Electric four-dimensional adjusting platform

Abstract

The utility model discloses an electric four-dimensional adjusting platform which comprises a two-dimensional translation mechanism and a two-dimensional inclination mechanism, the two-dimensional inclination mechanism is stacked above the two-dimensional translation mechanism, the two-dimensional translation mechanism drives the two-dimensional inclination mechanism to translate in the X-axis direction and the Y-axis direction, and the two-dimensional inclination mechanism comprises an objective table plate located at the top. The objective table plate can rotate around the X-axis direction and the Y-axis direction under the driving of the third driving assembly, and then two-dimensional angle inclination adjustment is achieved. The electric four-dimensional adjusting platform is high in automation degree and adjusting precision, a stepping motor and a ball screw are used in a two-dimensional translation mechanism in a combined mode, rotating motion of the stepping motor is converted into linear motion of a crossed roller guide rail, translation of a two-dimensional inclined bottom plate is achieved, and the working efficiency is improved. Meanwhile, on the basis that the objective table plate is in sliding connection with the two-dimensional inclined bottom plate, linear motion of the linear stepping motor is converted into rotation of the objective table plate through the pushing effect of the linear stepping motor on the objective table plate, and then the inclination angle of the objective table plate is adjusted.

Description

TECHNICAL FIELD

[0001] The utility model relates to optical measuring equipment field especially, it is a kind of electric four-dimensional adjustment platform. BACKGROUND

[0002] Four-dimensional adjustment platform is a kind of high-precision adjustment equipment, by providing axial displacement adjustment and angle adjustment function, realize the accurate positioning and multi-angle control to object, as optical measuring equipment can be used to adjust the optical piece to be measured and optical lens spot coincidence. At present, most four-dimensional adjustment platforms are manually adjusted, and the degree of automation is low, and the platform load is small, which does not meet the high-precision, large load and high-automation requirements of the optical measuring equipment. UTILITY MODEL CONTENT

[0003] The utility model aims at providing a kind of electric four-dimensional adjustment platform of high-precision, large load and high degree of automation.

[0004] Technical scheme: to realize the above-mentioned purpose, the utility model discloses a kind of electric four-dimensional adjustment platform, including two-dimensional translation mechanism, two-dimensional tilting mechanism, the two-dimensional tilting mechanism is stacked in two-dimensional translation mechanism upper, two-dimensional translation mechanism drives two-dimensional tilting mechanism to be translated in X axis, Y axis direction;The two-dimensional tilting mechanism includes the object table plate in top, and the object table plate is driven by third drive assembly and is adjusted two-dimensionally angle inclination.

[0005] Among them, the two-dimensional translation mechanism includes bottom plate, translation plate, two-dimensional tilting bottom plate, is equipped with transverse cross roller guide between bottom plate, translation plate, is equipped with longitudinal cross roller guide between translation plate, two-dimensional tilting bottom plate.

[0006] Among them, it further includes first drive assembly, second drive assembly respectively for driving transverse cross roller guide, longitudinal cross roller guide linear motion;The first drive assembly or second drive assembly includes step motor, ball screw, the output end of step motor is connected the screw rod of ball screw through coupling, and the nut of ball screw is fixed to the side of translation plate or two-dimensional tilting bottom plate.

[0007] Among them, the first drive assembly or second drive assembly further includes base plate, for the fixed end of first drive assembly or second drive assembly is installed on bottom plate or translation plate, the fixed end of step motor is installed on the right end of base plate through motor mounting plate, and the screw rod fixed side of ball screw is also installed on base plate and located on the side of step motor output end, so as to be connected the screw rod of ball screw and step motor output end through coupling, the screw rod support side of ball screw is installed on the left end of base plate through support side mounting plate.

[0008] The hard limiting stopper for limiting the stroke of the transverse cross roller guide and the longitudinal cross roller guide comprises a fixed seat, a polyurethane buffer block, and the two polyurethane buffer blocks are in contact and buffer when the stroke of the transverse cross roller guide and the longitudinal cross roller guide is maximum.

