Vacuum coating equipment

Abstract

The utility model discloses vacuum coating equipment, and relates to the technical field of vacuum coating. The vacuum coating equipment comprises a shell, a flow blocking assembly and an adjusting device. The shell comprises a cavity, a first electrode plate and a second electrode plate which are arranged at an interval in the preset direction are arranged in the cavity, and a first interval is formed between the first electrode plate and the second electrode plate; the flow blocking assembly is arranged on the edge of the first electrode plate, a second distance is formed between the flow blocking assembly and the second electrode plate in the preset direction, and the second distance is smaller than the first distance. By applying the vacuum coating equipment disclosed by the invention, the condition of forming a coating film in the cavity can be reduced, and the uniformity of the coating film around the substrate can be improved.

Description

TECHNICAL FIELD

[0001] The present application relates to the technical field of vacuum coating, and particularly relates to a vacuum coating device. BACKGROUND

[0002] In the vacuum coating device, a parallel-plate electrode plasma discharge structure is usually used. The parallel-plate electrode is usually divided into an upper electrode plate and a lower electrode plate, and a substrate to be coated is placed on the lower electrode plate.

[0003] In the related art, during the coating process, the plasma forms a coating on the inner wall of the chamber of the device, which increases the cleaning frequency and difficulty of the device. Moreover, due to the fast gas flow speed around the lower electrode, the plasma concentration around the lower electrode is low, and the substrate in the peripheral area of the lower electrode has a non-uniform coating. CONTENT OF THE UTILITY MODEL

[0004] The vacuum coating device provided by the present application can reduce the formation of a coating on the inner wall of the chamber and improve the uniformity of the coating around the substrate.

[0005] The present application provides a vacuum coating device, which comprises a housing, a flow blocking assembly and an adjusting device. The housing comprises a chamber, and the chamber is provided with a first electrode plate and a second electrode plate which are spaced apart along a preset direction, and the first electrode plate and the second electrode plate have a first spacing therebetween; the flow blocking assembly is arranged at the edge of the first electrode plate and has a second spacing with the second electrode plate along the preset direction, and the second spacing is smaller than the first spacing.

[0006] The vacuum coating device provided by the present application can reduce the formation of a coating on the inner wall of the chamber and improve the uniformity of the coating around the substrate.

[0007] In a possible implementation manner of the present application, the vacuum coating device further comprises an adjusting device, the adjusting device is drivingly connected to the flow blocking assembly, and the adjusting device is used to drive the flow blocking assembly to move along the preset direction so as to change the second spacing.

[0008] Here, the flow blocking assembly is driven to move along the preset direction by the adjusting device, the second distance between the flow blocking assembly and the second electrode plate can be changed according to requirements, the speed of the plasma flowing from the second distance is changed, and thus the plasma concentration of the edge area around the first electrode plate and the second electrode plate is adjusted.

[0009] In a possible implementation of the present application, the flow blocking assembly comprises a baffle, one side of the first electrode plate is provided with the baffle; or, opposite sides of the first electrode plate are respectively provided with baffles; or, adjacent sides of the first electrode plate are respectively provided with baffles; or, a plurality of baffles are arranged around the first electrode plate.

[0010] Here, the different side and different number of baffle configuration modes provide a variety of coating modes for selection, so that the vacuum coating equipment can adapt to a variety of different coating requirements, and the flexibility and applicability of the equipment are improved.

[0011] In a possible implementation of the present application, at least two baffles are connected to form a baffle group, and each baffle group is connected with an adjusting device; or, each baffle is connected with an adjusting device.

[0012] Here, the corresponding baffle group or baffle can be adjusted by the adjusting device as required, so as to flexibly change the preset gap between the different baffle groups or baffles and the second electrode plate. It is also convenient to maintain and clean the baffle and the adjusting device.

[0013] In a possible implementation of the present application, the chamber comprises an air inlet side and an air outlet side, the first electrode plate is arranged at the air inlet side, the second electrode plate is arranged at the air outlet side, and the first electrode plate is provided with a gas passage; and / or, the first electrode plate is fixedly arranged relative to the shell, and the second electrode plate is movably arranged relative to the shell.

[0014] Here, the flow blocking assembly can block the plasma in the plasma region, reduce the overflow of the plasma from the gap between the first electrode plate and the second electrode plate, reduce the contact between the plasma and the inner wall of the chamber, and reduce the formation of coating on the inner wall of the chamber. At the same time, the distance between the preset gap and the air outlet side is shortened, the contact time between the plasma and the chamber is reduced, and the formation of coating on the inner wall of the chamber is further reduced.

[0015] In a possible implementation of the present application, the adjusting device comprises a driving member and a transmission member, the driving member is arranged outside the shell, the shell is provided with a connecting hole communicating between the chamber and the outside of the shell, and the transmission member passes through the connecting hole to drive the driving member and the flow blocking assembly.

