Probe fixing structure and probe station

Abstract

The utility model proposes a probe fixing structure and a probe station, and relates to the technical field of wafer testing equipment, the probe fixing structure comprises a fixing member, the fixing member comprises a first pressing block and a second pressing block, the first pressing block is provided with a positioning groove and a positioning hole, the positioning groove extends along a first direction and is used for accommodating a probe body, the positioning hole extends along a second direction, and the positioning hole is used for accommodating the probe body. The first direction and the second direction form an included angle; the positioning hole is communicated with one end of the positioning groove in the first direction and is used for accommodating the needle tail; the second pressing block is located on the side, provided with the positioning groove, of the first pressing block. The second pressing block can move back and forth relative to the first pressing block in the first direction so as to expose the positioning hole and the positioning groove for taking and placing the probe. Or at least part of the positioning groove is covered, so that the second pressing block and the first pressing block jointly fix the probe. According to the probe fixing structure and the probe station provided by the embodiment of the utility model, the occupied space of the probe fixing structure in the circumferential direction can be reduced on the basis of dismounting and mounting the probes, so that more probes can be arranged on the probe station.

Description

TECHNICAL FIELD

[0001] The utility model relates to wafer test equipment technical field, concretely relates to probe fixing structure and probe station. BACKGROUND

[0002] In the related art, the probe station tests the chip through a plurality of probes distributed in the circumference of the wafer. In order to enable the probes to be installed and disassembled, the probe fixing structure of the probe station is designed to be detachable.

[0003] The existing probe fixing structure all fixes the probe extending in the front-back direction through a needle clamp plate. The needle clamp plate comprises a fastener, an upper pressing block and a lower pressing block. The lower pressing block has a downward extending positioning hole and a forward extending positioning groove. The positioning hole and the positioning groove are in communication with each other. The probe comprises a needle tail and a needle body connected with each other. When installing the probe, the worker places the probe downward, so that the needle tail extends into the positioning hole of the lower pressing block and the needle body is placed in the positioning groove of the lower pressing block. Then, the upper pressing block and the lower pressing block are close to each other in the circumferential direction. The fastener is used to press the upper pressing block and the lower pressing block in the up-down direction. The upper pressing block and the lower pressing block jointly clamp the needle body of the probe. The needle clamp plate in the above-mentioned scheme occupies a large space in the left-right direction, which is not conducive to the probe station to set more probes in the circumference of the chip. SUMMARY

[0004] The utility model discloses at least one of the technical problems existing in the prior art. To this end, the utility model provides a probe fixing structure, which can reduce the occupied space of the probe fixing structure in the circumference on the basis of realizing the disassembly and assembly of the probe, so as to set more probes on the probe station.

[0005] The utility model also provides a probe station with the above-mentioned probe fixing structure.

[0006] According to the probe fixing structure of the first aspect embodiment of the utility model, the probe fixing structure is used for fixing the probe. The probe comprises a needle body and a needle tail connected with each other. The needle tail is bent relative to the needle body. The probe fixing structure comprises:

[0007] The fixing member comprises a first pressing block and a second pressing block. The first pressing block has a positioning groove and a positioning hole. The positioning groove extends in a first direction and is used for accommodating the needle body. The positioning hole extends in a second direction. The first direction and the second direction have an included angle. The positioning hole is communicated with one end of the positioning groove in the first direction and is used for accommodating the needle tail. The second pressing block is located on one side of the first pressing block provided with the positioning groove.

[0008] The second pressing block is capable of moving back and forth relative to the first pressing block along the first direction to expose the positioning holes and the positioning groove for the probe pick-and-place, or cover at least part of the positioning groove to make the second pressing block and the first pressing block jointly fix the probe.

[0009] The probe fixing structure has at least the following beneficial effects: the second pressing block only needs to move back and forth along the first direction to expose the positioning groove and the positioning hole for the probe pick-and-place, or cover at least part of the positioning groove to make the second pressing block and the first pressing block jointly fix the probe, so that the second pressing block occupies less space perpendicular to the first direction, and the probe fixing structure also occupies less space perpendicular to the first direction. More probe fixing structures can be arranged in the circumferential direction of the wafer by the person skilled in the art.

[0010] According to some embodiments of the present application, the first pressing block comprises a first sliding part, and the second pressing block comprises a second sliding part, and the first sliding part is slidingly connected with the second sliding part along the first direction.

[0011] According to some embodiments of the present application, the first sliding part defines a sliding channel extending along the first direction, and the second sliding part is slidingly connected in the sliding channel.

[0012] According to some embodiments of the present application, the probe fixing structure further comprises a fastener movably connected to the inner wall of the sliding channel and capable of pushing the second pressing block close to the positioning groove when the second pressing block at least partially covers the positioning groove, so that the second pressing block and the first pressing block jointly fix the probe.

