Vertical furnace facilitating rotation of vertical boat

Abstract

The utility model provides a vertical furnace convenient for rotation of a vertical boat, which comprises a furnace body with a heating chamber, a lower furnace door detachably connected with the furnace body, at least one boat support frame arranged in the heating chamber and used for supporting the vertical boat, and at least one autorotation turntable connected with the boat support frame in one-to-one correspondence, the at least one first driving device is arranged on the lower furnace door and is in one-to-one correspondence connection with the autorotation turntables; the first driving device drives the corresponding rotation turntable to rotate so as to enable the vertical boat to rotate, so that the heating uniformity of the silicon wafer is improved, and the process effect is improved.

Description

TECHNICAL FIELD

[0001] The utility model belongs to solar photovoltaic cell production equipment field, more specifically, it relates to a vertical furnace convenient for vertical boat rotation. BACKGROUND

[0002] With the increasing demand for renewable energy all over the world, the solar photovoltaic industry has developed rapidly. At present, the diffusion of the photovoltaic industry, oxidation, annealing, doping, PECVD (low pressure chemical vapor deposition method), LPCVD (plasma enhanced chemical vapor deposition method) and other processes have vertical furnace and horizontal furnace two types, the structure of the two types needs to load the silicon wafer in the specific carrier and transmit into the reaction cavity to carry out the process, through the specific reaction gas, so as to realize the specific film coating, diffusion, oxidation and thin film deposition process to the silicon wafer. In the existing vertical furnace body, the relative position of the vertical boat carrying the silicon wafer into the furnace body does not change, and when the silicon wafer is diffused, oxidized, degraded and coated, the furnace body needs high-temperature conditions, and the temperature field in the furnace body has difference, thereby causing uneven heating of the silicon wafer and affecting the process effect. SUMMARY

[0003] The utility model discloses a vertical furnace convenient for vertical boat rotation, which solves the problem of uneven heating of the silicon wafer caused by the fixed position of the vertical boat relative to the furnace body in the prior art.

[0004] To achieve the above object, the utility model adopts the technical scheme of:

[0005] The utility model provides a vertical furnace convenient for vertical boat rotation, which comprises:

[0006] The furnace body has a heating chamber.

[0007] The lower furnace door is detachably connected with the furnace body.

[0008] At least one boat support frame is arranged in the heating chamber and used for supporting the vertical boat.

[0009] At least one self-rotation turntable is connected with the boat support frame one by one.

[0010] At least one first driving device is arranged on the lower furnace door and connected with the self-rotation turntable one by one, and is used for driving the corresponding self-rotation turntable to rotate so that the vertical boat rotates.

[0011] Further, the utility model further comprises:

[0012] The revolution turntable is connected with all the boat support frames.

[0013] A second driving device is arranged on the lower furnace door and connected with the revolution turntable, and is used to drive the revolution turntable to rotate so as to make the vertical boat perform revolution.

[0014] Further, the revolution turntable is arranged on the side of the lower furnace door facing the heating chamber, the revolution turntable is provided with at least one groove, the rotation turntable is arranged in the corresponding groove, and the boat support frame is arranged on the corresponding rotation turntable.

[0015] Further, the first driving device comprises a first motor and a first magnetic fluid seal, the lower end of the first magnetic fluid seal is connected with the first motor through a belt, and the upper end of the first magnetic fluid seal penetrates through the lower furnace door and is connected with the rotation turntable.

[0016] Further, the second driving device comprises a second motor and a second magnetic fluid seal, the lower end of the second magnetic fluid seal is connected with the second motor through a belt, and the upper end of the second magnetic fluid seal penetrates through the lower furnace door and is connected with the revolution turntable.

[0017] Further, the furnace body comprises an inner furnace body and an outer furnace body which jointly enclose the heating chamber, the inner furnace body is arranged in the outer furnace body, the lower end of the inner furnace body is closed, the lower end of the inner furnace body is open, and the lower furnace door is detachably arranged at the lower end of the inner furnace body.

