Flexible cleaning tool and wet process table

Abstract

The utility model discloses a flexible cleaning tool and a wet process table, and relates to the technical field of semiconductor processing, and the flexible cleaning tool comprises a main body structure, a retractable and expandable cleaning assembly, a first driving assembly and a second driving assembly; the cleaning assembly is rotationally mounted on the main body structure; the first driving assembly is mounted on the main body structure, is connected with the cleaning assembly and can drive the cleaning assembly to contract or expand; the second driving assembly is installed on the main body structure, connected with the cleaning assembly and capable of driving the cleaning assembly to rotate. The cleaning assembly achieves contraction and expansion functions through the first driving assembly, so that the cleaning assembly can adapt to the inner walls of the tank bodies of different sizes and make full contact with attached stubborn residues. And the second driving assembly is combined to drive the cleaning assembly to rotate, so that the inner wall of the tank body can be scraped and cleaned in all directions and at multiple angles, and the cleaning efficiency of stubborn residues is remarkably improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of semiconductor processing, in particular to a flexible cleaning tool and a wet bench. BACKGROUND

[0002] In an automated wet etching process, the wafer or basket is grasped by the robot body and immersed in a tank containing etching solution for cleaning and etching treatment. After a certain number of etching processes, if the use is suspended or different etching solution is used for the next etching process, the etching solution in the tank needs to be discharged and cleaned. The common cleaning method is to flush the used tank with a sprayer, and to clean the remaining material by blowing dry. For example, a cleaning method for a liquid tank in a scientific research type wet etching full-automatic system is disclosed in Chinese patent application CN118053795A.

[0003] Although the above cleaning method can meet the basic cleaning needs to a certain extent, the cleaning effect is often not ideal for the residual material attached to the inner wall of the tank. These residual materials that are not completely removed can adversely affect the precision of the subsequent etching process and the quality of the product.

[0004] Therefore, it is urgent to develop a more efficient cleaning tool to solve the problems in the prior art. CONTENT OF THE INVENTION

[0005] Therefore, the purpose of the present application is to provide a flexible cleaning tool and a wet bench to improve the cleaning effect in the tank and avoid adverse effects on the precision of the subsequent etching process and the quality of the product.

[0006] To achieve the above technical purpose, the present application provides a flexible cleaning tool, which comprises a main body structure, a retractable and expandable cleaning assembly, a first driving assembly and a second driving assembly.

[0007] The cleaning assembly is rotatably installed on the main body structure.

[0008] The first driving assembly is installed on the main body structure and connected with the cleaning assembly, and can drive the cleaning assembly to retract or expand.

[0009] The second driving assembly is installed on the main body structure and connected with the cleaning assembly, and can drive the cleaning assembly to rotate.

[0010] Further, the cleaning assembly comprises a fixed part, a movable part and at least two cleaning parts.

[0011] The movable part is slidingly connected with the fixed part in the length direction of the fixed part, and is fixedly connected with the fixed part in the circumferential direction of the fixed part.

[0012] The fixing member is rotationally connected with the main body structure along a circumferential direction of the fixing member;

[0013] The at least two cleaning members are circumferentially distributed around the fixing member, and each first end is hingedly connected with the movable member;

[0014] A connecting rod is arranged between each cleaning member and the fixing member;

[0015] A first end of the connecting rod is hingedly connected with the cleaning member, and a second end is hingedly connected with the fixing member;

[0016] The first driving assembly is connected with the movable member, and is configured to control the contraction or expansion movement between the cleaning members by driving the movable member to slide;

[0017] The second driving assembly is connected with the movable member or the fixing member, and is configured to drive the movable member or the fixing member to rotate.

[0018] Further, the movable member is sleeved outside the fixing member;

[0019] The movable member is provided with a first limiting structure;

[0020] The fixing member is provided with a second limiting structure matched with the first limiting structure, and is configured to limit the sliding displacement of the movable member on the fixing member.

[0021] Further, the first limiting structure is a limiting groove;

[0022] The second limiting structure is a limiting protrusion extending into the limiting groove.

[0023] Further, the first driving assembly includes a telescopic driving member and an elastic return member;

[0024] The elastic return member is mounted between the fixing member and the movable member, and is configured to provide an elastic force for the movement of the movable member towards the contraction of the cleaning members;

[0025] The telescopic driving member is mounted on the main body structure, and a telescopic end is capable of contacting the movable member, and is configured to drive the movable member to move towards the compression of the elastic return member, so as to expand the cleaning members.