[0016] Here, it is convenient to maintain and overhaul the driving member, and it is also convenient for the operator to control and adjust the driving member outside the shell. At the same time, the space inside the equipment is saved, and the overall structure of the vacuum coating equipment is more compact.

[0017] In a possible implementation manner of the present application, the driving member is sleeved on the outer circumferential side of the transmission member, and the two are threadedly connected, wherein the transmission member is located at one end of the housing or the driving member is provided with an operation part.

[0018] Here, the disassembly and assembly between the driving member and the transmission member are facilitated, the stability between the driving member and the transmission member is improved, and the operation process is simplified.

[0019] In a possible implementation manner of the present application, the driving member is a power output device; a fixed end of the power output device is connected with the housing, and an output end of the power output device is in transmission connection with the flow blocking assembly.

[0020] Here, the driving member is a power output device, and the output end of the driving member is in transmission connection with the flow blocking assembly, which helps to improve the efficiency of the driving member in driving the flow blocking assembly to move, reduce energy consumption, and realize automatic adjustment.

[0021] In a possible implementation manner of the present application, the vacuum coating equipment further comprises a sealing assembly, which is sealingly arranged between the transmission member and the housing.

[0022] Here, the sealing assembly arranged between the transmission member and the housing can reduce the leakage of gas, reduce the interruption and repeated operation of coating caused by gas leakage, help to improve the working efficiency of the coating equipment, and reduce the production cost.

[0023] In a possible implementation manner of the present application, the sealing assembly comprises a sealing sleeve, which is arranged on the circumferential side of the transmission member; the sealing sleeve is respectively provided with a limiting groove on the side wall facing the housing and the transmission member, and the limiting groove contains a sealing ring.

[0024] Here, the transmission member and the housing are double-sealed, which can improve the sealing performance of the vacuum coating equipment. The sealing ring is limited in the limiting groove and is not easy to displace or fall off, thereby enhancing the stability of the sealing assembly.

[0025] In a possible implementation manner of the present application, the housing comprises a shell and a cover, the shell and the cover enclose a cavity, the cover is formed with a containing groove, and the adjusting device is located in the containing groove.

[0026] Here, the maintenance process is simplified, the maintenance cost is reduced, the overall size of the equipment is reduced, and the space utilization rate is improved. BRIEF DESCRIPTION OF DRAWINGS

[0027] Figure 1 FIG. 1 is a structural schematic diagram of a vacuum coating equipment provided by an embodiment of the present application;

[0028] Figure 2 FIG. 2 is a structural schematic diagram of a vacuum coating equipment provided by an embodiment of the present application; Figure 1A local enlarged schematic view of the middle part B;

[0029] Figure 3 A structural schematic view of a vacuum coating device provided in the embodiment of the present application;

[0030] Figure 4 A structural schematic view of a vacuum coating device provided in the embodiment of the present application; Figure 3 A local enlarged schematic view of the middle part B;

[0031] Figure 5 A structural schematic view of a vacuum coating device provided in the embodiment of the present application;

[0032] Figure 6 A structural schematic view of a vacuum coating device provided in the embodiment of the present application;

[0033] Figure 7 A structural schematic view of a vacuum coating device provided in the embodiment of the present application;

[0034] Reference signs:

[0035] 1 - shell; 11 - chamber; 111 - air inlet; 112 - air outlet; 12 - connecting plate; 13 - fixed part; 14 - connecting hole; 15 - outer shell; 16 - cover; 161 - accommodating groove; 2 - flow blocking assembly; 21 - baffle; 3 - adjusting device; 31 - driving member; 311 - power output device; 32 - transmission member; 33 - operation part; 4 - first electrode plate; 41 - air hole; 5 - second electrode plate; 6 - lifting device; 7 - sealing assembly; 71 - sealing sleeve; 72 - limiting groove; Y - preset direction; H - first interval; J - second interval. DETAILED DESCRIPTION

[0036] In order to make the purpose, technical solutions and advantages of the embodiments of the present application clearer, the specific technical solutions of the present application will be further described in detail below with reference to the drawings in the embodiments of the present application. The following embodiments are used to illustrate the present application, but not to limit the scope of the present application.

[0037] In the embodiments of the present application, the terms "first" and "second" are only used for descriptive purposes, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Therefore, the features defined with "first" and "second" can explicitly or implicitly include one or more of the features. In the description of the embodiments of the present application, unless otherwise specified, the meaning of "a plurality of" is two or more.

[0038] In addition, in the embodiments of the present application, the directional terms such as "upper", "lower", "left" and "right" are defined relative to the orientation in which the components in the drawings are placed, and it should be understood that these directional terms are relative concepts, which are used for relative description and clarification, and can change accordingly according to the change of the orientation in which the components are placed in the drawings.

