Photoresist recovery device

Abstract

The utility model discloses a photoresist recovery device. Comprising a collecting tank, a waste collecting device, a reaction kettle, a multi-layer filter and a distilling device, wherein the waste collecting device is used for collecting waste liquid and waste gas in the recycling process; the reaction kettle is used for carrying out preliminary reaction on the waste liquid in the collecting tank; the multi-layer filter is used for filtering the waste liquid; the vacuum drying box is used for drying the photoresist obtained by distillation, the grinding machine is used for crushing the photoresist, the multilayer filter comprises a cabin body, a filtering module, a sterilization module and an exchange module, the filtering module, the sterilization module and the exchange module are sequentially and detachably mounted in the cabin body at intervals from top to bottom, and a cabin door is arranged on one side of the cabin body. Through the detachable modules in the multilayer filter, the adaptability of the filter can be greatly improved, the filtering efficiency is improved, the replacement frequency is reduced, and the labor cost is effectively saved.

Description

TECHNICAL FIELD

[0001] The utility model relates to photoresist recycling technical field, especially a photoresist recycling device. BACKGROUND

[0002] With the rapid development of domestic electronic industry, the semiconductor industry must reduce the emission of harmful chemicals. Photoresist and cleaning agents usually contain organic solvents and chemicals, which can cause harm to the environment and human health. Therefore, it is particularly important to develop an effective recycling system to reduce emissions and improve resource utilization.

[0003] A multi-layer filter is a device used for filtering liquids or gases, which removes particles or impurities of different sizes and types through multiple filter layers. The design of this filter aims to improve the filtering accuracy step by step through progressive filtration, thereby achieving more thorough purification. Multi-layer filters are widely used in water treatment, air purification, industrial production, food processing, pharmaceutical manufacturing, and other fields.

[0004] Currently, the separation and recycling technology of photoresist and cleaning agents in coating machines has made certain progress in the semiconductor industry, and various separation and recycling technologies have been developed, such as distillation, membrane separation, and adsorption. These technologies can effectively recover photoresist and cleaning agents from waste liquid.

[0005] The above-mentioned prior art has the following defects: Although the technology has made certain progress, the current recovery efficiency still has room for improvement. The construction and operation cost of the recovery system is high, and improvement is still needed in terms of improving recovery efficiency, reducing cost, technology integration, and adapting to environmental regulations. INVENTION CONTENTS

[0006] The purpose of the utility model is to provide a photoresist recycling device to solve the problems existing in the prior art.

[0007] The above technical purpose of the utility model is achieved through the following technical solutions:

[0008] A photoresist recycling device, comprising a collection tank, a waste collection device for collecting waste liquid and waste gas during the recycling process, a reaction kettle for preliminary reaction of the waste liquid in the collection tank, a multi-layer filter for filtering the waste liquid, a distillation device for distilling the filtrate, a vacuum drying oven for drying the photoresist obtained by distillation, and a grinding machine for crushing the photoresist, the multi-layer filter comprising a cabin body, a filter module, a sterilization module, and an exchange module, the filter module, sterilization module, and exchange module being installed in the interior of the cabin body in sequence from top to bottom, one side of the cabin body being provided with a hatch.

[0009] By adopting the technical scheme, the several modules in the multi-layer filter are arranged at intervals, the modules can remove multiple impurities in the fluid, effectively improve the filtering efficiency, and according to different properties of the fluid, only the hatch is opened, the filter layer in the module can be replaced, the filter can be suitable for filtering of various fluids such as water, air and oil, and has strong adaptability, since the filter layers are multiple and the intervals are large, the filtering period is effectively prolonged, the replacement frequency of the filter medium is reduced, and the maintenance cost is effectively reduced.

[0010] In a further embodiment, the inner wall of the cabin body is provided with a plurality of fixed supports arranged at intervals from top to bottom, the filter module comprises a pre-filter layer, a high-precision filter layer, an ultra-precision filter layer and an adsorption layer, the pre-filter layer, the high-precision filter layer, the ultra-precision filter layer and the adsorption layer are sequentially arranged on the top of the plurality of fixed supports from top to bottom, the bottom of the adsorption layer is provided with a sterilization module arranged at intervals, the sterilization module comprises a plurality of UV lamps and a filter film, a plurality of installation grooves are horizontally arranged on the inner wall of the cabin body, the UV lamps are fixedly installed in the installation grooves, one side of a waterproof partition plate welded on the top of the installation groove is inclined downward away from the installation groove, the filter film is arranged on the top of the fixed support close to the bottom of the adsorption layer, and the exchange module comprises an ion exchange layer and a final filter layer.

