Water-cooling conducting ring structure and magnetron sputtering film deposition equipment

Abstract

The utility model discloses a water cooling conducting ring structure and magnetron sputtering film deposition equipment, the water cooling conducting ring structure comprises a rectangular frame, the rectangular frame comprises four splicing strips and four splicing parts, two adjacent splicing strips are connected and fixed through the splicing parts, the interior of each splicing strip is provided with a cooling water channel along the length direction of the splicing strip, and the cooling water channel is connected with the splicing parts through the splicing parts. Transition water channels are formed in the splicing parts and communicate with the cooling water channels of every two adjacent splicing strips, so that an annular circulating water channel is formed; the electric connector is connected to the rectangular frame and provided with a water inlet channel and a water outlet channel which are communicated with the circulating water channel. According to the water-cooling conducting ring structure provided by the embodiment of the utility model, the four splicing strips are arranged, and the splicing parts are utilized to splice the four splicing strips, so that the water-cooling conducting ring structure is made into a spliced structure, and compared with integral processing, the water-cooling conducting ring structure is more convenient to process and manufacture and lower in cost.

Description

TECHNICAL FIELD

[0001] The utility model relates to magnetron sputtering field especially relates to a water -cooling conductive ring structure and magnetron sputtering thin film deposition equipment. BACKGROUND

[0002] Magnetron sputtering film coating as a kind of efficient thin film deposition technology is widely used in semiconductor, photovoltaic and other vacuum film coating industry. Magnetron sputtering film coating is through the interaction of electric field and magnetic field, electron is accelerated to fly to the substrate under the action of electric field, and a large number of argon ions and electrons are ionized, and electron flies to the substrate. Argon ions are accelerated to bombard target material under the action of electric field, and a large number of target material atoms, ions are sputtered, and deposited on the substrate to form film. In semiconductor, with the increase of the circuit density of each generation device, the surface and hole wall of the substrate with high aspect ratio hole need to be coated. When coating the substrate with deep hole, the direction of the coating atom and ion from the target surface to the substrate surface is close to perpendicular to the substrate surface, so as to avoid the problem that the substrate deep hole bottom is not coated with film, and the hole is sealed, causing coating failure and other problems. Therefore, the magnetic field generated by the upper coil and the lower coil is needed to correct the ion motion track. And the coating atom is not affected by the magnetic field and the electric field, so the collimator is needed to screen and filter out the coating atom that does not meet the direction requirement. And in some processes, the collimator is connected to the pulse power source, which can also correct the ion track. In the prior art, the collimator is indirectly connected to the power supply through water-cooled conductive ring, and water cooling is carried out, but the existing water-cooled conductive ring is usually machined integrally, which has high processing difficulty and high cost. CONTENT OF THE UTILITY MODEL

[0003] The utility model aims at least to solve one of the technical problems existing in the prior art. Therefore, the utility model provides a water-cooled conductive ring structure, which is convenient to process and low in cost.

[0004] The utility model further provides a magnetron sputtering thin film deposition equipment with the above-mentioned water-cooled conductive ring structure.

[0005] According to the water-cooled conductive ring structure of the first aspect embodiment of the utility model, which comprises:

[0006] The rectangular frame comprises four splicing strips and four splicing parts, two adjacent splicing strips are connected and fixed through the splicing part, the inside of the splicing strip is provided with a cooling water channel along the length direction of itself, and the inside of the splicing part is provided with a transition water channel, the transition water channel is connected with the cooling water channels of two adjacent splicing strips, so as to form a circular circulating water channel.

[0007] The electric connector is connected to the rectangular frame, and the electric connector is provided with a water inlet channel and a water outlet channel connected with the circulating water channel.

[0008] According to the water-cooled conductive ring structure, at least the following beneficial effects are achieved:

[0009] By arranging four splicing strips and splicing the four splicing strips by using the splicing part, the water-cooled conductive ring structure is made into a splicing structure, so that compared with integral machining, the machining is more convenient and the cost is lower.

[0010] According to some embodiments of the present application, along the length direction of the splicing strip, at least one of the splicing part and the splicing strip is provided with an extension part, and the extension part is connected to the upper end and / or the lower end of the other.