[0013] According to some embodiments of the present application, the fastener is screw-connected to the inner wall of the sliding channel.

[0014] According to some embodiments of the present application, the probe fixing structure further comprises a limiting piece, one of the first pressing block and the second pressing block is connected with the limiting piece, and the other has a limiting groove extending along the first direction, and the inner wall of the limiting groove comprises a first end portion and a second end portion in the first direction, the first end portion and the second end portion are oppositely arranged, the limiting piece is at least partially accommodated in the limiting groove and capable of abutting against the first end portion and the second end portion.

[0015] According to some embodiments of the present application, the probe fixing structure further comprises a bracket connected and used for fixing the first pressing block, and the second pressing block has the limiting groove, and the limiting piece is detachably connected to the first pressing block.

[0016] According to some embodiments of the present invention, in the first direction, the length of the sliding channel is smaller than the length of the second pressing block.

[0017] According to some embodiments of the present invention, along the arrangement direction of the positioning holes and the positioning grooves, the maximum dimension of the fixing member in a third direction gradually decreases, and the third direction is perpendicular to the first direction and the second direction.

[0018] A probe station according to a second aspect of the present invention is used for testing a wafer, comprising:

[0019] a stage for placing the wafer;

[0020] A plurality of probe fixing structures as described in any one of the above embodiments are arranged around the stage, and the needle body of each probe installed on the probe fixing structure faces the wafer along the first direction.

[0021] The probe station according to the embodiment of the present invention has at least the following beneficial effects: since the probe fixing structure in any of the above embodiments occupies a smaller space perpendicular to the first direction, and the needle bodies of the probes of the probe fixing structure are all facing the wafer along the first direction, the probe station can be equipped with more probe fixing structures, and the number of probes that can be set is also greater, and the efficiency of testing wafers is higher.

[0022] Additional aspects and advantages of the present invention will be given in part in the following description and will become apparent from the following description or learned through practice of the present invention. BRIEF DESCRIPTION OF THE DRAWINGS

[0023] The present invention will be further described below with reference to the accompanying drawings and embodiments, wherein:

[0024] Figure 1 This is an overall schematic diagram of the probe fixing structure of some embodiments of the present utility model;

[0025] Figure 2 for Figure 1 Explosion diagram of the probe fixing structure;

[0026] Figure 3 for Figure 1 Schematic diagram of the first pressing block;

[0027] Figure 4 for Figure 3 A partial enlarged view of point A in the middle;

[0028] Figure 5 for Figure 1 A schematic cross-sectional view of the probe fixing structure;

[0029] Figure 6 for Figure 5 A partial enlarged view of point B in the middle;

[0030] Figure 7 for Figure 1 A top view of the probe fixing structure;

[0031] Figure 8 This is a schematic diagram of the placement of multiple probe fixing structures in the probe station.

[0032] Reference numerals:

[0033] Probe 10, needle body 11, needle tail 12, needle head 13, wafer 20;

[0034] Probe fixing structure 100;

[0035] Fixing member 110, first pressing block 111, positioning groove 1111, first clamping wall 1111a, second clamping wall 1111b, positioning hole 1112, first positioning section 1112a, second positioning section 1112b, first sliding portion 1113, sliding channel 1114, second pressing block 112, second sliding portion 1121;

[0036] Fastener 120;

[0037] Limiting member 130;

[0038] Limiting groove 140, first end 141, second end 142;

[0039] Bracket 150;

[0040] Connector 160;

[0041] The loading platform 30. DETAILED DESCRIPTION

[0042] The following describes embodiments of the present invention in detail. Examples of the embodiments are shown in the accompanying drawings, wherein the same or similar reference numerals throughout represent the same or similar elements or elements having the same or similar functions. The embodiments described below with reference to the accompanying drawings are exemplary and are intended only to explain the present invention and are not to be construed as limiting the present invention.

[0043] In the description of the present invention, it should be understood that descriptions involving orientations, such as up, down, front, back, left, right, etc., indicating orientations or positional relationships, are based on the orientations or positional relationships shown in the accompanying drawings. They are only for the convenience of describing the present invention and simplifying the description, and do not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation. Therefore, they cannot be understood as limitations on the present invention.

[0044] In the description of the utility model, if the meaning of several is one or more, the meaning of multiple is two or more, greater than, less than, more than, etc. Understand as not including the number, above, below, within, etc. Understand as including the number. If it is described to the first, the second is only used for distinguishing the purpose of technical features, and cannot be understood as indicating or implying relative importance or implicitly indicating the number of indicated technical features or implicitly indicating the sequence of indicated technical features.