[0039] In the embodiments of the present application, unless specifically defined and limited otherwise, the term "connection" should be understood in a broad sense, for example, "connection" can be fixed connection, or detachable connection, or integral; can be directly connected, or indirectly connected through an intermediate medium.

[0040] In the embodiments of the present application, the term "comprising", "including" or any other variant thereof is intended to cover non-exclusive inclusion, so that a process, method, article or device including a series of elements not only includes those elements, but also includes other elements not explicitly listed, or further includes elements inherent to such process, method, article or device. Without more limitations, the element defined by the sentence "including a…" does not exclude the presence of other identical elements in the process, method, article or device including the element.

[0041] In the embodiments of the present application, the word "exemplary" or "for example" is used to mean serving as an example, instance or illustration. Any embodiment or design solution described as "exemplary" or "for example" in the embodiments of the present application should not be interpreted as being more preferred or advantageous than other embodiments or design solutions. Rather, the use of the word "exemplary" or "for example" is intended to present relevant concepts in a concrete manner.

[0042] In a vacuum coating equipment (Plasma Enhanced Chemical Vapour Deposition, PECVD), a parallel plate electrode plasma discharge structure is commonly used. The parallel plate electrode is divided into an upper electrode plate and a lower electrode plate. The upper electrode plate is fed with a radio frequency power supply, and the lower electrode plate is grounded. The reaction gas is converted into plasma under the action of the radio frequency of the equipment, and a plasma region is formed between the upper and lower electrode plates. The coated substrate is placed on the lower electrode and is in the plasma region, so that the chemical reaction generates the required film material on the surface of the substrate.

[0043] In the related art, the plasma forms a coating on the inner wall of the chamber of the equipment during the coating process, which increases the cleaning frequency and difficulty of the equipment. Moreover, due to the fast gas flow speed around the lower electrode, the plasma density around the lower electrode is low, and the phenomenon of uneven film layer exists on the substrate in the peripheral region of the lower electrode.

[0044] Reference Figure 1 , Figure 2 ,Figure 3 and Figure 4 The embodiment of the present application provides a vacuum coating equipment, which comprises a shell 1, a flow blocking assembly 2 and an adjusting device 3. The shell 1 comprises a chamber 11, the chamber 11 is provided with a first electrode plate 4 and a second electrode plate 5 which are spaced apart along a preset direction Y, and the first electrode plate 4 and the second electrode plate 5 have a first spacing H. The flow blocking assembly 2 is arranged at the edge of the first electrode plate 4 and has a second spacing J with the second electrode plate 5 along the preset direction Y. The second spacing J is smaller than the first spacing H.

[0045] In the embodiment of the present application, the preset direction Y can be adjusted according to the requirements of the first electrode plate 4 and the second electrode plate 5 in the vacuum coating. For example, referring to Figure 1 When the substrate to be coated needs to be placed on the second electrode plate 5 for coating, the first electrode plate 4 and the second electrode plate 5 can be spaced apart in the height direction of the chamber 11, so as to facilitate the placement of the substrate on the second electrode plate 5. At this time, the preset direction Y is the height direction of the chamber 11.

[0046] In the embodiment of the present application, the first electrode plate 4 and the second electrode plate 5 are arranged in the chamber along the preset direction Y. It can be understood that the spacing between the surfaces of the opposite sides of the first electrode plate 4 and the second electrode plate 5 is the first spacing H. The flow blocking assembly 2 and the second electrode plate 5 have the second spacing J along the preset direction Y. It can be understood that the side of the flow blocking assembly 2 close to the second electrode plate 5 has a first surface which is parallel to the second electrode plate 5, and the opposite side of the second electrode plate 5 has a second surface. The spacing between the first surface and the second surface is the second spacing J.

[0047] In the embodiment of the present application, the flow blocking assembly 2 is arranged at the edge of the first electrode plate 4. The flow blocking assembly 2 can form a fence at the edge of the first electrode plate 4, which can block the overflow of plasma from the edge of the first electrode plate 4. The flow blocking assembly 2 and the first electrode plate 4 can be abutted to improve the effect of the flow blocking assembly 2 in blocking the overflow of plasma. In order to reduce the friction between the flow blocking assembly 2 and the first electrode plate 4 when the flow blocking assembly 2 moves along the preset direction Y, a small gap can be formed between the flow blocking assembly 2 and the first electrode plate 4, or a component for reducing friction can be arranged at the region where the flow blocking assembly 2 and the first electrode plate 4 are in contact.

[0048] In the embodiment of the present application, the flow blocking assembly 2 can be connected with the edge of the first electrode plate 4 through a sliding rail, a sliding groove, a hinge or the like, or the flow blocking assembly 2 can be connected with the inner wall of the shell 1 through a sliding rail, a sliding groove, a hinge or the like, so that the flow blocking assembly 2 can move relative to the first electrode plate 4 along the preset direction Y.

