Scanning electron microscope objective table

Abstract

The utility model discloses an objective table of a scanning electron microscope, which comprises a base, a knob arranged on the side edge of the base, a transmission assembly arranged in the base, a rotating assembly connected with the transmission assembly, and a supporting assembly connected with the rotating assembly, the transmission assembly comprises a worm arranged in the knob and a worm gear connected to the worm; the rotating assembly comprises a threaded piece connected to the worm gear and a lead screw connected to the threaded piece. The supporting assembly comprises a supporting base connected to the top of the lead screw and a first platform arranged on the supporting base. According to the utility model, the worm and the worm gear are matched with each other to adjust the height of the sample, and the displacement of the sample in the horizontal direction is realized through the matching among the first slide rail, the first slide block, the second slide rail and the second slide block.

Description

TECHNICAL FIELD

[0001] The utility model relates to microscope technical field especially, relate to a scanning electron microscope object table. BACKGROUND

[0002] The electron microscope is a kind of microscope using electron beam to replace light beam to carry out imaging, with higher resolution and definition than traditional optical microscope, and electron microscope uses electron beam as illumination source.Electron beam is emitted by electron gun, is irradiated to sample after acceleration and focusing, and when electron beam and sample interact, multiple signals are generated, signal is detected by different detector, then by electronic control method and analysis software processing, the image of sample is generated.

[0003] Prior art CN220106427U discloses a kind of novel scanning electron microscope object table, including: bottom plate;Object platform, it is set to bottom plate one side, for carrying substrate glass;Connecting buckle, it is set to the side of bottom plate away from object platform;And fastening plate, it is detachably connected with object platform.By substrate glass is pasted on object platform using conductive adhesive tape, fastening plate is fixed to substrate glass using screw, scanning electron microscope is connected using the connecting buckle of bottom plate bottom, easy to operate, avoids substrate glass sample to slide when observing and cannot find glass melt, guarantees the efficiency and accuracy of observation glass melt.

[0004] But the scanning electron microscope object table described above has the following problems: it is difficult to move sample to facilitate quickly moving to the area needing observation. SUMMARY

[0005] The utility model overcomes the insufficient prior art and provides a scanning electron microscope object table.

[0006] To achieve the above purpose, the utility model adopts the technical scheme of a scanning electron microscope object table, pedestal, knob is arranged at the side of the pedestal, transmission assembly is arranged in the pedestal, rotating assembly is connected with the transmission assembly, and support assembly is connected with the rotating assembly.

[0007] The transmission assembly includes worm arranged in the knob and worm wheel connected with the worm.

[0008] The rotating assembly includes screw connected with the worm wheel and lead screw connected with the screw.

[0009] The support assembly includes support seat connected with the top of the lead screw and first platform arranged on the support seat.

[0010] The first sliding rail is connected with a first sliding block.

[0011] The top of the first sliding block is connected with a second platform, and the side of the second platform is provided with a push handle.

[0012] The second platform is provided with a second sliding rail, and the second sliding rail is connected with a second sliding block.

[0013] The top of the second sliding block is connected with a third platform.

[0014] The third platform is screw-connected with a threaded rod, and the top of the threaded rod is provided with a rotating handle.

[0015] The threaded rod is provided with a pressing block.

[0016] The side of the third platform is provided with a pull handle.

[0017] The side of the third platform is provided with a heating block, and the corresponding side is provided with a temperature sensor.

[0018] The outside of the screw rod and the worm is provided with a protective sleeve.

[0019] The utility model discloses solved the defect in the background art, and the utility model has the following beneficial effects:

[0020] (1) the utility model discloses a worm is connected with worm wheel, and the worm wheel is connected with screw part and screw rod, and the top of the screw rod is provided with support seat, and the support seat is provided with first platform, and the worm is connected in the knob interior, when the operator rotates the knob, the worm rotates along with it. The worm wheel and the worm are mutually engaged, and the rotation of the worm drives the worm wheel to rotate. The worm and worm wheel transmission has self-locking nature, and under the condition that there is no external force, the worm wheel cannot drive the worm to rotate reversely, which makes the object table can keep stable after adjusting to the specific position, and the position change does not occur due to slight external force or vibration. The worm wheel is connected with screw part, and the screw part is connected with the screw rod. The rotation of the worm wheel drives the screw part to rotate. Due to the screw thread cooperation between the screw part and the screw rod, the rotation of the screw part makes the screw rod move up and down. The top of the screw rod is provided with support seat, and the up and down movement of the screw rod drives the support seat to ascend and descend, so that the position adjustment of the sample in the vertical direction is realized.

