensure that the closed system of the device is in a negative pressure state, and hydrogen bromide at the leakage position is absorbed in real time, so that the leaked hydrogen bromide enters the circulating absorption system for absorption treatment.

[0012] Further, the circulating absorption system comprises a primary alkali liquid absorption tower and a secondary alkali liquid absorption tower, and the lower sides of the primary alkali liquid absorption tower and the secondary alkali liquid absorption tower are connected with an alkali liquid collecting tank.

[0013] The beneficial effect of the above technical scheme is that two absorptions are performed through the primary alkali liquid absorption tower and the secondary alkali liquid absorption tower, so that the absorption of hydrogen bromide is ensured to be complete, and the emission standard is reached.

[0014] Further, the primary alkali liquid absorption tower and the secondary alkali liquid absorption tower are connected with the alkali liquid collecting tank through a circulating pump, and the upper sides of the primary alkali liquid absorption tower and the secondary alkali liquid absorption tower are provided with a spraying assembly.

[0015] The beneficial effect of the above technical scheme is that the alkali liquid in the primary alkali liquid absorption tower and the secondary alkali liquid absorption tower is circulated to the spraying assembly by the circulating pump, so that the alkali liquid and hydrogen bromide gas are fully absorbed through the spraying assembly, and the gas is prevented from diffusing into the air to pollute the environment.

[0016] Further, the lower sides of the primary alkali liquid absorption tower and the secondary alkali liquid absorption tower are connected with a transparent observation tank.

[0017] The beneficial effect of the above technical scheme is that whether liquid flows in the transparent observation tank can be observed, so that it is prompted whether the spraying assembly works normally.

[0018] Further, the EPS emergency power supply device is connected with the fan.

[0019] The fan is arranged to ensure that the inside of the sealing device is in a negative pressure state, so that the discharged gas is sucked away and enters the circulating absorption system through the negative pressure ventilation system, and the emergency power supply device provides power for the fan when power is cut off, thereby ensuring normal operation of the entire system. BRIEF DESCRIPTION OF DRAWINGS

[0020] In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or prior art description will be briefly introduced.

[0021] Figure 1 is a structure diagram of the high-purity hydrogen bromide negative pressure ventilation and EPS emergency device of the present application

[0022] The reference numerals involved in the drawings are as follows:

[0023] rectification and purification system 1, a device sealing system 2, a circulating absorption system 3, and a negative pressure ventilation system 4 and an EPS emergency power supply device 5, the device sealing system 2 comprises a sealing shell 21, the rectification and purification system 1 is arranged in the device sealing system 2, the circulating absorption system 3 is connected with the device sealing system 2 through the negative pressure ventilation system 4, and the EPS emergency power supply device 5 supplies power for the circulating absorption system 3. DETAILED DESCRIPTION

[0024] The present application will be further described in detail below with reference to the drawings.

[0025] As shown in Figure 1 the present application discloses a kind of high-purity hydrogen bromide negative pressure ventilation and EPS emergency device, comprising: rectification and purification system 1, device sealing system 2, circulating absorption system 3 and negative pressure ventilation system 4 and EPS emergency power supply device 5, the device sealing system 2 includes sealing shell 21, the rectification and purification system 1 is arranged in the device sealing system 2, the circulating absorption system 3 with the device sealing system 2 is connected by negative pressure ventilation system 4, and the EPS emergency power supply device 5 supplies power for the circulating absorption system 3.

[0026] The beneficial effects of the above technical solutions are that when leakage occurs, the negative pressure ventilation system 4 absorbs the leaked gas to the circulating absorption system 3 for collection, effectively preventing the gas from dispersing into the air, and when power is cut off, the EPS emergency power supply device 5 can provide power to ensure normal operation of the system.

[0027] In some embodiments, the rectification purification system 1 includes two purification towers 11, divided into a first purification tower and a second purification tower, the bottom of the first purification tower is connected with the second purification tower, the material passes through the first purification tower and then enters the second purification tower for further purification, to ensure that the purity of hydrogen bromide meets the requirements, the top of the purification tower 11 is provided with a discharge pipeline 12, the discharge pipeline 12 is provided with a valve, in an abnormal state, when the internal pressure of the purification tower 11 reaches a certain value, the valve is opened, the gas enters the circulating absorption system 3 through the discharge pipeline 12 for recycling, and the discharge pipeline 12 is connected with the circulating absorption system 3. The top pressure relief is realized until the pressure is within the specified range, to protect the equipment from causing large-scale leakage accidents due to power failure and the like.