[0049] In the embodiment of the present application, the flow blocking assembly 2 blocks the plasma at the edge of the first electrode plate 4 when the vacuum coating equipment is working. The reaction gas and plasma in the chamber 11 need to be discharged from the chamber. The preset gap between the flow blocking assembly 2 and the second electrode plate 5 allows the reaction gas and plasma to flow between the first electrode plate 4 and the second electrode plate 5.

[0050] In the embodiment of the present application, the value of the preset gap can be adjusted according to different processes performed by the vacuum coating equipment. According to the type of reaction gas introduced into the chamber 11, the flow rate of the reaction gas, the distance between the first electrode plate 4 and the second electrode plate 5, and other parameters, the preset gap can be changed accordingly, so that the concentration of the plasma between the first electrode plate 4 and the second electrode plate 5 can reach the required concentration for the reaction.

[0051] The vacuum coating equipment of the embodiment of the present application has the flow blocking assembly 2 arranged at the edge of the first electrode plate 4. The flow blocking assembly 2 can block the overflow of the plasma from the edge of the first electrode plate 4, thereby reducing the formation of coating on the inner wall of the chamber 11 by the overflowed plasma, slowing down the frequency of equipment cleaning, and improving the utilization efficiency of the equipment. At the same time, the flow blocking assembly 2 can form a barrier between the first electrode plate 4 and the second electrode plate 5, which can block the too fast flow of the plasma and slow down the decrease of the concentration of the plasma between the first electrode plate 4 and the second electrode plate 5. Compared with the low plasma concentration around the first electrode plate 4 and the second electrode plate 5 in the related art, the vacuum coating equipment provided by the present application can improve the plasma concentration around the edge of the first electrode plate 4 and the second electrode plate 5, thereby improving the uniformity of the coating around the edge of the substrate.

[0052] The embodiment of the present application provides a vacuum coating equipment, which further comprises an adjusting device 3. The adjusting device 3 is drivingly connected to the flow blocking assembly 2. The adjusting device 3 is used to drive the flow blocking assembly 2 to move along a preset direction Y, so as to change the second distance J.

[0053] In the embodiment of the present application, the adjusting device 3 drives the flow blocking assembly 2 to move along the preset direction Y, which can change the second distance J. For the same process, the flow blocking assembly 2 can be adjusted once by the adjusting device 3 before the vacuum coating equipment works. For different processes (such as changing the type of gas, the flow rate of gas, etc.), the flow blocking assembly 2 can be adjusted as needed to change the preset gap.

[0054] In the embodiment of the present application, the adjusting device 3 can be connected to the control system of the vacuum coating equipment through a single-chip microcomputer or other control logic. The control logic can automatically adjust the position and speed of the flow blocking assembly 2 according to the coating parameters and process requirements. The adjusting device 3 can also be other devices capable of driving the flow blocking assembly 2 to move along the preset direction Y.

[0055] The vacuum coating equipment provided in the embodiments of the present application can drive the flow blocking assembly 2 to move along the preset direction Y through the adjusting device 3, change the second distance J between the flow blocking assembly 2 and the second electrode plate 5 according to requirements, change the speed of the plasma flowing from the second distance J, and thus adjust the plasma concentration of the edge area of the first electrode plate 4 and the second electrode plate 5.

[0056] The vacuum coating equipment provided in the embodiments of the present application includes the flow blocking assembly 2, and the flow blocking assembly 2 includes the baffle 21, and one side of the first electrode plate 4 is provided with the baffle 21, or opposite sides of the first electrode plate 4 are respectively provided with the baffles 21, or adjacent sides of the first electrode plate 4 are respectively provided with the baffles 21, or a plurality of baffles 21 are arranged around the first electrode plate 4.

[0057] In the embodiments of the present application, the baffle arranged at the edge of the first electrode plate 4 can be an integral structure or a split structure. For example, when one side of the first electrode plate 4 is provided with the baffle 21, the baffle 21 arranged at this side can be an integral baffle 21 or two or more baffles 21 connected together.

[0058] In the embodiments of the present application, the baffle 21 can be a cuboid plate structure, or can be other shapes, for example, for the first electrode plate 4 with a complex shape, the baffle 21 can be a shape matched with the edge of the first electrode plate 4. For example, referring to Figure 2 , the first electrode plate 4 is connected with the shell 1 through the connecting plate 12, the connecting plate 12 is provided with the fixed part 13 for insulation, the baffle 21 is adapted to the structure of the fixed part 13, and the side of the baffle 21 close to the fixed part 13 is provided with a clearance, so that the baffle 21 can be arranged at the edge of the first electrode plate 4.

