Graphite boat stepping transplanting blanking equipment

Abstract

The utility model discloses graphite boat stepping transplanting blanking equipment which comprises a placing frame and a bottom frame which are fixedly connected, and the top of the bottom frame is fixedly connected with two sets of placing bottom plates which are symmetrically distributed. In the application, a semi-finished graphite boat produced in the previous step is transferred to the top of a lifting bottom plate, a pushing cylinder pushes the lifting bottom plate to move upwards, the lifting bottom plate pushes the semi-finished graphite boat to move upwards by a specified distance, then a servo motor drives a driving gear to rotate, and the driving gear drives a transplanting bottom plate to translate through meshing with a rack; and when the semi-finished graphite boats correspond to the first group of positions, the lifting bottom plate is reset downwards, the semi-finished graphite boats are combined to the positioning blocks at the corresponding positions, and so on, the multiple groups of semi-finished graphite boats are correspondingly arranged at the top of the placement bottom plate, so that manual operation is not needed, and the convenience of transplanting and blanking of the graphite boats is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to graphite boat full -automatic cleaning drying technical field especially, relates to a kind of graphite boat's step transplanting blanking equipment. BACKGROUND

[0002] Graphite boat is usually refers to in the field such as semiconductor manufacturing, photovoltaic industry is used to load silicon wafer or other materials to carry out heat treatment a kind of container. This container is made of high-purity graphite, has good high-temperature resistance and chemical stability.

[0003] In single graphite boat use, due to the production process of silicon wafer, there will be a large number of chemical reagents attached to the graphite boat body, and after passing through multiple cleaning processes and drying operation, it can be recycled again. The existing blanking mode for graphite boat after drying process section is mostly manual operation, which is labor-intensive and low in efficiency. Therefore, a corresponding graphite boat step transplanting blanking equipment is needed to solve the above problems. SUMMARY

[0004] The utility model aims at: in order to solve the above problem, and propose a kind of graphite boat's step transplanting blanking equipment.

[0005] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0006] A kind of graphite boat's step transplanting blanking equipment, including fixedly connected placement frame and chassis, the top of the chassis is fixedly connected with two groups of placement bottom plates distributed symmetrically, the top of the two groups of placement bottom plates is integrated with the limiting assembly for limiting graphite boat, the outer side of the chassis is integrated with transplanting bottom plate and the translation assembly for the horizontal movement of transplanting bottom plate, the bottom of the transplanting bottom plate is fixedly connected with lifting cylinder, and the output end of the lifting cylinder is fixedly connected with lifting bottom plate.

[0007] Preferably, the limiting assembly includes a positioning block fixedly connected with the placement bottom plate, four profiled notches are formed in the top of the positioning block, and the four profiled notches are distributed in a rectangular shape.

[0008] Preferably, the translation assembly includes a servo motor, a rack and a sliding part, the servo motor and the rack are fixedly connected with the transplanting bottom plate and the chassis respectively, the output end of the servo motor is fixedly connected with a drive gear, and the drive gear is engaged with the rack.

[0009] Preferably, the sliding part includes a sliding rail fixedly connected with the chassis, and the bottom of the transplanting bottom plate is fixedly connected with a sliding sleeve slidingly matched with the sliding rail.

[0010] Preferably, the bottom of the lifting bottom plate is fixedly connected with a plurality of guide columns, and the outer walls of the plurality of guide columns are slidingly connected with the inner walls of the transplanting bottom plate.

[0011] Preferably, the lifting bottom plate top is fixedly connected with a silica gel pad plate.

[0012] To sum up, due to the adoption of the above technical scheme, the present application has the following advantages:

[0013] 1. In the present application, the placing frame serves as an empty area, the semi-finished graphite boat produced in the previous step is transferred to the top of the lifting bottom plate, the push cylinder pushes the lifting bottom plate to move upwards, the guide column is synchronously matched with the transplanting bottom plate to ensure the stability of the vertical movement of the lifting bottom plate, the lifting bottom plate pushes the semi-finished graphite boat to move upwards by a specified distance, then the servo motor drives the driving gear to rotate, the driving gear promotes the translational movement of the transplanting bottom plate through meshing with the rack, and the cooperation of the sliding sleeve and the sliding rail ensures the stability of the translational movement of the transplanting bottom plate, until the semi-finished graphite boat is correspondingly arranged in the first group of positions, the lifting bottom plate is reset downwards, and the semi-finished graphite boat is combined with the positioning block in the corresponding position. In this way, manual operation is not required, and the convenience of the transplanting and discharging of the graphite boat is improved.