[0011] By adopting the technical scheme, the pre-filter layer, the high-precision filter layer, the ultra-precision filter layer and the adsorption layer are combinations of different levels of filter layers, the mixed liquid or waste liquid will first remove large particles and impurities when passing through the pre-filter layer, then further remove the small particles that cannot be intercepted by the pre-filter layer through the high-precision filter layer, then adsorb the organic matter, odor and toxin in the fluid through the adsorption layer, then sterilize the fluid remaining on the filter film through the plurality of UV lamps, the waterproof partition plate can avoid a large amount of fluid directly poured on the UV lamps to affect the light transmittance, the UV lamps are also waterproofed, when entering the exchange module, the ion exchange layer removes specific ions such as calcium and magnesium in the fluid, and finally passes through the final filter layer to ensure that the fluid meets the final cleanliness requirement.

[0012] In a further embodiment, the hatch comprises a hinging device, a fixed rod and a door body, the door body is provided with a containing groove at the middle position of the outer side away from the inner wall of the cabin body, one end of the fixed rod is hingedly fixed in the containing groove, the hinging device is fixedly installed at the middle position of one side of the cabin body, the other end of the fixed rod is hingedly fixed with the cabin body through the hinging device, a fixing device is rotatably installed on one side of the hinging device, the fixing device is used for fixing the hatch, and a sealing rubber strip is bonded on the outer side of the door body.

[0013] By adopting the technical scheme, since the module composition in the cabin body needs to be adjusted, the structure design of the top cover plus the kettle body like a reaction kettle has certain defects, and it is inconvenient to replace the vertically and spaced filter layers, therefore a sealing door is directly arranged on the cabin body, the door body is hinged to the cabin body through specific fixing rods and hinge devices, when closed, the door body can be fixed on the cabin body through the fixing device, the sealing rubber strip on the outer side of the door body also deforms to tightly adhere to the cabin body, sealing is realized, and the top end and the bottom end of the door body correspond to the positions of the top end fixing support and the bottom end fixing support in the interior, so as to facilitate replacement of the filter layers.

[0014] In a further embodiment, the inside of the distillation device is provided with a plurality of first temperature sensors, the inside of the cabin body is fixedly provided with a plurality of second temperature sensors, a plurality of positioning rods are arranged at the top of the inner side wall of the cabin body, the top of each of the plurality of positioning rods is fixedly provided with a flow sensor, and the side close to the positioning rod of the high-precision filter layer and the side close to the positioning rod of the ultra-precision filter layer are each provided with a plurality of positioning holes corresponding to the positioning rods.

[0015] By adopting the technical scheme, the first temperature sensor arranged at the inlet of the distillation device can accurately sense the temperature of the fluid entering the inside of the distillation device, so as to adjust the internal temperature, and the remaining second temperature sensors can detect the average temperature in the inside of the distillation device, the heights of the plurality of positioning rods are different, and the inserted filter layers are also different, but they are all used to detect the flow rate of the water in the filter layer, because the filter layer needs to be replaced, only the service life is long, therefore when the filtration speed drops below the critical value, the system will report an error, prompting personnel to replace, and the pressure sensor can monitor the pressure coefficient in the filter tower, so as to ensure the stability and continuity of the entire filtration device and reduce the cost of manual maintenance.

[0016] In a further embodiment, the bottom end of the outside of the cabin body is provided with a control terminal, and the control terminal is electrically connected with the plurality of first temperature sensors, the plurality of second temperature sensors, the plurality of flow sensors and the plurality of pressure sensors through wires, the top of the control terminal is provided with a touch screen, and the bottom end of the touch screen is provided with an emergency stop button.

[0017] By adopting the technical scheme, the control terminal can analyze the data provided by the plurality of sensors in real time, and make further analysis according to the existing data model, change the temperature in the inside of the distillation device, and adjust the pressure in the inside of the cabin body.