[0009] The object table plate is rotatably connected above the two-dimensional inclined bottom plate through a sliding block based on a joint bearing, and the sliding block based on the joint bearing comprises a hollow upper fixed seat and a lower fixed seat, two groups of joint bearings, and a connecting column.

[0010] The first pin shaft and the second pin shaft are rotatably connected between the upper portion and the lower portion of the cross block through double bearings or sliding bearings.

[0011] The object table plate is rotatably connected above the two-dimensional inclined bottom plate through a sliding block based on a joint bearing, and the sliding block based on the joint bearing comprises a hollow upper fixed seat and a lower fixed seat, two groups of joint bearings, and a connecting column.

[0012] The third driving assembly comprises a linear stepper motor, the fixed end (1012) of the linear stepper motor is installed on the two-dimensional inclined bottom plate, and the upper end of the push rod of the linear stepper motor is fixed with a ball head top rod for pushing the two-dimensional inclined bottom plate to be angularly inclined.

[0013] The third driving assembly further comprises an anti-rotation mounting plate, a motor extension sensing ring and a proximity switch, wherein the anti-rotation mounting plate is fixed on the two-dimensional inclined bottom plate and abuts against the ball head top rod, the motor extension sensing ring is used for sensing the extension of the lower end of the push rod, and the proximity switch is used for sensing the upstroke or downstroke of the push rod.

[0014] The electric four-dimensional adjusting platform has the following advantages: 1. The electric four-dimensional adjusting platform can adjust the object table plate in the X and Y axis directions and rotate around the X and Y axes to adjust the angle; 2. The electric four-dimensional adjusting platform has a compact structure in the height direction, and the uppermost object table plate can meet the measurement requirements of heavy workpieces; 3. The degree of automation and the adjustment accuracy are high, the rotary motion of the stepper motor is converted into the linear motion of the cross roller guide through the combination of the stepper motor and the ball screw, thereby realizing the translation of the two-dimensional inclined bottom plate, and on the basis of the sliding connection between the object table plate and the two-dimensional inclined bottom plate, the linear motion of the linear stepper motor is converted into the rotation of the object table plate through the pushing action of the linear stepper motor on the object table plate, thereby realizing the adjustment of the inclination angle of the object table plate. BRIEF DESCRIPTION OF DRAWINGS

[0015] Figure 1 Structure diagram of electric four-dimensional adjustment platform

[0016] Figure 2 Structure diagram of two-dimensional tilt mechanism

[0017] Figure 3 Structure diagram of first driving assembly and second driving assembly

[0018] Figure 4 Structure diagram of limiting stop block

[0019] Figure 5 Structure diagram of vertical orthogonal slider based on pin shaft connection

[0020] Figure 6 Structure diagram of vertical orthogonal slider based on pin shaft connection

[0021] Figure 7 Structure diagram of linear stepper motor

[0022] Figure 8 Two-dimensional tilt adjustment diagram of two-dimensional tilt mechanism

[0023] Figure 9 Structure diagram of vertical orthogonal slider based on double bearing rotary connection

[0024] Figure 10 Structure diagram of vertical orthogonal slider based on sliding bearing rotary connection

[0025] Figure 11 Structure diagram of slider based on joint bearing rotary connection

[0026] Wherein, the bottom plate 1, the translation plate 2, the transverse cross roller guide 3, the longitudinal cross roller guide 4, the first driving assembly 5, the second driving assembly 6, the two-dimensional tilt bottom plate 7, the limiting stop block 8, the vertical orthogonal slider 9, the third driving assembly 10, the tension spring 11, the object table plate 12.

[0027] Base plate 501, stepper motor 502, motor mounting plate 503, shaft coupling 504, fixed side of screw rod 505, fixed side mounting plate 506, ball screw 507, screw rod support side 508, support side mounting plate 509, connecting seat 510, soft limit switch 511.

[0028] Fixed seat 801, polyurethane buffer block 802.