[0014] 2. In the present application, the corresponding positions on the two groups of placing bottom plates are fixedly provided with positioning blocks, four groups of profiled notches are formed in the positioning blocks, and the four groups of profiled notches are matched with each other to correspond to the two groups of semi-finished graphite boats of different sizes. In this way, the stability of the placement of the semi-finished graphite boats is ensured, and the universality of the step-by-step transplanting and discharging equipment of the graphite boats is ensured. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 An overall structure schematic view is shown according to an embodiment of the present application;

[0016] Figure 2 A rack structure schematic view is shown according to an embodiment of the present application;

[0017] Figure 3 A lifting bottom plate structure schematic view is shown according to an embodiment of the present application;

[0018] Figure 4 A guide column structure schematic view is shown according to an embodiment of the present application.

[0019] LEGEND:

[0020] 1. Placing frame; 2. Placing bottom plate; 3. Positioning block; 4. Lifting bottom plate; 5. Silica gel pad plate; 6. Chassis; 7. Rack; 8. Sliding rail; 9. Sliding sleeve; 10. Transplanting bottom plate; 11. Servo motor; 12. Driving gear; 13. Lifting cylinder; 14. Guide column; 15. Profiled notch. DETAILED DESCRIPTION

[0021] With reference to the drawings of the embodiments of the present application, the technical solutions in the embodiments of the present application will be clearly and completely described, obviously, the described embodiments are only part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments of the present application, all other embodiments obtained by those skilled in the art without creative labor fall within the scope of the present application.

[0022] Please refer to Figures 1-4 The present application provides a technical solution:

[0023] The stepping transplanting and discharging equipment for graphite boats comprises fixedly connected placing frames 1 and a chassis 6, the top of the chassis 6 is fixedly connected with two groups of placing bottom plates 2 which are symmetrically distributed, the top of each of the two groups of placing bottom plates 2 is integrated with a limiting assembly for limiting the graphite boats, the outer side of the chassis 6 is integrated with a transplanting bottom plate 10 and a translation assembly for horizontally moving the transplanting bottom plate 10, the bottom of the transplanting bottom plate 10 is fixedly connected with a lifting cylinder 13, and the output end of the lifting cylinder 13 is fixedly connected with a lifting bottom plate 4;

[0024] The placing frames 1 serve as empty areas, the semi-finished graphite boats produced in the previous steps are transferred to the top of the lifting bottom plate 4, the lifting cylinder pushes the lifting bottom plate 4 to go up, the guide column 14 is synchronously and slidingly matched with the transplanting bottom plate 10 to ensure the stability of the vertical movement of the lifting bottom plate 4, the lifting bottom plate 4 pushes the semi-finished graphite boats to go up by a specified distance, then the servo motor 11 drives the driving gear 12 to rotate, the driving gear 12 promotes the translation of the transplanting bottom plate 10 through the meshing with the rack 7, and the cooperation of the sliding sleeve 9 and the sliding rail 8 ensures the stability of the translation of the transplanting bottom plate 10, until the semi-finished graphite boats are correspondingly positioned at the first group of positions, the lifting bottom plate 4 is reset downward, the semi-finished graphite boats are combined with the positioning blocks 3 at the corresponding positions, and the same is repeated until the multiple groups of semi-finished graphite boats are correspondingly arranged on the top of the placing bottom plate 2, so that the artificial operation is not needed, and the convenience of the transplanting and discharging of the graphite boats is improved.

[0025] Specifically, as shown in Figure 2 and Figure 4 The limiting assembly comprises positioning blocks 3 fixedly connected with the placing bottom plates 2, four groups of profiled notches 15 are formed in the top of each positioning block 3, the positioning blocks 3 on the corresponding positions on the two groups of placing bottom plates 2 are fixedly connected with the positioning blocks 3, four groups of profiled notches 15 are formed in the positioning blocks 3, and the four groups of profiled notches 15 are matched with each other to correspond to the two groups of semi-finished graphite boats of different sizes, so that the stability of the placement of the semi-finished graphite boats is ensured, and the universality of the stepping transplanting and discharging equipment for graphite boats is ensured.