[0026] Further, the elastic return member is a compression spring, is sleeved outside the fixing member, and a first end is in contact with the fixing member, and a second end is in contact with the movable member.

[0027] Further, the main body structure is fixed with a shaft;

[0028] The fixing member is rotationally sleeved outside the shaft.

[0029] The first driving assembly further comprises a driving connecting member;

[0030] The first end of the driving connecting member is connected with the telescopic end of the telescopic driving member, and the second end is movably sleeved on the outer side of the shaft rod and can contact with the end of the movable member away from the elastic reset member.

[0031] Further, the cleaning member comprises a connecting arm and a cleaning arm;

[0032] The first end of the connecting arm is hingedly connected with the movable member;

[0033] The first end of the cleaning arm is hingedly connected with the second end of the connecting arm through a first torsional elastic member;

[0034] The first end of the connecting arm is hingedly connected with the movable member;

[0035] Further, the cleaning arm comprises at least two arm rods;

[0036] The adjacent two arm rods are hingedly connected through a second torsional elastic member.

[0037] Further, the cleaning structure is mounted on each cleaning member, or each cleaning member is externally provided with the cleaning structure of a retractable and expandable deformation sleeve structure.

[0038] Further, the outer surface of the cleaning structure is arrayed with a plurality of convex points;

[0039] The outer surface of the cleaning structure is covered with a detachable cleaning cloth.

[0040] Further, the second driving assembly comprises a rotary driving member and a transmission assembly;

[0041] The rotary driving member is connected with the movable member through the transmission assembly, and is used to drive the movable member to rotate.

[0042] Further, the transmission assembly comprises a driving gear and a driven gear;

[0043] The driving gear is fixed on the driving shaft of the rotary driving member;

[0044] The driven gear is fixed on the movable member and is engaged with the driving gear.

[0045] Further, the main body structure comprises a first mounting plate, a connecting plate and a second mounting plate;

[0046] The first mounting plate is vertically connected to the first side of the connecting plate;

[0047] The second mounting plate is connected perpendicularly to a second side of the connecting plate opposite to the first side;

[0048] The second mounting plate is parallel to the first mounting plate and is located at a lower position of the first mounting plate, so that the main body structure as a whole is Z-shaped.

[0049] The application also discloses a wet bench, comprising a wet bench body and the flexible cleaning tool.

[0050] The wet bench body has an etching chamber.

[0051] The etching chamber has an etching groove and a mechanical hand.

[0052] The mechanical hand can grab the flexible cleaning tool and extend into the etching groove to clean the inner wall of the etching groove.

[0053] From the above technical solutions, the flexible cleaning tool designed by the application has the following beneficial effects:

[0054] 1. The cleaning assembly realizes the functions of contraction and expansion through the first driving assembly, so that it can adapt to the inner walls of grooves of different sizes and fully contact with stubborn residues. In combination with the second driving assembly, the cleaning assembly can be driven to rotate, so that the inner walls of the grooves can be scraped and washed in all directions and at multiple angles, and the cleaning efficiency of stubborn residues is significantly improved.

[0055] 2. Since the cleaning assembly has the functions of contraction and expansion, the tool can flexibly adjust its size to adapt to grooves of different specifications. Such flexibility not only improves the universality of the tool, but also reduces the cost of additionally configuring special cleaning tools due to the replacement of grooves.

[0056] 3. The flexible cleaning tool integrates the first driving assembly and the second driving assembly, can realize high automation of the cleaning process, can be used in combination with the mechanical hand on the original wet bench, and realizes automatic operation, which not only improves the cleaning efficiency, but also reduces the potential risks caused by human operation errors. BRIEF DESCRIPTION OF DRAWINGS

[0057] In order to more clearly illustrate the technical solutions in the embodiments of the application or the prior art, the drawings needed to be used in the embodiment or prior art description will be briefly introduced. Obviously, the drawings in the following description are only some embodiments of the application, and those skilled in the art can obtain other drawings according to these drawings without creative labor.