[0018] In further embodiments, the distillation device comprises a preheater, a heater, a distillation column and a condenser, the distillation column is arranged in a spaced manner with the multi-layer filter, the preheater and the heater are fixedly installed on one side of the distillation column, the condenser is arranged in a spaced manner with the distillation column, the bottom end of the cabin body is provided with a first liquid outlet, one side of the preheater is provided with a first liquid inlet, the first liquid outlet and the first liquid inlet are communicated through a first pipeline, the top of the preheater is provided with a second liquid outlet, one side of the top end of the distillation column is provided with a second liquid inlet, the second liquid outlet and the second liquid inlet are communicated through a second pipeline, the bottom of the preheater is provided with a third liquid outlet, one side of the heater is provided with a third liquid inlet, the third liquid outlet and the third liquid inlet are communicated through a third pipeline, the top of the heater is provided with a fourth liquid outlet, one side of the bottom end of the distillation column is provided with a fourth liquid inlet, the fourth liquid outlet and the fourth liquid inlet are communicated through a fourth pipeline, the bottom of the distillation column is provided with a fifth liquid outlet, one side of the bottom end of the heater is provided with a fifth liquid inlet, the fifth liquid outlet and the fifth liquid inlet are communicated through a fifth pipeline, the top end of the distillation column is provided with a sixth liquid outlet, one side of the condenser is provided with a sixth liquid inlet, the sixth liquid outlet and the sixth liquid inlet are communicated through a sixth pipeline, one side of the bottom end of the condenser is provided with a seventh liquid outlet, the top end of the distillation column is provided with a seventh liquid inlet, the seventh liquid outlet and the seventh liquid inlet are communicated through a seventh pipeline, the other side of the bottom end of the condenser is provided with an eighth liquid outlet, the top of the vacuum drying box is provided with an eighth liquid inlet, and the eighth liquid outlet and the eighth liquid inlet are communicated through an eighth pipeline.

[0019] By adopting the above technical scheme, the preheater and the heater can distill the filtered fluid multiple times, and then the purified fluid obtained by distillation is sent into the vacuum drying box through the condenser, and the waste collecting device collects waste gas and waste liquid in the process and performs environmental protection treatment through a unified treatment system.

[0020] In further embodiments, the top end of the cabin body is provided with an audible and visual alarm device, and the audible and visual alarm device is electrically connected with the control terminal through wires.

[0021] By adopting the above technical scheme, when the filter layer needs to be replaced or the inside of the cabin body and the inside of the distillation device are abnormal, the audible and visual alarm device can transmit alarm signals, so that the operator can handle it in time.

[0022] In summary, the present application has the following advantages:

[0023] 1. Through the setting of the multi-layer filter, several interval arranged modules can be used to effectively remove multiple impurities in the fluid, improve the filtering efficiency, and according to different properties of the fluid, only the hatch door is opened, the filter layer in the module can be replaced, and the module can be applied to water, air and oil and various fluid filtering, and has strong adaptability, since the filter layer is multiple and the interval is large, the filtering period is effectively prolonged, the filtering medium replacement frequency is reduced while the adaptability is high, and the effect of effectively reducing the maintenance cost is achieved;

[0024] 2. Through the setting of the hatch door, the module composition can be adjusted quickly, the vertically and interval arranged filter layer can be easily replaced, the sealing door of the cabin body is hinged with the cabin body through the specific fixing rod and the hinge device, when being closed, the door body is fixed on the cabin body through the fixing device, the sealing rubber strip on the outer side of the door body also deforms, is tightly attached to the cabin body, sealing is achieved, and the top end and the bottom end of the hatch door correspond to the top end fixed support and the bottom end fixed support inside respectively, so that the effect of facilitating the replacement of the filter layer is achieved.

[0025] 3. Through the setting of the control terminal, the control terminal can analyze data provided by multiple sensors in real time, make further analysis according to an existing data model, change the temperature inside the distillation device, and adjust the pressure inside the cabin body, so that the continuity and stability of the recovery device are improved. BRIEF DESCRIPTION OF DRAWINGS

[0026] Figure 1 is an overall schematic view of the photoresist recovery device of the utility model;

[0027] Figure 2 is a schematic view for showing the inside of the cabin body in the photoresist recovery device of the utility model;

[0028] Figure 3 is a principle view of the photoresist recovery device of the utility model.

[0029] In the drawing, 1, multi-layer filter; 11, cabin body; 12, hatch door; 121, hinge device; 122, fixing rod; 123, door body; 13, fixed support; 14, filter module; 15, sterilization module; 16, exchange module; 2, distillation device; 3, control terminal; 4, audible and light alarm device. DETAILED DESCRIPTION

[0030] The utility model will be further described in detail in combination with the drawings.