[0018] Further, the boat support frame is arranged in multiple, and multiple boat support frames are arranged at intervals around the inner furnace body.

[0019] Further, the outer side of the outer furnace body is provided with an outer heating source, and the inner side of the inner furnace body is provided with an inner heating source.

[0020] Further, the upper end of the outer furnace body is provided with an upper heat preservation layer, and the lower end of the outer furnace body is provided with a lower heat preservation layer.

[0021] Further, the lower furnace door is sealingly connected with the lower end of the outer furnace body through a sealing flange.

[0022] Compared with the prior art, the vertical furnace facilitating rotation of the vertical boat has at least the following beneficial effects:

[0023] 1. The vertical furnace is provided with corresponding rotation turntables and first driving devices on the boat support frames in the vertical furnace, so that the vertical boat can perform rotation, and the heating uniformity of the silicon wafer is improved, and the process effect is provided.

[0024] 2、Still for the vertical furnace boat support frame is provided with revolution turntable and second driving device, through control second driving device and first driving device synchronous opening, realize vertical boat to carry out revolution and revolution simultaneously, more effectively improve the heating uniformity of silicon wafer, provide process effect.

[0025] 3、Set first driving device and second driving device adopt magnetic fluid seal, guarantee the sealing of vertical furnace while driving vertical boat to carry out revolution and revolution.

[0026] 4、After closing the lower furnace door, the lower furnace door is sealingly connected with the outer furnace body, ensuring the sealing of the vertical furnace.

[0027] 5、The outer furnace body is provided with an upper heat preservation layer and a lower heat preservation layer to prevent heat loss.

[0028] 6、The boat support frame is arranged between the inner furnace body and the outer furnace body, and is uniformly distributed around the inner furnace body, so that the silicon wafer is placed in the high temperature zone of the furnace, thereby improving the process effect. BRIEF DESCRIPTION OF DRAWINGS

[0029] In order to more clearly illustrate the technical scheme in the embodiments of the present application, the following will briefly introduce the drawings needed to be used in the embodiments or prior art description. Obviously, the drawings in the following description are only some embodiments of the present application, and for those skilled in the art, other drawings can also be obtained without creative labor.

[0030] Figure 1 The cross-sectional view of the vertical furnace provided by the preferred embodiment of the present application is shown in the figure.

[0031] Figure 2 The position diagram of the revolution turntable and the revolution turntable provided by the preferred embodiment of the present application is shown in the figure.

[0032] In the figure, the main marks are:

[0033] 101, furnace body; 1011, outer furnace body; 1012, inner furnace body; 102, lower furnace door; 103, boat support frame; 104, revolution turntable; 105, first driving device; 106, revolution turntable; 107, second driving device; 1081, upper heat preservation layer; 1082, lower heat preservation layer; 109, sealing flange; 110, rack mounting plate; 200, vertical boat. DETAILED DESCRIPTION

[0034] In order to make the technical problems, technical schemes and beneficial effects of the present application more clear, the following will further describe the present application in combination with the drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present application, and are not used to limit the present application.

[0035] In the existing vertical furnace body, the relative position of the vertical boat carrying the silicon wafer does not change after entering the furnace body, and when the silicon wafer is subjected to diffusion, oxidation, degradation, coating and other processes, the furnace body needs high temperature conditions, and the temperature field in the furnace body is different, thereby causing uneven heating of the silicon wafer and affecting the process effect.

[0036] To this end, the utility model provides a vertical furnace which can drive the vertical boat 200 to rotate and revolve to improve the uniformity of the heating of the silicon wafer and improve the process effect.