[0058] Figure 1 A schematic diagram of the flexible cleaning tool without a cleaning structure in a contracted state in the application;

[0059] Figure 2 An expanded state schematic view of a flexible cleaning tool without a cleaning structure provided in the present application;

[0060] Figure 3 A contracted state schematic view of a cleaning structure of a flexible cleaning tool provided in the present application;

[0061] Figure 4 An expanded state schematic view of a cleaning structure of a flexible cleaning tool provided in the present application;

[0062] Figure 5 A first partial structure schematic view of a flexible cleaning tool provided in the present application;

[0063] Figure 6 A second partial structure schematic view of a flexible cleaning tool provided in the present application;

[0064] Figure 7 A third partial structure schematic view of a flexible cleaning tool provided in the present application;

[0065] In the figure: 1, main structure; 11, first mounting plate; 12, connecting plate; 13, second mounting plate; 14, shaft; 141, stop flange; 2, cleaning assembly; 21, fixed piece; 211, second limiting structure; 212, second flange structure; 22, movable piece; 221, first limiting structure; 222, first flange structure; 23, cleaning piece; 231, connecting arm; 232, arm rod; 233, cleaning arm; 234, first torsional elastic piece; 235, second torsional elastic piece; 24, connecting rod; 3, first driving assembly; 31, telescopic driving piece; 32, elastic reset piece; 33, driving connecting piece; 4, second driving assembly; 41, rotary driving piece; 42, transmission assembly; 421, driven gear; 422, driving gear; 5, cleaning structure; 51, convex point. DETAILED DESCRIPTION

[0066] The technical solutions of the embodiments of the present application will be described clearly and completely in combination with the accompanying drawings. Obviously, the described embodiments are only some of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative work fall within the scope of protection of the present application.

[0067] In the description of the embodiments of the present application, it should be noted that the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc., indicating the orientation or positional relationship, are based on the orientation or positional relationship shown in the accompanying drawings. They are only for the convenience of describing the embodiments of the present application and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operate in a specific orientation. Therefore, they should not be understood as limiting the embodiments of the present application. In addition, the terms "first", "second", and "third" are used for descriptive purposes only and should not be understood as indicating or implying relative importance.

[0068] In the description of the embodiments of the present application, it should be noted that, unless otherwise expressly specified or limited, the terms "installed," "connected," and "connected" should be understood in a broad sense. For example, they can refer to fixed connections, replaceable connections, or integral connections. They can also refer to mechanical connections or electrical connections. They can also refer to direct connections or indirect connections through an intermediate medium. They can also refer to internal connections between two components. For those skilled in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific circumstances.

[0069] An embodiment of the present application discloses a flexible cleaning tool.

[0070] See also Figure 1 as well as Figure 2 , an embodiment of a flexible cleaning tool provided in the embodiments of the present application includes:

[0071] A main structure 1, a retractable and expandable cleaning component 2, a first driving component 3 and a second driving component 4.

[0072] The cleaning component 2 is rotatably mounted on the main structure 1; the first driving component 3 is mounted on the main structure 1 and connected to the cleaning component 2, and can drive the cleaning component 2 to contract or expand; the second driving component 4 is mounted on the main structure 1 and connected to the cleaning component 2, and can drive the cleaning component 2 to rotate.

[0073] The flexible cleaning tool designed in this application has the following beneficial effects:

[0074] 1. The cleaning component 2, through the first drive component 3, can contract and expand, adapting to the inner wall of the tank of varying sizes and fully contacting stubborn residue. Combined with the second drive component 4, the cleaning component 2 rotates, scraping and cleaning the inner wall of the tank from all directions and angles, significantly improving the removal efficiency of stubborn residue.

[0075] 2、Due to the contraction and expansion ability of the cleaning assembly 2, the tool can flexibly adjust its size to adapt to different specifications of the groove. This flexibility not only improves the versatility of the tool, but also reduces the cost of additional special cleaning tools due to groove replacement.

[0076] 3、The flexible cleaning tool integrates the first driving assembly 3 and the second driving assembly 4, which can realize high automation of the cleaning process, can be used with the original wet process machine, and can realize automatic operation. This not only improves the cleaning efficiency, but also reduces the potential risks caused by human operation errors.

[0077] The above is an embodiment one of a flexible cleaning tool provided by the embodiment of the present application, and the following is an embodiment two of a flexible cleaning tool provided by the embodiment of the present application, please refer to Figures 1 to 7 .

[0078] Based on the above embodiment one scheme:

[0079] Further, as Figure 5 shown, for the design of the cleaning assembly 2, it includes a fixed part 21, a movable part 22, and at least two cleaning parts 23.

[0080] The movable part 22 is slidingly connected with the fixed part 21 in the length direction of the fixed part 21, and is fixedly connected with the fixed part 21 in the circumferential direction of the fixed part 21; the fixed part 21 is rotationally connected with the main body structure 1 along the circumferential direction of the fixed part 21.

