Cleaning device for chassis of reduction furnace

Abstract

The utility model relates to the technical field of reduction furnace cleaning, in particular to a reduction furnace chassis cleaning device which comprises a protective cover and a control cabinet, an executing mechanism is arranged in the protective cover and comprises a dry ice injection system, a dust collection system, a swing mechanism, a reciprocating mechanism and an imaging system, and the reciprocating mechanism comprises a cross beam and a sliding table. The cross beam is horizontally arranged, the upper end of the cross beam is fixed to the upper end of the protective cover through the swing mechanism, the sliding table is in sliding fit with the cross beam, and a dry ice nozzle of the dry ice injection system, a dust collection nozzle of the dust collection system and a camera of the imaging system are all fixed to the bottom of the sliding table; according to the cleaning device, cleaning and dust collection can be carried out synchronously, thoroughness of cleaning can be guaranteed, dust diffusion can be prevented, dirt can be recycled conveniently, the problems that pollution is prone to occurring in manual cleaning and ignition is prone to occurring in laser cleaning are solved, and cleaning efficiency, convenience and safety are improved.

Description

Technical Field

[0001] The utility model relates to the technical field of reduction furnace cleaning, in particular to a reduction furnace chassis cleaning device. Background Art

[0002] The polysilicon reduction furnace is the core equipment for producing the final product in polysilicon production and is also a key factor in determining the system's production capacity and energy consumption. Therefore, the design and manufacture of the polysilicon reduction furnace directly affects product quality, output, and production costs.

[0003] Currently, there are two main methods for cleaning the chassis of a reduction furnace: 1. Wiping with chemical agents, which is not only time-consuming and labor-intensive, but also carries the risk of contamination during the cleaning process; and 2. Laser cleaning. However, the deposits on the chassis contain flammable substances, which may be ignited during the laser cleaning process, leading to an explosion and posing a safety hazard. Utility Model Content

[0004] The utility model is aimed at the above-mentioned deficiencies in the prior art and provides a reduction furnace chassis cleaning device, which can realize the simultaneous cleaning and dust collection, thereby ensuring the thoroughness of cleaning and preventing dust from spreading, facilitating the recovery of dirt, solving the problems of easy contamination in manual cleaning and easy ignition in laser cleaning, and improving the efficiency, convenience and safety of cleaning.

[0005] To achieve the above objectives, the present invention provides the following technical solutions:

[0006] A reduction furnace chassis cleaning device includes a protective cover and a control cabinet. An actuator is provided in the protective cover. The actuator includes a dry ice blasting system, a dust collection system, a rotary mechanism, a reciprocating mechanism and an imaging system. The reciprocating mechanism includes a beam and a slide. The beam is arranged horizontally, and the upper end of the beam is fixed to the upper end of the protective cover through a rotary mechanism. The slide and the beam are slidably engaged. The dry ice nozzle of the dry ice blasting system, the dust collection nozzle of the dust collection system, and the camera of the imaging system are all fixed to the bottom of the slide.

[0007] Preferably, an outer edge is provided at the edge of the protective cover, and a fixing hole is provided on the outer edge.

[0008] Preferably, the dry ice tank of the dry ice blasting system and the dust collection tank of the dust collection system are both located at the upper end of the protective cover.

[0009] Preferably, the rotating mechanism includes a first motor and a connecting seat, the bottom of the connecting seat is connected to the crossbeam, the upper end of the connecting seat is connected to the protective cover through a rotating support, the first motor is fixed to the protective cover, and the first motor drives the connecting seat to rotate through the rotating support.

[0010] Preferably, a guide rail and a lead screw are provided at the bottom of the crossbeam, a slider cooperating with the guide rail and a nut cooperating with the lead screw are provided at the upper end of the slide, and a second motor for driving the lead screw to rotate is provided at one end of the crossbeam.

[0011] Preferably, a bracket for supporting a dry ice nozzle and a vacuum nozzle is provided at the bottom of the slide.

