Combined anti-splashing evaporation boat assembly

Abstract

The utility model discloses a combined type anti-splashing evaporation boat component which comprises a ceramic crucible and an evaporation boat, an evaporation groove is formed in the surface of the evaporation boat, the ceramic crucible is placed in the middle of the evaporation groove of the evaporation boat, a molten pool is arranged in the middle of the ceramic crucible, and flow guide openings are formed in the two sides of the molten pool respectively. According to the utility model, the ceramic crucible and the evaporation boat are additionally arranged, so that the temperature difference exists between the ceramic crucible and the evaporation boat, and the metal wires are converted from solid state to liquid state to gas state in a stepped manner and are transited stably, so that the splashing phenomenon is effectively inhibited, the film coating is more uniform, the film forming quality can be guaranteed, and the ceramic crucible and the evaporation boat are mutually independent, low in manufacturing difficulty and capable of being replaced independently; the mode of the assembly can protect a wire feeding area of the evaporation boat, prevent the wire feeding area from being corroded by molten metal liquid and influence the use and endurance life of the evaporation boat, the molten pool is arranged in the middle of the ceramic crucible, prevent the metal liquid from overflowing, prevent all the metal liquid from flowing into the evaporation tank from diversion ports on two sides, and improve the material utilization rate.

Description

TECHNICAL FIELD

[0001] The utility model relates to vacuum coating equipment field especially relates to a combined type anti - splash evaporation boat subassembly. BACKGROUND

[0002] The working principle of the vacuum evaporation coating equipment is that the evaporation coating material is heated by an evaporator under vacuum condition to evaporate and vaporize, the evaporation particle flow is directly shot to the substrate, and the solid thin film is formed on the substrate. The traditional evaporation boat conducts electricity and generates heat, heats the metal, melts the metal from solid to liquid, and then evaporates the metal to gas. However, when the evaporation amount is large, the wire conveying speed becomes fast, and the heat of the evaporation boat is also large. In a short time, the metal needs to be melted and vaporized, so that the vaporization of the metal is not uniform, and the splashing phenomenon occurs. The single structure of the traditional evaporation boat causes the current to flow through the liquid metal, resulting in the change of the overall resistance, affecting the stability of the evaporation rate and the evaporation efficiency, and being corroded by the metal liquid, reducing the service life of the evaporation boat and increasing the use cost. Due to the process requirements of composite current collector and the like, the coating thickness is thicker, and accordingly a larger evaporation amount is required, but the splashing phenomenon is more serious, which causes the continuous production to be unable to be carried out, and seriously affects the film forming quality.

[0003] Therefore, it is necessary to design a new evaporation boat which can effectively suppress the splashing phenomenon, increase the evaporation efficiency and stability. CONTENT OF THE UTILITY MODEL

[0004] In view of the above problems, the utility model provides a combined type anti - splash evaporation boat subassembly which can effectively suppress the splashing phenomenon and improve the service life of the evaporation boat.

[0005] To solve the above technical problems, the utility model adopts the technical scheme of a combined type anti - splash evaporation boat subassembly, which comprises a ceramic crucible and an evaporation boat.

[0006] Further, the evaporation boat is connected with the positive and negative electrodes of the evaporation source respectively.

[0007] Further, the molten pool is a circular or elliptical groove.

[0008] Further, the evaporation groove is a rectangular groove, and the flow guide openings on both sides of the molten pool are flush with the long side direction of the evaporation groove.

[0009] From the above description of the structure of the utility model, compared with the prior art, the utility model has the following advantages:

[0010] 1. The utility model discloses a ceramic crucible is added, makes ceramic crucible and evaporation boat have temperature difference, realizes the step -by -step conversion of metal wire from solid to liquid to gaseous state, and the state is stable to pass, thereby effectively inhibiting the splashing phenomenon, making the coating more uniform, and the film quality can be guaranteed.

