Heating device and epitaxial equipment

Abstract

The utility model belongs to the technical field of semiconductor processing equipment, and discloses a heating device and epitaxial equipment, the heating device comprises at least two heating bodies, each heating body is provided with at least two bosses protruding outwards, each heating body corresponds to two first connecting bodies, and the first connecting bodies are connected with the first connecting bodies. First bearing grooves are formed in the end faces of one ends of the two first connecting bodies, the other ends of the first connecting bodies are connected to the electrodes, one boss on each heating body can be embedded into one first bearing groove, and the other boss on each heating body can be embedded into the other first bearing groove; different heating bodies can be distributed at intervals in the height direction through the two first connecting bodies corresponding to each heating body; the epitaxial equipment comprises a reaction cavity and the heating device, the heating device is arranged in the reaction cavity, the boss can be stably connected with the first connecting body, the temperature control effect is better, and the service life is long.

Description

TECHNICAL FIELD

[0001] The utility model relates to semiconductor processing equipment technical field especially, relates to a heating device and epitaxial equipment. BACKGROUND

[0002] There are various methods for growing silicon carbide epitaxial films, among which the chemical vapor deposition (CVD) method has the advantages of precise control of epitaxial film thickness and carrier concentration, fewer defects, moderate growth speed, and automatic process control, and is the most commonly used method for growing silicon carbide epitaxial films.

[0003] In the existing chemical vapor deposition (CVD) equipment, the core part is a cavity, and the reaction gas for growing thin films is introduced into the cavity from the upper gas inlet of the cavity. A side heater is usually arranged in the cavity, located near the inner side wall of the cavity, for heating the reaction gas in the cavity. The common side heater is directly fixed with a bolt by using an electrode and a heating body above the cavity. This connection method is prone to cause problems such as poor contact between the electrode and the heater, which may lead to increased resistance, unstable current, local overheating, discharge and other phenomena, making temperature control more difficult and the uniformity worse, affecting the uniformity of the grown thin films. SUMMARY

[0004] The utility model discloses a heating device and epitaxial equipment, solve the problem that electrode and heater contact badly.

[0005] To achieve this purpose, the utility model adopts the following technical scheme:

[0006] The heating device is applied to the epitaxial equipment, and the heating device comprises:

[0007] The heating body is provided with at least two outwardly protruding bosses;

[0008] A plurality of first connecting bodies are provided with a first supporting groove at one end face in the height direction, the other end of the first connecting body in the height direction is connected to the electrode, and the first connecting body can conduct electricity;

[0009] One of the bosses on the heating body is embedded in one of the first supporting grooves, and the other boss is embedded in the other first supporting groove.

[0010] In some embodiments, the number of heating bodies is multiple;

[0011] Each heating body corresponds to two first connecting bodies;

[0012] The first connecting bodies corresponding to adjacent two heating bodies have different sizes in the height direction, so that the adjacent two heating bodies are spaced apart in the height direction.

[0013] In some embodiments, the heating device further comprises a support base, a plurality of support grooves are arranged on the support base, and the first connecting body is at least partially arranged in the support groove away from the boss.

[0014] In some embodiments, more than two bosses are arranged on the heating body, and the heating body is further provided with a second connecting body, a second supporting groove is arranged at the first end of the second connecting body, the bosses on the heating body are correspondingly embedded in the second supporting groove, and the second end of the second connecting body is embedded in the support groove.

[0015] In some embodiments, two bosses are arranged on the heating body, and the two bosses are arranged on opposite sides of the heating body.

[0016] In some embodiments, the heating device comprises a conductive plate arranged on the support base, the electrode comprises a plurality of first electrodes and a second electrode, the first electrode is connected to one of the first connecting bodies on each heating body, the other first connecting body on each heating body is connected to the conductive plate, and the conductive plate is connected to the second electrode.

[0017] In some embodiments, the heating device comprises a low-thermal-conductivity body arranged on the support base, and the low-thermal-conductivity body circumferentially surrounds the heating body to enclose a heating space.

[0018] In some embodiments, an isolation plate is arranged between the conductive plate and the low-thermal-conductivity body.

[0019] In some embodiments, the first connecting body is Z-shaped.

[0020] Also provided is an epitaxial device comprising a reaction cavity and the heating device as described above, and the heating device is arranged in the reaction cavity.