[0011] According to some embodiments of the present application, two extension parts are arranged at one end of the splicing part close to the splicing strip, and the two extension parts are respectively connected to the upper end and the lower end of the splicing strip.

[0012] According to some embodiments of the present application, a first positioning protrusion is arranged at one end of the extension part, the splicing strip is provided with a first positioning recess, the first positioning protrusion is matched into the first positioning recess, and the first positioning protrusion is used to limit the movement of the splicing part along the length direction of the splicing strip relative to the splicing strip.

[0013] According to some embodiments of the present application, the splicing part comprises:

[0014] An angle piece, two ends of the angle piece abut against the end portions of two adjacent splicing strips;

[0015] Two fixing plates, the two fixing plates are arranged at the upper and lower ends of the angle piece, and the two ends of the fixing plate extend to the upper end or the lower end of two adjacent splicing strips, so as to form the extension part.

[0016] According to some embodiments of the present application, the opposite sides of the angle piece and the fixing plate are respectively provided with a matched second positioning protrusion and a second positioning recess.

[0017] According to some embodiments of the present application, the outer side of the splicing part is provided with a first arc-shaped transition surface, and the inner side is provided with a second arc-shaped transition surface, the first arc-shaped transition surface is flush with the outer end surface of two adjacent splicing strips, and the second arc-shaped transition surface is flush with the inner end surface of two adjacent splicing strips.

[0018] According to some embodiments of the present application, the transition water channel comprises a first segment and a second segment along the length direction, the first segment and the second segment are respectively connected to an adjacent cooling water channel, and the first segment and the second segment are distributed at an obtuse angle.

[0019] According to some embodiments of the present application, a sealing ring is arranged at the joint of the transition water channel and the cooling water channel.

[0020] According to the magnetron sputtering thin film deposition device of the second aspect of the present application, the device comprises:

[0021] A collimator;

[0022] The water-cooled conductive ring structure is arranged on the side of the collimator.

[0023] The magnetron sputtering thin film deposition device of the present application has at least the following beneficial effects:

[0024] The water-cooled conductive ring structure is provided with four splicing strips, and the four splicing strips are spliced by the splicing part, so that the water-cooled conductive ring structure is made into a splicing structure.

[0025] The additional aspects and advantages of the present application will be partially given in the following description, partially become obvious from the following description, or be understood through the practice of the present application. BRIEF DESCRIPTION OF DRAWINGS

[0026] The present application will be further described below in combination with the drawings and embodiments, wherein:

[0027] Figure 1 is a mounting structure schematic view of the water-cooled conductive ring structure of the embodiment of the present application;

[0028] Figure 2 is an internal structure schematic view of the water-cooled conductive ring structure of the embodiment of the present application;

[0029] Figure 3 is a mounting structure exploded schematic view of the splicing strip and the splicing part of the embodiment of the present application.

[0030] REFERENCE NUMERALS:

[0031] Rectangular frame 100, splicing strip 110, cooling water channel 111, first positioning recess 112, splicing part 120, transition water channel 121, first positioning protrusion 122, first arc-shaped transition surface 123, second arc-shaped transition surface 124, first section 125, second section 126, corner piece 130, second positioning recess 131, fixed plate 140, second positioning protrusion 141, sealing ring 150, first screw 160, second screw 170;

[0032] Electric connector 200, water inlet channel 201, water outlet channel 202. DETAILED DESCRIPTION

[0033] The embodiments of the present application are described below in detail, examples of which are shown in the drawings, wherein the same or similar notations represent the same or similar elements or elements having the same or similar functions throughout. The embodiments described below by referring to the drawings are exemplary only, for the purpose of explaining the present application, and should not be understood as a limitation of the present application.

[0034] In the description of the present application, it should be understood that, in relation to the orientation description, for example, the orientation or position relationship indicated by up, down, etc. is based on the orientation or position relationship shown in the drawings, which is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation of the present application.

[0035] In the description of the present application, the plural means more than two. If there is a description of first, second, etc., it is only for the purpose of distinguishing technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of technical features indicated or the sequence of technical features indicated.