[0028] In some embodiments, the negative pressure ventilation system 4 includes a plurality of connection pipelines 41 arranged on the side of the sealed shell 21, the connection pipelines 41 are connected with the circulating absorption system 3, the connection pipelines 41 are arranged at the upper, middle and lower parts of the sealed shell 21, and then are gathered into a pipeline connected with the top of the first alkali liquid absorption tower to absorb the leaked hydrogen bromide.

[0029] The above technical scheme has the beneficial effects that the connection pipelines 41 of the negative pressure ventilation system 4 are connected with the sealed shell 21, the negative pressure state in the sealed shell 21 is maintained, and gas leakage is prevented.

[0030] In some embodiments, the circulating absorption system 3 is connected with a fan 7, the rear side of the fan 7 is connected with a tail gas chimney 6, and the fan 7 is provided with valves at the front and rear sides, so that the on-off of the entire pipeline can be controlled, and the hydrogen bromide absorbed by the circulating absorption system 3 is discharged to high altitude through the tail gas chimney 6. At the same time, the fan 7 is also connected with the negative pressure ventilation system 4, and the fan 7 is used to ensure that the device closed system 2 is in a negative pressure state, to absorb the leaked hydrogen bromide in real time, and to make the leaked hydrogen bromide enter the circulating absorption system 3 for absorption treatment.

[0031] In some embodiments, the circulating absorption system 3 includes a first alkali liquid absorption tower 31 and a second alkali liquid absorption tower 32, and the lower sides of the first alkali liquid absorption tower 31 and the second alkali liquid absorption tower 32 are connected with an alkali liquid collecting tank 33. The hydrogen bromide is absorbed twice by the first alkali liquid absorption tower 31 and the second alkali liquid absorption tower 32, to ensure complete absorption of the hydrogen bromide and to meet the emission standard, and the alkali liquid collecting tank 33 collects the alkali liquid, which is then circulated by a circulating pump 34.

[0032] In some embodiments, the first alkali liquid absorption tower 31 and the second alkali liquid absorption tower 32 are connected with the alkali liquid collecting tank 33 through the circulating pump 34, and the upper sides of the first alkali liquid absorption tower 31 and the second alkali liquid absorption tower 32 are provided with a spraying assembly, the spraying assembly is provided with a plurality of nozzles mounted on a spraying pipe, and the nozzles are arranged on the inner upper sides of the first and second alkali liquid absorption towers 32.

[0033] The beneficial effect of the above technical scheme is that the circulating pump 34 circulates the alkali liquor in the primary alkali liquor absorption tower 31 and the secondary alkali liquor absorption tower 32 to the spraying assembly, and the alkali liquor is fully absorbed by the spraying assembly and hydrogen bromide gas, so that the gas is prevented from diffusing into the air to pollute the environment.

[0034] Further, the primary alkali liquor absorption tower 31 and the secondary alkali liquor absorption tower 32 are connected with a transparent observation tank 35 at the lower side, and the circulating pump 34 is arranged at the lower side of the transparent observation tank 35.

[0035] Further, the EPS emergency power supply device 5 is connected with the fan 7, and the emergency power supply device is also connected with the two circulating pumps 34 to supply power to the circulating pumps 34, and the fan 7 is arranged to ensure that the inside of the sealing device is in a negative pressure state, so that the discharged gas is sucked and enters the circulating absorption system 3 through the negative pressure ventilation system 4, and the emergency power supply device provides power for the fan 7 when power failure occurs, so as to ensure the normal operation of the whole system.