[0037] As shown in Figure 1 The vertical furnace provided by the preferred embodiment of the utility model comprises:

[0038] The furnace body 101 has a heating chamber;

[0039] The lower furnace door 102 is detachably connected with the furnace body 101;

[0040] The at least one boat support frame 103 is arranged in the heating chamber and is used for supporting the vertical boat 200;

[0041] The at least one self-rotation turntable 104 is connected with the boat support frame 103 one by one;

[0042] The at least one first driving device 105 is arranged on the lower furnace door 102 and is connected with the self-rotation turntable 104 one by one, and is used for driving the corresponding self-rotation turntable 104 to rotate so that the vertical boat 200 rotates.

[0043] In the preferred embodiment, the number of the boat support frame 103, the self-rotation turntable 104 and the first driving device 105 is the same, for example, the number of the boat support frame 103, the self-rotation turntable 104 and the first driving device 105 is one, two or four.

[0044] In the vertical furnace provided by the preferred embodiment of the utility model, the self-rotation turntable 104 corresponding to the boat support frame 103 and the first driving device 105 corresponding to the self-rotation turntable 104 are arranged, the corresponding self-rotation turntable 104 is driven to rotate by the first driving device 105, the corresponding boat support frame 103 is driven to rotate by the rotation of the self-rotation turntable 104, the vertical boat 200 rotates, and the uniformity of the heating of the silicon wafer is improved, and the process effect is improved.

[0045] In the preferred embodiment of the utility model, as shown in Figure 1 , Figure 2 The vertical furnace further comprises:

[0046] The revolving turntable 106 is connected with all the boat support frames 103;

[0047] The second driving device 107 is arranged on the lower furnace door 102 and connected with the revolution turntable 106, and is used for driving the revolution turntable 106 to rotate so as to make the vertical boat 200 revolve.

[0048] In the preferred embodiment, the number of the revolution turntable 106 and the second driving device 107 is one.

[0049] In the vertical furnace provided by the preferred embodiment, the revolution turntable 106 connected with all the boat support frames 103 and the second driving device 107 connected with the revolution turntable 106 are arranged, the revolution turntable 106 is driven to rotate by the second driving device 107, the revolution turntable 106 drives all the boat support frames 103 to rotate, and the revolution turntable 106 drives the furnace body 101 to rotate at the same time, so that the vertical boat 200 and the furnace body 101 revolve.

[0050] In the preferred embodiment, the first driving device 105 and the second driving device 107 can be controlled to be opened synchronously, so that the vertical boat 200 rotates and revolves at the same time, the heating uniformity of the silicon wafer is improved more effectively, and the process effect is improved.

[0051] In the preferred embodiment, the revolution turntable 106 is arranged on the side of the lower furnace door 102 facing the heating chamber, the revolution turntable 106 is provided with at least one groove, the rotation turntable 104 is arranged in the corresponding groove, and the boat support frame 103 is arranged on the corresponding rotation turntable 104.

[0052] In the preferred embodiment, the number of the revolution turntable 106 is one, and the revolution turntable 106 is provided with the groove corresponding to the rotation turntable 104. The size and shape of the groove are matched with the size and shape of the rotation turntable 104. If the number of the groove is multiple, the multiple grooves are arranged at intervals around the center of the revolution turntable 106.

[0053] In the preferred embodiment, the rotation turntable 104 is provided with the center hole for the driving end of the first driving device 105 to pass through. The vertical boat 200 is placed on the upper end of the boat support frame 103, and the lower end of the boat support frame 103 is fixed on the corresponding rotation turntable 104 by glue or fasteners.

[0054] In the vertical furnace provided by the preferred embodiment, the boat support frame 103, the rotation turntable 104 and the revolution turntable 106 are directly or indirectly fixed on the lower furnace door 102, so that the boat support frame 103 is exposed outside after the lower furnace door 102 is opened, and then the vertical boat 200 is conveniently taken out or put in.

[0055] In the preferred embodiment of the utility model, the first driving device 105 comprises a first motor and a first magnetic fluid seal, the lower end of the first magnetic fluid seal is connected with the first motor through a belt, and the upper end of the first magnetic fluid seal is connected with the self-rotating turntable 104 through the lower furnace door 102.