[0081] The at least two cleaning parts 23 are circumferentially distributed around the fixed part 21, and each first end is hingedly connected with the movable part 22; a connecting rod 24 is arranged between each cleaning part 23 and the fixed part 21; the first end of the connecting rod 24 is hingedly connected with the cleaning part 23, and the second end is hingedly connected with the fixed part 21. The first driving assembly 3 is connected with the movable part 22, and is used to control the contraction or expansion movement between the cleaning parts 23 by driving the movable part 22 to slide; the second driving assembly 4 is connected with the movable part 22 or the fixed part 21, and is used to drive the movable part 22 or the fixed part 21 to rotate.

[0082] When the first drive assembly 3 drives the movable part 22 to slide, since the cleaning part 23 is hinged to the movable part 22, and the connecting rod 24 is hinged to the cleaning part 23 and the fixed part 21 respectively, this will cause the various cleaning parts 23 to undergo contraction or expansion movement. In the contracted state, the cleaning assembly 2 can easily enter the interior of the tank body, avoid collision with the edge of the tank body, and smoothly reach the cleaning position; while in the expanded state, the cleaning part 23 can fit tightly against the inner wall of the tank body, and comprehensively scrape and clean the inner wall of the tank body, leaving no corner untouched. Contraction movement refers to the movement of the cleaning parts 23 away from one end of the movable part 22 and closer to each other, and expansion movement refers to the movement of the cleaning parts 23 away from one end of the movable part 22 and away from each other; the number of cleaning parts 23 can be selected and varied according to actual needs, and there is no specific restriction.

[0083] Furthermore, if Figure 5 As shown, the movable part 22 and the fixed part 21 can both be sleeve structures. The movable part 22 is slidably mounted on the fixed part 21. In addition to this nested sliding setting, it can also be designed as a slide rail sliding matching method according to actual needs. The nested sliding matching method is more compact than the slide rail sliding matching method.

[0084] The movable part 22 is provided with a first limiting structure 221, and the fixed part 21 is provided with a second limiting structure 211 that cooperates with the first limiting structure 221, which is used to limit the sliding displacement of the movable part 22 on the fixed part 21. The setting of the limiting structure is very important, which can ensure that the sliding displacement of the movable part 22 on the fixed part 21 is within a reasonable range. If the sliding displacement of the movable part 22 is too large, it may cause excessive contraction or expansion between the cleaning part 23. In the contracted state, it may not be able to enter the groove body smoothly. In the expanded state, it may cause excessive extrusion on the inner wall of the groove body, damaging the groove body or the cleaning part 23; if the sliding displacement is too small, the cleaning part 23 may not be able to fit tightly against the inner wall of the groove body, affecting the cleaning effect. Therefore, through the cooperation of the first limiting structure 221 and the second limiting structure 211, the sliding displacement of the movable part 22 on the fixed part 21 can be precisely controlled, ensuring the normal operation of the cleaning component 2 and a good cleaning effect.

[0085] Furthermore, if Figure 5 As shown, the first limiting structure 221 is a limiting groove, and the second limiting structure 211 is a limiting protrusion that extends into the limiting groove. The cooperation between the limiting groove and the limiting protrusion is simple and effective. The limiting groove provides a sliding path for the limiting protrusion, so that the movable member 22 can only slide on the fixed member 21 along the direction of the limiting groove, thereby ensuring the stability and directionality of the sliding of the movable member 22. At the same time, the length of the limiting groove determines the maximum sliding displacement of the movable member 22. When the limiting protrusion slides to the end of the limiting groove, the movable member 22 can no longer slide, thereby achieving precise limitation of the sliding displacement of the movable member 22.

[0086] The limiting protrusion can be a pressable elastic protrusion, such as the elastic protrusion between the telescopic rods of a folding umbrella. In this design, the operator can press the elastic protrusion to make it disengage from the limiting groove, thus flexibly separating the movable part 22 from the fixed part 21. Alternatively, the lower end of the limiting groove can be designed as an opening, which is then blocked by one end of the connected cleaning part 23, thus achieving the limiting function and facilitating the separation of the movable part 22 from the fixed part 21.

[0087] Further, as shown in Figure 5 and Figure 7 , for the design of the first driving assembly 3, it includes a telescopic driving part 31 and an elastic return part 32. The elastic return part 32 is installed between the fixed part 21 and the movable part 22, and is used to provide an elastic force for the movement of the movable part 22 towards the direction of retracting the cleaning parts 23, i.e., to make the cleaning parts 23 initially in the retracted state by using the elastic return part 32.

