Diaphragm air cylinder

Abstract

The utility model relates to the technical field of semiconductor packaging, and aims to solve the technical problems of positioning failure and positioning precision reduction. In order to solve the technical problem, the utility model provides the diaphragm cylinder. A groove body and an air inlet hole are formed in the top end face of the bottom of an air cylinder, and the air inlet hole is communicated with the groove body; the cylinder barrel is connected above the air cylinder bottom; the cylinder barrel comprises a mounting groove and a guide groove which are communicated with each other from bottom to top, three first inclined planes are arranged on the inner wall of the guide groove, and the three first inclined planes are arranged at intervals in the circumferential direction; the first inclined face inclines outwards from the top to the bottom of the cylinder barrel. The piston is provided with a piston body and a guide part connected to the top of the piston body, and the piston body is mounted in the mounting groove; three second inclined planes are arranged on the outer wall of the guide part, are arranged at intervals in the circumferential direction and are matched with the first inclined planes; and the diaphragm is hermetically connected between the cylinder bottom and the cylinder barrel. According to the utility model, the precision of center positioning is improved.

Description

TECHNICAL FIELD

[0001] The utility model relates to the technical field of semiconductor packaging, especially a diaphragm cylinder. BACKGROUND

[0002] In the semiconductor packaging test industry, a diaphragm cylinder with large thrust and short stroke is needed, the stroke of which is only 2-3mm, and the thrust needs to reach several hundred kilograms. Different from the common industrial cylinder, there is a gap of about 1-2mm between the piston and the cylinder barrel of the cylinder. If the structure type of the common industrial cylinder is directly used to push the piston by air pressure, air leakage will occur, and the function cannot be realized. The diaphragm cylinder pushes the diaphragm by air pressure, and the diaphragm pushes the piston to move, so as to realize the function. When the piston is ejected, accurate positioning is needed, and when the piston is retracted under external pressure, it can float freely to adapt to the machining and installation errors of external equipment.

[0003] The main problem to be solved by the diaphragm cylinder is accurate positioning when the cylinder is ejected. The common positioning method is to install a positioning pin on the end face of the cylinder barrel, and to set a positioning hole on the piston. The piston reciprocates under the guidance of the positioning pin and the positioning hole. This method has the problem of over-positioning, which causes friction between the positioning pin and the positioning hole, resulting in serious wear of the positioning pin and damage to the positioning pin, leading to positioning failure and high failure rate. UTILITY MODEL CONTENTS

[0004] Therefore, the utility model solves the above-mentioned problems existing in the prior art.

[0005] To solve the above-mentioned technical problems, the utility model provides a diaphragm cylinder, which comprises:

[0006] A cylinder bottom is provided with a groove and an air inlet hole penetrating the cylinder bottom at the top end face, and the air inlet hole is communicated with the groove;

[0007] A cylinder barrel is connected above the cylinder bottom; the cylinder barrel is provided with a mounting groove and a guide groove which are communicated with each other from bottom to top; three first inclined surfaces are arranged on the inner wall of the guide groove and are arranged at intervals in the circumferential direction; the first inclined surfaces are inclined outward from the top to the bottom of the cylinder barrel;

[0008] A piston is provided with a piston body and a guide part connected to the top of the piston body, and the piston body is mounted in the mounting groove; the guide part is matched with the guide groove, and three second inclined surfaces are arranged on the outer wall of the guide part and are arranged at intervals in the circumferential direction, and the second inclined surfaces are matched with the first inclined surfaces;

[0009] A diaphragm is sealingly connected between the cylinder bottom and the cylinder barrel and is located above the groove.

[0010] In an embodiment of the utility model, the guide groove is hexagonal structure, the hexagon is first side, second side, third side, fourth side, fifth side and sixth side are connected in turn, three first inclined surfaces are arranged on the first side, the third side and the fifth side respectively, the second side, the fourth side and the sixth side are not matched with the guide portion.

[0011] In an embodiment of the utility model, the top of the inner wall of the guide groove is vertical groove section, and the vertical groove section is connected with the top end of the first inclined surface.

[0012] In an embodiment of the utility model, two first positioning holes are arranged on the cylinder barrel, and two second positioning holes are arranged on the top of the cylinder bottom, and the second positioning holes are arranged in one-to-one correspondence with the first positioning holes.