[0059] In the embodiments of the present application, the length, width and height of the baffle 21 should be adjusted according to the overall size of the coating equipment and the specific requirements of the coating area, and the baffle 21 can completely cover the edge of the first electrode plate 4 or partially cover the edge of the first electrode plate 4.

[0060] In the embodiments of the present application, the baffle 21 is usually made of insulating material, and the baffle 21 can be made of ceramic material or glass material.

[0061] The vacuum coating equipment provided in the embodiments of the present application provides a plurality of coating modes through different configurations of the baffles 21 on different sides and in different numbers, so that the vacuum coating equipment can adapt to a plurality of different coating requirements, and the flexibility and applicability of the equipment are improved.

[0062] The vacuum coating equipment provided in the embodiments of the present application includes the flow blocking assembly 2, and the flow blocking assembly 2 includes the baffle 21, and one side of the first electrode plate 4 is provided with the baffle 21, or opposite sides of the first electrode plate 4 are respectively provided with the baffles 21, or adjacent sides of the first electrode plate 4 are respectively provided with the baffles 21, or a plurality of baffles 21 are arranged around the first electrode plate 4.

[0063] In the embodiments of the present application, different baffle 21 groups can be connected according to the adjustment requirements of the baffle 21. For example, when it is required to uniformly adjust the positions of the baffles 21 on the two sides of the first electrode plate 4, the baffles 21 on the two sides of the first electrode plate 4 can be connected as a baffle 21 group and connected with the same adjustment device 3, and then the baffles 21 on the two sides of the first electrode plate 4 can be adjusted at the same time.

[0064] In the embodiments of the present application, when it is required to separately adjust each baffle 21, an adjustment device 3 can be connected for each baffle 21. For example, referring to Figure 5 , the first electrode plate 4 is provided with a baffle 21 around the circumference, and each baffle 21 is connected with an adjustment device 3, so as to facilitate flexible adjustment of each baffle 21.

[0065] The vacuum coating equipment in the embodiments of the present application can form a baffle 21 group by connecting at least two baffles 21, can connect the baffles 21 according to different coating requirements, and can connect the baffle 21 group with the adjustment device 3 or connect each baffle 21 with the adjustment device 3. The corresponding baffle 21 group or baffle 21 can be adjusted by the adjustment device 3 as required, so as to flexibly change the preset gap between the different baffle 21 groups or the baffle 21 and the second electrode plate 5. It is also convenient to maintain and clean the baffle 21 and the adjustment device 3.

[0066] Referring to Figure 1 , Figure 3 and Figure 6 , the embodiments of the present application provide a vacuum coating equipment, the chamber 11 includes an inlet side and an outlet side, the first electrode plate 4 is arranged on the inlet side, the second electrode plate 5 is arranged on the outlet side, and the first electrode plate 4 is provided with a gas passage hole 41; and / or, the first electrode plate 4 is arranged in a relatively fixed manner with the shell 1, and the second electrode plate 5 is arranged in a relatively movable manner with the shell 1.

[0067] In the embodiments of the present application, when the reaction gas is introduced into the chamber 11, the flow direction of the gas will flow from the area where the first electrode plate 4 is located to the area where the second electrode plate 5 is located. Since the first electrode plate 4 is provided with a gas passage hole 41, the gas can flow through the gas passage hole 41 to the reaction area between the first electrode plate 4 and the second electrode plate 5, so as to facilitate the coating of the substrate in the area.

[0068] In the embodiments of the present application, according to the coating requirements, the second electrode plate 5 is arranged in a relatively movable manner with the shell 1, so as to adjust the distance between the first electrode plate 4 and the second electrode plate 5. For example, referring to Figure 1 and Figure 3 , the second electrode plate 5 and the shell 1 are connected by a lifting device 6, and the lifting device 6 can drive the second electrode plate 5 to move along a preset direction Y relative to the shell 1.

[0069] In the embodiment of the present application, the vent holes 41 on the first electrode plate 4 can be circular holes, diamond holes, rectangular holes, etc. The vent holes 41 can be unevenly distributed on the first electrode plate 4 according to the specific requirements of the coating area and the simulation results of the electric field and airflow. Figure 6 The vent holes 41 can also be evenly distributed on the first electrode plate 4 .

[0070] In the embodiment of the present application, an air inlet 111 is provided on the air inlet side of the chamber 11, and the reaction gas enters the chamber from the air inlet 111; an air outlet 112 is provided on the air outlet side of the chamber, and plasma, reaction gas, etc. are extracted from the chamber 11 through the air outlet 112.