[0088] The telescopic driving part 31 is installed on the main structure 1, and the telescopic end can contact the movable part 22, and is used to drive the movable part 22 to move towards the direction of compressing the elastic return part 32, so as to expand the cleaning parts 23.

[0089] In actual work process, when the telescopic driving part 31 is not started, the elastic return part 32 is in a natural stretched state, and the cleaning parts 23 are kept in the retracted state under the action of the elastic return part 32, which can avoid unnecessary wear of the cleaning parts 23 in the non-working state, and also facilitates the tool to enter the groove. After the tool enters the groove, the telescopic driving part 31 is started, the telescopic end of the telescopic driving part 31 extends and contacts the movable part 22, and pushes the movable part 22 to move towards the direction of compressing the elastic return part 32 against the elastic force of the elastic return part 32. With the movement of the movable part 22, the cleaning parts 23 are gradually expanded and fully contact the inner wall surface of the groove to be cleaned, and then realize the cleaning function under the driving action of the second driving assembly 4.

[0090] The design of the telescopic driving part 31 combined with the elastic return part 32 can realize the non-fixed connection between the telescopic driving part 31 and the cleaning assembly 2, thus realizing the contact driving of the separable type, and avoiding the interference with the rotation of the cleaning assembly 2.

[0091] Further, as shown in Figure 5As shown, the elastic reset member 32 is a compression spring, which is sleeved outside the fixed member 21, and the first end is in contact with the fixed member 21, and the second end is in contact with the movable member 22. The compression spring is simple and practical, and can stably provide the movable member 22 with the elastic force in the direction of shrinking each cleaning member 23. It is sleeved outside the fixed member 21, which not only ensures the stability of the spring during work, but also does not affect the sliding of the movable member 22 on the fixed member 21. Moreover, the compression spring has good elastic recovery capacity, and after the telescopic driving member 31 stops working, it can quickly pull the movable member 22 back to the initial position, so that the cleaning member 23 restores the shrinking state.

[0092] Further, as shown in Figure 5 and Figure 7 , the shaft 14 is fixed on the main body structure 1, and the fixed member 21 is rotatably sleeved outside the shaft 14. The shaft 14 provides support and guidance for the rotation of the fixed member 21, so that the fixed member 21 can stably rotate around the shaft 14, thereby driving the cleaning assembly 2 to rotate and clean. At the same time, the arrangement of the shaft 14 also ensures the flexibility and accuracy of the rotation of the fixed member 21.

[0093] Taking the nested design of the fixed member 21 and the shaft 14 as an example, in order to enable the telescopic driving member 31 to drive the movable member 22 along the axial direction of the shaft 14, and to better apply the required force for the movement of the movable member 22, the first driving assembly 3 also includes a driving connecting member 33; the first end of the driving connecting member 33 is connected with the telescopic end of the telescopic driving member 31, and the second end is movably sleeved outside the shaft 14, and can be in contact with the end of the movable member 22 away from the elastic reset member 32. As shown in Figure 7 , in order to facilitate the installation of the fixed member 21, one end of the shaft 14 is detachably connected with the main body structure 1, and the other end is provided with a stop flange 141 to prevent the fixed member 21 from being separated from the shaft 14; of course, the stop flange 141 can also be detachably connected with the shaft 14, and the specific connection is not limited.

[0094] When the telescopic end of the telescopic driving member 31 is extended, the second end of the driving connecting member 33 pushes the movable member 22 to move along the shaft 14 through the driving. Since the fixed member 21 is rotationally sleeved outside the shaft 14, when the movable member 22 moves to make the cleaning member 23 expand to contact the inner wall of the groove for cleaning, the shaft 14 provides stable support and rotation basis for the whole structure. The driving connecting member 33 is movably sleeved outside the shaft 14, which can flexibly transmit the power of the telescopic driving member 31 to the movable member 22, so as to ensure the smooth sliding of the movable member 22 on the shaft 14. Meanwhile, this connection mode makes the driving connecting member 33 relatively move on the shaft 14 along with the telescopic end of the telescopic driving member 31 during the working process, which avoids the problems of jamming or damage caused by inflexible connection. When the telescopic rod of the telescopic driving member 31 is reset and retracted, the elastic reset member 32 pushes the movable member 22 to return to the initial position, so as to prepare for the next cleaning work.