[0036] When the external network is powered off, since the hydrogen bromide purification generally adopts a low-temperature liquefaction rectification technology, the low-temperature liquefaction generally adopts an ice machine for cooling, and after power failure, the ice machine immediately stops running, the hydrogen bromide purification device will have a pressure rise higher than the design pressure, which will threaten the intrinsic safety of the equipment and cause a safety accident, when power failure occurs, the EPS emergency power supply will automatically access the equipment power supply, and the main power supply equipment is two circulating pumps 34 and a fan 7, since the hydrogen bromide is liquefied; because the hydrogen bromide has a certain time for pressure rise due to vaporization, when the hydrogen bromide purification equipment (design pressure 2.5 MPa) reaches 2.0 MPa, the operator can manually start the equipment to the power supply box; if other fans 7 and absorption liquid circulating pumps 34 are started, the fan 7 and the absorption liquid circulating pump 34 must be started for more than 30 seconds, and only one of the one-use-one-backup equipment can be started, and the interval time is not less than 30 seconds; after the absorption liquid circulating pump 34 and the fan 7 are started, the hydrogen bromide purification equipment is subjected to top pressure relief until the pressure is within the specified range, so as to protect the equipment from a large-scale leakage accident caused by a sharp rise in pressure due to power failure.

[0037] When the hydrogen bromide purification equipment leaks, since the hydrogen bromide has strong corrosiveness, the purification equipment, pipelines and valves are prone to leakage due to corrosion, when leakage occurs, the negative pressure ventilation system 4 sucks the leaked hydrogen bromide gas to the circulating absorption system 3 for absorption, and the operator wears protective articles to stop the leakage, so that an environmental protection accident caused by leakage is avoided.

[0038] For ordinary skilled persons in the art, without departing from the creative concept of the present application, a number of modifications and improvements can be made, which all belong to the protection scope of the present application.

Claims

1. A high-purity hydrogen bromide negative pressure ventilation and EPS emergency device, characterized in that: include: A distillation and purification system (1), a device closed system (2), a circulation absorption system (3), a negative pressure ventilation system (4) and an EPS emergency power supply device (5), wherein the device closed system (2) includes a sealed shell (21), the distillation and purification system (1) is arranged in the device closed system (2), the circulation absorption system (3) is connected to the device closed system (2) via the negative pressure ventilation system (4), and the EPS emergency power supply device (5) supplies power to the circulation absorption system (3).

2. The high-purity hydrogen bromide negative pressure ventilation and EPS emergency device according to claim 1, characterized in that: The distillation purification system (1) comprises two purification towers (11), and a discharge pipe (12) is provided at the top of each purification tower (11), and the discharge pipe (12) is connected to the circulating absorption system (3).

3. The high-purity hydrogen bromide negative pressure ventilation and EPS emergency device according to claim 1, characterized in that: The negative pressure ventilation system (4) comprises a plurality of connecting pipes (41) arranged on the side of the sealed housing (21), and the connecting pipes (41) are connected to the circulating absorption system (3).

4. The high-purity hydrogen bromide negative pressure ventilation and EPS emergency device according to claim 1, characterized in that: The circulating absorption system (3) is connected to a fan (7), and the rear side of the fan (7) is connected to an exhaust chimney (6).

5. The high-purity hydrogen bromide negative pressure ventilation and EPS emergency device according to claim 1, characterized in that: The circulating absorption system (3) comprises a primary alkali solution absorption tower (31) and a secondary alkali solution absorption tower (32), and the lower sides of the primary alkali solution absorption tower (31) and the secondary alkali solution absorption tower (32) are connected to an alkali solution collecting tank (33).

6. The high-purity hydrogen bromide negative pressure ventilation and EPS emergency device according to claim 5, characterized in that: The primary alkali liquid absorption tower (31) and the secondary alkali liquid absorption tower (32) are connected to the alkali liquid collection tank (33) via a circulation pump (34), and spray components are provided on the upper sides of the primary alkali liquid absorption tower (31) and the secondary alkali liquid absorption tower (32).

7. The high-purity hydrogen bromide negative pressure ventilation and EPS emergency device according to claim 6, characterized in that: A transparent observation tank (35) is connected to the lower side of the primary alkali solution absorption tower (31) and the secondary alkali solution absorption tower (32).

8. The high-purity hydrogen bromide negative pressure ventilation and EPS emergency device according to claim 4, characterized in that: The EPS emergency power supply device (5) is connected to the fan (7).

Images