[0013] In an embodiment of the utility model, the cylinder bottom is further provided with a groove, the groove is recessed downward from the bottom wall of the groove body, the diameter of the groove is smaller than the diameter of the groove body, and the groove and the groove body are coaxial, the boundary between the groove and the groove body is smoothly transitioned, and the groove is communicated with the air inlet hole.

[0014] In an embodiment of the utility model, along the extension direction of the piston, a sealing protrusion is arranged on one side of the cylinder bottom close to the cylinder barrel.

[0015] In an embodiment of the utility model, the sealing protrusion is two, and the two sealing protrusions are arranged in radial direction.

[0016] In an embodiment of the utility model, the cylinder bottom and the cylinder barrel are fixedly connected through bolts.

[0017] In an embodiment of the utility model, the air inlet hole is arranged in the center of the cylinder bottom.

[0018] In an embodiment of the utility model, the bottom of the cylinder bottom is provided with a sealing groove coaxial with the air inlet hole, and a sealing ring is arranged in the sealing groove.

[0019] The above technical scheme of the utility model has the following advantages compared with the prior art:

[0020] The diaphragm cylinder, the cylinder barrel of the embodiment is provided with three first inclined surfaces, the piston is provided with three second inclined surfaces, when the cylinder is ejected, the three second inclined surfaces on the piston are matched with the three first inclined surfaces respectively, so that the accurate center point position is realized, when the piston is compressed back by external force, the piston can also float freely. It can be seen that the application improves the accuracy of center positioning. In addition, the application realizes positioning through the cooperation of the first inclined surface and the second inclined surface, avoids the direct friction between the metal part (positioning pin) and the metal part (positioning hole), and prolongs the service life of the cylinder. BRIEF DESCRIPTION OF DRAWINGS

[0021] In order to make the content of the utility model more easily be clearly understood, the following according to the specific embodiment of the utility model and combining with the drawings, the utility model is further detailed, wherein,

[0022] Figure 1 It is the structure diagram of the diaphragm cylinder in the preferred embodiment of the utility model;

[0023] Figure 2 It is the top view of the diaphragm cylinder of Figure 1 ;

[0024] Figure 3 It is the section view at B-B of Figure 2 ;

[0025] Figure 4 It is the section view at C-C of Figure 2 ;

[0026] Figure 5 It is the structure diagram of the cylinder bottom in the diaphragm cylinder of Figure 1 ;

[0027] Figure 6 It is the structure diagram of the cylinder barrel in the diaphragm cylinder of Figure 1 ;

[0028] Figure 7 It is the bottom view of the cylinder barrel in the diaphragm cylinder of Figure 1 ;

[0029] Figure 8 It is the section view at A-A of Figure 7 ;

[0030] Figure 9 It is the structure diagram of the piston in the diaphragm cylinder of Figure 1 ;

[0031] The description of the drawing of the specification is as follows: 100, cylinder bottom;110, groove body;120, air inlet hole;130, second positioning hole;140, recess;150, sealing protrusion;160, sealing groove;

[0032] 200, cylinder barrel;210, mounting groove;220, guide groove;221, first inclined surface;222, vertical groove segment;230, first positioning hole;

[0033] 300, piston;310, piston body;320, guide portion;321, second inclined surface;322, arc structure;

[0034] 400, diaphragm. DETAILED DESCRIPTION

[0035] The utility model is further described below in combination with the drawings and specific embodiments, so that those skilled in the art can better understand the utility model and implement it, but the embodiments are not used as the limitation of the utility model.

[0036] Referring to Figures 1-9 The utility model discloses a diaphragm cylinder, including:

[0037] Cylinder bottom 100, top end face is provided with groove 110 and the air inlet hole 120 of the cylinder bottom 100, and the air inlet hole 120 is communicated with the groove 110;

[0038] Cylinder barrel 200, is connected in the upper of cylinder bottom 100;Cylinder barrel 200 from below to above intercommunication installation groove 210 and guide groove 220, the inner wall of guide groove 220 is equipped with three first inclined plane 221, three first inclined plane 221 are along the circumferential interval arrangement;First inclined plane 221 from the top to the bottom of cylinder barrel 200 is inclined outward;

[0039] Piston 300, is equipped with piston body 310 and the guide portion 320 of connecting in piston body 310 top, and piston body 310 is installed in installation groove 210;Guide portion 320 is cooperated with guide groove 220, and the outer wall of guide portion 320 is equipped with three second inclined plane 321, and three second inclined plane 321 are along the circumferential interval arrangement, and second inclined plane 321 is cooperated with first inclined plane 221.