[0045] In the description of the utility model, unless otherwise explicitly limited, the words such as setting, installation, connection should be understood broadly, and the person skilled in the art can determine the specific meaning of the above words in the utility model in combination with the specific content of the technical scheme.

[0046] In the description of the utility model, the description of reference terms "one embodiment", "some embodiments", "illustrative embodiment", "example", "specific example" or "some examples" means that the specific features, structures, materials or characteristics described in combination with the embodiment or example are included in at least one embodiment or example of the utility model. In the specification, the illustrative description of the above terms does not necessarily refer to the same embodiment or example. Moreover, the specific features, structures, materials or characteristics described can be combined in any one or more embodiments or examples in a suitable manner.

[0047] Please refer to Figure 2 In order to facilitate the person skilled in the art to understand, the probe 10 mentioned in the utility model includes the needle body 11 and the needle tail 12 connected with each other, and the needle tail 12 is bent relative to the needle body 11. In some embodiments, the probe 10 tests the wafer 20 through the end of the needle body 11 away from the needle tail 12. In some embodiments, please refer to Figure 2 As shown in the figure, the probe 10 also includes a needle head 13, which is connected to the end of the needle body 11 away from the needle tail 12, and is also bent relative to the needle body 11, and the needle head 13 gradually thins in the direction away from the needle body 11; the probe 10 tests the wafer 20 through the needle head 13.

[0048] Please refer to Figures 1-4 As shown in the figure, the utility model provides a probe fixing structure 100 for fixing the probe 10. The probe fixing structure 100 includes a fixing piece 110, and the fixing piece 110 includes a first pressing block 111 and a second pressing block 112.

[0049] Please refer to Figure 3 And Figure 4 As shown in the figure, the first pressing block 111 of the utility model has a positioning groove 1111 and a positioning hole 1112, the positioning groove 1111 extends along the first direction, and is used for accommodating the needle body 11.

[0050] After the needle body 11 is placed into the positioning groove 1111, the extending direction of the needle body 11 is the same as the extending direction of the positioning groove 1111, and the inner wall of the positioning groove 1111 can limit the position of the needle body 11 on the first pressing block 111, so that the needle body 11 is more easily fixed in the positioning groove 1111 after the probe 10 is fixed by the first pressing block 111 and the second pressing block 112, thereby reducing the deviation of the probe 10 each time it is fixed on the probe fixing structure 100.

[0051] Without departing from the inventive concept of the present application, those skilled in the art can design the shape of the inner wall of the positioning groove 1111. For example, along the first direction, the cross section of the inner wall of the positioning groove 1111 perpendicular to the first direction can be "U" shaped. As a preferred solution, please refer to Figure 3 、 Figure 4 In some embodiments, the inner wall of the positioning groove 1111 includes a first clamping wall 1111a and a second clamping wall 1111b, the first clamping wall 1111a and the second clamping wall 1111b are used to abut against the needle body 11, and the first clamping wall 1111a and the second clamping wall 1111b have an included angle therebetween. The first clamping wall 1111a and the second clamping wall 1111b with the included angle can guide the needle body 11 when the needle body 11 is placed into the positioning groove 1111, so that the needle body 11 can naturally move along the gap between the first clamping wall 1111a and the second clamping wall 1111b during the process of being placed into the positioning groove 1111. On the other hand, the needle body 11 can be simultaneously subjected to the abutting action of the first clamping wall 1111a and the second clamping wall 1111b, so that the needle body 11 is less likely to be separated from the positioning groove 1111.

[0052] Please refer to Figure 3 The positioning hole 1112 of the present application extends along the second direction, the first direction and the second direction have an included angle, the positioning hole 1112 is communicated with one end of the positioning groove 1111 in the first direction, and is used to accommodate the needle tail 12.

[0053] After the needle tail 12 is placed into the positioning hole 1112, the extending direction of the needle tail 12 is the same as the extending direction of the positioning hole 1112, and the inner wall of the positioning hole 1112 can limit the movement of the needle tail 12 perpendicular to the extending direction of the positioning hole 1112. When the needle body 11 is accommodated in the positioning groove 1111 and the needle tail 12 is accommodated in the positioning hole 1112, since the needle tail 12 is connected to the needle body 11, the inner wall of the positioning hole 1112 can limit the movement of the needle tail 12 perpendicular to the extending direction of the positioning hole 1112, so as to limit the movement of the needle body 11 in the positioning groove 1111 perpendicular to the extending direction of the positioning hole 1112, and further limit the movement of the probe 10 as a whole.

