Insulation clamp, electronic spraying device and ion implantation equipment
By setting an insulating clamp on the clamp rod, the problem of contact short circuit due to thermal deformation of the clamp is solved, and the stable operation of the ion implantation equipment and the improvement of the insulation performance are achieved.
Patent Information
- Application Number
- CN202422553568.8
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-22
- Publication Date
- 2025-10-17
- Estimated Expiration
- 2034-10-22
AI Technical Summary
The existing clamp rods are deformed due to heating, which causes a short circuit between adjacent clamps, thus affecting the normal operation of the ion implantation equipment.
An insulating clamp is used. By setting the clamp body made of insulating material on the clamp rod, a set distance is ensured between the clamp rods to avoid mutual contact. The clamp body adopts a two-half structure for easy installation.
It effectively prevents the clamp from short-circuiting due to thermal deformation, ensures the stable operation of the ion implantation equipment, and improves the insulation performance and safety of the equipment.
Smart Images
Figure CN223442094U_ABST
Abstract
Description
TECHNICAL FIELD
[0001] The utility model relates to a semiconductor technical field, especially a kind of insulating clamp, electronic shower device and ion implantation equipment. BACKGROUND
[0002] Ion implantation is a very important doping technology in modern integrated circuit manufacturing, which injects doping elements into semiconductor wafer by ion implantation equipment in the form of ion acceleration, changes its conductive characteristics and finally forms the required device structure. Ion implantation equipment generally includes ion source, ion extraction and mass analyzer, acceleration tube, scanning system, process cavity and high vacuum system, the high vacuum system is used to form negative pressure environment in its process cavity, the ion source generates ion beam and separates impurity ions through ion extraction and mass analyzer, then the ion beam is accelerated through acceleration tube and enters the process cavity to bombard wafer surface, realizing ion implantation.
[0003] In ion implantation process, since positively charged ion beam is used to implant wafer, doping ion beam will generate charge accumulation on wafer surface, which will cause uneven doping and gate oxide breakdown, etc. Therefore, ion beam needs to be neutralized in ion implantation machine.
[0004] The existing means is to introduce electrons into the process cavity through electronic shower device, which will be integrated into ion beam under the attraction of ion beam positive potential. Electronic shower device generates hot electrons through filament. In order to provide sufficient hot electrons, the electronic shower device will be provided with multiple filaments, and the installation of filaments needs to be fixed by pliers, so it is necessary to adaptively set multiple pliers. The plier rod of existing pliers is usually in long strip structure, and the local part of plier rod has bending structure. When the filament is heated, the pliers supplying filament power are easy to contact with the plier rod of adjacent pliers due to deformation after heating, thereby causing short circuit phenomenon.
[0005] Therefore, based on the above technical problems, an insulating clamp, electronic shower device and ion implantation equipment are needed, which can improve the short circuit phenomenon caused by the contact of adjacent pliers due to thermal deformation by the setting of insulating clamp. UTILITY MODEL CONTENTS
[0006] The utility model aims at providing an insulating clamp, electronic shower device and ion implantation equipment, which is installed on adjacent pliers to prevent adjacent pliers from approaching each other and avoid short circuit caused by the contact of adjacent pliers due to thermal deformation.
[0007] The utility model provides an insulating clamp, which comprises: clamp body;
[0008] The clamp body is made of insulating material;
[0009] The clamp body is provided with at least two mounting through holes for accommodating pincers.
[0010] The adjacent mounting through holes have a set distance.
[0011] Optionally, the clamp body comprises a first clamp piece and a second clamp piece, the first clamp piece and the second clamp piece are detachably spliced to form the clamp body, the first clamp piece is provided with a first groove on a splicing surface thereof, the second clamp piece is provided with a second groove on a splicing surface thereof, and one first groove and one second groove form the mounting through hole after the first clamp piece and the second clamp piece are spliced.
[0012] Optionally, the opening directions of the mounting through holes are parallel.