[0021] The utility model has the advantages of:

[0022] The first supporting groove arranged on the first connecting body enables the electrode to be connected to the heating body through the first connecting body, the boss can be stably connected to the first connecting body under the action of gravity, thereby ensuring stable connection between the electrode and the heating body, making the temperature control effect better and the service life longer, and different heating bodies can be independently controlled in temperature, thereby improving the temperature control effect. BRIEF DESCRIPTION OF DRAWINGS

[0023] Figure 1 is the schematic view of the first connecting body of the heating device of the utility model;

[0024] Figure 2 is a schematic view of the first connecting body in the heating device of the utility model;

[0025] Figure 3 is a schematic view of the heating device of the utility model;

[0026] Figure 4 is a partial sectional view of the heating device of the utility model;

[0027] Figure 5 is a partial sectional view of the heating device of the utility model arranged in the fixed seat.

[0028] In the drawing:

[0029] 1, heating body; 2, boss; 3, first connecting body; 31, first bearing groove; 4, electrode; 5, support seat; 51, support ring; 52, plug-in ring; 53, support groove; 6, conductive plate; 7, low thermal conductivity body; 71, plug-in groove; 8, isolation plate; 9, fixed seat. DETAILED DESCRIPTION

[0030] The utility model will be further explained in detail in combination with the drawings and examples. It can be understood that the specific examples described here are only used to explain the utility model, not to limit the utility model. In addition, it should be noted that, in order to facilitate the description, only the part related to the utility model is shown in the drawing, not all the structures.

[0031] In the description of the utility model, unless otherwise explicitly specified and limited, the terms "connected", "connected", "fixed" should be understood broadly, for example, it can be fixedly connected, or it can be detachably connected, or it can be integrated; it can be mechanically connected, or it can be electrically connected; it can be directly connected, or it can be indirectly connected through an intermediate medium; it can be the internal communication of two elements or the interaction relationship of two elements. For ordinary skilled in the art, the specific meaning of the above terms in the utility model can be understood according to the specific circumstances.

[0032] In the utility model, unless otherwise explicitly specified and limited, the first feature "on" or "below" the second feature can include that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact through another feature between them. Moreover, the first feature "on", "above" and "above" the second feature includes that the first feature is directly above and obliquely above the second feature, or only indicates that the horizontal height of the first feature is higher than that of the second feature. The first feature "below", "below" and "below" the second feature includes that the first feature is directly below and obliquely below the second feature, or only indicates that the horizontal height of the first feature is less than that of the second feature.

[0033] In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like, orientation or positional relationship are based on the orientation or positional relationship shown in the drawings, and are only for the convenience of description and simplification of operation, and do not indicate or imply that the device or element referred to must have a particular orientation, be constructed and operated in a particular orientation, and therefore cannot be understood as a limitation on the present application. In addition, the terms "first" and "second" are only used to distinguish in the description, and have no special meaning.

[0034] As Figures 1 to 5 shown, the present application provides a heating device applied to epitaxial equipment, which comprises a plurality of heating bodies 1, including two in the present application; wherein at least two outward protruding bosses 2 are arranged on each heating body 1, each heating body 1 corresponds to two first connecting bodies 3, the adjacent two first connecting bodies 3 have different sizes in the height direction, one end face of the two first connecting bodies 3 in the height direction is provided with a first supporting groove 31, the other end of the first connecting body 3 in the height direction is connected to an electrode 4, one of the bosses 2 on each heating body 1 can be embedded in one of the first supporting grooves 31, and the other boss 2 can be embedded in the other first supporting groove 31; so that different heating bodies 1 can be distributed in the height direction by the two first connecting bodies 3 corresponding to each heating body 1, so as to form different temperature zones at different heights.

[0035] With the above structure, the first connecting body 3 is provided with the first supporting groove 31, so that the electrode 4 is connected to the heating body 1 through the first connecting body 3, under the action of gravity, the boss 2 can be stably connected with the first connecting body 3, so as to ensure the stable connection between the electrode 4 and the heating body 1, the temperature control effect is better, and the service life is long; and different heating bodies can be independently controlled in temperature, so as to improve the temperature control effect.

[0036] It can be understood that the heating device can also include only one heating body 1, which is connected with two first connecting bodies 3 through the boss 2, and the first connecting body 3 is connected with the electrode 4. Through the cooperation of the boss 2 and the first supporting groove 31, the connection stability between the heating body 1 and the first connecting body 3 is improved.

[0037] In the present embodiment, the material of the first connecting body 3 is graphite. It should be noted that the boss 2 can be integrally formed with the heating body 1; and the number of the heating body 1 is not limited.