[0054] On the other hand, the inner wall of the positioning hole 1112 can also limit the rotation of the needle tail 12, specifically, please refer toFigure 2 、 Figure 3 As shown in FIG. 11B, after the needle tail 12 extends into the positioning hole 1112, the inner wall of the positioning hole 1112 can limit the rotation of the needle tail 12 around the axis parallel to the second direction. When the needle body 11 is accommodated in the positioning groove 1111 and the needle tail 12 is accommodated in the positioning hole 1112, since the needle tail 12 is connected to the needle body 11, the positioning groove 1111 extends along the first direction, the positioning hole 1112 extends along the second direction, the first direction and the second direction have an included angle, then the inner wall of the positioning hole 1112 can limit the rotation of the needle body 11 located in the positioning groove 1111 around the axis parallel to the second direction, thereby limiting the rotation of the probe 10 as a whole.

[0055] Without departing from the inventive concept of the present application, those skilled in the art can adjust the size of the positioning hole 1112 according to the size of the probe 10 to be fixed. In some embodiments, the positioning hole 1112 can be a blind hole with a certain depth. As a preferred embodiment, please refer to FIG. 11A, Figure 3 、 Figure 4 As shown in FIG. 11B, the positioning hole 1112 is a through hole penetrating the first pressing block 111, and the positioning hole 1112 can accommodate more needle tails 12 with different lengths, and the compatibility of the probe 10 is stronger.

[0056] Without departing from the inventive concept of the present application, those skilled in the art can design the shape of the inner wall of the positioning groove 1111 by themselves. Exemplarily, the cross section of the inner wall of the positioning hole 1112 perpendicular to the first direction along the second direction can be a circle, a rectangle or a square with the same size, etc. As a preferred solution, please refer to FIG. 11A, Figure 5 、 Figure 6 As shown in FIG. 11B, in some embodiments, the positioning hole 1112 includes a first positioning section 1112a and a second positioning section 1112b which are in communication with each other, and the second positioning section 1112b is away from the positioning groove 1111 relative to the first positioning section 1112a; along the direction close to the second positioning section 1112b, the cross-sectional area of the first positioning section 1112a perpendicular to the extension direction of the positioning hole 1112 gradually decreases. When the needle tail 12 of the probe 10 enters the positioning hole 1112 from the first positioning section 1112a close to the positioning groove 1111, since the cross-sectional area of the first positioning section 1112a perpendicular to the extension direction of the positioning hole 1112 gradually decreases, the inner wall of the first positioning section 1112a can play a guiding role in the process of inserting the needle tail 12 into the positioning hole 1112, which facilitates the extension of the needle tail 12 into the second positioning section 1112b and the entry of the needle body 11 connected to the needle tail 12 into the positioning groove 1111.

[0057] It should be noted that the first direction and the second direction have an included angle means that the first direction and the second direction intersect each other, and the angle between the first direction and the second direction is not 0° or 180°. Without departing from the inventive concept of the utility model, the person skilled in the art can design the included angle between the first direction and the second direction to enable the positioning hole 1112 to accommodate the needle tail 12 of the probe 10, and simultaneously enable the positioning groove 1111 to accommodate the needle body 11 of the same probe 10. Exemplarily, please refer to Figure 2 In some embodiments, the first direction is parallel to the front-rear direction, and the second direction is parallel to the up-down direction, and then the positioning groove 1111 and the positioning hole 1112 can be used to accommodate the probe 10 with the needle body 11 and the needle tail 12 intersecting each other at 90°.

[0058] Please refer to Figure 1 、 Figure 2 The second pressing block 112 of the utility model is located at one side of the first pressing block 111 provided with the positioning groove 1111. The second pressing block 112 can move back and forth along the first direction relative to the first pressing block 111, and when moving along the positive direction (i.e. the rear direction in the figure) of the first direction, the positioning hole 1112 and the positioning groove 1111 can be exposed to provide the probe 10 with a taking and placing function. When the positioning hole 1112 and the positioning groove 1111 are exposed, the worker can place the needle tail 12 of the probe 10 into the positioning hole 1112, and simultaneously place the needle body 11 into the positioning groove 1111, or take out the probe 10 originally limited by the positioning hole 1112 and the positioning groove 1111, to realize the taking and placing of the probe 10. Figure 1 、 Figure 2 The second pressing block 112 of the utility model can cover at least part of the positioning groove 1111 when moving along the reverse direction (i.e. the front direction in the figure) of the first direction, to enable the second pressing block 112 and the first pressing block 111 to jointly fix the probe 10. When the second pressing block 112 covers at least part of the positioning groove 1111, the movement of the needle body 11 accommodated in the positioning groove 1111 will be limited by the second pressing block 112 and the inner wall of the positioning groove 1111, and the limitation of the inner wall of the positioning hole 1112 to the needle tail 12 further reduces the rotation of the probe 10 in the positioning groove 1111, thereby enabling the probe 10 to be fixed. In particular, when the probe 10 comprises a needle head 13 connected to one end of the needle body 11 and bent relative to the needle body 11, the inner wall of the positioning hole 1112 can further reduce the deviation of the orientation of the needle head 13 by limiting the rotation of the needle body 11, to make the orientation of the needle head 13 more accurate.