[0029] Upper fixed seat 901, lower fixed seat 902, cross block 903, first pin 904, second pin 905; linear stepping motor 101, push rod 1011, fixed end 1012, ball head push rod 102, anti-rotation

[0030] Mounting plate 103, motor extension induction ring 104, proximity switch 105. DETAILED DESCRIPTION

[0031] The technical solution of the present utility model is described in detail below with reference to the embodiments and drawings.

[0032] Example 1

[0033] like Figures 1-7 As shown, the electric four-dimensional adjustment platform includes a two-dimensional translation mechanism and a two-dimensional tilting mechanism. The two-dimensional tilting mechanism is stacked on top of the two-dimensional translation mechanism. The two-dimensional translation mechanism can translate along the X-axis and Y-axis directions, and the two-dimensional tilting mechanism can perform two-dimensional angle tilt adjustment.

[0034] The two-dimensional translation mechanism includes a base plate 1, a translation plate 2, a transverse cross roller guide 3, a longitudinal cross roller guide 4, a first drive assembly 5, a second drive assembly 6, and a two-dimensional inclined base plate 7.

[0035] The fixed end of the transverse cross roller guide 3 is mounted on the upper surface of the base plate 1, the movable end of the transverse cross roller guide 3 is mounted on the lower surface of the translation plate 2, the fixed end of the longitudinal cross roller guide 4 is mounted on the upper surface of the translation plate 2, and the fixed end of the longitudinal cross roller guide 4 is mounted on the lower surface of the two-dimensional inclined base plate 7. The two-dimensional inclined base plate 7 is the uppermost panel of the two-dimensional translation mechanism and also the lowermost panel of the two-dimensional tilt mechanism.

[0036] The translation plate 2 and the two-dimensional inclined base plate 7 are controlled to move by the first drive assembly 5 and the second drive assembly 6 respectively. The first drive assembly 5 and the second drive assembly 6 have the same structure, including a stepper motor 502 and a ball screw 507. The output end of the stepper motor 502 is connected to the screw rod of the ball screw 507 through a coupling 504, driving the rotation of the screw rod, and further driving the nut of the ball screw 507 to move horizontally on the screw rod, thereby converting the rotation output of the stepper motor 502 into the horizontal movement of the nut. In the first drive assembly 5, the nut is fixed to the side of the translation plate 2 through the nut connecting seat 510. The moving direction of the nut is consistent with the moving direction of the moving end of the horizontal cross roller guide 3, thereby driving the translation plate 2 to move horizontally relative to the base plate 1. In the second drive assembly 6, the nut is fixed to the side of the two-dimensional inclined base plate 7 through the nut connecting seat 510. The moving direction of the nut is consistent with the moving direction of the moving end of the longitudinal cross roller guide 4, thereby driving the two-dimensional inclined base plate 7 to move longitudinally relative to the translation plate 2.

[0037] The first driving assembly 5 or the second driving assembly 6 further comprises a base plate 501 for mounting the fixed end of the first driving assembly 5 or the second driving assembly 6 on the bottom plate 1 or the translation plate 2. For the first driving assembly 5, the fixed end thereof is mounted on the side edge of the bottom plate 1 through the base plate 501, and the nut (moving end) of the first driving assembly 5 is fixed to the side edge of the translation plate 2 through a nut connecting seat. For the second driving assembly 6, the fixed end thereof is mounted on the side edge of the translation plate 2 through the base plate 501, and the nut (moving end) of the second driving assembly 6 is fixed to the side edge of the two-dimensional tilting bottom plate 7 through a nut connecting seat. The fixed end of the stepping motor 502 is mounted on the right end of the base plate 501 through a motor mounting plate 503, the fixed side 505 of the screw rod of the ball screw 507 is also mounted on the base plate 501 and located on the side of the output end of the stepping motor 502 through a fixed side mounting plate 506, so as to facilitate the connection of the screw rod of the ball screw 507 and the output end of the stepping motor 502 through a shaft coupling 504, and the support side 508 of the screw rod of the ball screw 507 is mounted on the left end of the base plate 501 through a support side mounting plate 509. A soft limit switch 511 is arranged on the base plate 501 and located in the moving range of the nut, for controlling the transverse moving range of the nut.