[0013] Optionally, the clamp body is in a strip shape, the mounting through holes are arranged along the length direction of the clamp body, and the opening directions of the mounting through holes are perpendicular to the length direction of the clamp body.
[0014] Optionally, the two ends of the clamp body along the length direction are in outwardly protruding curved surface structures.
[0015] Optionally, the set distance between the adjacent mounting through holes along the length direction of the clamp body is 10-15 mm.
[0016] Optionally, the size of the clamp body along the length direction is 40-50 mm.
[0017] Optionally, the size of the clamp body along the width direction is 20-30 mm, the width direction of the clamp body is perpendicular to the length direction of the clamp body and perpendicular to the opening direction of the mounting through hole.
[0018] The utility model also provides an electronic spraying device, the electronic spraying device includes at least two groups of pincers, the pincer rod of a pincer passes through a mounting through hole on the clamp body, and the pincer rod of another pincer passes through another mounting through hole on the clamp body.
[0019] The utility model also provides an ion implantation equipment, the ion implantation equipment is installed above-mentioned electronic spraying device.
[0020] In the utility model, a plurality of mounting through holes are arranged on the insulation clamp for the pincer rod of the pincers to pass through, the adjacent pincers can be prevented from approaching each other, and short circuit caused by the contact of the adjacent pincers due to thermal deformation can be avoided.In addition, the insulation clamp is provided with a two-half structure, and the installation of the insulation clamp is facilitated. DRAWINGS
[0021] Figure 1 Structure diagram of the tongs of one embodiment of the utility model;
[0022] Figure 2 Structure diagram of the assembly of the insulation clamp and the tongs of one embodiment of the utility model;
[0023] Figure 3 Structure diagram of the insulation clamp of one embodiment of the utility model;
[0024] Figure 4 Structure diagram of the explosion of the insulation clamp of one embodiment of the utility model;
[0025] Figure 5 Structure diagram of the insulation clamp of another embodiment of the utility model.
[0026] In the drawings:
[0027] 100-flange plate;
[0028] 200-first tongs; 210-first tongs rod; 220-second tongs rod;
[0029] 300-second tongs; 310-third tongs rod; 320-fourth tongs rod;
[0030] 400-insulation clamp;
[0031] 10-clamp body; 101-first clamp piece; 102-second clamp piece; 103-first recess; 104-second recess; 105-first connecting hole; 106-second connecting hole; 11-mounting through hole;
[0032] 20-bolt;
[0033] 30-clamping protrusion. Specific embodiments
[0034] The insulation clamp of the utility model is further described in detail below in combination with the drawings and specific embodiments. The advantages and features of the utility model will be more apparent according to the following description. It should be noted that the drawings are all very simplified and use non-precise proportions, and are only used to facilitate and clearly assist the purpose of describing the embodiments of the utility model.
[0035] As used in the present utility model, the singular forms "a," "an," and "the" include plural referents unless the context clearly dictates otherwise. The term "or" is generally employed in its sense including "and / or" unless the context clearly dictates otherwise. The term "at least one" is generally employed in its sense including "one or more of" unless the context clearly dictates otherwise. The term "at least two" or "a plurality" is generally employed in its sense including "two or more" unless the context clearly dictates otherwise. In addition, the terms "first," "second," "third," etc. are used only to describe different instances and do not imply or suggest relative importance or an implied indication of the number of the technical features indicated. Thus, features qualified with "first," "second," "third," etc. can expressly or implicitly include one or at least two of the features. In addition, as used in the present utility model, "mounting," "connected," "connection," one element "disposed" in another element should be understood broadly, and generally only indicates that there is a connection, coupling, cooperation or transmission relationship between the two elements, and the two elements can be directly or indirectly connected, coupled, cooperated or transmitted through intermediate elements, and cannot be understood as indicating or suggesting the spatial position relationship between the two elements, i.e. one element can be in any direction inside, outside, above, below or one side of another element, unless the content is otherwise clearly indicated. For those skilled in the art, the specific meaning of the above terms in the present utility model can be understood according to the specific circumstances. In addition, directional terms such as upper, lower, up, down, left, right, etc. are used with respect to the exemplary embodiments as they are shown in the drawings, and the upward or upward direction is towards the top of the corresponding drawing, and the downward or downward direction is towards the bottom of the corresponding drawing.