[0059] The second pressing block 112 of the utility model can cover at least part of the positioning groove 1111 when moving along the reverse direction (i.e. the front direction in the figure) of the first direction, to enable the second pressing block 112 and the first pressing block 111 to jointly fix the probe 10. When the second pressing block 112 covers at least part of the positioning groove 1111, the movement of the needle body 11 accommodated in the positioning groove 1111 will be limited by the second pressing block 112 and the inner wall of the positioning groove 1111, and the limitation of the inner wall of the positioning hole 1112 to the needle tail 12 further reduces the rotation of the probe 10 in the positioning groove 1111, thereby enabling the probe 10 to be fixed. In particular, when the probe 10 comprises a needle head 13 connected to one end of the needle body 11 and bent relative to the needle body 11, the inner wall of the positioning hole 1112 can further reduce the deviation of the orientation of the needle head 13 by limiting the rotation of the needle body 11, to make the orientation of the needle head 13 more accurate. Figure 1 Figure 2 The second pressing block 112 of the utility model can cover at least part of the positioning groove 1111 when moving along the reverse direction (i.e. the front direction in the figure) of the first direction, to enable the second pressing block 112 and the first pressing block 111 to jointly fix the probe 10. When the second pressing block 112 covers at least part of the positioning groove 1111, the movement of the needle body 11 accommodated in the positioning groove 1111 will be limited by the second pressing block 112 and the inner wall of the positioning groove 1111, and the limitation of the inner wall of the positioning hole 1112 to the needle tail 12 further reduces the rotation of the probe 10 in the positioning groove 1111, thereby enabling the probe 10 to be fixed. In particular, when the probe 10 comprises a needle head 13 connected to one end of the needle body 11 and bent relative to the needle body 11, the inner wall of the positioning hole 1112 can further reduce the deviation of the orientation of the needle head 13 by limiting the rotation of the needle body 11, to make the orientation of the needle head 13 more accurate.

[0060] ​Since the second pressing block 112 only needs to move back and forth along the first direction to expose the positioning groove 1111 and the positioning hole 1112 for the probe 10 to be taken and placed, or cover at least part of the positioning groove 1111 to fix the probe 10 together with the first pressing block 111, the second pressing block 112 occupies less space in the direction perpendicular to the first direction, and the probe fixing structure 100 also occupies less space in the direction perpendicular to the first direction. Please refer to Figure 8 When the needle body 11 of the probe 10 installed in the probe fixing structure 100 of the utility model is directed towards the wafer 20 along the first direction, the person skilled in the art can arrange more probe fixing structures 100 circumferentially on the wafer 20, thanks to the less space occupied by the probe fixing structure 100 in the direction perpendicular to the first direction.

[0061] Further, when the person skilled in the art arranges the probe fixing structure 100 circumferentially on the wafer 20, the axis of the positioning groove 1111 can be directed towards the wafer 20, and the axis of the positioning hole 1112, the axis of the positioning groove 1111 and the center line of the wafer 20 can be coplanar. Through the above scheme, the positioning hole 1112 occupies less space circumferentially on the wafer 20, and the probe fixing structure 100 also occupies less space circumferentially on the wafer 20, so the person skilled in the art can arrange more probe fixing structures 100 circumferentially on the wafer 20.

[0062] Further, please refer to Figure 1 、 Figure 7 As shown, the maximum dimension of the fixing member 110 in the third direction (i.e. the left-right direction in Figure 7 When the needle tail 12 of the probe 10 is accommodated in the positioning hole 1112, and the needle body 11 is accommodated in the positioning groove 1111, the needle body 11 extends relative to the needle tail 12 along the arrangement direction of the positioning hole 1112 and the positioning groove 1111, so when the needle body 11 of the probe 10 installed in the probe fixing structure 100 of the above embodiment is directed towards the wafer 20 along the first direction, gradually reducing the maximum dimension of the fixing member 110 in the third direction can further reduce the space occupied by the fixing member 110 circumferentially on the wafer 20, and thus facilitate the worker to arrange more probe fixing structures 100 circumferentially on the wafer 20.