[0031] Wherein the same parts are indicated by the same reference numerals. It should be noted that the words "front", "back", "left", "right", "up" and "down" used in the following description refer to the accompanying drawings. Figure 1In the description, the terms "bottom" and "top," "inner" and "outer" refer to directions toward or away from a particular component geometry, respectively. Furthermore, the terms "first" and "second" are used for descriptive purposes only and should not be understood to indicate or imply relative importance or implicitly specify the number of technical features indicated. Thus, features defined as "first" or "second" may explicitly or implicitly include one or more of such features. Throughout this specification, "plurality" means two or more, unless otherwise specifically defined in terms of the center's direction.

[0032] Example 1:

[0033] like Figures 1-3The application discloses a photoresist recycling device, which comprises a collecting tank, a waste collecting device for collecting waste liquid and waste gas in a recycling process, a reaction kettle for carrying out a preliminary reaction on the waste liquid in the collecting tank, a multilayer filter 1 for filtering the waste liquid, a distillation device 2 for distilling the filtrate, a vacuum drying box for drying the photoresist obtained through distillation and a grinding machine for crushing the photoresist, the multilayer filter 1 comprises a cabin body 11, a filtering module 14, a sterilization module 15 and an exchange module 16, the filtering module 14, the sterilization module 15 and the exchange module 16 are sequentially and spacedly arranged in the inside of the cabin body 11 in a detachable mode from top to bottom, one side of the cabin body 11 is provided with a cabin door 12, the cabin door 12 comprises a hinging device 121, a fixing rod 122 and a door body 123, the door body 123 is provided with a containing groove at the middle position of the outer side away from the inner wall of the cabin body 11, one end of the fixing rod 122 is hingedly fixed in the inside of the containing groove, the hinging device 121 is fixedly arranged at the middle position of one side of the cabin body 11, and the other end of the fixing rod 122 is hingedly fixed with the cabin body 11 through the hinging device 121, a fixing device is rotatably arranged at one side of the hinging device 121, the fixing device is used for fixing the cabin door 12, and a sealing rubber strip is bonded to the outer side periphery of the door body 123, the distillation device 2 comprises a preheater, a heater, a distillation tower and a condenser, the distillation tower is spacedly arranged with the multilayer filter 1, the preheater and the heater are fixedly arranged at one side of the distillation tower, the condenser is spacedly arranged with the distillation tower, a first liquid outlet is arranged at the bottom end of the cabin body 11, a first liquid inlet is arranged at one side of the preheater, the first liquid outlet and the first liquid inlet are communicated through a first pipeline, a second liquid outlet is arranged at the top of the preheater, a second liquid inlet is arranged at one side of the top end of the distillation tower, the second liquid outlet and the second liquid inlet are communicated through a second pipeline, a third liquid outlet is arranged at the bottom of the preheater, a third liquid inlet is arranged at one side of the heater, the third liquid outlet and the third liquid inlet are communicated through a third pipeline, a fourth liquid outlet is arranged at the top of the heater, a fourth liquid inlet is arranged at one side of the bottom end of the distillation tower, the fourth liquid outlet and the fourth liquid inlet are communicated through a fourth pipeline, a fifth liquid outlet is arranged at the bottom of the distillation tower, a fifth liquid inlet is arranged at one side of the bottom end of the heater, the fifth liquid outlet and the fifth liquid inlet are communicated through a fifth pipeline, a sixth liquid outlet is arranged at the top end of the distillation tower, a sixth liquid inlet is arranged at one side of the condenser, the sixth liquid outlet and the sixth liquid inlet are communicated through a sixth pipeline, a seventh liquid outlet is arranged at one side of the bottom end of the condenser, a seventh liquid inlet is arranged at the top end of the distillation tower, the seventh liquid outlet and the seventh liquid inlet are communicated through a seventh pipeline, an eighth liquid outlet is arranged at the other side of the bottom end of the condenser, an eighth liquid inlet is arranged at the top of the vacuum drying box, the eighth liquid outlet and the eighth liquid inlet are communicated through an eighth pipeline, through the multiple modules which are detachably arranged in the multilayer filter 1, the waste liquid can be filtered, sterilized and ion exchanged, so that the waste liquid becomes recyclable fluid again and enters the distillation device 2, is recycled multiple times in the distillation device 2 and finally becomes fluid photoresist which enters the vacuum drying box, and after drying, becomes powder photoresist.The cabin door 12 ensures the sealing while making it more convenient to replace the modules in the multi-layer filter 1, effectively improving the adaptability of the multi-layer filter 1, enabling it to process various fluids, and having a long service life without frequent replacement, effectively reducing labor costs.