[0036] In the description of the present application, unless otherwise explicitly limited, the words such as setting, installing, connecting, etc. should be broadly understood, and the person skilled in the art can reasonably determine the specific meaning of the above words in the present application in combination with the specific content of the technical solution.

[0037] When coating a deep hole substrate, it is desired that the direction of the coating atoms and ions from the target surface to the substrate surface is close to perpendicular to the substrate surface, so as to prevent the substrate deep hole bottom from being not fully coated with film, the orifice being sealed, and causing poor coating and other problems, and therefore the magnetic field is needed to correct the ion motion trajectory. Since the coating atoms are not affected by the magnetic field and the electric field, a collimator is needed to screen and filter out the coating atoms that do not meet the direction requirement. In the prior art, the collimator indirectly supplies power through a water-cooled conductive ring and cools by water, but the existing water-cooled conductive ring is usually machined integrally, which has high processing difficulty and cost.

[0038] Therefore, the present application provides a water-cooled conductive ring structure and a magnetron sputtering thin film deposition equipment, which can effectively improve the above problems.

[0039] The water-cooled conductive ring structure and the magnetron sputtering thin film deposition equipment according to the embodiments of the present application are described below with reference to the accompanying drawings. Figures 1 to 3 The water-cooled conductive ring structure and the magnetron sputtering thin film deposition equipment according to the embodiments of the present application are described below with reference to the accompanying drawings.

[0040] The water-cooled conductive ring structure according to the first aspect of the present application comprises a rectangular frame 100 and an electric connector 200.

[0041] The rectangular frame 100 comprises four splicing strips 110 and four splicing parts 120, two adjacent splicing strips 110 are fixedly connected through the splicing part 120, the four splicing strips 110 are spliced and combined through the four splicing parts 120 to form a splicing structure, the inside of the splicing strip 110 is provided with a cooling water channel 111 along the length direction of the splicing strip 110, the inside of the splicing part 120 is provided with a transition water channel 121, the transition water channel 121 communicates the cooling water channels 111 of the two adjacent splicing strips 110, and the cooling water channels 111 of the four splicing strips 110 and the transition water channels 121 of the four splicing parts 120 jointly form a ring-shaped circulating water channel.

[0042] The electric connector 200 is connected to the rectangular frame 100, the electric connector 200 is provided with a water inlet channel 201 and a water outlet channel 202 which communicate with the circulating water channel, so that the cooling water is input and output to the circulating water channel. Specifically, the electric connector 200 can be connected to the cable to supply power to the rectangular frame 100, the electric connector 200 is connected to one of the four splicing strips 110, the cooling water channel 111 of the splicing strip 110 connected with the electric connector 200 is blocked into two sections, the two sections of the cooling water channel 111 are connected to the water inlet channel 201 and the water outlet channel 202 of the electric connector 200 respectively, and in addition, the splicing strip 110 and the splicing part 120 are made of a material with high electrical conductivity and high thermal conductivity, such as high-purity copper, silver and the like.

[0043] The water-cooled conductive ring structure of the embodiment of the utility model, through setting four splicing strips 110, and splicing four splicing strips 110 by splicing part 120, so that the water-cooled conductive ring structure is made into splicing structure, so setting, relative to integrated processing, not only processing is more convenient, and cost is lower.

[0044] Referring to Figure 1 and Figure 3 As shown in the utility model some embodiments, along the length direction of splicing strip 110, splicing part 120 and at least one of splicing strip 110 are provided with extension, extension is connected to the upper end and / or lower end of another, it specifically includes the following several cases, one is that splicing part 120 is provided with an extension close to one end of splicing strip 110 to be connected with the upper end or lower end of splicing strip 110, two is that splicing part 120 is provided with two extensions close to one end of splicing strip 110 to be connected with the upper end and lower end of splicing strip 110 respectively, three is that splicing strip 110 is provided with an extension close to one end of splicing part 120 to be connected with the upper end or lower end of splicing part 120, four is that splicing strip 110 is provided with two extensions close to one end of splicing part 120 to be connected with the upper end and lower end of splicing part 120 respectively, by setting extension, can use extension to provide a better mounting position to set connecting piece to connect splicing strip 110 and splicing part 120, facilitate the connection between the two.