[0038] The soft limit switch is an electrical switch used to control the range of mechanical movement. By detecting the position of a mechanical component, when the mechanical component reaches a set position, the switch sends a signal to the control system to stop or change the direction of movement of the mechanical component. In this embodiment, the soft limit switch 511 is two groups, respectively located on the left and right sides of the nut, when the nut moves to the left or right side to reach the starting position of the corresponding soft limit switch 511, the soft limit switch 511 sends a signal to the stepping motor 502 control system. The soft limit switch 511 can adopt a non-contact sensor or a contact sensor to prevent the nut from exceeding the predetermined movement range.

[0039] In order to further buffer the translation plate 2 and the two-dimensional tilting bottom plate 7 when moving to the maximum stroke, a hard limit stop block 8 can be provided, which includes a fixed seat 801 and a polyurethane buffer block 802. In actual application, two limit stop blocks 8 are used as a pair of combination, wherein the two polyurethane buffer blocks 802 are oppositely arranged. For the buffer of the transversely intersecting roller guide 3, one of the limit stop blocks 8 is fixed on the bottom plate 1 through the fixed seat 801 and located at one side of the fixed end of the transversely intersecting roller guide 3, and the axial direction of the polyurethane buffer block 802 is consistent with the moving direction of the transversely intersecting roller guide 3; the other limit stop block 8 is fixed on the lower bottom surface of the translation plate 2 through the fixed seat 801 and located at one side of the moving end of the transversely intersecting roller guide 3. With the transverse movement of the translation plate 2, the two polyurethane buffer blocks 802 touch and buffer when the translation plate 2 reaches the limit stroke. For the buffer of the longitudinally intersecting roller guide 4, one of the limit stop blocks 8 is fixed on the upper surface of the translation plate 2 through the fixed seat 801 and located at one side of the fixed end of the longitudinally intersecting roller guide 4, and the axial direction of the polyurethane buffer block 802 is consistent with the moving direction of the longitudinally intersecting roller guide 4; the other limit stop block 8 is fixed on the lower bottom surface of the two-dimensional tilting bottom plate 7 through the fixed seat 801 and located at one side of the moving end of the longitudinally intersecting roller guide 4. With the longitudinal movement of the two-dimensional tilting bottom plate 7, the two polyurethane buffer blocks 802 touch and buffer when the two-dimensional tilting bottom plate 7 reaches the limit stroke.

[0040] As Figure 2 , 3As shown, the two-dimensional tilting mechanism includes a stage plate 12 arranged above the two-dimensional tilting base plate 7, and the stage plate 12 and the two-dimensional tilting base plate 7 are connected through vertical orthogonal sliders 9 based on pin shaft connection, and the vertical orthogonal sliders 9 include an upper fixed seat 901, a lower fixed seat 902, and a cross block 903. The upper fixed seat 901 and the lower fixed seat 902 are the same in structure and symmetrically arranged, are hollow structures, and are provided with through holes in the radial direction, and the upper part and the lower part of the cross block 903 are also provided with through holes, and a first pin shaft 904 and a second pin shaft 905 pass through the through holes of the upper part and the lower part respectively, and the two ends of the first pin shaft 904 and the second pin shaft 905 are fixed to the through holes of the upper fixed seat 901 and the lower fixed seat 902 respectively. Thus, the upper part and the lower part of the cross block 903 are respectively installed in the cavities of the upper fixed seat 901 and the lower fixed seat 902. After the first pin shaft 904 and the second pin shaft 905 are fixed to the upper fixed seat 901 and the lower fixed seat 902, the cross block 903 can swing in the cross direction relative to the upper fixed seat 901 and the lower fixed seat 902, that is, relative to the lower fixed seat 902, when the upper fixed seat 901 is subjected to a force perpendicular to the upper side surface of the cross block 903, the upper fixed seat 901 can rotate around the upper part in the axial direction under the swing of the cross block 903, and when the upper fixed seat 901 is subjected to a force perpendicular to the lower side surface of the cross block 903, the upper fixed seat 901 can rotate around the lower part in the axial direction under the swing of the cross block 903.