[0040] Diaphragm 400, seal connection is between cylinder bottom 100 and cylinder barrel 200, and is located in the upper of groove 110.

[0041] Specifically, the cylinder barrel 200 of the embodiment is provided with three first inclined planes 221, and the piston 300 is provided with three second inclined planes 321, when the cylinder is ejected, the three second inclined planes 321 on the piston 300 are matched with the three first inclined planes 221 respectively, so that the accurate center point position is realized, and when the piston 300 is compressed back by external force, the piston 300 can also float freely. Therefore, the application improves the accuracy of center positioning. In addition, the application realizes positioning through the cooperation of the first inclined plane 221 and the second inclined plane 321, avoids the direct friction between the metal part (positioning pin) and the metal part (positioning hole), and provides the service life of the cylinder.

[0042] Further, the guide groove 220 is hexagonal structure, and the hexagon is sequentially connected with the first side, the second side, the third side, the fourth side, the fifth side and the sixth side; three first inclined surfaces 221 are arranged on the first side, the third side and the fifth side respectively; the second side, the fourth side and the sixth side are not matched with the guide part 320. For example, the positions corresponding to the second side, the fourth side and the sixth side in the guide part 320 are provided with the arc structure 322 which is recessed to the interior of the guide part 320.

[0043] Further, the top of the inner wall of the guide groove 220 is a vertical groove segment 222 which is connected with the top end of the first inclined surface 221. Specifically, the top end of the wall of the guide groove 220 is a 90-degree right angle, instead of a sharp angle less than 90 degrees, so that the worker will not scratch when processing the guide groove 220 or carrying the cylinder barrel 200.

[0044] Further, the cylinder barrel 200 is provided with two first positioning holes 230; the top of the cylinder bottom 100 is provided with two second positioning holes 130 which are arranged one by one corresponding to the first positioning holes 230. In some embodiments, the two first positioning holes 230 are arranged at the diagonal positions. Specifically, when the cylinder barrel 200 and the cylinder bottom 100 are connected and installed, the positioning pins can be inserted into the first positioning holes 230 and the second positioning holes 130 for positioning, and then the cylinder barrel 200 and the cylinder bottom 100 are fixedly connected through bolts, so as to improve the accuracy of the cylinder.

[0045] Further, the cylinder bottom 100 is also provided with a recess 140 which is recessed downward from the bottom wall of the groove body 110; the diameter of the recess 140 is smaller than that of the groove body 110, and they are coaxial, and the boundary between the recess 140 and the groove body 110 is smoothly transitioned; the recess 140 is communicated with the gas inlet hole 120. Specifically, the diaphragm 400 will be brought to the bottom wall of the groove body 110 in the process of the piston 300 retracting, and the diaphragm 400 will be bonded with the bottom wall of the groove body 110. When the piston 300 extends, a relatively large force is needed to separate the diaphragm 400 from the bottom wall of the groove body 110, which may cause the diaphragm 400 to be torn or damaged. The application sets the recess 140, which reduces the contact area between the diaphragm 400 and the bottom wall of the groove body 110, and thus reduces the force required to separate the diaphragm 400 from the bottom wall of the groove body 110, thereby improving the service life of the diaphragm 400.

[0046] Further, along the extension and retraction direction of the piston 300, the side of the cylinder bottom 100 close to the cylinder barrel 200 is provided with a sealing protrusion 150. Specifically, the sealing performance of the cylinder bottom 100, the cylinder barrel 200 and the diaphragm 400 is improved by the sealing protrusion 150.

[0047] Furthermore, there are two sealing protrusions 150, which are spaced apart in the radial direction. Specifically, the two sealing protrusions 150 play a double sealing role, further improving the sealing performance.