[0021] (2) The first platform is provided with a first sliding rail, a first sliding block is connected to the first sliding rail, the top of the first sliding block is connected with a second platform, a push handle is arranged on the side of the second platform, a second sliding rail is arranged on the second platform, a second sliding block is connected to the second sliding rail, the top of the second sliding block is connected with a third platform, a pull handle is arranged on the side of the third platform, and an operator can hold the push handle to apply a horizontal pushing force or a horizontal pulling force to the second platform, so that the second platform drives the first sliding block to move on the first sliding rail. The pull handle is used to apply a horizontal pulling force to the third platform, so that the third platform drives the second sliding block to move on the second sliding rail.

[0022] (3) The threaded rod is provided with a rotating handle at the top, and a pressing block is arranged on the threaded rod. The rotating handle provides a convenient force application position for an operator. The operator can hold the rotating handle to apply a rotating force to the threaded rod. When the rotating handle is rotated, the threaded rod rotates, and the pressing block moves downward along the axial direction of the threaded rod to apply a pressing force to the sample placed on the third platform, so that the sample is tightly pressed on the third platform. When the sample needs to be loosened, the threaded rod is reversely rotated, and the pressing block moves upward to release the pressing force on the sample. The cooperation of the threaded rod and the pressing block can flexibly adjust the size of the pressing force according to different conditions such as the shape, size and weight of the sample, so that the sample can be kept stable during the scanning electron microscope observation,

[0023] (4) The third platform is provided with a heating block on the side, and a temperature sensor is arranged on the corresponding side. The heating block is used for heating treatment of the sample placed on the third platform. When the sample needs to be heated and observed, the heating block starts to work, so that the temperature of the third platform and the sample gradually increases to reach the required heating temperature condition. The heating function is particularly important for samples that need to be observed in a specific temperature environment, such as the microstructure evolution of some materials at different temperatures, the activity observation of biological samples at suitable temperatures, etc. The temperature sensor can accurately sense the temperature change and convert the temperature signal into an electric signal, which is transmitted to the control system. BRIEF DESCRIPTION OF DRAWINGS

[0024] The utility model will be further described in connection with the drawings and examples;

[0025] Figure 1 It is the stereogram of the preferred embodiment of the utility model;

[0026] Figure 2 It is the sectional side view of the preferred embodiment of the utility model;

[0027] Figure 3 It is the sectional front view of the preferred embodiment of the utility model;

[0028] Figure 4 is a sectional view of the preferred embodiment of the utility model;

[0029] Figure 5 is an internal sectional view of the preferred embodiment of the utility model;

[0030] In the figure: 1, base; 2, knob; 3, first platform; 4, second platform; 5, third platform; 6, first slide rail; 7, first sliding block; 8, second slide rail; 9, second sliding block; 10, threaded rod; 11, compression block; 12, rotating handle; 13, pushing handle; 14, pulling handle; 15, heating block; 16, temperature sensor; 17, worm; 18, worm wheel; 19, threaded part; 20, lead screw; 21, support seat; 22, protective sleeve. DETAILED DESCRIPTION

[0031] The utility model will be further explained in detail in combination with the drawings and embodiments, these drawings are all simplified schematic diagram, only with the schematic way the basic structure of the utility model is shown, therefore it only shows the constitution related with the utility model.

[0032] As Figures 1-5 shown, a scanning electron microscope stage includes: base 1, knob 2 arranged at the side of base 1, transmission assembly arranged in base 1, rotating assembly connected with transmission assembly, and support assembly connected with rotating assembly.

[0033] The transmission assembly comprises a worm 17 arranged in the knob 2, a worm wheel 18 connected to the worm 17, a threaded part 19 connected to the worm wheel 18, and a lead screw 20 connected to the threaded part 19; the support assembly comprises a support base 21 connected to the top of the lead screw 20, and the first platform 3 arranged on the support base 21. The worm 17 is arranged inside the knob 2, which is directly contacted and forced by the operator. When the operator rotates the knob 2, the worm 17 rotates. The external manual operation of the operator is converted into the precise rotation of the worm 17, which provides an initial power source for the subsequent power transmission. The worm 17 and the worm wheel 18 are in meshing connection, and the rotation of the worm 17 drives the rotation of the worm wheel 18. The cooperation of the worm 17 and the worm wheel 18 has self-locking property, and the worm wheel 18 cannot drive the worm 17 to rotate reversely without external force. The threaded part 19 is connected to the worm wheel 18, and the rotation of the worm wheel 18 drives the rotation of the threaded part 19. The threaded part 19 usually has a threaded structure matched with the lead screw 20, and the threaded connection mode can effectively transmit the rotation of the threaded part 19 to the lead screw 20, so as to realize further transmission and conversion of power. The support base 21 is connected to the top of the lead screw 20, and the up-down movement of the lead screw 20 drives the support base 21 to move up and down. The support base 21, as a key component connecting the lead screw 20 and the first platform 3, plays a role of stable support.