[0041] The outer end surfaces of the upper fixed seat 901 and the lower fixed seat 902 are mounting planes, and are respectively fixed to the lower bottom surface of the stage plate 12 and the upper surface of the two-dimensional tilting base plate 7, and with the cross block 903 swinging in the cross direction relative to the upper fixed seat 901 and the lower fixed seat 902, the two-dimensional tilting base plate 7 and the stage plate 12 can relatively slide in the cross direction.

[0042] The vertical orthogonal sliders 9 not only connect and support the two-dimensional tilting base plate 7 and the stage plate 12, but also enable the two-dimensional tilting base plate 7 and the stage plate 12 to relatively tilt.

[0043] In this embodiment, the vertical orthogonal sliders 9 are two groups arranged in the radial direction of the two-dimensional tilting base plate 7 and the stage plate 12 and close to the edge position. The cross directions of the cross blocks 903 of the two groups of vertical orthogonal sliders 9 are symmetrically arranged relative to the central section of the stage plate 12 (perpendicular to the connection of the two groups of vertical orthogonal sliders 9).

[0044] On the two-dimensional inclined base plate 7, a third driving assembly 10 for applying a pushing force to the object table plate 12 is arranged perpendicular to the radial direction of the two sets of vertically orthogonal sliders 9. The third driving assembly 10 comprises a linear stepper motor 101, which is an execution element for converting an electrical pulse signal into linear motion. The push rod 1011 of the linear stepper motor 101 moves linearly through the fixed end 1012 of the linear stepper motor 101. The fixed end 1012 of the linear stepper motor 101 is mounted on the lower surface of the two-dimensional inclined base plate 7. The two-dimensional inclined base plate 7 is provided with a through hole for facilitating the linear motion of the push rod 1011. The upper end of the push rod 1011 passes through the through hole and is fixed with a ball head top rod 102. The top of the ball head top rod 102 can abut against the lower surface of the object table plate 12 under the driving of the push rod 1011.

[0045] In the present embodiment, the third driving assembly 10 is arranged in two sets, perpendicular to the radial direction of the two sets of vertically orthogonal sliders 9 and close to the edge position. The upper and lower axial directions of the cross-shaped block 903 in the two sets of vertically orthogonal sliders 9 are perpendicular to the axial directions of the ball head top rods 102 in the two sets of third driving assemblies 10. Specifically, the two sets of third driving assemblies 10 are arranged on the left and right radial directions of the object table plate 12, and the two sets of vertically orthogonal sliders 9 are arranged on the front and back radial directions perpendicular to the left and right radial directions. The upper axial direction of the cross-shaped block 903 is perpendicular to the axial direction of the ball head top rod 102 in the right third driving assembly 10, and the lower axial direction of the cross-shaped block 903 is perpendicular to the axial direction of the ball head top rod 102 in the left third driving assembly 10. When the third driving assembly 10 applies a pushing force, the object table plate 12 tilts under the swinging of the cross-shaped block 903, as shown in FIG. 6. When the left third driving assembly 10 pushes the object table plate 12, the object table plate 12 tilts around the X-axis direction under the swinging of the upper part of the cross-shaped block 903 (equivalent to applying a pushing force to the upper side), as shown in FIG. 7. When the right third driving assembly 10 pushes the object table plate 12 (equivalent to applying a pushing force to the lower side), the object table plate 12 tilts around the Y-axis direction under the swinging of the lower part of the cross-shaped block 903, as shown in FIG. 8. Figure 8 Figure 8 Figure 8

[0046] The X-axis (Y-axis) direction in which the above-mentioned two-dimensional translation mechanism can translate and the X-axis (Y-axis) direction in which the object table plate 12 can rotate represent a certain direction in a two-dimensional plane. The two directions can be the same or different from a specific direction. Through the position setting of the two sets of vertically orthogonal sliders 9 and the third driving assembly 10, the two directions can point to the same specific direction.