[0071] In the vacuum coating equipment of the embodiment of the present application, the reaction gas flows from the vent 41 into the space between the first electrode plate 4 and the second electrode plate 5, and is converted into plasma by the radio frequency of the equipment, thereby forming a plasma region between the first electrode plate 4 and the second electrode plate 5. Because the baffle assembly 2 is disposed at the edge of the first electrode plate 4, the baffle assembly 2 can block the plasma within the plasma region, thereby reducing the overflow of the plasma from the gap between the first electrode plate 4 and the second electrode plate 5, reducing the contact between the plasma and the inner wall of the chamber 11, and reducing the formation of a coating on the inner wall of the chamber 11.

[0072] At the same time, there is a preset gap between the baffle assembly 2 and the second electrode plate 5. Since the second electrode plate 5 is arranged on the gas outlet side, that is, the preset gap is close to the gas outlet side, when the reaction gas and plasma flow out of the plasma area through the preset gap, the distance between the preset gap and the gas outlet side is shortened, which can reduce the contact time between the plasma and the chamber 11 and further reduce the formation of a coating on the inner wall of the chamber 11.

[0073] Reference Figure 2 and Figure 4 An embodiment of the present application provides a vacuum coating device, wherein the adjustment device 3 includes a driving member 31 and a transmission member 32. The driving member 31 is arranged on the outside of the shell 1. The shell 1 is provided with a connecting hole 14 connecting the chamber 11 and the outside of the shell 1. The transmission member 32 passes through the connecting hole 14 to transmit and connect the driving member 31 to the baffle assembly 2.

[0074] In the embodiment of the present application, the driving member 31 can be manually driven, motor-driven, pneumatically driven, or the like. For example, a handwheel or handle can be used as the transmission member 32, and manually rotated to drive the flow blocking assembly 2 to move. This approach is low-cost and simple in structure, making it suitable for applications where frequent manual adjustments are not required.

[0075] The vacuum coating equipment provided by the embodiment of the application has the driving member 31 arranged outside the shell 1, so that the driving member 31 is convenient to maintain and overhaul, and the operator is also convenient to control and adjust the driving member 31 outside the shell 1, and then the transmission member 32 changes the preset gap between the flow blocking assembly 2 and the second electrode plate 5. Meanwhile, the space inside the equipment is saved, and the overall structure of the vacuum coating equipment is more compact.

[0076] With reference to Figure 2 and Figure 4 The embodiment of the application provides a vacuum coating equipment, the driving member 31 is sleeved on the outer circumferential side of the transmission member 32, and the two are threadedly connected, wherein the transmission member 32 is located at one end outside the shell 1 or the driving member 31 is provided with an operating part 33.

[0077] In the embodiment of the application, the transmission member 32 is located at one end outside the shell 1 or the driving member 31 is provided with the operating part 33, and the operator can operate through the operating part 33 arranged on the one end of the transmission member 32 outside the shell 1 or the operating part 33 arranged on the driving member 31, so as to adjust the relative position between the transmission member 32 and the driving member 31, and then adjust the preset gap between the flow blocking assembly 2 and the second electrode plate 5.

[0078] In the embodiment of the application, the transmission member 32 is located at one end outside the shell 1 or the driving member 31 is provided with the operating part 33, and the operating part 33 can be a handle, a hand wheel, a knob or the like. Since the driving member 31 is sleeved on the outer circumferential side of the transmission member 32 and the two are threadedly connected, the relative rotation between the driving member 31 and the transmission member 32 can be realized through the operating part 33, so as to adjust the relative position between the driving member 31 and the transmission member 32, and then drive the adjustment of the preset distance between the flow blocking assembly 2 and the second electrode plate 5.

[0079] In the embodiment of the application, in the case that the driving member 31 rotates relative to the transmission member 32, the transmission member 32 and the flow blocking assembly 2 are fixedly connected, and a structure for buffering and reducing friction can be arranged between the driving member 31 and the shell 1. In the case that the transmission member 32 rotates relative to the driving member 31, the driving member 31 can be fixed on the shell 1, and the end of the transmission member 32 and the flow blocking assembly 2 can relatively rotate, so that the transmission member 32 does not drive the flow blocking assembly 2 to rotate when rotating.

[0080] The vacuum coating equipment provided in the embodiment of the present application, the driving member 31 is sleeved on the outer circumferential side of the transmission member 32 and is fixed by a threaded connection, facilitating disassembly and assembly between the driving member 31 and the transmission member 32; and the threaded connection can bear a large torque and axial force, improving the stability between the driving member 31 and the transmission member 32. The operation part 33 is arranged on one end of the transmission member 32 located outside the shell 1 or on the driving member 31, so that the operator can more conveniently control and adjust the transmission member 32 or the driving member 31, simplifying the operation process.

[0081] With reference to Figure 7 The embodiment of the present application provides a vacuum coating equipment, the driving member 31 is a power output device 311; the fixed end of the power output device 311 is connected with the shell 1, and the output end of the power output device 311 is in transmission connection with the flow blocking component 2.