[0012] Compared with the prior art, the beneficial effects of the present invention are:

[0013] 1. The utility model can realize the simultaneous cleaning and dust collection, which can not only ensure the thoroughness of cleaning but also prevent the spread of dust and facilitate the recovery of dirt. It solves the problems of easy pollution in manual cleaning and easy ignition in laser cleaning, and improves the efficiency, convenience and safety of cleaning.

[0014] 2. The utility model can drive the actuator to realize lateral movement and rotation, thereby increasing the comprehensiveness and thoroughness of cleaning.

[0015] 3. The utility model is equipped with an imaging system, which can timely determine the area on the chassis surface that needs to be cleaned, ensuring comprehensive and thorough cleaning. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] Figure 1 This is a schematic diagram of the structure of the utility model Figure 1 ;

[0017] Figure 2 This is a schematic diagram of the structure of the utility model Figure 2 ;

[0018] Figure 3 This is a schematic diagram of the internal structure of the utility model;

[0019] Figure 4 This is a schematic diagram of the structure of the utility model after removing the protective cover;

[0020] Figure 5 It is a structural diagram of the connecting seat;

[0021] In the figure: 1-protective cover; 101-outer edge; 102-fixing hole; 2-dry ice blasting system; 201-dry ice tank; 202-dry ice nozzle; 3-control cabinet; 4-dust suction system; 401-dust suction tank; 402-dust suction nozzle; 5-first motor; 6-reciprocating mechanism; 601-second motor; 602-crossbeam; 602-guide rail; 604-slider; 605-screw; 606-nut seat; 607-slide; 608-bracket; 7-imaging system; 8-connecting seat; 801-slewing bearing. DETAILED DESCRIPTION

[0022] The following will be combined with the drawings in the embodiments of the present invention to clearly and completely describe the technical solutions in the embodiments of the present invention. Obviously, the embodiments described are only part of the embodiments of the present invention, not all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by ordinary technicians in this field without making creative efforts are within the scope of protection of the present invention.

[0023] like Figure 1 、 Figure 2 As shown, a reduction furnace chassis cleaning device includes a protective cover 1 and a control cabinet 3. An actuator is provided in the protective cover 1, and the actuator includes a dry ice blasting system 2, a dust collection system 4, a rotary mechanism, a reciprocating mechanism 6, and an imaging system 7. The reciprocating mechanism 6 includes a beam 602 and a slide 607. The beam 602 is arranged horizontally, and the upper end of the beam 602 is fixed to the upper end of the protective cover 1 through the rotary mechanism. The slide 607 and the beam 602 are slidably engaged. Figure 3 As shown, the dry ice nozzle 202 of the dry ice blasting system 2 , the vacuum nozzle 402 of the vacuum system 4 , and the camera of the imaging system 7 are all fixed on the bottom of the slide 607 .

[0024] Protective cover 1: prevents the dust from spreading during the cleaning process and facilitates dust recovery;

[0025] Dry ice blasting system 2: mainly includes dry ice tank 201 and dry ice nozzle 202, which uses compressed air to spray dry ice particles at a high speed of more than 150m / s; the low temperature of -79℃ can condense dirt and make it brittle, which is an effective method for gently removing almost all types of dirt. Dry ice cleaning technical parameters:

[0026] Cleaning surface width: 100mm; cleaning accuracy: 0.5μm, cleaning yield rate over 98%; cleaning method: high-speed dry ice particles + compressed air; air source: 0.45-0.7Mpa; filtration speed: 0.01μm;

[0027] The dust collection system 4 mainly includes a dust collection nozzle 402 and a dust collection tank 401. The dust collection nozzle 402 is installed in the cleaning cover to collect the dirt blown down during the cleaning process.

[0028] The actuator moves left and right along the reciprocating mechanism 6, and the rotary mechanism drives the actuator to rotate, achieving all-round cleaning and dust collection;

[0029] Imaging system 7: Uses a 3D laser profile sensor to promptly identify areas on the chassis surface that need cleaning during the cleaning process.

[0030] An outer edge 101 is provided at the edge of the protective cover 1 , and a fixing hole 102 is provided on the outer edge 101 , which facilitates the installation and fixing of the protective cover 1 during the cleaning process.