[0045] In the embodiment, to make the connection between the splicing strip 110 and the splicing part 120 more stable, the second structure form is adopted, two extension parts are arranged at one end of the splicing part 120 close to the splicing strip 110, and the two extension parts are respectively attached to the upper end and the lower end of the splicing strip 110, so as to clamp the splicing strip 110. In a further embodiment of the utility model, a first positioning protrusion 122 is arranged at one end of the extension part attached to the splicing strip 110, the splicing strip 110 is provided with a first positioning recess 112, the first positioning protrusion 122 is matched into the first positioning recess 112, and the first positioning protrusion 122 is used for limiting the movement of the splicing part 120 relative to the splicing strip 110 in the length direction of the splicing strip 110. It can be understood that, since the water-cooled conductive ring structure needs to be electrified, it is generally made of materials with high electrical conductivity and high thermal conductivity, such as high-purity copper, silver and other metals, that is, the splicing strip 110 and the splicing part 120 need to be made of the above-mentioned materials, and the above-mentioned materials are mostly soft, and the splicing strip 110 and the splicing part 120 need to bear the hydraulic tension of the cooling water in the circulating water channel, so they also need to have certain structural strength. Therefore, in the embodiment, the first positioning protrusion 122 and the first positioning recess 112 are arranged, and the first positioning protrusion 122 is adapted to be embedded into the first positioning recess 112, so as to relatively position the splicing strip 110 and the splicing part 120 in the length direction of the splicing strip 110. The connection strength between the splicing strip 110 and the splicing part 120 is improved through the cooperation of the first positioning protrusion 122 and the first positioning recess 112. In this way, the connecting part between the splicing strip 110 and the splicing part 120 can only play a fixing role without bearing the hydraulic tension. Specifically, the connecting part between the extension part of the splicing strip 110 and the splicing part 120 can adopt the first screw 160, that is, the extension part of the splicing part 120 and the splicing strip 110 are connected through the first screw 160, and the first screw 160 is vertically distributed. Since the first screw 160 is distributed perpendicular to the length direction of the splicing strip 110, the hydraulic tension can be borne by the first positioning protrusion 122 and the first positioning recess 112, and the first screw 160 and the threaded hole position matched therewith do not need to bear the hydraulic tension of the cooling water in the circulating water channel, so as to avoid the easy damage of the screw thread and reduce the service life.

[0046] It can be conceived that the first positioning protrusion 122 and the first positioning recess 112 can have various structure forms, for example, in the embodiment, as shown in Figure 3 , the first positioning protrusion 122 is arranged as a long strip-shaped protrusion, which is distributed perpendicular to the length direction of the splicing strip 110, and the first positioning recess 112 is arranged as a long strip-shaped groove matched therewith; for another example, the first positioning protrusion 122 is arranged as a cylindrical protrusion, which is distributed perpendicular to the length direction of the splicing strip 110, and the first positioning recess 112 is arranged as a cylindrical hole matched therewith, or other structure forms meeting the conditions are adopted, which are not listed one by one here.

[0047] Referring toFigure 1 and Figure 3 As shown in FIG. 12 and FIG. 13, in some embodiments of the present application, the joint part 120 comprises a corner piece 130 and two fixing plates 140. The two ends of the corner piece 130 abut against the ends of the two adjacent joint strips 110, and a transition water channel 121 is arranged inside the corner piece 130. The two fixing plates 140 are arranged at the upper and lower ends of the corner piece 130, and the two ends of each fixing plate 140 extend to the upper end or the lower end of the two adjacent joint strips 110, so as to form an extension part. In this embodiment, the two ends of the fixing plate 140 arranged at the upper end of the corner piece 130 extend to the upper end of the two adjacent joint strips 110 respectively, and the two ends of the fixing plate 140 arranged at the lower end of the corner piece 130 extend to the lower end of the two adjacent joint strips 110 respectively. The four extension parts are formed by the two fixing plates 140. In this embodiment, the opposite sides of the two fixing plates 140 are respectively provided with two first positioning protrusions 122, which are matched with the first positioning recesses 112 on the joint strips 110. The two fixing plates 140 are connected with the joint strips 110 by the first screws 160.