[0082] In the embodiment of the present application, the power output device 311 can be a stepping motor, a servo motor or a cylinder. The fixed end of the power output device 311 is connected with the shell 1, the output end of the power output device 311 is in transmission connection with the flow blocking component 2, and the output end of the power output device 311 can move along the preset direction Y to drive the flow blocking component 2 to move along the preset direction Y.

[0083] The vacuum coating equipment provided in the embodiment of the present application, the driving member 31 is a power output device 311, and the output end of the driving member 31 is in transmission connection with the flow blocking component 2, which helps to improve the efficiency of the driving member 31 in driving the flow blocking component 2 to move, reduce energy consumption and realize automatic adjustment.

[0084] The embodiment of the present application provides a vacuum coating equipment, and the vacuum coating equipment further comprises a sealing assembly 7, which is sealingly arranged between the transmission member 32 and the shell 1.

[0085] In the embodiment of the present application, the sealing assembly 7 can be made of materials with high elasticity, high wear resistance and high corrosion resistance, such as rubber and nylon. These materials can ensure that the sealing performance of the sealing assembly 7 is not reduced due to wear or corrosion during long-term use.

[0086] The vacuum coating equipment provided in the embodiment of the present application, the sealing assembly 7 is arranged between the transmission member 32 and the shell 1, which can reduce the leakage of gas, reduce the interruption and repeated operation of coating caused by gas leakage, help to improve the working efficiency of the coating equipment and reduce the production cost.

[0087] The embodiment of the present application provides a vacuum coating equipment, and the sealing assembly 7 comprises a sealing sleeve 71, which is arranged on the circumferential side of the transmission member 32; the sealing sleeve 71 is provided with a limiting groove 72 on the side wall facing the shell 1 and the transmission member 32, and the limiting groove 72 contains a sealing ring.

[0088] In the embodiments of the present application, referring to Figure 2 and Figure 4 , the transmission member 32 passes through the connecting hole 14, and the sealing sleeve 71 is arranged on the side of the transmission member 32 closer to the shell 1 relative to the driving member 31. The sealing sleeve 71 can provide sealing between the connecting hole 14 and the transmission member 32, thereby reducing the overflow of plasma or reaction gas from the gap between the connecting hole 14 and the transmission member 32.

[0089] In the embodiments of the present application, the limiting groove 72 can be one or multiple. For example, referring to Figure 2 and Figure 4 , one limiting groove 72 is arranged on the side of the sealing sleeve 71 contacting the shell 1, and one limiting groove 72 is arranged on the side of the sealing sleeve 71 contacting the transmission member 32. In this way, the sealing sleeve 71 can be limited from at least two directions, and the displacement of the sealing sleeve 71 is reduced when the transmission member 32 and the driving member 31 relatively move.

[0090] The vacuum coating equipment in the embodiments of the present application can improve the sealing performance of the vacuum coating equipment by arranging the limiting grooves 72 on the side walls of the sealing sleeve 71 facing the shell 1 and the transmission member 32, and accommodating the sealing ring. The sealing ring is limited in the limiting groove 72 and is not easy to displace or fall off, thereby enhancing the stability of the sealing assembly 7.

[0091] Referring to Figure 1 and Figure 3 , the present application provides a vacuum coating equipment, the shell 1 includes a shell 15 and a cover 16, the shell 15 and the cover 16 enclose to form a chamber 11, the cover 16 is formed with a containing groove 161, and the adjusting device 3 is located in the containing groove 161.

[0092] In the embodiments of the present application, the size and depth of the containing groove 161 formed on the cover 16 can be adjusted according to the size of the adjusting device 3, so that the adjusting device 3 can be stably installed in the containing groove 161.

[0093] In the embodiments of the present application, the shell 15 and the cover 16 enclose to form a chamber 11, and a sealing structure can be arranged between the cover 16 and the shell 15. An elastic sealing strip, a metal sealing ring or other sealing methods can be used to form a good seal in the chamber 11 when the cover 16 is closed.

[0094] The vacuum coating apparatus of the embodiment of the present application comprises a housing 1 comprising an outer shell 15 and a cover 16. When the device within the housing 1 requires maintenance or replacement, the operator can open the cover 16 to conveniently repair or replace the device within the housing 1, simplifying the maintenance process and reducing maintenance costs. A receiving groove 161 is formed in the cover 16, providing a mounting location for the adjustment device 3. This effectively utilizes the space within the housing 1, reducing the overall size of the apparatus and improving space efficiency.