[0026] Specifically, as shown in Figure 2 and Figure 3As shown, the translation assembly includes a servo motor 11, a rack 7 and a sliding part, the stepper motor 11 and the rack 7 are fixedly connected with the transplanting bottom plate 10 and the chassis 6 respectively, the output end of the servo motor 11 is fixedly connected with a driving gear 12, and the driving gear 12 is in meshing connection with the rack 7, the sliding part includes a sliding rail 8 fixedly connected with the chassis 6, the bottom of the transplanting bottom plate 10 is fixedly connected with a sliding sleeve 9 in sliding cooperation with the sliding rail 8, the servo motor 11 drives the driving gear 12 to rotate, the driving gear 12 drives the transplanting bottom plate 10 to translate through the meshing with the rack 7, and the cooperation of the sliding sleeve 9 and the sliding rail 8 ensures the stability of the translation of the transplanting bottom plate 10, a plurality of guide columns 14 are fixedly connected to the bottom of the lifting bottom plate 4, and the outer walls of the plurality of guide columns 14 are in sliding connection with the inner walls of the transplanting bottom plate 10, so as to ensure the stability of the vertical movement of the lifting bottom plate 4, and a silica gel pad 5 is fixedly connected to the top of the lifting bottom plate 4, so as to increase the friction and avoid the slipping of the graphite boat.

[0027] Working principle: the frame 1 is placed as an empty area, the semi-finished graphite boat produced in the previous step is transferred to the top of the lifting bottom plate 4, the lifting bottom plate 4 is pushed upward by the push cylinder, the guide columns 14 are in synchronous sliding cooperation with the transplanting bottom plate 10, so as to ensure the stability of the vertical movement of the lifting bottom plate 4, the lifting bottom plate 4 pushes the semi-finished graphite boat to move upward by a specified distance, then the servo motor 11 drives the driving gear 12 to rotate, the driving gear 12 drives the transplanting bottom plate 10 to translate through the meshing with the rack 7, and the cooperation of the sliding sleeve 9 and the sliding rail 8 ensures the stability of the translation of the transplanting bottom plate 10, until the semi-finished graphite boat corresponds to the first group of positions, the lifting bottom plate 4 is reset downward, and the semi-finished graphite boat is combined with the positioning block 3 at the corresponding position, and so on, until a plurality of semi-finished graphite boats are arranged in correspondence on the top of the placement bottom plate 2, so as to improve the convenience of the transplanting and discharging of the graphite boat without manual operation, the corresponding positions on the two placement bottom plates 2 are fixedly provided with positioning blocks 3, four profiled notches 15 are formed in the positioning blocks 3, and the four profiled notches 15 are in cooperation in pairs, so as to correspond to two groups of semi-finished graphite boats of different sizes, so as to ensure the stability of the placement of the semi-finished graphite boats and the versatility of the step-by-step transplanting and discharging equipment of the graphite boat.

[0028] The above description of the embodiments enables those skilled in the art to implement or use the present application. Various modifications to these embodiments will be apparent to those skilled in the art, and the general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present application. Therefore, the present application will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A step-by-step transplanting and unloading device for a graphite boat, comprising a placement frame (1) and a base frame (6) fixedly connected, characterized in that: The top of the base frame (6) is fixedly connected to two symmetrically distributed groups of placement base plates (2), and the tops of the two groups of placement base plates (2) are integrated with a limiting assembly for limiting the position of the graphite boat. The outer side of the base frame (6) is integrated with a transplanting base plate (10) and a translation assembly for horizontally moving the transplanting base plate (10). The bottom of the transplanting base plate (10) is fixedly connected to a lifting cylinder (13), and the output end of the lifting cylinder (13) is fixedly connected to the lifting base plate (4).

2. The step-by-step transplanting and unloading equipment for a graphite boat according to claim 1, characterized in that: The limiting assembly comprises a positioning block (3) fixedly connected to the placement base plate (2); four groups of contoured notches (15) are provided on the top of the positioning block (3), and the four groups of contoured notches (15) are distributed in a rectangular shape.

3. The step-by-step transplanting and unloading equipment for a graphite boat according to claim 2, characterized in that: The translation assembly comprises a servo motor (11), a rack (7) and a sliding portion. The servo motor (11) and the rack (7) are fixedly connected to the transplanting base plate (10) and the base frame (6) respectively. The output end of the servo motor (11) is fixedly connected to a driving gear (12), and the driving gear (12) is meshed with the rack (7).

4. The step-by-step transplanting and unloading equipment for a graphite boat according to claim 3, characterized in that: The sliding portion comprises a slide rail (8) fixedly connected to the base frame (6), and a slide sleeve (9) is fixedly connected to the bottom of the transplanting base plate (10) and is in sliding engagement with the slide rail (8).

5. The step-by-step transplanting and unloading equipment for a graphite boat according to claim 4, characterized in that: The bottom of the lifting base plate (4) is fixedly connected to a plurality of guide columns (14), and the outer surfaces of the plurality of guide columns (14) are all slidably connected to the inner surface wall of the transplanting base plate (10).

6. The step-by-step transplanting and unloading equipment for a graphite boat according to claim 5, characterized in that: A silica gel pad (5) is fixedly connected to the top of the lifting base plate (4).

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