[0047] ​​​A tension spring 11 is further arranged on one side of the third driving assembly 10, and two ends of the tension spring 11 are fixed on the two-dimensional inclined bottom plate 7 and the object table plate 12 respectively. During the pushing process of the third driving assembly 10 to the object table plate 12, a pulling force is applied to balance the pushing force of the push rod 1011 of the linear stepper motor and the pulling force of the tension spring, thereby playing a role of smooth buffering.

[0048] The third driving assembly 10 further comprises an anti-rotation mounting plate 103, a motor extension sensing ring 104, and a proximity switch 105. The anti-rotation mounting plate 103 is fixed on the two-dimensional inclined bottom plate 7 and abuts against the ball head top rod 102 to prevent the ball head top rod 102 from rotating. The motor extension sensing ring 104 is fixed on the fixed end 1012 of the linear stepper motor 101 and is used to sense the extension of the lower end of the push rod 1011 and send a sensing signal to the control system. The proximity switch 105 is a non-contact switch. In the embodiment, two sets of proximity switches 105 are arranged on the upper and lower surfaces of the two-dimensional inclined bottom plate 7 and are located on one side of the push rod 1011, and are respectively used to sense the upward stroke and the downward stroke of the push rod 1011. When the push rod 1011 moves up and down to reach the movement signal of the corresponding proximity switch 105, the control system is notified to stop or change the movement direction of the mechanical components to control the longitudinal movement range of the push rod 1011.

[0049] The two-dimensional inclined bottom plate 7 described above serves as a transition plate between the two-dimensional translation mechanism and the two-dimensional tilting mechanism, so that the structure of the platform in the height direction is more compact, and the object table plate 12 at the uppermost end can meet the measurement requirements of heavy workpieces. In the two-dimensional translation mechanism, the first driving assembly and the second driving assembly are combined with the stepper motor and the ball screw to convert the rotary motion of the stepper motor into the linear motion of the cross roller guide rail, and then realize the translation of the two-dimensional inclined bottom plate 7 in the X-axis and Y-axis directions. In the two-dimensional tilting mechanism, the vertical orthogonal sliding block 9 is used to slidingly connect the object table plate 12 and the two-dimensional inclined bottom plate 7, and the third driving assembly is used to realize the rotation of the object table plate 12 around the X-axis and the Y-axis and the tilting setting at a specific angle.

[0050] In the first driving assembly, the second driving assembly, and the third driving assembly, the running parameters of the motor are accurately adjusted to realize extremely high translation, rotation, and positioning precision, and then realize the resolution of two-dimensional translation of 1 um and the resolution of two-dimensional rotation of 1 urad.

[0051] In addition to the sliding connection between the object table plate 12 and the two-dimensional inclined bottom plate 7 through the vertical orthogonal sliding block 9, other connection modes are further provided in the embodiments, which are as follows:

[0052] Embodiment Two

[0053] As Figure 9As shown, based on the structure that after the first pin shaft 904 and the second pin shaft 905 are fixed to the upper fixed seat 901 and the lower fixed seat 902 in the embodiment, the cross block 903 can swing in the cross direction relative to the upper fixed seat 901 and the lower fixed seat 902. In the second embodiment, the specific structure of the vertical orthogonal slider based on the double bearing rotation connection is: there are double bearings with interference fit on the first pin shaft 904 and the second pin shaft 905. When the first pin shaft 904 and the second pin shaft 905 pass through the upper and lower through-holes of the cross block 903 respectively, the outer rings of the double bearings on the first pin shaft 904 and the second pin shaft 905 are interference fit with the upper and lower through-holes of the cross block 903 respectively, and at the same time, the two ends of the first pin shaft 904 and the second pin shaft 905 are fixed to the corresponding positions of the upper fixed seat 901 and the lower fixed seat 902 respectively. When the upper fixed seat 901 or the lower fixed seat 902 is subjected to external force, the first pin shaft 904 or the second pin shaft 905, driven by the corresponding fixed seat, rotates between the double bearings and the cross block 903, thereby further realizing the angular tilt between the stage plate 12 and the two-dimensional inclined base plate 7.