[0095] The embodiment of the present application provides a vacuum coating device, in which a substrate is placed on a second electrode plate 5, the second electrode plate 5 is moved in a direction close to the first electrode plate 4, and the second electrode plate 5 is moved to a position when the vacuum coating device is in operation. The driving member 31 is adjusted according to the coating requirements to adjust the preset gap between the baffle assembly 2 and the second electrode plate 5 to a preset value. The reaction gas is introduced into the chamber 11 from the air inlet side of the shell 1, and the reaction gas flows to the reaction area between the first electrode plate 4 and the second electrode plate 5 through the vent 41 on the first electrode plate 4. The reaction gas is converted into plasma by the radio frequency action of the equipment, and a plasma area is formed between the first electrode plate 4 and the second electrode plate 5. The substrate is coated in the plasma area. The excess reaction gas and plasma in the chamber 11 are extracted from the chamber 11 by a vacuum pump located on the air outlet side of the shell 1, and the plasma in the plasma area flows to the air outlet side through the preset gap between the baffle assembly 2 and the second electrode plate 5.

[0096] The serial numbers of the embodiments of this application are for descriptive purposes only and do not represent the superiority or inferiority of the embodiments. The above are only preferred embodiments of this application and do not limit the scope of the patent of this application. Any equivalent structure or equivalent process transformation made by using the contents of the description and drawings of this application, or directly or indirectly applied in other related technical fields, are also included in the scope of patent protection of this application.

Claims

1. A vacuum coating device, characterized in that: include: A housing (1) comprises a chamber (11), wherein a first electrode plate (4) and a second electrode plate (5) are arranged in the chamber (11) and are spaced apart along a preset direction (Y), and a first distance (H) is provided between the first electrode plate (4) and the second electrode plate (5); The baffle assembly (2) is arranged at the edge of the first electrode plate (4) and has a second spacing (J) with the second electrode plate (5) along a preset direction (Y), and the second spacing (J) is smaller than the first spacing (H).

2. The vacuum coating equipment according to claim 1, characterized in that: It also includes an adjusting device (3), the adjusting device (3) being transmission-connected to the baffle assembly (2), and the adjusting device (3) being used to drive the baffle assembly (2) to move along the preset direction (Y) to change the second spacing (J).

3. The vacuum coating equipment according to claim 2, characterized in that: The baffle assembly (2) comprises a baffle (21), wherein the baffle (21) is provided on one side of the first electrode plate (4); or, the baffles (21) are respectively provided on two opposite sides of the first electrode plate (4); or, the baffles (21) are respectively provided on two adjacent sides of the first electrode plate (4); or, a plurality of baffles (21) are provided around the first electrode plate (4).

4. The vacuum coating equipment according to claim 3, characterized in that: At least two baffles (21) are connected to form a baffle (21) group, and each baffle (21) group is respectively connected to the adjustment device (3); or, each baffle (21) is respectively connected to the adjustment device (3).

5. The vacuum coating equipment according to claim 3, characterized in that: The chamber (11) comprises an air inlet side (111) and an air outlet side (112), the first electrode plate (4) is arranged on the air inlet side (111), the second electrode plate (5) is arranged on the air outlet side (112), and the first electrode plate (4) is provided with a vent hole (41); and / or, The first electrode plate (4) and the shell (1) are fixedly arranged relative to each other, and the second electrode plate (5) and the shell (1) are movable relative to each other.

6. The vacuum coating equipment according to any one of claims 2 to 5, characterized in that: The regulating device (3) comprises a driving member (31) and a transmission member (32); the driving member (31) is arranged on the outside of the housing (1); the housing (1) is provided with a connecting hole (14) communicating with the chamber (11) and the outside of the housing (1); the transmission member (32) passes through the connecting hole (14) to connect the driving member (31) to the baffle assembly (2) in a transmission manner.

7. The vacuum coating equipment according to claim 6, characterized in that: The driving member (31) is sleeved on the outer peripheral side of the transmission member (32), and the two are threadedly connected, wherein the transmission member (32) is located at one end outside the housing (1) or the driving member (31) is provided with an operating portion (33).

8. The vacuum coating equipment according to claim 6, characterized in that: The driving member (31) is a power output device (311); the fixed end of the power output device (311) is connected to the housing (1), and the output end of the power output device (311) is transmission-connected to the baffle assembly (2).

9. The vacuum coating equipment according to claim 6, characterized in that: It also includes a sealing assembly (7), which is sealingly arranged between the transmission member (32) and the housing (1).

10. The vacuum coating equipment according to claim 9, characterized in that: The sealing assembly (7) includes a sealing sleeve (71), and the sealing sleeve (71) is arranged on the peripheral side of the transmission member (32); The sealing sleeve (71) is provided with limiting grooves (72) on the side walls facing the housing (1) and the transmission member (32), respectively, and a sealing ring is accommodated in the limiting groove (72).

11. The vacuum coating equipment according to claim 2, characterized in that: The housing (1) comprises an outer shell (15) and a cover (16); the outer shell (15) and the cover (16) enclose the chamber (11); the cover (16) is formed with a receiving groove (161); and the adjustment device (3) is located in the receiving groove (161).

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