[0056] In the vertical furnace provided by the preferred embodiment of the utility model, the first driving device 105 is used to realize the self-rotation of the vertical boat 200, and the first driving device 105 adopts magnetic fluid sealing, thereby ensuring the sealing of the vertical furnace and driving the vertical boat 200 to rotate.

[0057] In the preferred embodiment of the utility model, the second driving device 107 comprises a second motor and a second magnetic fluid seal, the lower end of the second magnetic fluid seal is connected with the second motor through a belt, and the upper end of the second magnetic fluid seal is connected with the revolving turntable 106 through the lower furnace door 102.

[0058] In the vertical furnace provided by the preferred embodiment of the utility model, the second driving device 107 is used to realize the revolution of the vertical boat 200, and the second driving device 107 adopts magnetic fluid sealing, thereby ensuring the sealing of the vertical furnace and driving the vertical boat 200 to revolve.

[0059] In the preferred embodiment of the utility model, the furnace body 101 comprises an inner furnace body 1012 and an outer furnace body 1011 which jointly form a heating chamber, the inner furnace body 1012 is arranged in the outer furnace body 1011, the lower end of the inner furnace body 1012 is closed, the lower end of the inner furnace body 1012 is open, and the lower furnace door 102 is detachably arranged at the lower end of the inner furnace body 1012.

[0060] In the preferred embodiment, the inner furnace body 1012 and the outer furnace body 1011 are coaxially arranged, the upper end of the inner furnace body 1012 is open and the lower end is closed, the lower end of the outer furnace body 1011 is open and the upper end is closed, and the upper end of the inner furnace body 1012 is connected with a hoisting connecting piece after penetrating through the upper end of the outer furnace body 1011, the hoisting connecting piece can provide force to the inner furnace body 1012, thereby ensuring that the inner furnace body 1012 is suspended in the outer furnace body 1011.

[0061] In the preferred embodiment, the inner furnace body 1012 and the outer furnace body 1011 can jointly form a heating chamber with a concave cross section, and the inner furnace body 1012 and the outer furnace body 1011 can both be quartz tubes.

[0062] In the preferred embodiment of the utility model, along the axial direction of the furnace body 101, there is a containing space between the side wall of the inner furnace body 1012 and the side wall of the outer furnace body 1011, and the containing space belongs to the heating chamber. The boat support frame 103 is arranged between the side wall of the inner furnace body 1012 and the side wall of the outer furnace body 1011. If the boat support frame 103 is arranged in multiple, the multiple boat support frames 103 are arranged at intervals around the inner furnace body 1012.

[0063] In the vertical furnace provided by the preferred embodiment of the utility model, the boat support frame 103 is arranged between the inner furnace body 1012 and the outer furnace body 1011, and is uniformly distributed in a circle with the inner furnace body 1012 as the center, so that the silicon wafer is placed in the high-temperature area of the furnace body 101, and the process effect is improved.

[0064] In the preferred embodiment of the utility model, the outer side of the outer furnace body 1011 is provided with an outer heating source, and the inner side of the inner furnace body 1012 is provided with an inner heating source. The outer heating source and the inner heating source both adopt heating wires.

[0065] In the vertical furnace provided by the preferred embodiment of the utility model, the inner furnace body 1012 and the outer furnace body 1011 are both provided with heating sources, so that the required temperature for the process of the silicon wafer can be provided. Specifically,

[0066] In the preferred embodiment of the utility model, the upper end of the outer furnace body 1011 is provided with an upper heat preservation layer 1081, and the lower end of the outer furnace body 1011 is provided with a lower heat preservation layer 1082. The upper heat preservation layer 1081 and the lower heat preservation layer 1082 are both in the shape of a circle, and can be called upper heat preservation circles and lower heat preservation circles. The upper heat preservation layer 1081 and the lower heat preservation layer 1082 can both be made of heat preservation materials such as heat preservation cotton.