[0038] As Figure 1As shown, in order to provide a support position, in some embodiments, the heating device further comprises a support seat 5, which is made of insulating quartz material. A plurality of support grooves 53 are provided on the support seat 5, and the first connecting body 3 is correspondingly and at least partially arranged in the support groove 53 away from the boss 2. The inner bottom of the support groove 53 is provided with a through hole, and the electrode 4 is connected to the first connecting body 3 through the through hole. Specifically, the electrode 4 is connected to the first connecting body 3 through a CFC screw, and the end of the first connecting body 3 away from the boss 2 is provided with a screw hole for screwing and fixing the CFC screw. The CFC screw can not only fix the first connecting body 3, but also ensure that the electrode 4 forms a passage with the first connecting body 3 and the heating body 1. Specifically, the first connecting body 3 is composed of two transverse connecting bodies and one longitudinal connecting body, one of the transverse connecting bodies is connected to one end of the longitudinal connecting body, and the other transverse connecting body is connected to the other end of the longitudinal connecting body to form a Z shape, and the first supporting groove 31 is located on one of the transverse connecting bodies to improve the stability of the support.

[0039] In some embodiments, in addition to the first connecting body 3 for electrically connecting, the heating device can further comprise a second connecting body (not shown in the figure), which is not conductive. When the second connecting body is provided, the boss 2 on each heating body 1 is provided with more than two, two of which are connected to the first connecting body 3, and the first end of the second connecting body is provided with a second supporting groove. The other bosses 2 on each heating body 1 can be correspondingly embedded in the second supporting groove, and the second end of the second connecting body, that is, the end of the second connecting body away from the heating body 1, is embedded in the support groove 53 of the support seat 5, so as to provide support for the heating body 1 through the additional second connecting body and ensure the stability of the heating body 1. It can be understood that the second connecting body can also be Z-shaped to improve the stability of the support.

[0040] It can be understood that the heating device can further comprise a third connecting body (not shown in the figure), which can conduct electricity. When the heating body 1 uses three-phase power supply, two of the three-phase power supply are connected through two first connecting bodies 3, and the other one is connected through the third connecting body. The heating body 1 is additionally provided with a boss 2 for matching the third connecting body. The first end of the third connecting body is provided with a third supporting groove, and the boss 2 on the heating body 1 for matching the third connecting body is embedded in the third supporting groove. The second end of the third connecting body, that is, the end of the third connecting body away from the heating body 1, is embedded in the support groove 53 of the support seat 5. It can be understood that the third connecting body can also be Z-shaped to improve the stability of the support.

[0041] As shown, Figure 1 In the current embodiment, in order to save installation space, the boss 2 on each heating body 1 comprises two, and the two bosses 2 are arranged on opposite sides of the heating body 1, so as to be supported from both sides of the heating body 1 and ensure the stability of the heating body 1.

[0042] Continue as Figure 1 As shown, since the first connector 3 connected to each heating body 1 needs to be connected to the electrode 4 to form a loop, in order to reduce the number of electrodes 4, in some embodiments, the heating device includes a conductive plate 6, which is arranged on the support seat 5, and the conductive plate 6 is made of conductive graphite; correspondingly, the electrode 4 includes several first electrodes and a second electrode, one of the first connectors 3 on different heating bodies 1 is connected to the first electrode, and the other first connectors 3 on different heating bodies 1 are connected to the conductive plate 6, and the second electrode is connected to the conductive plate 6, so that on the basis that the heating body 1 can be controlled individually, the different heating bodies 1 are connected to the second electrode through the conductive plate 6 to form a loop, which reduces the number of electrodes 4 and improves space utilization.

[0043] like Figure 3 and Figure 4 As shown, in some embodiments, in order to insulate heat from the outside and keep heat inside, the heating device includes a low thermal conductor 7, which is arranged on the support seat 5, and the low thermal conductor 7 circumferentially surrounds the heating body 1 to enclose a heating space through the low thermal conductor 7, so that the gas in the heating space is heated by the heating body 1, and is kept warm by the low thermal conductor 7 to ensure the stability of the process temperature; in addition, the low thermal conductor 7 can also insulate heat from the outside to prevent heat from overflowing from the heating body 1 and scalding the staff. In the current embodiment, the low thermal conductor 7 is made of a material with a thermal conductivity of less than or equal to 10W / (m·K), such as graphite hard felt. In order to prevent the low thermal conductor 7 from contacting the conductive plate 6 and to prevent the low thermal conductor 7 from conducting electricity, an isolation plate 8 is provided on the support seat 5, and the isolation plate 8 is located between the low thermal conductor 7 and the conductive plate 6 to isolate the two.