[0031] The dry ice tank 201 , the dust collection tank 401 and the control cabinet 3 are all located at the upper end of the protective cover 1 .

[0032] The rotary mechanism includes a first motor 5 and a connecting seat 8, the bottom of the connecting seat 8 is connected to the crossbeam 602, as shown in FIG. Figure 5 As shown, the upper end of the connecting seat 8 is connected to the protective cover 1 through the slewing support 801, the outer ring of the slewing support 801 is fixed to the connecting seat 8, the inner ring of the slewing support 801 is fixed to the protective cover 1, the first motor 5 is fixed to the protective cover 1, the first motor 5 is connected to the planetary reducer, the output shaft of the planetary reducer is engaged with the slewing support 801 through the gear, and the first motor 5 drives the beam 602 to rotate.

[0033] like Figure 4 As shown, a guide rail 603 and a lead screw 605 are provided at the bottom of the crossbeam 602, and a slider 604 cooperating with the guide rail 603 and a nut 606 cooperating with the lead screw 605 are provided at the upper end of the slide 607. There are two guide rails 603, and the lead screw 605 is located between the two guide rails 603. One end of the crossbeam 602 is provided with a second motor 601 for driving the lead screw 605 to rotate.

[0034] Among them, the two ends of the screw 605 are connected to the crossbeam 602 through bearings and bearing seats. A pulley is provided at one end of the screw 605. A pulley is provided on the output shaft of the reducer connected to the first motor 5. The two pulleys are driven by a belt. The first motor 5 drives the screw 605 to rotate, and the screw 605 drives the slide 607 to move back and forth horizontally through the nut seat 606.

[0035] A bracket 608 for supporting the dry ice nozzle 202 and the vacuum nozzle 402 is provided at the bottom of the slide 607 .

[0036] By controlling the first motor 5 and the second motor 601 , the cleaning position can be changed, and the rotation speed can be adjusted through a program.

[0037] Obviously, those skilled in the art may make various modifications and variations to the present invention without departing from the spirit and scope of the present invention. Thus, if such modifications and variations fall within the scope of the claims of the present invention and their equivalents, the present invention is intended to include such modifications and variations.

Claims

1. A reduction furnace chassis cleaning device, comprising a protective cover and a control cabinet, wherein an actuator is provided in the protective cover, and characterized in that: The actuator includes a dry ice blasting system, a dust collection system, a rotary mechanism, a reciprocating mechanism and an imaging system. The reciprocating mechanism includes a beam and a slide. The beam is arranged horizontally, and the upper end of the beam is fixed to the upper end of the protective cover through a rotary mechanism. The slide and the beam are slidably matched. The dry ice nozzle of the dry ice blasting system, the dust collection nozzle of the dust collection system, and the camera of the imaging system are all fixed to the bottom of the slide.

2. The reduction furnace bottom plate cleaning device according to claim 1, characterized in that: An outer edge is provided at the edge of the protective cover, and a fixing hole is provided on the outer edge.

3. The reduction furnace bottom plate cleaning device according to claim 1, characterized in that: The dry ice tank of the dry ice blasting system and the dust suction tank of the dust suction system are both located at the upper end of the protective cover.

4. The reduction furnace bottom plate cleaning device according to claim 1, characterized in that: The rotary mechanism includes a first motor and a connecting seat, the bottom of the connecting seat is connected to the crossbeam, the upper end of the connecting seat is connected to the protective cover through a rotary support, the first motor is fixed to the protective cover, and the first motor drives the connecting seat to rotate through the rotary support.

5. The reduction furnace bottom plate cleaning device according to claim 1, characterized in that: A guide rail and a lead screw are provided at the bottom of the crossbeam, a slider matched with the guide rail and a nut matched with the lead screw are provided at the upper end of the slide, and a second motor for driving the lead screw to rotate is provided at one end of the crossbeam.

6. The reduction furnace bottom plate cleaning device according to claim 1, characterized in that: A bracket for supporting a dry ice nozzle and a dust suction nozzle is provided at the bottom of the slide.

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