[0095] Further, as shown in Figure 6 , for the design of the cleaning member 23, it includes a connecting arm 231 and a cleaning arm 233; the first end of the connecting arm 231 is hingedly connected with the movable member 22; the first end of the cleaning arm 233 is hingedly connected with the second end of the connecting arm 231 through a first torsional elastic member 234 (torsion spring); and the first end of the connecting rod 24 is hingedly connected with the connecting arm 231.

[0096] The connecting arm 231 plays a connecting role, realizes swinging under the sliding driving of the movable member 22, and further drives the connected cleaning arm 233 to realize contraction or expansion movement. The cleaning arm 233 is hingedly connected with the connecting arm 231 through the first torsional elastic member 234, realizes elastic rotation reset connection, and this design makes the cleaning arm 233 have a certain elastic rotation angle, which can more flexibly adhere to the inner wall of the groove, so as to improve the cleaning effect.

[0097] In order to facilitate the hinging, one end of the movable member 22 is provided with a first flange structure 222 for facilitating the hinging with the connecting arm 231, and one end of the fixed member 21 is provided with a second flange structure 212 for facilitating the hinging with the connecting rod 24. The elastic reset member 32 can be arranged between the first flange structure 222 and the second flange structure 212.

[0098] Further, as shown in Figure 6 , the cleaning arm 233 includes at least two arm rods 232, and adjacent two arm rods 232 are hingedly connected through a second torsional elastic member 235 (torsion spring).

[0099] The design of the at least two arm poles 232 being hinged by the second torsional elastic member 235 gives the cleaning arm 233 higher flexibility and adaptability. When cleaning the inner wall of the tank, when the cleaning arm 233 encounters irregular shapes, protrusions or depressions inside the tank, the relative rotation between the arm poles 232 can occur according to the actual situation, so that the cleaning arm 233 can better fit the complex profile of the inner wall of the tank.

[0100] The number of arm poles 232 is not limited, and the distribution mode can be designed according to actual needs. Taking two arm poles 232 as an example, the first arm pole 232 hinged with the connecting arm 231 can be arranged flush or inwardly buckled with the connecting arm 231. Taking the flush arrangement as an example, the first arm pole 232 has the same angle with the connecting arm 231 relative to the connecting rod 24 in the initial state, and the second arm pole 232 has a certain angle with the first arm pole 232. Meanwhile, each arm pole 232 can be circular arc-shaped or linear, as long as it ensures that adjacent cleaning members 23 do not interfere with each other, and those skilled in the art can design according to actual needs.

[0101] Further, in order to better achieve cleaning, one way is that each cleaning member 23 is respectively provided with a cleaning structure 5; when the cleaning member 23 expands, the cleaning structure 5 thereon can be attached to the inner wall of the tank, so as to wipe the inner wall of the tank by the cleaning cloth. The cleaning structure 5 can be a sleeve structure directly wrapped on the cleaning member 23, or a block structure directly attached to the cleaning member 23.

[0102] Another way is that, as shown in Figure 3 and Figure 4 , each cleaning member 23 is provided with a cleaning structure 5 of a sleeve structure which can be expanded and contracted; when the cleaning member 23 expands, the cleaning structure 5 can be expanded to make the outer circumferential surface of the cleaning structure 5 attached to the inner wall of the tank, so as to wipe the inner wall of the tank by the cleaning structure 5.

[0103] The cleaning structure 5 mentioned above can be made of sponge or rubber, and the specific material is not limited.

[0104] Further, as shown in Figure 3 and Figure 4 , the outer surface of the cleaning sleeve is provided with a plurality of convex points 51, which can increase the friction between the cleaning structure 5 and the inner wall of the tank, and better clean the stubborn residues on the inner wall of the tank during the cleaning process. When the cleaning sleeve is attached to the inner wall of the tank and rotates with the cleaning member 23, the convex points 51 can generate stronger friction and scraping force on the residues, so that the cleaning effect is more remarkable. Moreover, the convex points 51 can also disperse the pressure, so as to avoid local excessive pressure of the cleaning sleeve and damage the cleaning sleeve, thereby prolonging the service life of the cleaning sleeve.

[0105] In the cleaning process, the cleaning structure 5 can be contaminated with a large amount of dirt and impurities, in order to facilitate cleaning and reuse, the cleaning structure 5 is coated with a detachable cleaning cloth (lint-free cloth) (not shown in the figure), which can be pasted with magic tape, and the specific mode is not limited.

