Scanning electron microscope test fixture

Abstract

The utility model discloses a test fixture for a scanning electron microscope. The test fixture comprises a fixture bracket, a clamping mechanism arranged on the fixture bracket and a fixing pin arranged at the bottom of the fixture bracket, the clamping mechanism comprises clamping assemblies symmetrically arranged on two side plates of the clamp support, each clamping assembly comprises a push-pull rod penetrating through the side plates of the clamp support, a spring arranged on the push-pull rod in a sleeving mode and an elastic steel sheet arranged on the push-pull rod, and the springs and the elastic steel sheets are arranged in the clamp support. According to the utility model, a sample can be prevented from inclining in the analysis process, the analysis quality is improved, the analysis error is reduced, and accurate experimental data is further obtained.

Description

TECHNICAL FIELD

[0001] The utility model belongs to test fixture technical field relates to a scanning electron microscope test fixture. BACKGROUND

[0002] Scanning electron microscope is the use electron beam scanning sample surface, produces secondary electron signal, obtains sample surface topography, composition information through detecting these signals, it can be to aluminum alloy etc. Sample analysis, but the irregular metal sample will appear tilt after being put into scanning electron microscope, when energy spectrum scanning, the composition analysis is not accurate due to the count rate reduction, thereby leading to the experimental data and real value exist serious error.

[0003] In view of the above situation, the urgent need for design a fixture, can prevent the sample from tilting in the analysis process, improve the analysis quality, reduce the analysis error. UTILITY MODEL CONTENT

[0004] In view of the above-mentioned deficiencies in the prior art, the utility model aims at providing a scanning electron microscope test fixture, which can prevent the sample from tilting in the analysis process, improve the analysis quality, reduce the analysis error, and thus obtain accurate experimental data.

[0005] To achieve the above object, the utility model adopts the following technical scheme:

[0006] The utility model provides a scanning electron microscope test fixture, which comprises a fixture support, a clamping mechanism arranged on the fixture support and a fixing pin arranged at the bottom of the fixture support.

[0007] The clamping mechanism comprises clamping assemblies symmetrically arranged on the side plates of the fixture support, the clamping assemblies comprise push-pull rods penetrating through the side plates of the fixture support, springs sleeved on the push-pull rods and elastic steel sheets arranged on the push-pull rods, and the springs and the elastic steel sheets are arranged in the interior of the fixture support.

[0008] Preferably, the fixture support is in the shape of a U, and the fixture support comprises a bottom plate and side plates symmetrically arranged at the two ends of the bottom plate, and the side plates are provided with mounting holes for mounting the push-pull rods.

[0009] Preferably, the fixing pin is a cylindrical pin.

[0010] Preferably, the push-pull rod comprises a connecting rod and a handle, one end of the connecting rod is connected with the handle, and the other end of the connecting rod penetrates through the side plate of the fixture support and is connected with the elastic steel sheet.

[0011] Preferably, the elastic steel sheet comprises a first steel sheet and second steel sheets symmetrically arranged at the two ends of the first steel sheet, and the included angle between the first steel sheet and the second steel sheets is an obtuse angle.

[0012] The scanning electron microscope test clamp has the following beneficial effects: the irregular sample direction can be adjusted, the morphology of the fracture, ideal matrix organization can be accurately and quickly obtained under secondary electrons and back scattering, the energy spectrum analysis counting rate can be increased to tens of thousands, and the obtained composition is more accurate, thereby providing important scientific basis for subsequent product manufacturing and research and development.

[0013] The scanning electron microscope test clamp of the utility model can effectively prevent sample inclination, prevent serious errors between experimental data and true values, improve analysis quality, and further obtain accurate experimental data. BRIEF DESCRIPTION OF DRAWINGS

[0014] Other features, objects and advantages of the utility model will become more apparent through reading the following detailed description of the non-limiting embodiments with reference to the accompanying drawings:

[0015] Figure 1 Fig. 1 is a structural schematic view of the scanning electron microscope test clamp of the utility model;

[0016] Figure 2 Fig. 2 is a top view of the scanning electron microscope test clamp of the utility model;

[0017] Figure 3 Fig. 3 is a structural schematic view of the push-pull rod of the utility model;

[0018] Figure 4 Fig. 4 is a separation schematic view of the two elastic steel sheets of the utility model;

[0019] Figure 5 Fig. 5 is a schematic view of the scanning electron microscope test clamp clamping a sample of the utility model;

[0020] Figure 6 Fig. 6 is a schematic view of the cylindrical pin inserted into the workbench of the utility model;

[0021] In the drawings, 1 is a clamp support; 11 is a bottom plate; 12 is a side plate; 2 is a push-pull rod; 21 is a handle; 22 is a connecting rod; 3 is a spring; 4 is an elastic steel sheet; 41 is a first steel sheet; 42 is a second steel sheet; 5 is a fixed pin; 6 is a sample; and 7 is a workbench. DETAILED DESCRIPTION

[0022] In order to better understand the above technical solutions of the utility model, the technical solutions of the utility model are further described below in combination with embodiments.