[0067] In the vertical furnace provided by the preferred embodiment of the utility model, the outer furnace body 1011 is provided with the upper heat preservation layer 1081 and the lower heat preservation layer 1082 for heat preservation, so as to prevent the loss of heat in the furnace.

[0068] In the preferred embodiment of the utility model, the lower furnace door 102 is sealingly connected with the lower end of the outer furnace body 1011 through the sealing flange 109.

[0069] In the vertical furnace provided by the preferred embodiment of the utility model, the sealing flange 109 is used to sealingly connect the lower furnace door 102 with the outer furnace body 1011, so as to ensure the sealing property of the vertical furnace.

[0070] For better understanding, the complete structure of the vertical furnace provided by the preferred embodiment of the utility model will be described in detail below with reference to the drawings:

[0071] As Figure 1As shown, the vertical furnace comprises an outer furnace body 1011, an inner furnace body 1012 and a lower furnace door 102 which jointly constitute a heating chamber. The outer furnace body 1011 and the inner furnace body 1012 are each provided with a heating source, and the outer furnace body 1011 is provided with an upper heat preservation layer 1081 and a lower heat preservation layer 1082. The upper heat preservation layer 1081 and the lower heat preservation layer 1082 are in the shape of a circle. The upper and lower ends of the outer furnace body 1011 are provided with rack mounting plates 110 for mounting on a rack.

[0072] Two boat support frames 103 are symmetrically arranged between the side wall of the outer furnace body 1011 and the side wall of the inner furnace body 1012. The lower end of the outer furnace body 1011 is open, and the lower end of the inner furnace body 1012 is closed. The lower furnace door 102 is sealingly connected to the lower end of the outer furnace body 1011 through a sealing flange 109, and is provided on one side facing the heating chamber with a revolution turntable 106 which is provided with three grooves arranged at intervals, two rotation turntables 104 are arranged in two of the grooves respectively, and the lower ends of the two boat support frames 103 are fixed on the two rotation turntables 104 respectively. The lower end of the inner furnace body 1012 is connected to the revolution turntable 106 through a connecting frame, and the lower end of the connecting frame is arranged in the other groove.

[0073] The second driving device 107 is arranged in the middle of the lower furnace door 102, and the two first driving devices 105 are arranged at intervals on the lower furnace door 102 and located on the two sides of the second driving device 107. Taking each first driving device 105 as an example, the first driving device 105 comprises a first motor and a first magnetic fluid seal, the lower end of the first magnetic fluid seal is connected to the first motor through a belt, and the upper end of the first magnetic fluid seal passes through the lower furnace door 102 and the revolution turntable 106 in sequence and extends into the center hole of the rotation turntable 104. The second driving device 107 comprises a second motor and a second magnetic fluid seal, the lower end of the second magnetic fluid seal is connected to the second motor through a belt, and the upper end of the second magnetic fluid seal passes through the lower furnace door 102 and extends into the center hole of the revolution turntable 106.

[0074] After the lower furnace door 102 is opened, the two boat support frames 103 are exposed, and the two vertical boats 200 carrying silicon wafers are placed on the upper ends of the two boat support frames 103 respectively, the lower furnace door 102 is closed to seal the vertical furnace, the two first driving devices 105 and the second driving device 107 are simultaneously started, the two rotation turntables 104 are driven to rotate by the two first driving devices 105 respectively, and the revolution turntable 106 is driven to rotate by the second driving device 107, so that the two vertical boats 200 are simultaneously rotated and revolved, thereby improving the heating uniformity of the silicon wafers and improving the process effect.

[0075] The vertical furnace provided by the utility model has the following effective effects:

[0076] 1. A vertical furnace is provided with a corresponding self-rotating turntable and a first driving device for supporting the boat, realizing the self-rotation of the vertical boat, and further improving the heating uniformity of the silicon wafer and providing the process effect.

[0077] 2. A vertical furnace is provided with a corresponding self-rotating turntable and a first driving device for supporting the boat, realizing the self-rotation of the vertical boat, and further improving the heating uniformity of the silicon wafer and providing the process effect.