[0048] Referring to Figure 3 As shown in FIG. 12 and FIG. 13, in some embodiments of the present application, in order to facilitate the assembly and disassembly of the joint part 120 and the joint strips 110, the two fixing plates 140 are detachably connected with the corner piece 130. During the assembly, the corner piece 130 is first connected with one of the fixing plates 140, and then the fixing plate 140 is connected with the two adjacent joint strips 110 by the first screws 160, so that the first positioning protrusions 122 of the fixing plate 140 are embedded in the corresponding first positioning recesses 112. Then, the other fixing plate 140 is connected with the corner piece 130 and the two adjacent joint strips 110. During the disassembly, the reverse operation can be performed. Specifically, the two fixing plates 140 are connected with the corner piece 130 by the second screws 170. The second screws 170 are vertically distributed. The corner piece 130 and the fixing plates 140 are connected by the second screws 170, which is convenient for connection. Further, the opposite sides of the corner piece 130 and the fixing plates 140 are respectively provided with adaptive second positioning protrusions 141 and second positioning recesses 131. The second positioning protrusions 141 are embedded in the second positioning recesses 131. Similarly, after the matching structure of the second positioning protrusions 141 and the second positioning recesses 131 is arranged, the second positioning protrusions 141 and the second positioning recesses 131 can bear the hydraulic tension, so as to improve the connection strength between the fixing plates 140 and the corner piece 130. The second screws 170 only play a role in connection and fixation. In this way, the second screws 170 and the threaded holes matched with the second screws 170 can avoid bearing the hydraulic tension of the cooling water in the circulating water channel, so as to avoid the easy damage of the screw thread caused by bearing the hydraulic tension. In this embodiment, the second positioning recesses 131 are in a fan-shaped structure, and the second positioning protrusions 141 are arranged on the fixing plates 140 and match the shape and size of the second positioning recesses 131.

[0049] Referring to Figure 2As shown in some embodiments of the utility model, the outside of the splicing part 120 is provided with a first arc transition surface 123, the inside of the splicing part 120 is provided with a second arc transition surface 124, the first arc transition surface 123 is flush with the outer end surface of the adjacent two splicing strips 110, the second arc transition surface 124 is flush with the inner end surface of the adjacent two splicing strips 110, that is, the splicing part 120 is a rounded structure, which can avoid stress concentration and easy damage compared with a right angle structure. Specifically, in the embodiment, the first arc transition surface 123 and the second arc transition surface 124 are respectively arranged on the outside and the inside of the corner piece 130.

[0050] Referring to Figure 2 As shown in some embodiments of the utility model, the transition water channel 121 includes a first section 125 and a second section 126 along the length direction, the first section 125 and the second section 126 are respectively connected to an adjacent cooling water channel 111, the first section 125 and the second section 126 are distributed at an obtuse angle, specifically, the first section 125 and the second section 126 are both inclined inwardly relative to the corresponding cooling water channel 111, that is, the first section 125 and the second section 126 are inclined and crossed, it can be understood that, considering the cost, installation and other factors, the side wall of the circulating water channel is designed to be relatively thin, if the first section 125 and the second section 126 of the transition water channel 121 are crossed and connected at a right angle, one of the water channels is easy to be drilled and broken when drilling, therefore, in the embodiment, the first section 125 and the second section 126 are distributed at an obtuse angle, so as to reduce the risk of wall breaking when drilling one of the water channels.

[0051] Referring to Figure 2 And Figure 3 As shown in some embodiments of the utility model, a sealing ring 150 is arranged at the joint of the transition water channel 121 and the cooling water channel 111, the sealing ring 150 is used for preventing the cooling water in the circulating water channel from leaking; specifically, a recess is arranged on the end surface of the splicing strip 110 in the length direction, and the sealing ring 150 is embedded in the recess, so as to facilitate the positioning and installation of the sealing ring 150.