[0048] Furthermore, the cylinder bottom 100 and the cylinder barrel 200 are fixed together by bolts. In some embodiments, the cylinder bottom 100 and the cylinder barrel 200 are fixed together by four bolts, with the four bolts distributed at the four corners. Specifically, the connection method of this embodiment is simple, low-cost, and has a stable and reliable connection.

[0049] In some comparative embodiments, the air intake hole 120 is not located in the center of the cylinder bottom 100 (offset to one side), which requires orientation during cylinder assembly. To address this issue, the air intake hole 120 is further provided in the center of the cylinder bottom 100. Specifically, since the air intake hole 120 is provided in the center of the cylinder bottom 100, orientation is not required during cylinder assembly, making assembly quick and easy.

[0050] Furthermore, the bottom of the cylinder base 100 is provided with a sealing groove 160 coaxial with the air inlet 120, and a sealing ring is installed in the sealing groove 160. During use, the cylinder is connected to the gas storage device via the air pipe, thereby inflating the cylinder. Specifically, in this embodiment, the sealing ring is used to achieve a sealed connection between the cylinder and the air pipe.

[0051] Obviously, the above embodiments are merely examples for clarity of explanation and are not intended to limit the implementation methods. Those skilled in the art will appreciate that other variations or modifications based on the above descriptions are possible. It is not necessary and impossible to enumerate all implementation methods here. Obvious variations or modifications arising therefrom remain within the scope of protection of the present invention.

Claims

1. A diaphragm cylinder, characterized in that: include: The cylinder bottom has a top surface provided with a groove and an air inlet hole penetrating the cylinder bottom, wherein the air inlet hole is connected to the groove; A cylinder barrel connected to the top of the cylinder bottom; the cylinder barrel has a mounting groove and a guide groove interconnected from bottom to top, the guide groove has three first inclined surfaces on its inner wall, and the three first inclined surfaces are arranged at intervals along the circumferential direction; the first inclined surfaces are inclined outward from the top to the bottom of the cylinder barrel; A piston having a piston body and a guide portion connected to the top of the piston body, wherein the piston body is mounted in the mounting groove; the guide portion cooperates with the guide groove; an outer wall of the guide portion is provided with three second inclined surfaces, the three second inclined surfaces being arranged at intervals along the circumferential direction, and the second inclined surfaces cooperate with the first inclined surface; The diaphragm is sealed and connected between the cylinder bottom and the cylinder barrel, and is located above the tank body.

2. The diaphragm cylinder according to claim 1, characterized in that: The guide groove is a hexagonal structure, and the hexagon is a first side, a second side, a third side, a fourth side, a fifth side and a sixth side connected in sequence; the three first inclined surfaces are respectively arranged on the first side, the third side and the fifth side; the second side, the fourth side and the sixth side do not cooperate with the guide part.

3. The diaphragm cylinder according to claim 1, characterized in that: The top of the inner wall of the guide groove is a vertical groove section, and the vertical groove section is connected to the top end of the first inclined surface.

4. The diaphragm cylinder according to claim 1, characterized in that: Two first positioning holes are provided on the cylinder barrel; two second positioning holes are provided on the top of the cylinder bottom, and the second positioning holes are arranged in a one-to-one correspondence with the first positioning holes.

5. The diaphragm cylinder according to claim 1, characterized in that: The cylinder bottom is also provided with a groove, which is formed by being recessed downward from the bottom wall of the trough body; the diameter of the groove is smaller than the diameter of the trough body, and the two are coaxial, and the boundary between the groove and the trough body is smoothly transitioned; the groove is connected to the air inlet.

6. The diaphragm cylinder according to claim 1, characterized in that: Along the expansion and contraction direction of the piston, a sealing protrusion is provided on one side of the cylinder bottom close to the cylinder barrel.

7. The diaphragm cylinder according to claim 6, characterized in that: There are two sealing protrusions, and the two sealing protrusions are arranged at intervals in the radial direction.

8. The diaphragm cylinder according to claim 1, characterized in that: The cylinder bottom and the cylinder barrel are fixed by bolt connection.

9. The diaphragm cylinder according to claim 1, characterized in that: The air inlet is located at the center of the cylinder bottom.

10. The diaphragm cylinder according to claim 1, characterized in that: A sealing groove coaxial with the air inlet hole is provided at the bottom of the cylinder bottom, and a sealing ring is installed in the sealing groove.

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