[0036] Please refer to Figure 1 In the embodiment shown, two sets of tongs are mounted on the flange plate 100, which are respectively a first tong 200 and a second tong 300. The first tong 200 includes a first tong rod 210 and a second tong rod 220, and the second tong 300 includes a third tong rod 310 and a fourth tong rod 320. The third tong rod 310 is located directly below the first tong rod 210, and the fourth tong rod 320 is located directly below the second tong rod 220.
[0037] The first tong 200 is used to fix one set of filaments, one end of the filament is connected with the first tong rod 210, and the other end is connected with the second tong rod 220. The second tong 300 is used to fix the other set of filaments, one end of the filament is connected with the third tong rod 310, and the other end is connected with the fourth tong rod 320.
[0038] The first tong rod 210, the second tong rod 220, the third tong rod 310 and the fourth tong rod 320 are respectively connected with corresponding power terminals, which are used to supply power to the filaments.
[0039] The structure and assembly of the flange plate 100, the tongs and the filament are prior art and will not be described here.
[0040] Please continue to refer to Figure 1 As shown, the first tong rod 210, the second tong rod 220, the third tong rod 310 and the fourth tong rod 320 are in long strip structure, and the tongs have a local bending structure, which causes the distance between adjacent tongs to be small. After the filament is heated, the tongs that supply power to the filament are easy to cause contact between adjacent tongs due to deformation after heating, thereby causing a short circuit phenomenon.
[0041] Please Figure 2 And Figure 3 As shown, the present embodiment provides an insulating clamp 400, which includes a clamp body 10 made of insulating material.
[0042] The clamp body 10 is provided with two mounting through holes 11, and the mounting through holes 11 are used to accommodate tongs.
[0043] Please refer to Figure 2 As shown, Figure 2 The use of an insulating clamp is shown. One of the mounting through holes is for the first tong rod 210 to pass through, and the other mounting through hole is for the third tong rod 310 to pass through.
[0044] In combination Figure 3 As shown, the adjacent mounting through holes 11 have a set distance L1, which refers to the minimum distance between the hole walls of the two mounting through holes 11.
[0045] The set distance is based on the distance between the two first tong rods 210 and the third tong rod 310 and the adjustment of the insulating requirement adaptability. In addition, the second tong rod 220 and the fourth tong rod 320 cooperate with another insulating clamp.
[0046] In the present embodiment, the clamp body 10 corresponds to two groups of tongs, so the clamp body 10 is provided with two mounting through holes 11. In other alternative embodiments, the number of mounting through holes 11 can be adaptively adjusted based on the actual number of tongs.
[0047] In this embodiment, two sets of pliers are equipped with two insulating clamps, wherein the first pliers rod 210 and the third pliers rod 310 correspond to one insulating clamp, and the second pliers rod 220 and the fourth pliers rod 320 correspond to another insulating clamp. In other alternative embodiments, two sets of pliers can be provided with an insulating clamp, for example, an insulating clamp is installed on the first pliers rod 210 and the third pliers rod 310, or an insulating clamp is installed on the second pliers rod 220 and the fourth pliers rod 320, and the installation position can be adaptively adjusted based on the actual short-circuit protection requirements. In other alternative embodiments, four mounting holes can also be opened on an insulating clamp to allow four pliers rods to pass through respectively.
[0048] Combine Figure 1 and Figure 3 As shown, in this embodiment, at least a portion of each clamp rod is arranged in parallel, and the opening directions of the two mounting holes 11 are parallel. The arrangement of the mounting holes 11 is adapted to the mounting structure of each clamp rod. In other alternative embodiments, the opening directions of the mounting holes 11 can be adjusted to suit the actual clamp rod structure. For example, the opening directions of the mounting holes 11 can be arranged at a certain angle.