[0052] The magnetron sputtering thin film deposition equipment according to the second aspect of the utility model comprises a collimator and the water-cooled conductive ring structure of the first aspect of the utility model, the water-cooled conductive ring structure is arranged on the side of the collimator, the collimator is indirectly electrified through the water-cooled conductive ring structure, and the collimator is water-cooled.

[0053] The magnetron sputtering thin film deposition equipment adopts the water-cooled conductive ring structure of the first aspect of the utility model, the water-cooled conductive ring structure is provided with four splicing strips 110, and the four splicing strips 110 are spliced through the splicing part 120, so that the water-cooled conductive ring structure is made into a splicing structure, which is more convenient to process and manufacture and has lower cost compared with integral processing.

[0054] It should be noted that since the magnetron sputtering thin film deposition device can adopt all the technical solutions of the water-cooled conductive ring structure of the first aspect embodiment, it at least has all the beneficial effects brought by the technical solutions of the first aspect embodiment. These additional beneficial effects will not be described here.

[0055] It can be understood that other configurations and operations of the magnetron sputtering thin film deposition device according to the embodiments of the present application are known to those skilled in the art, and will not be described in detail here.

[0056] The embodiments of the present application are described in detail above in combination with the drawings, but the present application is not limited to the above embodiments. Various changes can be made within the knowledge of those skilled in the art without departing from the spirit of the present application.

Claims

1. A water-cooled conductive ring structure, characterized in that: include: A rectangular frame comprising four splicing strips and four splicing portions, wherein two adjacent splicing strips are connected and fixed by the splicing portions, cooling water channels are provided inside the splicing strips along their lengths, and transition water channels are provided inside the splicing portions, wherein the transition water channels connect the cooling water channels of two adjacent splicing strips, thereby forming an annular circulating water channel; An electric connector is connected to the rectangular frame, and the electric connector is provided with a water inlet and a water outlet communicating with the circulating water channel.

2. The water-cooled conductive ring structure according to claim 1, characterized in that: Along the length direction of the splicing strip, at least one of the splicing portion and the splicing strip is provided with an extension portion, and the extension portion is attached and connected to the upper end and / or lower end of the other one.

3. The water-cooled conductive ring structure according to claim 2, characterized in that: The two extending portions are provided at one end of the splicing portion close to the splicing strip, and the two extending portions are respectively connected to the upper end and the lower end of the splicing strip.

4. The water-cooled conductive ring structure according to claim 3, characterized in that: The extension portion is attached to one end of the splicing strip to provide a first positioning protrusion, the splicing strip is provided with a first positioning recess, the first positioning protrusion fits into the first positioning recess, and is used to at least limit the movement of the splicing portion relative to the splicing strip along the length direction of the splicing strip.

5. The water-cooled conductive ring structure according to claim 3, characterized in that: The splicing portion includes: Angle pieces, the two ends of which abut against the ends of two adjacent splicing strips; Two fixing plates are provided at the upper and lower ends of the corner piece, and the two ends of the fixing plates extend to the upper ends or lower ends of two adjacent splicing strips to form the extension portion.

6. The water-cooled conductive ring structure according to claim 5, characterized in that: The corner piece and the fixing plate are respectively provided with a second positioning protrusion and a second positioning recess that match each other on the facing sides thereof.

7. The water-cooled conductive ring structure according to claim 1, characterized in that: The outer side of the splicing portion is provided with a first arcuate transition surface, and the inner side is provided with a second arcuate transition surface. The first arcuate transition surface is flush with the outer end surfaces of the two adjacent splicing strips, and the second arcuate transition surface is flush with the inner end surfaces of the two adjacent splicing strips.

8. The water-cooled conductive ring structure according to claim 7, characterized in that: The transition water channel includes a first section and a second section along the length direction. The first section and the second section are respectively connected to an adjacent cooling water channel. The first section and the second section are distributed at an obtuse angle.

9. The water-cooled conductive ring structure according to claim 1, characterized in that: A sealing ring is provided at the junction of the transition water channel and the cooling water channel.

10. A magnetron sputtering thin film deposition device, characterized in that: include: collimator; The water-cooled conductive ring structure according to any one of claims 1 to 9, wherein the water-cooled conductive ring structure is arranged on the circumference of the collimator.

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