[0023] In combination with Figure 1 , Figure 2As shown in the provided scanning electron microscope test fixture, a fixture support 1, a clamping mechanism arranged on the fixture support 1 and a fixing pin 5 arranged at the bottom of the fixture support 1. The clamping mechanism includes a clamping assembly symmetrically arranged on the two side plates 12 of the fixture support 1, the clamping assembly includes a push-pull rod 2 passing through the side plate of the fixture support, a spring 3 sleeved on the push-pull rod 2 and an elastic steel sheet 4 arranged on the push-pull rod 2, and the spring 3 and the elastic steel sheet 4 are arranged in the inside of the fixture support 1.

[0024] In combination Figure 1 As shown, the shape of the fixture support 1 is U-shaped, and the fixture support includes a bottom plate 11 and side plates 12 symmetrically arranged at both ends of the bottom plate 11, and each side plate 12 is provided with a mounting hole for mounting the push-pull rod 2.

[0025] In combination Figure 1 As shown, the fixing pin 5 is a cylindrical pin, and can also be a pin of other shapes.

[0026] In combination Figure 2 As shown, the push-pull rod 2 includes a connecting rod 22 and a handle 21; one end of the connecting rod 22 is connected with the handle 21, and the other end passes through the side plate 12 of the fixture support 1 and is connected with the elastic steel sheet 4.

[0027] In combination Figure 3 As shown, the elastic steel sheet 4 includes a first steel sheet 41 and a second steel sheet 42 symmetrically arranged at both ends of the first steel sheet 41, and the included angle between the first steel sheet 41 and the second steel sheet 42 is an obtuse angle.

[0028] In combination Figures 4 to 6 As shown, the use process of the scanning electron microscope test fixture of the utility model is as follows:

[0029] (1) Pull apart the two push-pull rods 2 so that the two elastic steel sheets 4 are separated (see Figure 4 As shown);

[0030] (2) Place the sample 6 between the two elastic steel sheets 4, and then loosen the two push-pull rods 2 (see Figure 5 As shown);

[0031] (3) Turn on the electron microscope and the energy spectrometer, release the gas, and open the sample chamber;

[0032] (4) Insert the fixing pin 5 into the workbench 7 (see Figure 6 As shown);

[0033] (5) Put the workbench 7 into the sample chamber for vacuum analysis.

[0034] Those skilled in the art of the present technology should realize that the above embodiments are only used to illustrate the present application, and are not used as a limitation of the present application, as long as the changes and modifications of the above described embodiments are within the scope of the present application.

Claims

1. A scanning electron microscope test fixture, characterized in that: It includes a clamp bracket, a clamping mechanism provided on the clamp bracket, and a fixing pin provided at the bottom of the clamp bracket; The clamping mechanism includes a clamping assembly symmetrically arranged on the two side plates of the clamp bracket, and the clamping assembly includes a push-pull rod passing through the side plates of the clamp bracket, a spring sleeved on the push-pull rod, and an elastic steel sheet arranged on the push-pull rod. The spring and the elastic steel sheet are arranged inside the clamp bracket.

2. The scanning electron microscope test fixture according to claim 1, characterized in that: The clamp bracket is in a U-shape and comprises a bottom plate and side plates symmetrically arranged at both ends of the bottom plate. The side plates are provided with mounting holes for mounting the push-pull rods.

3. The scanning electron microscope test fixture according to claim 1, characterized in that: The fixing pin is a cylindrical pin.

4. The scanning electron microscope test fixture according to claim 1, characterized in that: The push-pull rod includes a connecting rod and a handle; one end of the connecting rod is connected to the handle, and the other end passes through the side plate of the clamp bracket and is connected to the elastic steel sheet.

5. The scanning electron microscope test fixture according to claim 1, characterized in that: The elastic steel sheet includes a first steel sheet and second steel sheets symmetrically arranged at two ends of the first steel sheet, and the angle between the first steel sheet and the second steel sheet is an obtuse angle.

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