[0049] In this embodiment, the clamp body 10 is made of ceramic, which meets the insulation and high temperature resistance requirements of the clamp. In other alternative embodiments, the clamp body 10 can also be made of silicon dioxide or other high temperature resistant insulating materials. The material of the clamp body 10 can be selected based on the adaptability of actual use requirements.
[0050] Please refer to Figure 3 As shown, in this embodiment, the cross-section of each clamp rod is rectangular, and the mounting through-hole 11 is adaptively configured as a rectangular hole, and the clamp rod is conformably positioned in the mounting through-hole 11. In other alternative embodiments, the specific shape of the mounting through-hole 11 can be adaptively adjusted based on the actual cross-sectional shape of the clamp rod. For example, the mounting through-hole 11 can be configured as a square hole, a circular hole, or the like.
[0051] Please refer to Figure 3As shown, the clamp body 10 comprises a first clamp piece 101 and a second clamp piece 102, both of which are approximately cuboid structures. The first clamp piece 101 and the second clamp piece 102 are detachably spliced to form the clamp body 10. The first clamp piece 101 is provided with two first recesses 103 on its splicing surface, and the second clamp piece 102 is provided with two second recesses 104 on its splicing surface. After the first clamp piece 101 and the second clamp piece 102 are spliced, one first recess 103 and one second recess 104 form one mounting through hole 11, and the other first recess 103 and the other second recess 104 form another mounting through hole 11.
[0052] Figure 1 Each of the clamp lever rods has a partial bending structure, so it is difficult for the clamp lever rod to pass through its end into the mounting through hole 11. Therefore, in this embodiment, the clamp body 10 is provided with the above-mentioned two-half splicing structure, which facilitates the assembly of the clamp body 10 and each clamp lever rod.
[0053] Please continue to refer to Figure 3 and Figure 4 As shown, in this embodiment, a first connecting hole 105 is formed on the first clamp piece 101, and a second connecting hole 106 is formed on the second clamp piece 102. After the first clamp piece 101 and the second clamp piece 102 are spliced, the two connecting holes are oppositely arranged. The first clamp piece 101 and the second clamp piece 102 are connected into one body through a bolt 20 penetrating through the above-mentioned connecting holes and cooperating with a nut, so as to realize the detachable splicing of the first clamp piece 101 and the second clamp piece 102. Preferably, the bolt 20 is made of insulating material.
[0054] Please continue to refer to Figure 3 and Figure 4 As shown, the clamp body 10 is in a strip shape, and each mounting through hole 11 is arranged along the length direction of the clamp body 10, and the opening direction of the mounting through hole 11 is perpendicular to the length direction of the clamp body 10. Through this structural arrangement, it is beneficial to distribute more mounting through holes 11 on a smaller cross-sectional shape, which is beneficial to reduce the size of the clamp body 10 on one hand, so as to improve the interference phenomenon with other components, and on the other hand, it is also convenient for the spatial layout of the clamp body 10 in the electronic shower device, and facilitates the installation of the clamp body 10.
[0055] Please continue to refer to Figure 3 and Figure 4 As shown, the clamp body 10 is in a strip shape, and each mounting through hole 11 is arranged along the length direction of the clamp body 10, and the opening direction of the mounting through hole 11 is perpendicular to the length direction of the clamp body 10. Through this structural arrangement, it is beneficial to distribute more mounting through holes 11 on a smaller cross-sectional shape, which is beneficial to reduce the size of the clamp body 10 on one hand, so as to improve the interference phenomenon with other components, and on the other hand, it is also convenient for the spatial layout of the clamp body 10 in the electronic shower device, and facilitates the installation of the clamp body 10.