[0063] The utility model does not make specific limitation to the specific way that the second pressing block 112 moves back and forth along the first direction relative to the first pressing block 111. As a preferred embodiment, the first pressing block 111 comprises a first sliding part 1113, and the second pressing block 112 comprises a second sliding part 1121, and the first sliding part 1113 is in sliding connection with the second sliding part 1121 along the first direction. The sliding connection relationship between the first sliding part 1113 and the second sliding part 1121 can restrict the movement of the second pressing block 112 relative to the first pressing block 111 perpendicular to the first direction, guide the movement of the second pressing block 112 along the first direction, and further improve the stability of the movement of the second pressing block 112 relative to the first pressing block 111.

[0064] The utility model does not make specific limitation to the specific way that the first sliding part 1113 is in sliding connection with the second sliding part 1121 along the first direction. In some embodiments, as shown in Figure 5 、 Figure 6 the first sliding part 1113 is a limiting piece 130, the second sliding part 1121 defines a limiting slot 140 extending along the first direction, and the limiting piece 130 is partially accommodated in the limiting slot 140. When the second pressing block 112 moves relative to the first pressing block 111, the limiting piece 130 can restrict the movement of the second pressing block 112 relative to the first pressing block 111 perpendicular to the first direction.

[0065] As shown in Figures 1-3 , as a preferred embodiment, the first sliding part 1113 defines a sliding channel 1114 extending along the first direction, and the second sliding part 1121 is in sliding connection in the sliding channel 1114. Since the sliding channel 1114 extends along the first direction, the second sliding part 1121 will be limited by the inner wall of the sliding channel 1114 when sliding in the sliding channel 1114, and the movement in multiple directions perpendicular to the first direction will be restricted, thereby making the movement of the second pressing block 112 along the first direction more stable.

[0066] As shown in Figure 2 , in some embodiments, the second sliding part 1121 is a square structure, and the cross section of the sliding channel 1114 perpendicular to the first direction is a square structure matched with the second sliding part 1121. The above-mentioned structure is beneficial to reducing the rotation of the second sliding part 1121 around the center line of the sliding channel 1114, and makes the movement of the second pressing block 112 along the first direction more stable.

[0067] The positioning hole 1112 and the positioning groove 1111 can also be arranged on the wall surface of the inner wall of the sliding channel 1114 without departing from the inventive concept of the utility model. When the second pressing block 112 is moved along one of the first directions to expose the positioning hole 1112 and the positioning groove 1111, the worker can first move the probe 10 when it is necessary to remove the probe 10, so that the needle tail 12 is separated from the positioning hole 1112, the needle body 11 is separated from the positioning groove 1111, and the probe 10 is completely accommodated in the sliding channel 1114, and then the probe 10 is removed along the first direction. When the worker needs to put in the probe 10, the worker can also first put the probe 10 into the sliding channel 1114 along the first direction, and then make the needle tail 12 inserted into the positioning hole 1112 and the needle body 11 accommodated in the positioning groove 1111.

[0068] Please refer to Figures 1-3 As a preferred embodiment, the sliding channel 1114 is arranged at a position away from the positioning hole 1112, and located on a side of the positioning hole 1112 away from the positioning groove 1111. In the above embodiment, the inner wall of the sliding channel 1114 avoids the positioning hole 1112 and the positioning groove 1111, so that the worker can directly insert the needle tail 12 of the probe 10 into the positioning hole 1112 along the second direction, and put the needle body 11 into the positioning groove 1111, so that the probe 10 is taken and placed more quickly.

[0069] Further, please refer to Figure 1 、 Figure 2 In some embodiments, the length of the sliding channel 1114 is less than the length of the second pressing block 112 in the first direction. Since the length of the sliding channel 1114 is less than the length of the second pressing block 112, there is always a part of the second pressing block 112 extending out of the sliding channel 1114 during the sliding process of the second sliding part 1121 in the sliding channel 1114, and the worker can apply force to the second pressing block 112 from the outside of the sliding channel 1114, which is beneficial to adjusting the position of the second pressing block 112.

[0070] Further, please refer to Figure 5 、 Figure 6As shown in some embodiments, the probe fixing structure 100 further comprises a limiting piece 130, the first pressing block 111 is connected with the limiting piece 130, the second pressing block 112 is provided with a limiting groove 140 extending along the first direction, the inner wall of the limiting groove 140 comprises a first end portion 141 and a second end portion 142 in the first direction, the first end portion 141 and the second end portion 142 are oppositely arranged, the limiting piece 130 is at least partially accommodated in the limiting groove 140 and can abut against the first end portion 141 and the second end portion 142. When the second sliding portion 1121 slides in the sliding channel 1114, the limiting piece 130 also generates relative movement along the first direction relative to the limiting groove 140, and since the first end portion 141 and the second end portion 142 are oppositely arranged in the first direction, the limiting piece 130 can limit the movement of the second sliding portion 1121 in the forward direction of the first direction (i.e. the backward direction in Figure 5 、 Figure 6 ) by abutting against the first end portion 141, and can limit the movement of the second sliding portion 1121 in the reverse direction of the first direction (i.e. the forward direction in Figure 5 、 Figure 6 ) by abutting against the second end portion 142, thereby limiting the sliding stroke of the second sliding portion 1121 in the first direction.