[0034] In the utility model, a first sliding rail 6 is arranged on the first platform 3, a first sliding block 7 is connected to the first sliding rail 6, a second platform 4 is connected to the top of the first sliding block 7, a push handle 13 is arranged on the side of the second platform 4, a second sliding rail 8 is arranged on the second platform 4, a second sliding block 9 is connected to the second sliding rail 8, and a third platform 5 is connected to the top of the second sliding block 9. The first sliding rail 6 arranged on the first platform 3 provides a stable moving track for the first sliding block 7, and the push handle 13 arranged on the side of the second platform 4 provides a convenient force applying part for the operator. The operator can hold the push handle 13 to apply a horizontal pushing force or pulling force to the second platform 4, so that the second platform 4 drives the first sliding block 7 to move on the first sliding rail 6, the second sliding block 9 can move on the second sliding rail 8, the third platform 5 connected to the top of the second sliding block 9 can change its position on the second platform 4 along with the movement of the second sliding block 9, and the position adjustment of the sample in another horizontal direction is further realized. The second sliding rail 8 and the second sliding block 9 are matched to enable the sample to be accurately positioned in two-dimensional space on the horizontal plane.

[0035] The utility model discloses a third platform 5 upper side sets up a pull handle 14, and the other side of third platform 5 sets up a heating block 15, and the corresponding side sets up a temperature sensor 16.

[0036] The utility model discloses a third platform 5 upper side sets up a pull handle 14, and the other side of third platform 5 sets up a heating block 15, and the corresponding side sets up a temperature sensor 16.

[0037] The utility model discloses a third platform 5 upper side sets up a pull handle 14, and the other side of third platform 5 sets up a heating block 15, and the corresponding side sets up a temperature sensor 16.

[0038] The utility model discloses a height-adjustable sample observation device, which comprises a base, a first platform, a second platform, a third platform, a first slide rail, a second slide rail, a first sliding block, a second sliding block, a first platform height adjusting mechanism, a second platform horizontal position adjusting mechanism and a third platform horizontal position adjusting mechanism.

[0039] The above is according to the ideal embodiment of the utility model for the inspiration, through the above-mentioned description, the relevant personnel can certainly in the range without deviating from the technical thought of this utility model, carry out the change and the modification of diversity.This utility model's technical scope is not limited to the content in the specification, must be according to the claim range to determine the technical scope.

Claims

1. A scanning electron microscope stage, comprising: The base (1), the knob (2) arranged on the side of the base (1), the transmission assembly arranged in the base (1), the rotating assembly connected with the transmission assembly, and the supporting assembly connected with the rotating assembly, characterized in that: The transmission assembly comprises a worm (17) arranged in the knob (2) and a worm wheel (18) connected with the worm (17); The rotating assembly comprises a threaded part (19) connected with the worm wheel (18) and a lead screw (20) connected with the threaded part (19); The supporting assembly comprises a supporting seat (21) connected with the top of the lead screw (20) and a first platform (3) arranged on the supporting seat (21).

2. A scanning electron microscope stage according to claim 1, characterised in that: A first sliding rail (6) is arranged on the first platform (3), and a first sliding block (7) is connected with the first sliding rail (6).

3. A scanning electron microscope stage according to claim 2, wherein: The top of the first sliding block (7) is connected with a second platform (4), and a pushing handle (13) is arranged on the side of the second platform (4).

4. A scanning electron microscope stage according to claim 3, wherein: A second sliding rail (8) is arranged on the second platform (4), and a second sliding block (9) is connected with the second sliding rail (8).

5. A scanning electron microscope stage according to claim 4, wherein: The top of the second sliding block (9) is connected with a third platform (5).

6. A scanning electron microscope stage according to claim 5, wherein: A threaded rod (10) is threadedly connected with the third platform (5), and a rotating handle (12) is arranged on the top of the threaded rod (10).

7. A scanning electron microscope stage according to claim 6, wherein: A pressing block (11) is arranged on the threaded rod (10).

8. A scanning electron microscope stage as claimed in claim 5, characterized in that: A pulling handle (14) is arranged on the side of the third platform (5).

9. A scanning electron microscope stage as claimed in claim 5, characterized in that: A heating block (15) is arranged on the side of the third platform (5), and a temperature sensor (16) is arranged on the corresponding side.

10. A scanning electron microscope stage according to claim 1, wherein: A protective sleeve (22) is arranged on the outside of the lead screw (20) and the worm (17).

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