[0034] As shown in Figures 1-2 The inner wall of the cabin body 11 is provided with a plurality of fixed supports 13 spaced apart from top to bottom, the filter module 14 includes a pre-filter layer, a high-precision filter layer, an ultra-precision filter layer and an adsorption layer, the pre-filter layer, the high-precision filter layer, the ultra-precision filter layer and the adsorption layer are sequentially arranged on the top of the plurality of fixed supports 13 from top to bottom, the bottom of the adsorption layer is provided with a sterilization module 15, the sterilization module 15 includes a plurality of UV lamps and a filter film, a plurality of installation grooves are horizontally arranged on the inner wall of the cabin body 11, and the UV lamps are fixedly installed in the installation grooves. One side of the waterproof partition plate welded on the top of the installation groove is inclined downward away from the installation groove, the filter film is arranged on the top of the fixed support 13 close to the bottom of the adsorption layer, the exchange module 16 includes an ion exchange layer and a final filter layer, and the ion exchange layer and the final filter layer are sequentially arranged on the top of the plurality of fixed supports 13 at the bottom of the sterilization module 15 from top to bottom. The inside of the distillation device 2 is provided with a plurality of first temperature sensors, a plurality of second temperature sensors are fixedly installed in the inside of the cabin body 11, a plurality of positioning rods are spaced apart on the top end of the inner side wall of the cabin body 11, and a plurality of flow sensors are fixedly installed on the top end of the plurality of positioning rods. The side of the high-precision filter layer close to the positioning rod and the side of the ultra-precision filter layer close to the positioning rod are both provided with a plurality of positioning holes corresponding to the positioning rods, the inside of the cabin body 11 is provided with a plurality of pressure sensors, the bottom end of the outside of the cabin body 11 is provided with a control terminal 3, and the control terminal 3 is electrically connected with the plurality of first temperature sensors, the plurality of second temperature sensors, the plurality of flow sensors and the plurality of pressure sensors through wires. The top of the control terminal 3 is provided with a touch screen, the bottom end of the touch screen is provided with an emergency stop button, the top end of the cabin body 11 is provided with an audible and visual alarm device 4, and the audible and visual alarm device 4 is electrically connected with the control terminal 3 through wires. Through the arrangement of the plurality of filter layers, the temperature sensor, the flow sensor and the pressure sensor, the control terminal 3 can effectively monitor the state in the cabin body 11, so that the control terminal 3 can adjust the temperature and pressure according to the preset parameters, and the state of the pre-filter layer, the high-precision filter layer, the ultra-precision filter layer and the adsorption layer can also be detected to determine whether they need to be replaced, thereby ensuring the continuity and stability of the recovery device.

[0035] In the embodiments disclosed by the utility model, the terms "mounting", "connection", "connecting", "fixing" and the like should be understood in a broad sense, for example, "connecting" can be fixed connection, or detachable connection, or integrally connected; "connection" can be direct connection, or indirect connection through an intermediate medium.

[0036] The specific embodiments are merely an explanation of the utility model, and are not a limitation of the utility model, and a person skilled in the art can make modifications to the embodiments without creative contribution according to the needs after reading the specification, but as long as the modifications are within the scope of the claims of the utility model, they are protected by the patent law.

Claims

1. A photoresist recovery device, comprising a collecting tank, a waste collection device for collecting waste liquid and waste gas in a recovery process, a reactor for performing a preliminary reaction on the waste liquid in the collecting tank, a multi-layer filter (1) for filtering the waste liquid, a distillation device (2) for distilling the filtrate, a vacuum drying oven for drying the photoresist obtained by distillation, and a grinder for crushing the photoresist, characterized in that: The multi-layer filter (1) comprises a cabin (11), a filtration module (14), a sterilization module (15) and an exchange module (16); the filtration module (14), the sterilization module (15) and the exchange module (16) are detachably installed in the cabin (11) in sequence from top to bottom; a cabin door (12) is provided on one side of the cabin (11).