[0054] Example 3

[0055] like Figure 10 As shown, based on the structure of the embodiment in which the first pin 904 and the second pin 905 are fixed to the upper fixing seat 901 and the lower fixing seat 902, the cross block 903 can swing in the cross direction relative to the upper fixing seat 901 and the lower fixing seat 902. In the third embodiment, the specific structure of the vertical orthogonal slider based on the sliding bearing rotation connection is as follows: a group of sliding bearings includes an inner bearing and an outer bearing, wherein the inner ring of the inner bearing is interference fit on the first pin 904 and the second pin 905, and the outer ring of the outer bearing is interference fit in the upper and lower through-holes of the cross block 903.

[0056] When the first pin 904 and the second pin 905 pass through the upper and lower holes of the cross block 903, respectively, the outer rings of the inner and outer bearings slide (including rotate) relative to each other. Simultaneously, the ends of the first pin 904 and the second pin 905 are fixed to corresponding locations on the upper and lower fixing seats 901 and 902, respectively. When the upper and lower fixing seats 901 and 902 are subjected to external force, the first pin 904 or the second pin 905, driven by the corresponding fixing seat, rotates between the sliding bearing and the cross block 903, thereby further achieving the angular tilt between the stage plate 12 and the two-dimensional tilting base plate 7.

[0057] Example 4

[0058] like Figure 11As shown, based on the upper fixed seat 901 and the lower fixed seat 902 in the embodiment, in the third embodiment, the specific structure of the slider based on the rotary connection of the joint bearing is: including two groups of joint bearings, the outer rings of the two groups of joint bearings are interference fitted in the cavities of the upper fixed seat 901 and the lower fixed seat 902 respectively, and the inner rings of the two groups of joint bearings are interference fitted and sleeved on the same connecting column. The sliding contact surface of the joint bearing is an inner spherical surface and an outer spherical surface, which can rotate and swing at any angle during movement. When the upper fixed seat 901 or the lower fixed seat 902 is subjected to an external force, the two groups of joint bearings are driven by the corresponding fixed seat to rotate and swing at an angle, thereby further realizing the angular inclination between the object table plate 12 and the two-dimensional inclined bottom plate 7.

Claims

1. An electric four-dimensional adjustment platform, comprising a two-dimensional translation mechanism and a two-dimensional tilt mechanism, characterized in that: The two-dimensional tilting mechanism is stacked on the two-dimensional translation mechanism, and the two-dimensional translation mechanism drives the two-dimensional tilting mechanism to translate in the X-axis and Y-axis directions; the two-dimensional tilting mechanism includes a loading platform plate (12) located at the top, and the loading platform plate (12) is driven by a third driving component (10) to perform two-dimensional angle tilt adjustment.

2. The electric four-dimensional adjustment platform according to claim 1, characterized in that: The two-dimensional translation mechanism comprises a base plate (1), a translation plate (2), and a two-dimensional inclined base plate (7); a transverse cross roller guide rail (3) is provided between the base plate (1) and the translation plate (2); and a longitudinal cross roller guide rail (4) is provided between the translation plate (2) and the two-dimensional inclined base plate (7).

