Chip coating crucible protection device

Abstract

The utility model discloses a protective device for a chip coating crucible, which relates to the field of chip production and comprises a bottom connecting plate, a top connecting plate is arranged above the bottom connecting plate, through holes are formed in the bottom connecting plate and the top connecting plate in a penetrating manner, and the through holes are formed at a certain angle from top to bottom. A placement groove is formed in the inner wall of the through opening in the top connecting plate, and a check ring is arranged in the placement groove. According to the utility model, through the movably arranged check ring, after long-term use, a large amount of coating materials are deposited on the check ring, and at the moment, the check ring is directly disassembled and replaced by a new check ring, so that the replacement is quick and the operation is simple.

Description

TECHNICAL FIELD

[0001] The utility model relates to chip production field, concretely is a kind of chip coating crucible protection device. BACKGROUND

[0002] In the field of semiconductor manufacturing and chip processing, chip coating is a crucial process step, which is directly related to the performance and stability of the chip. During the coating process, the crucible, as a container for carrying and heating the coating material, has a very harsh working environment, and needs to withstand high temperature, corrosive gas and material sputtering and other multiple challenges. Therefore, protecting the crucible from damage and ensuring the smooth progress of the coating process is the key to improving the efficiency and quality of chip manufacturing.

[0003] Traditional chip coating crucible protection devices mostly use simple shielding structures. These devices can reduce the direct impact of external factors on the crucible to some extent, but they have obvious shortcomings in dealing with the directional flow of sputtered material at high temperature and ensuring coating uniformity. In particular, during the process of coating material evaporating through high temperature and depositing on the surface of the chip, the sputtered material often spreads in a certain angle to the surrounding. If the protection device is not designed reasonably, it is easy to cause material waste, uneven coating and even damage to the crucible. Therefore, the existing crucible protection device generally uses a inwardly recessed through hole to prevent the sputtering of evaporated coating material during the coating process.

[0004] However, the existing protection device can guide and block the coating material during actual use, but a large amount of coating material will also deposit at the bottom of the baffle ring. After a long time of use, it needs to be cleaned in time to ensure the quality of coating. However, the traditional cleaning requires the entire baffle ring to be removed and reinstalled, resulting in low production efficiency. TECHNICAL CONTENT

[0005] Therefore, the utility model aims to provide a chip coating crucible protection device to solve the problem that the existing protection device can guide and block the coating material during actual use, but a large amount of coating material will also deposit at the bottom of the baffle ring. After a long time of use, it needs to be cleaned in time to ensure the quality of coating. However, the traditional cleaning requires the entire baffle ring to be removed and reinstalled, resulting in low production efficiency.

[0006] To achieve the above-mentioned purpose, the utility model provides the following technical scheme: a chip coating crucible protection device, comprising a bottom connecting plate, a top connecting plate is arranged above the bottom connecting plate, a through hole is arranged through the bottom connecting plate and the top connecting plate, the through hole is arranged from top to bottom at a certain angle, an accommodation groove is arranged on the inner wall of the through hole of the top connecting plate, and a baffle ring is arranged in the accommodation groove.

[0007] By adopting the technical scheme, the through opening arranged at a certain angle ensures that the spraying of the film coating material does not pollute the internal environment of the film coating device during the film coating of the crucible, and the stop ring is movably arranged through the installation groove and the stop ring, thereby facilitating quick cleaning.

[0008] The utility model further sets up, the stop ring cooperation through opening sets angle setting, a pair of inside guide board is symmetrically arranged to one side of stop ring.

[0009] By adopting the technical scheme, the stop ring is limited, and the guide board facilitates the user to take out the stop ring.

[0010] The utility model further sets up, the top connecting plate is provided with extension block at inside guide board bottom.

[0011] By adopting the technical scheme, the inside guide board is supported through the extension block.

[0012] The utility model further sets up, the extension block is provided with outside guide board in cooperation with inside guide board.

[0013] By adopting the technical scheme, the outside guide board is matched with the inside guide board to support and limit the inside guide board, thereby ensuring the stability of the stop ring and the stability of the device.

[0014] The utility model further sets up, a pair of extension block is provided with guide groove.

[0015] By adopting the technical scheme, the inside guide board is matched with the inside guide board to support and limit the inside guide board, thereby ensuring the stability of the stop ring and the stability of the device.

[0016] The utility model further sets up, the stop ring is provided with mounting plate in cooperation with guide groove in the end close to guide groove.

[0017] By adopting the technical scheme, the mounting plate connected with the stop ring is taken and lifted upward, and the stop ring can be taken out from the top connecting plate and replaced.