[0055] Please continue to refer to Figure 3 and Figure 4 As shown, the clamp body 10 is in a strip shape, and each mounting through hole 11 is arranged along the length direction of the clamp body 10, and the opening direction of the mounting through hole 11 is perpendicular to the length direction of the clamp body 10. Through this structural arrangement, it is beneficial to distribute more mounting through holes 11 on a smaller cross-sectional shape, which is beneficial to reduce the size of the clamp body 10 on one hand, so as to improve the interference phenomenon with other components, and on the other hand, it is also convenient for the spatial layout of the clamp body 10 in the electronic shower device, and facilitates the installation of the clamp body 10.
[0056] Please continue to refer to Figure 3 As shown, the distance L1 between adjacent mounting holes 11 along the length direction of the clamp body 10 is 10mm-15mm. This distance is suitable for the existing clamp rod structure and also ensures good insulation effect.
[0057] Further, the size L of the clamp body 10 along its length direction is 40mm-50mm. The overall length of the clamp body 10 is limited, which is beneficial to adapt to smaller installation space, increase the application range of the insulation clamp, and prevent interference with adjacent parts. At the same time, L1 is 10mm-15mm, so that the two mounting holes 11 have a reasonable layout on the clamp body 10. Preferably, the two mounting holes 11 are symmetrically arranged along the length direction of the clamp body 10, so that the wall thickness of both ends of the clamp body 10 along its length direction is equal, ensuring good mechanical properties of the clamp body 10.
[0058] Further, the size W of the clamp body 10 along its width direction is 20mm-30mm, and the width direction of the clamp body 10 is perpendicular to the length direction of the clamp body 10 and perpendicular to the opening direction of the mounting hole 11. The overall width of the clamp body 10 is limited, which is beneficial to further adapt to smaller installation space, increase the application range of the insulation clamp, and prevent interference with adjacent parts. This size setting also meets the structural strength requirement when arranging a group of mounting holes 11 in the width direction of the clamp body 10.
[0059] Please refer to Figure 5 As shown, another embodiment of the connection between the first clamp piece 101 and the second clamp piece 102. The first clamp piece 101 is provided with a clamping hole, and the opening of the clamping hole gradually decreases from inside to outside. The second clamp piece 102 is connected with a clamping protrusion 30, and the shape of the clamping protrusion 30 is matched with the clamping hole. The clamping protrusion 30 is elastically deformed and matched in the clamping hole. The clamping protrusion 30 is made of elastic material, such as rubber structure or spring structure. When the clamping protrusion 30 is subjected to external force, it shrinks into the clamping hole, and then the clamping protrusion 30 returns to its original size and is matched in the clamping hole, so as to realize the detachable connection between the first clamp piece 101 and the second clamp piece 102. In addition, the first clamp piece 101 and the second clamp piece 102 can also be connected by screw connection, such as replacing the bolt with a screw, and preferably using a countersunk screw, so that the entire screw does not protrude from the outer surface of the first clamp piece 101 and the second clamp piece 102. The first clamp piece 101 and the second clamp piece 102 can also be connected by other known detachable connection methods, which are not described here,
[0060] The embodiment also provides an electronic shower device, which comprises two sets of tongs and two insulating clamps, and the two sets of tongs are respectively a first tong 200 and a second tong 300.
[0061] One of the insulating clamps is matched with the first tong rod 210 and the third tong rod 310, and one mounting through hole of the insulating clamp is used for passing through the first tong rod 210, and the other mounting through hole is used for passing through the third tong rod 310. In addition, the other insulating clamp is matched with the second tong rod 220 and the fourth tong rod 320, and one mounting through hole of the insulating clamp is used for passing through the second tong rod 220, and the other mounting through hole is used for passing through the fourth tong rod 320.
[0062] In other alternative embodiments, the number of installed insulating clamps can be adjusted adaptively based on the number of sets of tongs.
[0063] The electronic shower device is also called an electron gun, and the insulating clamps are installed in the chamber of the electron gun. The electronic shower device generates electrons by high-voltage pulse ionization, and makes the electrons move along a preset track by a magnetic field. The electronic shower device adopts an existing structure, and the difference lies in the arrangement of the insulating clamps, which will not be described here.