3. The electric four-dimensional adjustment platform according to claim 2, characterized in that: The invention also includes a first drive assembly (5) and a second drive assembly (6) for driving the transverse cross roller guide rail (3) and the longitudinal cross roller guide rail (4) to move linearly, respectively; the first drive assembly (5) or the second drive assembly (6) includes a stepper motor (502) and a ball screw (507); the output end of the stepper motor (502) is connected to the screw rod of the ball screw (507) through a coupling (504); the nut of the ball screw (507) is fixed to the side of the translation plate (2) or the side of the two-dimensional inclined base plate (7).

4. The electric four-dimensional adjustment platform according to claim 3, characterized in that: The first drive assembly (5) or the second drive assembly (6) further comprises a base plate (501) for mounting the fixed end of the first drive assembly (5) or the second drive assembly (6) on the base plate (1) or the translation plate (2); the fixed end of the stepping motor (502) is mounted on the right end of the base plate (501) via a motor mounting plate (503); the screw fixed side (505) of the ball screw (507) is also mounted on the base plate (501) via a fixed side mounting plate (506) and is located on the output end side of the stepping motor (502), so as to facilitate connection of the screw of the ball screw (507) and the output end of the stepping motor (502) via a coupling (504); and the screw support side (508) of the ball screw (507) is mounted on the left end of the base plate (501) via a support side mounting plate (509).

5. The electric four-dimensional adjustment platform according to claim 2, characterized in that: The invention also includes a hard limit block (8) for limiting the travel of the transverse cross roller guide (3) and the longitudinal cross roller guide (4), which includes a fixed seat (801) and a polyurethane buffer block (802). When the travel of the transverse cross roller guide (3) and the longitudinal cross roller guide (4) is maximum, the two polyurethane buffer blocks (802) arranged opposite to each other perform contact buffering.

6. The electric four-dimensional adjustment platform according to claim 2, characterized in that: The loading platform plate (12) is slidably connected to the top of the two-dimensional inclined bottom plate (7) via a vertical orthogonal slider (9). The vertical orthogonal slider (9) includes an upper fixed seat (901), a lower fixed seat (902), and a cross block (903). The upper fixed seat (901) and the lower fixed seat (902) are hollow structures and are provided with perforations in the radial direction. The upper and lower parts of the cross block (903) are also provided with perforations and are fixed in the cavities of the upper fixed seat (901) and the lower fixed seat (902) by using a first pin shaft (904) and a second pin shaft (905).

7. The electric four-dimensional adjustment platform according to claim 6, characterized in that: The first pin shaft (904) and the second pin shaft (905) are rotatably connected to the upper and lower parts of the cross block (903) via double bearings or sliding bearings.

8. The electric four-dimensional adjustment platform according to claim 2, characterized in that: The loading platform (12) is rotatably connected to the top of the two-dimensional inclined base plate via a slider rotatably connected based on a joint bearing. The slider rotatably connected based on a joint bearing comprises an upper fixed seat (901) and a lower fixed seat (902) with a hollow structure, two sets of joint bearings, and a connecting column. The outer rings of the two sets of joint bearings are respectively interference-fitted in the cavities of the upper fixed seat (901) and the lower fixed seat (902), and the inner rings of the two sets of joint bearings are respectively interference-fitted at both ends of the connecting column.

9. The electric four-dimensional adjustment platform according to claim 2, characterized in that: The third driving assembly (10) comprises a linear stepping motor (101), a fixed end (1012) of the linear stepping motor (101) being mounted on the two-dimensional tilting base plate (7), and a ball head push rod (102) for pushing the two-dimensional tilting base plate (7) to tilt at an angle being fixed to the upper end of the push rod (1011) of the linear stepping motor (101).

10. The electric four-dimensional adjustment platform according to claim 9, characterized in that: The third drive assembly (10) further comprises an anti-rotation mounting plate (103), a motor extension induction ring (104), and a proximity switch (105), wherein the rotation mounting plate (103) is fixed on the two-dimensional inclined bottom plate (7) and abuts against the ball head push rod (102), the motor extension induction ring (104) is used to sense the extension and retraction of the lower end of the push rod (1011), and the proximity switch (105) is used to sense the upward stroke or downward stroke of the push rod (1011).

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