[0106] Further, as shown in Figure 7 , for the design of the second driving assembly 4, it includes a rotating driving part 41 and a transmission assembly 42; the rotating driving part 41 is connected with the movable part 22 through the transmission assembly 42, and is used to drive the movable part 22 to rotate.

[0107] The telescopic driving part 31 and the rotating driving part 41 of the present application can be electric (pneumatic) push rods and (electric / pneumatic) rotary motors respectively, and the specific mode is not limited.

[0108] Further, the transmission assembly 42 includes a driving gear 422 and a driven gear 421; the driving gear 422 is fixed on the driving shaft of the rotating driving part 41; the driven gear 421 is fixed on the movable part 22 and is engaged with the driving gear 422.

[0109] The length of the driven gear 421 is designed to be longer, so as to ensure that it can be engaged with the driving gear 422 when it follows the movable part 22 to slide. Conversely, the length of the driving gear 422 can be designed to be longer, and then the driven gear 421 can be ensured to be engaged with the driving gear 422 when it follows the movable part 22 to slide.

[0110] Further, as shown in Figure 7 , the main body structure 1 includes a first mounting plate 11, a connecting plate 12 and a second mounting plate 13; the first mounting plate 11 is connected perpendicularly to the first side of the connecting plate 12; the second mounting plate 13 is connected perpendicularly to the second side of the connecting plate 12 opposite to the first side; the second mounting plate 13 is parallel to the first mounting plate 11 and is located below the first mounting plate 11, so that the main body structure 1 as a whole is Z-shaped.

[0111] The Z-shaped main body structure 1 is designed so that the first driving assembly 3 and the second driving assembly 4 have a reasonable layout in space; the telescopic driving part 31 of the first driving assembly 3 can be mounted at the bottom or the first side of the first mounting plate 11, and the rotating driving part 41 of the second driving assembly 4 can be mounted at the top or the second side of the second mounting plate 13, thereby avoiding mutual interference and making the structure more compact.

[0112] The present application also discloses a wet bench, which comprises a wet bench body and a flexible cleaning tool; the wet bench body has an etching chamber; the etching chamber has an etching groove and a mechanical hand; the mechanical hand can grab the flexible cleaning tool and extend it into the etching groove to clean the inner wall of the etching groove.

[0113] After the robot picks up the flexible cleaning tool and enters the etching groove, the first driving assembly 3 drives the cleaning members 23 to expand, so that the cleaning cloth outside the cleaning structure 5 adheres to the inner wall of the etching groove. Then the second driving assembly 4 drives the cleaning assembly 2 to rotate to wipe the inner wall. After wiping is completed, the cleaning members 23 are reset to be contracted, so that the cleaning structure 5 does not contact the inner wall, thereby avoiding that the pollutants are attached to the inner wall of the etching groove again during the extraction process.

[0114] The above describes in detail the flexible cleaning tool and the wet bench provided by the application. For those skilled in the art, according to the idea of the embodiments of the application, the specific implementation manners and application ranges can be changed. In summary, the content of the specification should not be understood as a limitation of the application.

Claims

1. A flexible cleaning tool, characterized in that: It comprises a main structure (1), a retractable and expandable cleaning component (2), a first driving component (3) and a second driving component (4); The cleaning component (2) is rotatably mounted on the main structure (1); The first driving component (3) is mounted on the main structure (1) and connected to the cleaning component (2), and is capable of driving the cleaning component (2) to contract or expand; The second driving component (4) is mounted on the main structure (1) and connected to the cleaning component (2), and is capable of driving the cleaning component (2) to rotate.

2. The flexible cleaning tool according to claim 1, characterized in that The cleaning assembly (2) comprises a fixed part (21), a movable part (22), and at least two cleaning parts (23); The movable member (22) is slidably connected to the fixed member (21) in the longitudinal direction of the fixed member (21), and is fixedly connected to the fixed member (21) in the circumferential direction of the fixed member (21); The fixing member (21) is rotatably connected to the main structure (1) along its own circumferential direction; At least two cleaning members (23) are distributed around the circumference of the fixed member (21), and the first end of each cleaning member is hinged to the movable member (22); A connecting rod (24) is provided between each cleaning member (23) and the fixing member (21); The first end of the connecting rod (24) is hinged to the cleaning member (23), and the second end is hinged to the fixing member (21); The first driving assembly (3) is connected to the movable member (22) and is used to control the contraction or expansion movement between the cleaning members (23) by driving the movable member (22) to slide; The second driving assembly (4) is connected to the movable part (22) or the fixed part (21) and is used to drive the movable part (22) or the fixed part (21) to rotate.