[0064] In the embodiment, an ion implantation equipment is also provided, and the ion implantation equipment is installed with the electronic shower device.
[0065] The ion implantation equipment comprises an ion source, an ion extraction and mass analyzer, an acceleration tube, a scanning system, a process chamber, and a high-vacuum system. The process chamber is provided with a placement site for placing a wafer, and the wafer to be doped is placed on the placement site. The high-vacuum system is used for forming a negative pressure environment in the process chamber. The ion source generates an ion beam, and the ion beam is separated from impurity ions by the ion extraction and mass analyzer, and then is accelerated by the acceleration tube to enter the process chamber to bombard the surface of the wafer, so as to realize ion implantation. The parts of the ion implantation equipment can be consistent with the existing equipment.
[0066] The electronic shower device is used for neutralizing a positively charged ion beam, and preventing the phenomenon of over-neutralization caused by the attraction of electrons to the wafer surface, so as to improve the phenomenon of uneven charge distribution on the wafer surface.
[0067] The electronic shower device is installed on the outer wall of the process chamber of the ion implantation equipment, and the sidewall of the process chamber is provided with an opening hole, which is used as an electron emission port of the electronic shower device. Therefore, the electron emission port is communicated with the process chamber, so that the electrons generated by the electronic shower device enter the process chamber through the electron emission port to neutralize the ion beam.
[0068] The various embodiments described in this specification are presented by way of example, and each embodiment describes only a specific embodiment that is not intended to limit the scope of the application. The same or similar parts in each embodiment can be mutually referred to.
[0069] The above description is only a description of the preferred embodiment of the present application, and is not intended to limit the scope of the present application. Any modification or modification made by a person skilled in the art according to the above disclosure is within the protection scope of the claims.
Claims
1. An insulating clamp, characterized in that: include: fixture body; The clamp body is made of insulating material; The clamp body is provided with at least two mounting through holes, and the mounting through holes are used to accommodate the clamp rods; There is a set distance between adjacent mounting through holes.
2. The insulating clamp according to claim 1, wherein: The clamp body includes a first clamp part and a second clamp part, and the first clamp part and the second clamp part are detachably spliced to form the clamp body. The first clamp part is provided with a first groove on its splicing surface, and the second clamp part is provided with a second groove on its splicing surface. After the first clamp part and the second clamp part are spliced together, the first groove and the second groove are combined to form the mounting through hole.
3. The insulating clamp according to claim 1, wherein: The opening directions of the mounting through holes are arranged in parallel.
4. The insulating clamp according to claim 1, wherein: The clamp body is in the shape of an elongated strip, and the mounting through holes are arranged along the length direction of the clamp body. The opening direction of the mounting through holes is perpendicular to the length direction of the clamp body.
5. The insulating clamp according to claim 4, wherein: The two ends of the clamp body along the length direction thereof are in an outwardly convex curved surface structure.
6. The insulating clamp according to claim 4, wherein: Along the length direction of the clamp body, the set distance between adjacent mounting through holes is 10 mm to 15 mm.
7. The insulating clamp according to claim 4, wherein: The size of the clamp body along its length direction is 40mm to 50mm.
8. The insulating clamp according to claim 4, wherein: The size of the clamp body along its width direction is 20 mm to 30 mm, and the width direction of the clamp body is perpendicular to the length direction of the clamp body and perpendicular to the opening direction of the mounting through hole.
9. An electronic spray device, characterized in that: The electronic spray device includes at least two sets of clamps and the insulating clamp according to any one of claims 1 to 8, the clamp rod of one clamp passes through a mounting through hole on the clamp body, and the clamp rod of the other clamp passes through another mounting through hole on the clamp body.
10. An ion implantation device, characterized in that: The ion implantation equipment is equipped with the electron spray device according to claim 9.