2. A photoresist recovery device according to claim 1, characterized in that: A plurality of fixed brackets (13) are arranged at intervals from top to bottom on the inner wall of the cabin (11); the filter module (14) includes a pre-filter layer, a high-precision filter layer, an ultra-precision filter layer and an adsorption layer; the pre-filter layer, the high-precision filter layer, the ultra-precision filter layer and the adsorption layer are arranged in sequence from top to bottom on the top of the plurality of fixed brackets (13); a sterilization module (15) is arranged at intervals at the bottom of the adsorption layer; the sterilization module (15) includes a plurality of UV lamps and a filter membrane; a plurality of mounting grooves are arranged horizontally on the inner wall of the cabin (11); UV lamps are fixedly installed in the plurality of mounting grooves; a side of a waterproof partition is welded to the top of the mounting groove; the waterproof partition is arranged downwardly at a side away from the mounting groove; the filter membrane is arranged on the top of the fixed bracket (13) near the bottom of the adsorption layer; the exchange module (16) includes an ion exchange layer and a final filter layer; the ion exchange layer and the final filter layer are arranged in sequence from top to bottom on the top of the plurality of fixed brackets (13) at the bottom of the sterilization module (15).

3. The photoresist recovery device according to claim 1, characterized in that: The cabin door (12) comprises a hinge device (121), a fixing rod (122) and a door body (123); a receiving groove is provided at a middle position of an outer side of the door body (123) away from the inner wall of the cabin body (11); one end of the fixing rod (122) is hingedly fixed inside the receiving groove; the hinge device (121) is fixedly installed at a middle position on one side of the cabin body (11), and the other end of the fixing rod (122) is hingedly fixed to the cabin body (11) through the hinge device (121); a fixing device is rotatably installed on one side of the hinge device (121), and the fixing device is used to fix the cabin door (12); a sealing strip is bonded to the outer periphery of the door body (123).

4. The photoresist recovery device according to claim 2, characterized in that: A plurality of first temperature sensors are provided inside the distillation device (2), a plurality of second temperature sensors are fixedly installed inside the cabin (11), a plurality of positioning rods are spaced apart at the top end of the inner wall of the cabin (11), a flow sensor is fixedly installed at the top end of the plurality of positioning rods, a plurality of positioning holes corresponding to the positioning rods are provided on the side of the high-precision filtration layer close to the positioning rod and the side of the ultra-precision filtration layer close to the positioning rod, and a plurality of pressure sensors are provided inside the cabin (11).

5. The photoresist recovery device according to claim 4, characterized in that: A control terminal (3) is provided at the outer bottom end of the cabin (11), and the control terminal (3) is electrically connected to a plurality of first temperature sensors, a plurality of second temperature sensors, a plurality of flow sensors, and a plurality of pressure sensors via wires. A touch screen is provided on the top of the control terminal (3), and an emergency stop button is provided at the bottom end of the touch screen.

6. The photoresist recovery device according to claim 4, characterized in that: The distillation device (2) includes a preheater, a heater, a distillation tower and a condenser, the distillation tower is spaced apart from the multi-layer filter (1), the preheater and the heater are fixedly installed on one side of the distillation tower, the condenser is spaced apart from the distillation tower, the bottom end of the cabin (11) is provided with a first liquid outlet, one side of the preheater is provided with a first liquid inlet, the first liquid outlet and the first liquid inlet are connected through a first pipe, the top of the preheater is provided with a second liquid outlet, the top side of the distillation tower is provided with a second liquid inlet, the second liquid outlet and the second liquid inlet are connected through a second pipe, the bottom of the preheater is provided with a third liquid outlet, one side of the heater is provided with a third liquid inlet, the third liquid outlet and the third liquid inlet are connected through a third pipe, and the top of the heater is provided with a fourth liquid outlet A fourth liquid inlet is provided on one side of the bottom end of the distillation tower, and the fourth liquid outlet and the fourth liquid inlet are communicated through a fourth pipe. A fifth liquid outlet is provided on the bottom of the distillation tower, and a fifth liquid inlet is provided on one side of the bottom end of the heater, and the fifth liquid outlet and the fifth liquid inlet are communicated through a fifth pipe. A sixth liquid outlet is provided on the top of the distillation tower, and a sixth liquid inlet is provided on one side of the condenser, and the sixth liquid outlet and the sixth liquid inlet are communicated through a sixth pipe. A seventh liquid outlet is provided on one side of the bottom end of the condenser, and a seventh liquid inlet is provided on the top of the distillation tower, and the seventh liquid outlet and the seventh liquid inlet are communicated through a seventh pipe. An eighth liquid outlet is provided on the other side of the bottom end of the condenser, and an eighth liquid inlet is provided on the top of the vacuum drying oven, and the eighth liquid outlet and the eighth liquid inlet are communicated through an eighth pipe.

7. The photoresist recovery device according to claim 5, characterized in that: The top of the cabin (11) is provided with an audible and visual alarm device (4), and the audible and visual alarm device (4) is electrically connected to the control terminal (3) via an electric wire.

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