3. The flexible cleaning tool according to claim 2, characterized in that: The movable part (22) is slidably mounted outside the fixed part (21); The movable member (22) is provided with a first limiting structure (221); The fixing member (21) is provided with a second limiting structure (211) that cooperates with the first limiting structure (221) and is used to limit the sliding displacement of the movable member (22) on the fixing member (21).

4. The flexible cleaning tool according to claim 3, characterized in that: The first limiting structure (221) is a limiting groove; The second limiting structure (211) is a limiting protrusion extending into the limiting groove.

5. The flexible cleaning tool according to claim 3, characterized in that: The first driving assembly (3) comprises a telescopic driving member (31) and an elastic reset member (32); The elastic reset member (32) is installed between the fixed member (21) and the movable member (22) and is used to provide an elastic force for the movable member (22) to move in a direction of retracting each cleaning member (23); The telescopic driving member (31) is mounted on the main structure (1), and the telescopic end is capable of contacting the movable member (22) to drive the movable member (22) to move in a direction of compressing the elastic reset member (32) to expand each of the cleaning members (23).

6. The flexible cleaning tool according to claim 5, characterized in that The elastic reset member (32) is a compression spring, which is sleeved outside the fixing member (21), with a first end in contact with and abutting against the fixing member (21), and a second end in contact with and abutting against the movable member (22).

7. The flexible cleaning tool according to claim 5, characterized in that A shaft (14) is fixed to the main structure (1); The fixing member (21) is rotatably mounted on the outside of the shaft (14); The first drive assembly (3) further includes a drive connection member (33); The first end of the driving connecting member (33) is connected to the telescopic end of the telescopic driving member (31), and the second end is movably sleeved outside the shaft (14) and can contact an end of the movable member (22) away from the elastic reset member (32).

8. The flexible cleaning tool according to claim 2, characterized in that The cleaning member (23) comprises a connecting arm (231) and a cleaning arm (233); The first end of the connecting arm (231) is hinged to the movable member (22); The first end of the cleaning arm (233) is hinged to the second end of the connecting arm (231) via a first torsional elastic member (234); The first end of the connecting rod (24) is hinged to the connecting arm (231).

9. The flexible cleaning tool according to claim 8, characterized in that The cleaning arm (233) comprises at least two arm rods (232); Two adjacent arm rods (232) are hingedly connected via a second torsional elastic member (235).

10. The flexible cleaning tool according to claim 2, characterized in that A cleaning structure (5) is installed on each of the cleaning members (23), or a cleaning structure (5) having a same shrinkable, expandable and deformable sleeve structure is provided outside each of the cleaning members (23).

11. The flexible cleaning tool according to claim 10, characterized in that The outer surface of the cleaning structure (5) is provided with a plurality of convex points (51) in an array; The outer surface of the cleaning structure (5) is covered with a detachable cleaning cloth.

12. The flexible cleaning tool according to claim 2, characterized in that The second drive assembly (4) comprises a rotary drive member (41) and a transmission assembly (42); The rotary drive member (41) is connected to the movable member (22) via the transmission assembly (42) and is used to drive the movable member (22) to rotate.

13. The flexible cleaning tool according to claim 12, characterized in that The transmission assembly (42) includes a driving gear (422) and a driven gear (421); The driving gear (422) is fixed to the driving shaft of the rotating driving member (41); The driven gear (421) is fixed to the movable member (22) and meshes with the driving gear (422).

14. The flexible cleaning tool according to claim 12, characterized in that The main structure (1) comprises a first mounting plate (11), a connecting plate (12) and a second mounting plate (13); The first mounting plate (11) is vertically connected to a first side surface of the connecting plate (12); The second mounting plate (13) is vertically connected to a second side surface of the connecting plate (12) opposite to the first side surface; The second mounting plate (13) is parallel to the first mounting plate (11) and is located below the first mounting plate (11), so that the main structure (1) is Z-shaped as a whole.

15. Wet bench, characterized in that It comprises a wet bench body and a flexible cleaning tool as claimed in any one of claims 1 to 14; The wet process table body has an etching chamber; The etching chamber is provided with an etching tank and a robot; The robot arm can grab the flexible cleaning tool and extend it into the etching groove to clean the inner wall of the etching groove.

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