[0044] Specifically, if Figure 1 and Figure 4 As shown, the heater 1, low thermal conductor 7, and support base 5 are all arranged in an annular shape, wherein the support base 5 includes an annular support ring 51 and an annular plug-in ring 52 disposed on the support ring 51. The heater 1 is disposed within the space enclosed by the support ring 51 and the plug-in ring 52. A support groove 53 is defined in the support ring 51, and the plug-in ring 52 is provided with a through-hole, through which the first connector 3 and the second connector are both inserted into the support groove 53. An isolation plate 8 is disposed on the plug-in ring 52, and the low thermal conductor 7 has a plug-in groove 71. The low thermal conductor 7 is plugged into the plug-in ring 52 through the plug-in groove 71, so that the low thermal conductor 7 is partially placed on the isolation plate 8 and partially placed on the support ring 51, thereby isolating the low thermal conductor 7 from the conductive plate 6 via the isolation plate 8.

[0045] The present application also provides an epitaxial device, comprising a reaction chamber and the above-mentioned heating device, wherein the heating device is arranged in the reaction chamber. Figure 5As shown, the reaction cavity is provided with a fixing base 9, and the supporting base 5 is installed on the fixing base 9, so that the heating body 1 is stably connected, the temperature control effect is better, and the service life is prolonged.

[0046] Obviously, the above embodiments of the present application are only examples for clearly illustrating the present application, and are not intended to limit the embodiments of the present application. For those skilled in the art, various obvious changes, re-adjustments and substitutions can be made without departing from the protection scope of the present application. Here, it is not necessary and impossible to enumerate all the embodiments. Any modification, equivalent substitution and improvement within the spirit and principle of the present application shall be included in the protection scope of the present application.

Claims

1. A heating device, applied to an epitaxial device, characterized in that: include: A heating body (1), wherein the heating body (1) is provided with at least two outwardly protruding bosses (2); A plurality of first connectors (3), wherein a first supporting groove (31) is provided on an end surface of one end of the first connector (3) in the height direction, and the other end of the first connector (3) in the height direction is connected to an electrode (4), and the first connector (3) is capable of conducting electricity; One of the bosses (2) on the heating body (1) is embedded in one of the first supporting grooves (31), and the other boss (2) is embedded in the other of the first supporting grooves (31).

2. The heating device according to claim 1, wherein The number of the heating bodies (1) is multiple; Each of the heating bodies (1) has two corresponding first connecting bodies (3); The first connecting bodies (3) corresponding to two adjacent heating bodies (1) have different sizes along the height direction, so that the two adjacent heating bodies (1) are spaced apart along the height direction.

3. The heating device according to claim 1 or 2, characterized in that The heating device further comprises a support seat (5), a plurality of support grooves (53) being provided on the support seat (5), an end of the first connector (3) away from the boss (2) being at least partially disposed in the support groove (53), and the electrode (4) passing through the groove wall of the support groove (53) and connected to the first connector (3).

4. The heating device according to claim 3, characterized in that The number of the bosses (2) on the heating body (1) is more than two, and the heating body (1) is also correspondingly provided with a second connector, the first end of the second connector is provided with a second supporting groove, the bosses (2) on the heating body (1) are correspondingly embedded in the second supporting groove, and the second end of the second connector is embedded in the supporting groove (53).

5. The heating device according to claim 3, characterized in that Two bosses (2) are provided on the heating body (1), and the two bosses (2) are provided on opposite sides of the heating body (1).

6. The heating device according to claim 3, characterized in that The heating device comprises a conductive plate (6), the conductive plate (6) being arranged on the support seat (5), the electrode (4) comprising a plurality of first electrodes and a second electrode, one of the first connectors (3) on each of the heating bodies (1) being connected to the first electrode, and another of the first connectors (3) on each of the heating bodies (1) being connected to the conductive plate (6), and the conductive plate (6) being connected to the second electrode.

7. The heating device according to claim 6, characterized in that The heating device comprises a low thermal conductor (7), which is arranged on the support seat (5). The low thermal conductor (7) circumferentially surrounds the heating body (1) to enclose a heating space.

8. The heating device according to claim 7, characterized in that An isolation plate (8) is provided between the conductive plate (6) and the low thermal conductor (7).

9. The heating device according to claim 1, characterized in that The first connector (3) is Z-shaped.

10. Epitaxial device, comprising a reaction chamber, characterized in that: It also includes a heating device according to any one of claims 1 to 9, wherein the heating device is arranged in the reaction chamber.

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