[0071] On the basis of the above scheme, please refer to Figure 1 、 Figure 5 、 Figure 6 As shown in some embodiments, the probe fixing structure 100 further comprises a support 150 connected with and used for fixing the first pressing block 111. The limiting piece 130 is detachably connected with the first pressing block 111. After the first pressing block 111 is fixed by the support 150, the worker can directly move the second pressing block 112 to cover at least part of the positioning groove 1111 or expose the positioning groove 1111 and the positioning hole 1112. When the limiting piece 130 is installed on the first pressing block 111, since the first pressing block 111 can remain stationary due to the fixation by the support 150, the installation process of the limiting piece 130 is more stable. In some embodiments, the support 150 is connected with the first pressing block 111 through a plurality of connecting pieces 160. Without departing from the inventive concept of the utility model, the support 150 can also be connected with the first pressing block 111 through bonding, clamping or other means.

[0072] In some embodiments, the second pressing block 112 is connected with the limiting member 130, and the first pressing block 111 is provided with the limiting groove 140. When the second sliding part 1121 slides in the sliding channel 1114, the limiting member 130 also generates relative movement in the first direction relative to the limiting groove 140. Since the first end 141 and the second end 142 are oppositely arranged in the first direction, the limiting member 130 can limit the movement of the second sliding part 1121 in the first direction by abutting against the first end 141, and can limit the movement of the second sliding part 1121 in the first direction by abutting against the second end 142, thereby limiting the sliding stroke of the second sliding part 1121 in the first direction.

[0073] As mentioned above, the first sliding part 1113 defines the sliding channel 1114 extending in the first direction, and the second sliding part 1121 is slidably connected in the sliding channel 1114. Based on the above scheme, please refer to Figure 1 、 Figure 2 、 Figure 5 In some embodiments, the probe fixing structure 100 further comprises the fastener 120, which is movably connected to the first sliding part 1113 and can extend relative to the inner wall of the sliding channel 1114 to push the second pressing block 112 close to the positioning groove 1111 when the second pressing block 112 at least partially covers the positioning groove 1111, so that the second pressing block 112 and the first pressing block 111 jointly fix the probe 10. When the second pressing block 112 at least partially covers the positioning groove 1111, the fastener 120 movably connected to the first sliding part 1113 can extend relative to the inner wall of the sliding channel 1114, so that the fastener 120 can push the second sliding part 1121 contained in the sliding channel 1114 to make the second pressing block 112 close to the positioning groove 1111, and further limit the movement of the needle body 11 contained in the positioning groove 1111.

[0074] After the fastener 120 pushes the second sliding part 1121 to make the second pressing block 112 abut against the first pressing block 111, the fastener 120 can continuously press the second sliding part 1121 so that the second pressing block 112 continuously receives the abutting force from the first pressing block 111 and the fastener 120; the second pressing block 112 keeps relatively stationary with the first pressing block 111 by the friction force provided by the fastener 120 and the first pressing block 111, thereby continuously covering at least part of the positioning groove 1111, so as to ensure the stability of the probe fixing structure 100 in fixing the probe 10.

[0075] Please refer to Figure 1 、 Figure 5As shown, for the probe 10 of a specific specification, when the needle body 11 is placed into the positioning groove 1111, a part of the needle body 11 protrudes relative to the surface of the first pressing block 111, then the fastener 120 in the above-mentioned embodiment can contact the needle body 11 in the process of pushing the second sliding part 1121 so that the second pressing block 112 approaches the positioning groove 1111, and then the second pressing block 112 and the first pressing block 111 jointly clamp the needle body 11, cooperate with the limitation of the needle tail 12 by the inner wall of the positioning hole 1112, can further fix the position of the probe 10, and improve the stability of the probe 10 in work.

[0076] Without departing from the inventive concept of the utility model, the person skilled in the art can design the way that the fastener 120 is movably connected to the first sliding part 1113 by himself. In some embodiments, the fastener 120 is a bolt, the first sliding part 1113 is provided with a bolt hole matched with the fastener 120, and the worker can insert the fastener 120 towards the first sliding part 1113, so that the fastener 120 extends from the inner wall of the sliding channel 1114 and pushes the second pressing block 112 to approach the positioning groove 1111 to fix the probe 10.