[0011] 2. The ceramic crucible and the evaporation boat are independent of each other, the manufacturing difficulty is low, and the ceramic crucible and the evaporation boat can be replaced independently, the component mode can protect the evaporation boat wire feeding area, avoid being corroded by molten metal liquid, influence the use and the service life of the evaporation boat, the molten pool is in the middle of the ceramic crucible, prevents the metal liquid from overflowing, and the metal liquid flows into the evaporation tank from the two flow guide openings, and the material utilization rate is improved. BRIEF DESCRIPTION OF DRAWINGS

[0012] The drawings constituting a part of this application are used to provide further understanding of the utility model, and the illustrative embodiment of the utility model and its explanation are used to explain the utility model, and do not constitute undue limitation to the utility model. In the drawings:

[0013] Figure 1 It is the overhead structure schematic diagram of the utility model;

[0014] Figure 2 It is Figure 1 It is the overhead structure schematic diagram of the utility model;

[0015] Figure 3 It is the three-dimensional structure schematic diagram of the ceramic crucible of the utility model. DETAILED DESCRIPTION

[0016] In order to make the purpose, technical scheme and advantage of the utility model more clearly, the following is in combination with the drawing and embodiment, and the utility model is further explained in detail. It should be understood that the specific embodiment described here is only used to explain the utility model, and is not used to limit the utility model.

[0017] EMBODIMENT

[0018] Reference Figures 1-3 A combined anti-splashing evaporation boat assembly, comprising a ceramic crucible 1 and an evaporation boat 2, the evaporation boat 2 is connected with the positive and negative poles of the evaporation source respectively on both sides, the evaporation groove 5 is formed on the surface of the evaporation boat 2, the ceramic crucible 1 is placed in the middle of the evaporation groove 5 of the evaporation boat, the molten pool 4 is in the middle of the ceramic crucible 1, the molten pool 4 is a circular or oval groove, and the flow guide opening 3 is formed on both sides of the molten pool 4.

[0019] The evaporation groove 5 is a rectangular groove, and the flow guide opening 3 on both sides of the molten pool is flush with the long side direction of the evaporation groove 5.

[0020] In working, the ceramic crucible 1 is placed in the middle of the evaporation groove 5 of the evaporation boat 2; the evaporation boat 2 is connected with positive and negative electrodes to heat the ceramic crucible 1; the metal wire is sent to the molten pool 4 to be melted; and the liquid metal flows into the evaporation groove 5 from the flow guide 3 to be further heated and evaporated.

[0021] The utility model discloses a ceramic crucible is added, makes ceramic crucible and evaporation boat have temperature difference, realizes that metal wire is from solid to liquid again to gaseous step -by -step conversion, and state is stable and oversteps to effectively inhibit splashing phenomenon, makes coating more uniform, and the quality of film formation can guarantee. Ceramic crucible and evaporation boat are independent of each other, and the difficulty of manufacturing is low, and can be independently replaced, and the mode of assembly can protect the evaporation boat wire feeding area, avoids being corroded by molten metal liquid, influences the use and the endurance life of evaporation boat, and the middle of ceramic crucible is the molten pool, prevents the overflow of metal liquid, and the metal liquid all flows into the evaporation groove from two sides flow guide, improves material utilization.

[0022] The above only is the preferred embodiment of the utility model, and does not use to limit the utility model, and any modification, equivalent replacement and improvement etc. that are made in the spirit and principle of the utility model should be included in the protection scope of the utility model.

Claims

1. A combined anti-splash evaporation boat assembly, characterized by: The invention comprises a ceramic crucible (1) and an evaporation boat (2), wherein an evaporation groove (5) is provided on the surface of the evaporation boat (2), the ceramic crucible (1) is placed in the middle of the evaporation groove (5) of the evaporation boat, the middle of the ceramic crucible (1) is a molten pool (4), and guide ports (3) are respectively provided on both sides of the molten pool (4).

2. The combined anti-splash evaporation boat assembly according to claim 1, characterized in that: Both sides of the evaporation boat (2) are connected to the positive and negative electrodes of the evaporation source respectively.

3. The combined anti-splash evaporation boat assembly according to claim 1, characterized in that: The molten pool (4) is a circular or elliptical groove.

4. The combined anti-splash evaporation boat assembly according to claim 1, characterized in that: The evaporation groove (5) is a rectangular groove, and the guide ports (3) on both sides of the molten pool are flush with the long side direction of the evaporation groove (5).

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