[0018] In summary, the utility model mainly has the following beneficial effects:

[0019] The stop ring is movably arranged, and a large amount of film coating material is deposited on the stop ring after long-term use, so that the stop ring can be directly disassembled and replaced with a new one, which is quick and simple to operate. DRAWINGS

[0020] Figure 1 It is a whole structure schematic view of the utility model;

[0021] Figure 2 The overall structure of the utility model is shown in the top view;

[0022] Figure 3 The overall structure of the utility model is shown in the top view;

[0023] Figure 4 The overall structure of the utility model is shown in the top view;

[0024] In the figure: 1, bottom connecting plate; 2, top connecting plate; 3, baffle ring; 4, through opening; 5, internal guide plate; 6, mounting plate; 7, external guide plate; 8, limiting ring groove; 9, installation groove; 10, extension block; 11, guide groove. DETAILED DESCRIPTION

[0025] The technical solutions in the embodiments of the utility model will be clearly and completely described below with reference to the drawings in the embodiments of the utility model. The embodiments described below with reference to the drawings are exemplary and are used only for explaining the utility model and cannot be understood as limiting the utility model.

[0026] The embodiments of the utility model will be described below according to the overall structure of the utility model.

[0027] A chip film plating crucible protection device, as shown in the figure, comprises a bottom connecting plate 1, which is installed above the film plating crucible during actual use, a top connecting plate 2 is arranged above the bottom connecting plate 1, through openings 4 are arranged through the bottom connecting plate 1 and the top connecting plate 2, the through openings are aligned with the discharge port of the crucible, the through openings 4 are arranged at a certain angle from top to bottom, the inner wall of the through openings 4 on the top connecting plate 2 is provided with an installation groove 9, a baffle ring 3 is arranged in the installation groove 9, the baffle ring 3 is arranged at an angle in cooperation with the through openings 4, a pair of internal guide plates 5 is symmetrically arranged on one side of the baffle ring 3, the top connecting plate 2 is provided with an extension block 10 at the bottom of the internal guide plates 5, an external guide plate 7 is arranged on the extension block 10 in cooperation with the internal guide plates 5, the top connecting plate 2 is supported by the extension block 10, the internal guide plates 7 on the baffle ring 3 are matched with the external guide plates 7 arranged on the extension block 10 to limit the position.

[0028] Further, a guide groove 11 is arranged between a pair of the extension blocks 10, the baffle ring 3 is provided with a mounting plate 6 at one end close to the guide groove 11 in cooperation with the guide groove 11, the baffle ring 3 can be taken off from the top connecting plate 2 by taking the mounting plate 6, and then the baffle ring 3 can be directly replaced and cleaned, which is simple and fast.

[0029] In the above structure, the baffle ring 3 is arranged in cooperation with the through openings 4, the through openings 4 further limit the position of the baffle ring 3, thereby ensuring the stability of the baffle ring 3 during operation.

[0030] Compared with the traditional protective device, the application adopts multi-layer modular superposition, and the guide groove 11 is convenient for the user to lift the mounting plate 6 upward from the bottom, so that the retaining ring 3 is lifted from the bottom, and the retaining ring 3 is convenient for the operator to take out.

[0031] Although the embodiments of the utility model have been shown and described, the specific embodiments are only the explanation of the utility model, and are not the limitation of the utility model, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable way, and the person skilled in the art can make the modification, replacement and change of the embodiments without the creative contribution after reading the specification without departing from the principles and the purpose of the utility model, but as long as in the right claim range of the utility model, it is protected by the patent law.

Claims

1. A chip coating crucible protection device, comprising a bottom connecting plate (1), characterized in that: A top connecting plate (2) is provided above the bottom connecting plate (1), and a through opening (4) is provided through the bottom connecting plate (1) and the top connecting plate (2), the through opening (4) being opened from top to bottom at a certain angle, and a placement groove (9) is provided on the inner wall of the through opening (4) on the top connecting plate (2), and a retaining ring (3) is provided in the placement groove (9).

2. A chip coating crucible protection device according to claim 1, characterized in that: The retaining ring (3) is arranged at an angle to match the opening (4), and a pair of internal guide plates (5) are symmetrically arranged on one side of the retaining ring (3).

3. The chip coating crucible protection device according to claim 1, characterized in that: The top connecting plate (2) is provided with an extension block (10) at the bottom of the inner guide plate (5).

4. A chip coating crucible protection device according to claim 3, characterized in that: An external guide plate (7) is provided on the extension block (10) in cooperation with the internal guide plate (5), and the top connecting plate (2) is on the extension block (10).

5. The chip coating crucible protection device according to claim 3, characterized in that: A guide groove (11) is provided between the pair of extension blocks (10).

6. The chip coating crucible protection device according to claim 1, characterized in that: One end of the retaining ring (3) close to the guide groove (11) is matched with the guide groove (11) and is provided with a mounting plate (6).

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