[0078] 3. The first driving device and the second driving device are provided with magnetic fluid sealing, which can ensure the sealing of the vertical furnace and drive the vertical boat to rotate and revolve.

[0079] 4. After the lower furnace door is closed, the lower furnace door is sealingly connected with the outer furnace body, ensuring the sealing of the vertical furnace.

[0080] 5. The outer furnace body is provided with an upper heat preservation layer and a lower heat preservation layer to prevent heat loss.

[0081] 6. The boat support frame is arranged between the inner furnace body and the outer furnace body and is uniformly distributed around the inner furnace body, ensuring that the silicon wafer is placed in the high temperature zone of the furnace, and further improving the process effect.

[0082] The above is only a preferred embodiment of the present application, and is not intended to limit the present application. Any modification, equivalent replacement and improvement within the spirit and principles of the present application shall be included in the protection scope of the present application.

Claims

1. A vertical furnace that facilitates the rotation of a vertical boat, characterized in that: include: a furnace body having a heating chamber; a lower furnace door, detachably connected to the furnace body; at least one boat support frame disposed in the heating chamber and configured to support a vertical boat; At least one rotating turntable connected to each of the boat support frames in a one-to-one correspondence; At least one first driving device, provided on the lower furnace door and connected to the rotating turntables in a one-to-one correspondence, for driving the corresponding rotating turntables to rotate so as to rotate the vertical boat; a revolution turntable connected to all of the boat support frames; The second driving device is arranged on the lower furnace door and connected to the revolution turntable, and is used to drive the revolution turntable to rotate so that the vertical boat revolves. The second driving device is started synchronously with the first driving device to realize the simultaneous rotation and revolution of the vertical boat.

2. The vertical furnace for facilitating vertical boat rotation according to claim 1, characterized in that: The revolution turntable is arranged on the side of the lower furnace door facing the heating chamber, and the revolution turntable is provided with at least one groove, the rotation turntable is arranged in the corresponding groove, and the boat support frame is arranged on the corresponding rotation turntable.

3. The vertical furnace for facilitating vertical boat rotation according to claim 1, wherein: The first driving device includes a first motor and a first magnetic fluid seal. The lower end of the first magnetic fluid seal is connected to the first motor through a belt, and the upper end of the first magnetic fluid seal passes through the lower furnace door and is connected to the rotating turntable.

4. The vertical furnace for facilitating vertical boat rotation according to claim 1, wherein: The second driving device includes a second motor and a second magnetic fluid seal, the lower end of the second magnetic fluid seal is connected to the second motor via a belt, and the upper end of the second magnetic fluid seal passes through the lower furnace door and is connected to the revolving turntable.

5. The vertical furnace for facilitating vertical boat rotation according to claim 1, characterized in that: The furnace body includes an inner furnace body and an outer furnace body which together enclose the heating chamber. The inner furnace body is arranged in the outer furnace body. The lower end of the inner furnace body is closed and the lower end of the inner furnace body is open. The lower furnace door is detachably arranged at the lower end of the inner furnace body.

6. The vertical furnace for facilitating vertical boat rotation according to claim 5, characterized in that: The boat support frames are provided in plurality, and the plurality of boat support frames are arranged at intervals around the inner furnace body.

7. The vertical furnace for facilitating vertical boat rotation according to claim 5, characterized in that: An external heating source is provided on the outer side of the outer furnace body, and an internal heating source is provided on the inner side of the inner furnace body.

8. The vertical furnace for facilitating vertical boat rotation according to claim 5, characterized in that: An upper heat-insulating layer is provided at the upper end of the outer furnace body, and a lower heat-insulating layer is provided at the lower end of the outer furnace body.

9. The vertical furnace for facilitating vertical boat rotation according to claim 5, wherein: The lower furnace door is sealed and connected to the lower end of the outer furnace body through a sealing flange.

Images