[0077] As shown in Figure 5 , Figure 6 As a preferred embodiment, the fastener 120 is screw-connected to the first sliding part 1113. The above-mentioned scheme makes the worker push the second pressing block 112 to approach the positioning groove 1111 to fix the probe 10 by rotating the fastener 120, and in the process of rotating the fastener 120, the worker can more accurately adjust the degree that the fastener 120 extends from the inner wall of the sliding channel 1114 by adjusting the degree of rotation, and then more accurately adjust the force with which the second pressing block 112 abuts against the first pressing block 111 or the needle body 11, and increase the stability of the probe fixing structure 100 clamping the probe 10.

[0078] As shown in Figure 1 , Figure 8 The utility model further provides a probe station for testing a wafer 20, which comprises a wafer table 30 for placing the wafer 20 and a plurality of probe fixing structures 100 according to any of the above-mentioned embodiments. The plurality of probe fixing structures 100 are arranged around the wafer table 30, and the needle body 11 of each probe 10 mounted on the probe fixing structure 100 faces the wafer 20 along a first direction. Since the probe fixing structure 100 according to any of the above-mentioned embodiments occupies a small space in a direction perpendicular to the first direction, and the needle body 11 of the probe 10 of the probe fixing structure 100 faces the wafer 20 along the first direction, the probe station can have more probe fixing structures 100, and can have more probes 10, and the efficiency of testing the wafer 20 is higher.

[0079] The utility model embodiment has been explained in detail above in combination with the drawings, but the utility model is not limited to the above-mentioned embodiment, still can make various changes in the knowledge range of the ordinary skill in the art who possesses under the premise of not departing from the utility model's tenet. Besides, the embodiment and the feature in the embodiment of the utility model can be combined mutually under the condition of not conflicting.

Claims

1. A probe fixing structure for fixing a probe, wherein the probe comprises a needle body and a needle tail connected to each other, wherein the needle tail is bent relative to the needle body, and wherein: The probe fixing structure comprises: The fixing member includes a first pressing block and a second pressing block, wherein the first pressing block has a positioning groove and a positioning hole, the positioning groove extends along a first direction and is used to accommodate the needle body, and the positioning hole extends along a second direction, and the first direction and the second direction form an angle; the positioning hole is connected to one end of the positioning groove in the first direction and is used to accommodate the needle tail; the second pressing block is located on a side of the first pressing block where the positioning groove is provided; The second pressing block can move back and forth relative to the first pressing block along the first direction to expose the positioning hole and positioning groove for the probe to be taken in and placed; or cover at least part of the positioning groove so that the second pressing block and the first pressing block can jointly fix the probe.

2. The probe fixing structure according to claim 1, characterized in that: The first pressing block includes a first sliding portion, and the second pressing block includes a second sliding portion. The first sliding portion is slidably connected to the second sliding portion along the first direction.

3. The probe fixing structure according to claim 2, characterized in that: The first sliding portion defines a sliding channel extending along the first direction, and the second sliding portion is slidably connected in the sliding channel.

4. The probe fixing structure according to claim 3, characterized in that: The probe fixing structure also includes a fastener, which is movably connected to the inner wall of the sliding channel and can push the second pressing block close to the positioning groove when the second pressing block at least partially covers the positioning groove, so that the second pressing block and the first pressing block jointly fix the probe.

5. The probe fixing structure according to claim 4, characterized in that: The fastener is threadedly connected to the inner wall of the sliding channel.

6. The probe fixing structure according to claim 3, characterized in that: The probe fixing structure also includes a limiting member, one of the first pressure block and the second pressure block is connected to the limiting member, and the other has a limiting groove, the limiting groove extends along the first direction, and the inner wall of the limiting groove includes a first end and a second end in the first direction, the first end and the second end are arranged opposite to each other, and the limiting member is at least partially accommodated in the limiting groove and can abut against the first end and the second end.

7. The probe fixing structure according to claim 6, characterized in that: The probe fixing structure further includes a bracket, which is connected to and used to fix the first pressing block; the second pressing block has the limiting groove, and the limiting member is detachably connected to the first pressing block.

8. The probe fixing structure according to claim 3, characterized in that: In the first direction, the length of the sliding channel is smaller than the length of the second pressing block.

9. The probe fixing structure according to claim 1, characterized in that: Along the arrangement direction of the positioning holes and the positioning grooves, the maximum dimension of the fixing member in a third direction gradually decreases, and the third direction is perpendicular to the first direction and the second direction.

10. A probe station for testing wafers, characterized in that: include: a stage for placing the wafer; A plurality of probe fixing structures according to any one of claims 1 to 9 are arranged around the stage, and the needle body of each probe mounted on the probe fixing structure is directed toward the wafer along the first direction.

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